KR101407656B1 - Vacuum isolation apparatus - Google Patents

Abstract

A vacuum interrupter for opening and closing an entrance formed in a vacuum chamber, the vacuum interrupter comprising: a roller block disposed around the doorway; a roller block portion linearly movably coupled to the roller block portion, And the other end of the roller block is located outside the roller block portion and is capable of contacting with the peripheral portion of the doorway, and is connected to one side of the airtight portion and the roller block, and lifts the roller block and presses the airtight portion toward the peripheral portion of the doorway .

Description

[0001] Vacuum isolation apparatus [0002]

The present invention relates to a vacuum interrupter.

Generally, when a semiconductor or a liquid crystal panel is manufactured, the corresponding manufacturing process proceeds in various vacuum regions. A plurality of vacuum chambers are connected to each other in order to realize the degree of vacuum required for each manufacturing process. A vacuum interrupter is provided at the entrance and exit of each vacuum chamber to open and close the entrance.

The vacuum interrupter is provided with a valve plate protruding toward the entrance and closing the entrance. The valve plate is operated by a plurality of actuators, and the valve plate also has a long shape on one side depending on the shape of the entrance. The actuator uses compressed air as the working fluid. The injection of the working fluid for the operation of the actuator was performed at one end or both ends in the longitudinal direction. The valve plate contacts the periphery of the doorway according to the elongation of the actuating rod of the actuator, thereby shielding the doorway.

However, the operation rod operation of the actuator located close to the portion to which the working fluid is supplied occurs first, and the operation rod of the actuator far away from the portion to which the working fluid is supplied is operated late. Accordingly, since the actuators do not operate at the same time, the degree of close contact of the valve plate with the periphery of the entrance is lowered.

[Patent Document 1] Korean Published Patent Application No. 10-2011-0090594 (Aug. 10, 2011) [Patent Document 2] Korean Patent Publication No. 10-2010-0061214 (June 7, 2010) [Patent Document 3] Korean Patent Publication No. 10-2010-0051376 (May 17, 2010) [Patent Document 4] Korean Published Patent Application No. 10-2009-0081282 (Jan. 23, 2009)

The vacuum interrupter of the present invention provides a technique of increasing the degree of close contact of the valve plate to the chamber in which the entrance port is formed.

A vacuum interrupter according to an embodiment of the present invention is a vacuum interrupter that opens and closes an entrance formed in a vacuum chamber and includes a roller block disposed to be able to move up and down around an entrance of the vacuum chamber, An airtight portion which is located outside the roller block portion and which is connected to the roller block portion so as to be linearly movable and which can contact the peripheral portion of the entrance and exit portion, And an elastic member coupled to the roller block and applying an elastic force such that the airtight portion is separated from the periphery of the doorway, wherein at least a part of the driving unit is inclined And the airtight portion comes into contact with the other surface, And moves linearly in the peripheral direction.

Wherein the airtight portion includes a roller plate located inside the roller block and linearly moving in the direction of the exit port periphery, a push-pull shaft connected to the roller block in a linear movement, And a blade which is located outside the roller block and is connected to the other side of the push-pull shaft and can contact the peripheral portion of the entrance by linear movement of the roller plate.

The airtight portion may further include a shaft bushing fixed to the roller block and guiding the push-pull shaft.

The airtight portion may further include a guide shaft in which the roller block is linearly movably coupled to one side and the other side is fixed to the roller block.

At least a part of the other surface of the roller plate may include a first vertical surface, a second vertical surface located above the first vertical surface, and a slope connecting the first vertical surface and the second vertical surface.

The driving unit includes a housing including a piston, a block operating rod having one side connected to the piston and the other side connected to the roller block, a roller operating rod having one side connected to the piston and the other side connected to the roller plate, And a pressure roller portion rotatably mounted on the other side of the roller actuating rod and contacting the other surface of the roller plate and linearly moving the roller plate.

The pressure roller unit is mounted on the other side of the roller actuating rod and is rotatably coupled to both the guide block located in the elevation guide groove and both sides of the guide block and is capable of contacting the first vertical plane, And may include a pressure roller.

Wherein the block operation rod includes an operation shaft having an opened lower side positioned inside the housing and the other side connected to the roller block, a shaft rod having one side coupled to the piston and the other side slidably coupled to the lower side of the operation shaft, A shaft elastic member disposed between the shaft rod and the operation shaft and elastically supporting the operation shaft, and a shaft cap mounted on a lower side of the operation shaft and hooked on the upper surface of the inside of the housing.

