KR101397425B1 - Exposure apparatus - Google Patents

Abstract

The present invention relates to an exposure apparatus in which a camera used for alignment between a mask and an exposure target can be moved, and more particularly, to an exposure apparatus for aligning a mask held by a plurality of mask holders and an exposure target moved by a plurality of stage units The exposure apparatus comprising: a camera support frame having a vertical support vertically disposed on an upper surface of a support of the exposure apparatus, and a horizontal support disposed on the upper portion of the vertical support; A camera unit guide formed on the horizontal support; A camera mount disposed on the camera unit guide; A plurality of camera units mounted on the camera mounting unit to photograph and align the alignment marks formed on the mask side and the alignment target marks formed on the exposure target, respectively; And a camera moving unit for moving the camera mounting unit to the left and right along the camera unit guide. Such an exposure apparatus is easy to manage with a small number of cameras, and the cost of the product can be reduced.

Description

[0001] EXPOSURE APPARATUS [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an exposure apparatus, and more particularly to an exposure apparatus in which a camera used for alignment between a mask and an exposure target is movable.

In general, when a glass or a semiconductor device (e.g., a substrate) of a display device is manufactured, a photosensitive material PR (Photo Resist) is coated on an exposure subject (e.g., a glass or a substrate) Lithography) process. The lithography process is a process of transferring a pattern formed on a mask onto a glass or a substrate through an exposure apparatus.

In such an exposure apparatus, a mask is placed at the same position as the mask pattern corresponding to the pattern of the semiconductor device, and an exposure beam, which is reproduction light, is irradiated from the opposite direction to the recording, Lt; / RTI > At this time, by aligning the alignment mark formed on the glass or substrate side with the alignment mark formed on the mask side by using the camera, the mask is aligned with the glass or the substrate, and then the pattern formed on the mask Is transferred onto the glass or the substrate.

On the other hand, Korean Patent No. 10-0174486 discloses an exposure apparatus for acquiring alignment light output from a plurality of alignment optical systems using a prism, focusing an image on a single CCD camera by changing the magnification through a zoom lens, A plurality of alignment optical systems for outputting alignment light corresponding to alignment marks formed on a workpiece through respective optical paths; A screen on which a reference mark is formed; A prism for reflecting a plurality of alignment light output from the plurality of alignment optical systems and forming an image on the screen; An image forming apparatus comprising: a zoom lens having a magnification varying discontinuously; an image forming lens for forming an alignment mark formed on the screen and light corresponding to the reference mark; A shaded camera for outputting image information corresponding to an image formed by the imaging lens; Calculating a positional difference between the position of the reference mark and the alignment mark according to the image information outputted from the visual camera, detecting a change in the position of the workpiece on which the alignment mark is formed, An image processing means for outputting image data; Information display means for displaying corresponding information in accordance with a signal output from the image processing means; And stage control means for controlling the position of the workpiece in accordance with a signal output from the image processing means, wherein the imaging lens is a zoom lens whose magnification is variable discontinuously. According to the disclosed technique, an accurate alignment position can be easily grasped with a simple configuration.

Such a conventional exposure apparatus observes an alignment mark formed on the mask side and an alignment mark formed on the exposure target object at the same time using a fixed camera and receives the masked alignment mark and the image for the exposure target object alignment mark, The mask alignment mark and the image of the exposure target object alignment mark are converted into image data and the minutiae point of the mask alignment mark and the minutiae point of the exposure target object alignment mark are extracted from the converted image data and the distance between the extracted two minutiae points is calculated , The stage is moved so that the calculated distance is within a predetermined allowable range to fit the mask alignment mark and the exposure target object alignment mark so that the mask is aligned with the exposure target object, The pattern formed on the photosensitive body is transferred onto the exposure target.

However, in the conventional exposure apparatus, since the camera used for positioning between the mask and the exposure target is fixedly installed, it is possible to perform only one alignment with a single camera (or, as a set of cameras, And four cameras are installed in one stage, so that a total of 16 cameras are required in the case of an exposure apparatus having four stages.

As described above, the conventional exposure apparatus has many expensive cameras used for aligning the mask and the exposure target, which makes it difficult to manage a large number of cameras, which increases the cost of the product.

Korean Patent No. 10-0174486

One embodiment of the present invention is to provide an exposure apparatus that allows a camera used for alignment between a mask and an exposure target object (e.g., glass, substrate, and the like) to be movable.

Among the embodiments, the exposure apparatus is an exposure apparatus for performing alignment between a mask held by a plurality of mask holders and an exposure subject moved by a plurality of stage units, wherein the exposure apparatus comprises: A camera support frame having an arranged vertical support and a horizontal support disposed on top of the vertical support; A camera unit guide formed on the horizontal support; A camera mount disposed on the camera unit guide; A plurality of camera units mounted on the camera mounting unit to photograph and align the alignment marks formed on the mask side and the alignment target marks formed on the exposure target, respectively; And a camera moving unit for moving the camera mounting unit to the left and right along the camera unit guide.

In one embodiment, the vertical support may separate the illumination optical system house formed above the camera unit and the mask holder formed below the camera unit, so that the camera unit is moved apart between the illumination optical system house and the mask holder have.

In one embodiment, the illumination optical system house may be fixedly disposed on an upper portion of the camera unit so as to be spaced apart from the camera unit.

In one embodiment, the camera moving unit moves the camera unit mounted on the camera mounting unit along the camera unit guide to position the camera unit on one stage unit, aligns the stage unit with the other camera unit, It is possible to move to the upper portion of the stage portion and perform positioning with respect to the other stage portion.

In one embodiment, the camera support frame may be provided on a support of the exposure apparatus such that a camera mounted on the camera mount is positioned in alignment with a mask on the mask holder.

In one embodiment, the camera mount has a rectangular shape including an empty space therein, and the camera unit may be mounted in a protruding manner in the direction of an empty space inside the horizontal support to photograph the lower portion.

In one embodiment, the exposure apparatus may further include a vertical adjusting unit formed on a side surface of the camera mounting unit to adjust the height of the camera unit by moving the camera unit up and down.

In one embodiment, the exposure apparatus may further include an interval adjusting unit formed on both sides of the upper surface of the camera mounting unit to adjust the interval between the camera units by moving the camera unit left or right or back and forth.

Among the embodiments, the exposure apparatus is an exposure apparatus that performs alignment between a mask held by a mask holder and an exposure subject moved by a stage unit, before performing exposure by an illumination optical system of an illumination optical system house, A camera support frame having a vertical support vertically disposed on the upper surface of the support of the exposure apparatus and a horizontal support disposed on the upper portion of the vertical support; A camera unit guide formed on the horizontal support; A camera mount disposed on the camera unit guide; A camera unit mounted on the camera mounting unit to photograph and align the alignment mark formed on the mask side and the alignment mark formed on the exposure target, respectively; A camera moving unit for moving the camera mount unit left and right along the camera unit guide; A vertical adjustment unit formed on a side surface of the camera mounting unit to adjust the height of the camera unit by moving the camera unit up and down; And an interval adjusting unit formed on both sides of the upper portion of the camera mounting unit to adjust the interval between the camera units by moving the camera unit left or right or back and forth.

In one embodiment, the camera section is disposed between the illumination optical system house and the mask holder, and is spaced apart from the illumination optical system house and the mask holder, respectively, so that the camera section can be moved left and right between the illumination optical system house and the mask holder have.

In one embodiment, the camera moving unit moves the camera unit mounted on the camera mounting unit along the camera unit guide so as to position the camera unit on an upper portion of the stage unit, aligns the stage unit with the camera unit, It is possible to move to the upper portion of the stage and perform the alignment with respect to the other stage portion.