According to the embodiment of the present invention, the airtight portion moves linearly as the pressure roller contacting the other surface of the airtight portion moves, and at this time, the pressure roller uniformly presses the other surface of the airtight portion so that the airtight portion can linearly move straight without being shifted to one side . As a result, the airtight portion moves linearly in a straight line, and the front surface of the airtight portion comes into contact with the peripheral portion of the doorway at the same time.

According to the embodiment of the present invention, since the guide shaft fixed to the roller block supports the roller plate, the blade connected to the roller plate through the push-pull shaft is not sagged. As a result, the front surface of the blade touches the periphery of the doorway at the same time and drops at the same time, so that airtightness and adhesion can be improved.

According to the embodiment of the present invention, since the rising pressure roller linearly moves the airtight portion, the airtight portion can perform a precise and stable operation. Thus, the reliability of operation of the vacuum interrupter can be improved.

1 is a perspective view schematically showing a vacuum interrupter according to an embodiment of the present invention;
2 is a rear perspective view of the vacuum interrupter shown in Fig.
3 is a cross-sectional view of the vacuum interrupter taken along the line III-III shown in FIG. 2;
4 is a cross-sectional view of the vacuum interrupter taken along the line IV-IV shown in FIG. 3;
5 is a cross-sectional view of the vacuum interrupter taken along the line V-V shown in FIG. 3;
Figs. 6 to 8 are operational states of the vacuum interrupter shown in Fig. 1. Fig.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily carry out the present invention. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Like parts are designated with like reference numerals throughout the specification.

1 to 5 show a vacuum interrupter according to an embodiment of the present invention.

1, the vacuum interrupter 1 according to the present embodiment is installed in a vacuum chamber C in which a semiconductor or a liquid crystal panel is manufactured to intermittently control an entrance G through which a semiconductor or a liquid crystal panel enters or exits .

2 to 5, the vacuum interrupter 1 according to the present embodiment includes a roller block 10, an airtight portion 20, an elastic member 24, and a driving portion 30. The airtight portion 20 may further include a guide shaft 25.

The roller block 10 may be disposed adjacent to the vacuum chamber C (see FIG. 1). The inside of the roller block 10 is empty. The inside of the roller block 10 communicates with the outside through a back surface. The front surface of the roller block 10 is formed with through holes 11 for communicating the inside and the outside. In the center of the inner bottom surface of the roller block 10, a hole 12 (see FIG. 6) is vertically penetrated. On the bottom surface of the roller block 10, mounting holes 13 (see FIG. 6) are formed on both sides of the hole 12. However, at least one mounting hole 13 may be formed.

The airtight portion 20 includes a roller plate 21, a push-pull shaft 22, and a blade 23, which is mounted on the roller block 10 and interrupts the entrance and exit of the vacuum chamber.

The roller plate 21 is located inside the roller block 10. The roller plate 21 can be inserted into the roller block 10 through the open rear side of the roller block 10. The roller plate 21 can be linearly moved in the front-rear direction within the roller block 10. [

On one side (front surface) of the roller plate 21 facing the through holes 11, there are formed coupling holes 211 which are aligned with the through holes 11, And a guide hole 212 is formed at a position spaced apart by a predetermined distance. In addition, a bulge 213 is formed at a position separated from the guide hole 212 by a predetermined distance. An elevating guide groove 214 (see FIG. 6) is formed in the upper surface direction on the bottom surface of the roller plate 21 facing the hole 12.

A portion of the other surface (back surface) of the roller plate 21 is composed of a first vertical surface 215, a second vertical surface 217, and a slope surface 216. The first vertical surface 215, the second vertical surface 217 and the inclined surface 216 are located on both sides of the elevation guide groove 214.

The first vertical surface 215 is connected to the bottom surface from the other surface of the roller plate 21 and is formed perpendicular to the top surface.

The second vertical surface 217 is formed on the upper side of the roller plate 21 away from the first vertical surface 215. The second vertical surface 217 is further projected toward the back surface of the roller block 10 than the first vertical surface 215.

The inclined surface 216 connects the first vertical surface 215 and the second vertical surface 217. The inclined surface 216 is formed as a curved line. However, the inclined surface 216 may be formed in a straight line.

The push-pull shaft 22 is formed to have a predetermined length. The push-pull shaft 22 is provided so as to be linearly movable with respect to one of the through holes 11 of the through-holes 11. One side of the push-pull shaft 22 is located inside the roller block 10 and is coupled to the coupling hole 211.

A shaft bushing 221 is provided between the outer circumferential surface of the push-pull shaft 22 and the inner circumferential surface of the through-hole 11. The shaft bushing 221 guides the push-pull shaft 22 so that it can be straightly moved. Also, the shaft bushing 221 prevents the push-pull shaft 22 from being sagged by the weight of the roller plate 21.

The shaft bushing 221 is formed to be shorter than the push-pull shaft 22. A flange is formed at one side of the shaft bushing 221, and the flange is fixed to the roller block 10. The other side of the shaft bushing 221 protrudes into the roller block 10.

The blade 23 is formed to have a predetermined length and faces the entrance of the vacuum chamber. A sealing member 231 is mounted on one surface (front surface) of the blade 23 facing the peripheral portion of the doorway.

The other surface (back surface) of the blade 23 faces the roller block 10. A coupling hole (232) is formed on the other surface of the blade (23). The other side of the push-pull shaft 22 is coupled to the engagement hole 232. At this time, a separate member may be detachably coupled to the other surface of the blade 23, such as a bolt, and a coupling hole may be formed in a separate member so that the other side of the push-pull shaft 22 may be coupled.

The length of the blade 23 is longer than the length of the roller block 10 and the roller plate 21 so that the weight of the blade 23 can be larger than that of the roller plate 21. The push-pull shaft 22 and the roller plate 21 can be inclined as the blade 23 is sagged by the difference in weight. When the push-pull shaft 22 is tilted, the push-pull shaft 22 can not linearly move linearly, and the airtightness of the doorway may be deteriorated. Accordingly, the guide shaft 25 may be provided at a portion adjacent to the push-pull shaft 22 to prevent the blade 23 from sagging.

The guide shaft 25 has a predetermined length and one side is coupled to the guide hole 212. A reinforcing bushing 251 is provided between the guide shaft 25 and the guide hole 212. The flange formed on the other side of the guide shaft 25 is fixed to the roller block 10 by a fastening means such as a bolt. Thus, the roller plate 21 can be supported by the guide shaft 25. Therefore, when the blade 23 is to be warped by the weight, the guide shaft 25 supports the roller plate 21 through the reinforcing bushing 251, so that the blade 23 is not sagged.

The elastic member 24 is located inside the roller block 10. One side of the elastic member 24 is inserted into the fulcrum 213 of the roller plate 21 and the other side is in contact with the inner surface of the roller block 10 and can be compressed when the roller plate 21 advances. The compressed elastic member 24 applies an elastic force such that the roller plate 21 is retracted. However, the resilient member 24 may be located between the roller block 10 and the blade 23. The present invention does not limit the position of the elastic member 24. The elastic member 24 may be made of a coil spring or the like.

The driving unit 30 elevates the roller block 10 and advances the roller plate 21 to bring the blade 23 into close contact with the peripheral portion of the entrance. The driving unit 30 includes a housing 31, a block actuating rod 32, a roller actuating rod 33, and a pressure roller unit 331.

The inside of the housing 31 is empty and the upper side is open. A piston 313 is installed in the housing 31 so as to be movable up and down. Ports 311 and 312 are formed in the housing 31 to allow the working fluid to flow into the housing 31. The working fluid may be air. The piston 313 can move up and down according to the ports 311 and 312 through which the working fluid flows.

A head cover 314 is mounted on the opened portion of the housing 31 and the rod holes 314a and 314b are vertically passed through the head cover 314 with intervals therebetween. On the other hand, a sealing member (not shown) may be provided on the rod holes 314a and 314b.

The block actuating rod 32 is formed as a pair by raising and lowering the roller block 10. However, the block actuating rod 32 may be formed of at least one. The block actuating rod 32 includes an actuating shaft 321, a shaft rod 322, and a shaft elastic member 323.