Among the embodiments, the exposure apparatus is an exposure apparatus that performs alignment between a mask held by a mask holder and an exposure subject moved by a stage unit, before performing exposure by an illumination optical system of an illumination optical system house, A camera support frame having a vertical support vertically disposed on the upper surface of the support of the exposure apparatus and a horizontal support disposed on the upper portion of the vertical support; A camera unit guide formed on the horizontal support; A camera mount disposed on the camera unit guide; And a control unit for controlling the stage unit to perform a data process on the recognized position to recognize the position of the alignment mark formed on the exposure target object by recognizing the reference position of the alignment mark formed on the mask side, A camera unit for performing alignment between the object and the object to be exposed; And a camera moving unit for moving the camera mounting unit to the left and right along the camera unit guide.

In one embodiment, the vertical support may separate the illumination optical system house and the mask holder from each other, so that the camera part is moved left and right between the illumination optical system house and the mask holder.

In one embodiment, the camera moving unit moves the camera unit mounted on the camera mounting unit along the camera unit guide so as to position the camera unit on an upper portion of the stage unit, aligns the stage unit with the camera unit, It is possible to move to the upper portion of the stage and perform the alignment with respect to the other stage portion.

In one embodiment, the exposure apparatus may further include a vertical adjustment unit formed on a side surface of the camera mounting unit to adjust the height of the camera unit by moving the camera unit up and down. The camera adjusting unit may be formed on both sides of the upper portion of the camera mounting unit, Or an interval adjusting unit for adjusting the distance between the camera units by moving the camera unit forward and backward.

The exposure apparatus according to an embodiment of the present invention realizes a plurality of positions with a single camera by implementing a camera which is used when aligning a mask and an exposure object (for example, glass, substrate, and the like) (Or a set of cameras can perform positioning with respect to a plurality of stages), so that the number of cameras is reduced and camera management becomes easy, and the cost of the product is reduced.

1A to 1C are views for explaining an exposure apparatus according to an embodiment of the present invention.
FIGS. 2A to 2D are views for explaining a camera unit and a camera support frame in FIG. 1. FIG.
FIGS. 3A and 3B are views for explaining the operation of the exposure apparatus shown in FIG.
FIG. 4 is a view for explaining the exposure operation of the exposure target in FIGS. 3A and 3B. FIG.
FIG. 5 is a view for explaining the operation of the arm robot in the process of loading the exposure object in FIG.

The description of the present invention is merely an example for structural or functional explanation, and the scope of the present invention should not be construed as being limited by the embodiments described in the text. That is, the embodiments are to be construed as being variously embodied and having various forms, so that the scope of the present invention should be understood to include equivalents capable of realizing technical ideas. Also, the purpose or effect of the present invention should not be construed as limiting the scope of the present invention, since it does not mean that a specific embodiment should include all or only such effect.

Meanwhile, the meaning of the terms described in the present invention should be understood as follows.

The terms "first "," second ", and the like are intended to distinguish one element from another, and the scope of the right should not be limited by these terms. For example, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component.

It is to be understood that when an element is referred to as being "connected" to another element, it may be directly connected to the other element, but there may be other elements in between. On the other hand, when an element is referred to as being "directly connected" to another element, it should be understood that there are no other elements in between. On the other hand, other expressions that describe the relationship between components, such as "between" and "between" or "neighboring to" and "directly adjacent to" should be interpreted as well.

It should be understood that the singular " include "or" have "are to be construed as including a stated feature, number, step, operation, component, It is to be understood that the combination is intended to specify that it does not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or combinations thereof.

All terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs, unless otherwise defined. Commonly used predefined terms should be interpreted to be consistent with the meanings in the context of the related art and can not be interpreted as having ideal or overly formal meaning unless explicitly defined in the present invention.

1A to 1C are views for explaining an exposure apparatus according to an embodiment of the present invention. 1A is a plan view of the exposure apparatus, FIG. 1B is a front view of the exposure apparatus, and FIG. 1C is a side view of the exposure apparatus.