The operation shaft 321 is formed to have a predetermined length and is coupled to the rod hole 314a so as to be movable up and down. The lower side of the operating shaft 321 is located inside the housing 31 and is spaced apart from the piston 313 by a predetermined distance. However, the lower side of the operating shaft 321 may be directly coupled to the piston 313. [ A shaft cap 321a engaged with the head cover 314 is coupled to the lower side of the actuating shaft 321 so that the actuating shaft 321 is not separated from the housing 31. [ In addition, the bottom surface of the operation shaft 321 is opened.

The other side of the operating shaft 321 is exposed to the outside of the housing 31 and is coupled to the mounting hole 13. At this time, the operation shaft 321 may be fixed to the mounting hole 13, such as a pin (not shown).

The shaft rod 322 is located inside the housing 31 and the lower side is coupled to the piston 313 and the upper side passes through the shaft cap 321a and is slidably coupled to the inside of the operation shaft 321 .
On the upper side of the shaft rod 322, there is formed a flange engaged with the shaft cap 321a. The shaft rod 322 does not separate from the operation shaft 321 while the flange is caught by the shaft cap 321a.

The shaft elastic member 323 is located inside the operation shaft 321 to apply an elastic force to the shaft rod 322 so that the flange portion of the shaft rod 322 is caught by the shaft cap 321a and the operation shaft 321 ).
When the piston 313 rises in a state where the shaft cap 321a is in contact with the head cover 314, the shaft rod 322 can slide to the inside of the operation shaft 321. At this time, the shaft elastic member 323 can be compressed.

The roller actuating rod 33 is positioned between the pair of block actuating rods 32 to allow the roller plate 21 to advance. The roller operating rod 33 is disposed linearly movably in the rod hole 314b (see Fig. 6). The lower end of the roller actuating rod 33 is engaged with the piston 313 and the upper end is inserted into the roller block 10 through the hole 12 and positioned in the elevating guide groove 214.

The pressure roller unit 331 linearly moves the roller plate 21 and includes a guide block 331a and a pressure roller 331b.

The guide block 331a is mounted on the upper end of the roller actuating rod 33 and is coupled to the elevation guide groove 214 in a linear movement. The guide block 331a can guide the linearly moving roller operating rod 33 so that it can linearly move linearly. In addition, the guide block 331a protrudes in the direction of the back surface of the roller block 10.

The pressing roller 331b is rotatably mounted on both sides of the guide block 331a and rotatably supports the first vertical surface 215, the inclined surface 216, the second vertical surface 217, . When the pressure roller 331b contacts the first vertical surface 215, the pressure roller 331b does not press the roller plate 21, so that the roller plate 21 is urged by the elastic force of the elastic member 24, The blade 23 is moved in the backward direction of the block 10, and the blade 23 is separated from the peripheral portion of the entrance.
When the pressure roller 331b contacts the upper side of the inclined surface 216 or the second vertical surface 217, the roller plate 21 is pressed and the roller plate 21 is moved forward. At this time, the elastic member 24 is compressed. The blade 23 connected to the roller plate 21 through the push-pull shaft 22 is linearly moved in the direction of the peripheral portion of the doorway, and one surface of the blade 23 is in close contact with the peripheral portion.

On the other hand, a support panel 40, which is in contact with the pressure roller 331b, is mounted on the central portion of the rear surface of the roller block 10 that is opened. The support panel 40 is configured such that when the pressurizing roller 331b contacts the first vertical surface 215, the inclined surface 216 and the second vertical surface 217 with the rise of the roller operating rod 33, So that it can be lifted straightly without being pushed toward the open back side of the block 10. When the pressure roller 331b is pushed to move linearly, the roller actuating rod 33 can be bent, but the roller actuating rod 33 is not bent because the support panel 40 supports the pressure roller 331b so as not to be pushed.

6 to 8 show an operation example of the vacuum interrupter according to the embodiment of the present invention. The operation of the above-described vacuum interrupter will be described with reference to FIGS. 6 to 8. FIG.

6 shows a state in which the piston located in the cylinder is lowered, a) is a front sectional view, and b) is a partial side sectional view.

Referring to FIG. 6, when the working fluid flows into the housing 31 through the first port 311, the piston 313 descends and is located on the inner bottom surface of the housing 31. At this time, the roller block 10 and the airtight portion 20 are out of the openings of the vacuum chamber (C).
The pressing roller 331b is positioned at the first vertical surface 215 and the roller plate 21 is retracted toward the back surface of the roller block 10 by the elastic force of the elastic member 24. [ As a result of the retraction of the roller plate 21, one side of the blade 23 maintains a state away from the circumferential surface of the vacuum chamber C. In this state, when the working fluid flows into the housing 31 through the second port 312, the piston 313 moves to the upper side of the housing 31.

Next, referring to FIG. Fig. 7 shows a state in which the piston located in the cylinder is elevated, a) is a front sectional view, and b) is a partial side sectional view.

Referring to FIG. 7, when the working fluid flows into the housing 31 through the second port 312, the piston 313 moves to the upper side of the housing 31. At this time, the movement of the piston 313 causes the block operation rod 32 and the roller operation rod 33 to also linearly move upward. The blade 23 is positioned in the same line as the entrance G of the vacuum chamber C and the entrance G is moved in the upward direction of the vacuum chamber C as the roller block 10 and the hermetic portion 20 are moved toward the upper side of the vacuum chamber C. [ As shown in FIG.
The shaft cap 321a of the block actuating rod 32 moving to the upper side is brought into contact with the head cover 314 so that the actuating shaft 321 of the block actuating rod 32 is no longer linearly moved in the upper side direction.

When the working fluid continuously flows into the housing 31 through the second port 312, the shaft rod 322 connected to the piston 313 slides into the operating shaft 321, Can rise further. When the piston 313 rises, the shaft elastic member 323 is compressed by the slide movement of the shaft rod 322, and an elastic force is generated. With the rise of the piston 313, the roller operating rod 33 linearly moves to the upper side. At this time, the pressure roller portion 331 rises along the elevation guide groove 241.

Next, a description will be made with reference to FIG. 8 shows a state in which the airtight portion advances due to the continuous rise of the piston located inside the cylinder, wherein a) is a front sectional view and b) is a partial side sectional view.

The guide block 331a rises along the elevating guide groove 214 when the roller actuating rod 33 is raised while the actuating shaft 321 is hooked on the head cover 314 by the shaft cap 321a, The roller 331b rises along the first vertical surface 215. [

When the ascending pressing roller 331b contacts the inclined surface 216, the roller plate 21 is linearly moved in the direction of the front surface of the roller block 10. The blade 23 connected to the roller plate 21 through the push-pull shaft 22 linearly moves in the direction of the periphery of the entrance G of the vacuum chamber C due to the linear movement of the roller plate 21. When the pressing roller 331b abuts on the upper side of the inclined surface 216 or the second vertical surface 217 due to the linear upward movement of the roller operating rod 33, the front surface of the blade 23 comes in close contact with the peripheral portion of the entrance G The entrance G is closed. At this time, the sealing member 231 is compressed so that the airtightness between the peripheral portion of the entrance G and the front surface of the blade 23 is improved.

The pressing roller 331b supports the pressing roller 331b contacting the first vertical surface 215, the inclined surface 216 and the second vertical surface 217. The pressing roller 331b ) Can be lifted straight up without rushing.

When the roller plate 21 linearly moves in the front direction of the roller block 10, the elastic member 24 is compressed to generate an elastic force. The elastic force tries to move the roller plate 21 in the backward direction of the roller block 10.

On the other hand, since the guide shaft 25 fixed to the roller block 10 supports the roller plate 21, the blade 23 connected to the roller plate 21 through the push-pull shaft 22 is not sagged. That is, when the blade 23 is sagged, the push-pull shaft 22 and the roller plate 21 are inclined. Since the guide shaft 25 (see FIG. 3) supports the roller plate 21 so as not to be tilted, 23) will not be sagged. Accordingly, the front surface of the blade 23 simultaneously contacts the peripheral portion of the entrance G and drops at the same time, so that airtightness and adhesion can be improved.

6 to 8, when the working fluid is introduced into the housing 31 through the first port 311 to open the closed entrance G, the piston 313 descends. At this time, the shaft rod 322 slidably moved into the roller operating rod 33 and the operating shaft 321 is lowered. The pressing roller 331b located on the second vertical surface 217 or the inclined surface 216 moves to the first vertical surface 215 due to the descent of the roller operating rod 33. [ When the pressure roller 331b moves to the first vertical surface 215, the roller plate 21 moves (retracts) toward the back surface of the roller block 10 by the elastic force of the compressed elastic member 24. [ With the retraction of the roller plate 21, the blade 23 connected to the roller plate 21 and the push-pull shaft 22 is also retracted. The retreated blade 23 is separated from the periphery of the entrance G.

When the shaft rod 322 is lowered along the descending piston 313 and the flange of the shaft rod 322 is caught by the lower end of the operation shaft 321, the operation shaft 321 descends along the piston 313 . The shaft elastic member 323 is restored to its original state by the elastic force of the compressed shaft elastic member 323 and the flange of the shaft rod 322 is rotated by the elastic force of the shaft elastic member 323, And is brought into close contact with the lower end portion. The roller block 10 and the airtight portion 20 are moved to the inner bottom surface of the vacuum chamber C by the lowering of the operation shaft 321 and are completely opened to the entrance G. [

In the vacuum interrupter 1 according to this embodiment, the airtight portion 20 moves linearly as the pressure roller 331b contacting the other surface of the airtight portion 20 ascends and descends. At this time, the pressure roller 331b presses the airtight portion The other surface of the hermetically sealed portion 20 is uniformly pressed so that the hermetic portion 20 can be straightly moved without being shifted to one side. As a result, the airtight portion 20 linearly moves linearly, and the front surface of the airtight portion 20 contacts the peripheral portion of the entrance G at the same time.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, Of the right.

H: Housing G: Entrance
1: Vacuum interrupter 10: Roller block
11: through hole 12: hole
13: mounting hole 20: airtight portion
21: roller plate 211: engaging hole
212: Guide ball 213: Tan success
214: lift-up guide groove 215: first vertical surface
216: slope 217: second vertical surface
22: Push-pull shaft 221: Shaft bushing
23: Blade 231: Sealing member
232: coupling hole 24: elastic member
25: guide shaft 251: reinforcing bushing
30: driving part 31: cylinder
311: first port 312: second port
313: piston 314: head cover
314a: Rod ball 32: Block working rod
321: Operation shaft 321a: Shaft cap
322: shaft rod 323: shaft elastic member
33: roller operating rod 331: pressure roller portion
331a: guide block 331b: pressure roller
40: Support panel

Claims (9)

A roller block which is vertically movable in an entrance portion formed in the vacuum chamber,
An airtight portion movably coupled to the roller block, one side of which is located in the roller block and the other side of which is in contact with the entrance,
An elastic member disposed inside the roller block and applying an elastic force such that the airtight portion is away from the entrance;
A driving unit connected to the airtight unit and the roller block, for moving the airtight unit in the direction of the entrance and exit,
. The method of claim 1,
The gas-
A roller plate movably arranged in the roller block,
A blade located outside the roller block and capable of contacting a peripheral portion of the entrance, and
And a push-pull shaft movably disposed on the roller block for connecting the roller plate and the blade,
Containing
Vacuum interrupter. delete 3. The method of claim 2,
The gas-
And a shaft bushing fixed to the roller block and guiding and guiding the push-pull shaft. The method according to claim 2 or 4,
The gas-
And a guide shaft penetrating the roller block and connecting the roller plate and the blade. 3. The method of claim 2,
A portion of the lower side of the roller plate
The first vertical plane,
A second vertical surface spaced apart from the first vertical surface and projecting further than the first vertical surface, and
An inclined surface connecting the first vertical surface and the second vertical surface,
Lt; / RTI > The method of claim 6,
The driving unit includes:
A housing including a piston,
A block operating rod passing through the housing and connecting the piston and the roller block,
A roller operating rod passing through the housing and connecting the piston and the inside of the roller block, and
And a pressing roller portion which is connected to the roller operating roller and is located inside the roller block,
Containing
Vacuum interrupter. 8. The method of claim 7,
The pressure roller unit
A guide block connected to the roller operating rod and located in an elevating guide groove formed in the roller plate,
And a pressure roller which is rotatably coupled to both sides of the guide block and can contact the first vertical surface, the inclined surface, and the second vertical surface,
Containing
Vacuum interrupter. 8. The method of claim 7,
The block operating rod includes:
An actuating shaft connecting the inside of the housing and the roller block,
A shaft rod which is located inside the housing and connects the piston and the operation shaft,
A shaft elastic member positioned between the shaft rod and the operation shaft and elastically supporting the operation shaft,
A shaft cap disposed within the housing and coupled to the actuating shaft,
Containing
Vacuum interrupter.

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