1A to 1C, an exposure apparatus includes a support 100, a first conveying unit 102, a second conveying unit 104, a plurality of stage units 106, a plurality of illumination optical system houses 108, A plurality of camera guides 116, a plurality of stage guides 118, a plurality of mask holders 124, a plurality of mask holder moving units 126, a house support frame 130, Frame 132 as shown in FIG.

The support 100 is fixed on the floor and serves to support components of the exposure apparatus.

The first carrying part 102 is disposed apart from the upper part of the support 100 and carries an exposure object provided from the outside on one side. In addition, the first carrying unit 102 can shift the exposure subject one by one in accordance with the cycle in which the arm robot 109 loads the exposure subject in the first carrying unit 102. [ In one embodiment, the object to be exposed may correspond to a cell such as a glass, a wafer, a substrate, or the like.

The second carrying part 104 is disposed at the same height as the first carrying part 102 and spaced apart from the upper part of the supporting body 100, and carries the exposure object to the outside from the other side. The second conveying unit 104 can shift the exposure target one by one according to the cycle in which the arm robot 109 unloads the exposure target to the second conveyance unit 104. [

And the first carrying portion 102 and the second carrying portion 104 may be disposed on the same imaginary extension line. In one embodiment, the first delivery portion 102 and the second delivery portion 104 may correspond to a conveyor.

The exposure apparatus may include a plurality of stage units 106, which stage units 106 may be disposed between the first carrying unit 102 and the second carrying unit 104.

The stage unit 106 loads the object to be exposed on a virtual extension line connecting the first carrying unit 102 and the second carrying unit 104 (hereinafter referred to as a first position), and moves the object to be exposed in the Y-axis direction In the vertical direction with respect to the front surface of the exposure apparatus).

The stage unit 106 is disposed at a lower portion of the camera unit 116 located between the mask holder 124 and the illumination optical system house 108 And the camera unit 116 performs alignment with the object to be exposed.

The stage unit 106 may be configured to position the exposure target object away from the mask holder 124 and align the exposure target object with the exposure target object based on the mask held by the mask holder 124 by the camera unit 116 . ≪ / RTI > That is, the camera unit 116 can perform alignment with respect to the alignment marks formed on the mask and the alignment marks formed on the exposure target.

For example, the stage unit 106 may move the exposure target in the X-axis direction (i.e., in the horizontal direction with respect to the front surface of the exposure apparatus) or in the Y-axis direction (i.e., So that the alignment of the mask and the exposure target can be performed by the camera unit 116. [ In addition, the stage unit 106 may rotate the exposure target at an angle of? (That is, rotate in parallel with the support 100) so that alignment with the exposure target can be performed.

The stage unit 106 performs alignment with the exposure target object based on the image photographed through the camera unit 116 provided on the camera support frame 132. At this time, the camera unit 116 is spaced apart from the mask holder 124 so that the upper part of the mask mounted on the mask holder 124 can be photographed. The stage unit 106, the mask holder 124, and the camera unit 116 may be positioned on a straight line when the stage unit 106 is moved to the second position.

In one embodiment, the exposure apparatus may include four stage portions 106, each of which may operate independently. In addition, the exposure apparatus may include the same number of mask holders 124 as the number of the stage sections 106.

For example, if the exposure apparatus includes four stage portions 106, it may include four mask holders 124 for each stage portion 106. At this time, the mask holder 124 may mount a mask having the same pattern, or may mount a mask having different patterns. Further, the mask holder moving unit 126 moves the position of the mask mounted on the mask holder 124 to the lower portion of the camera unit 116.

The stage unit 106 moves the exposed exposure object to the first position after the exposure object is exposed. That is, each stage unit 106 reciprocates between the first positions and the second positions.

The illumination optical system house 108 is fixedly disposed on the horizontal support 204 and includes a light output portion 134 to illuminate the exposure target through the illumination optical system when the exposure target is located below the light output portion 134. [ Exposed.

In other words, when the exposure object at the second position is aligned, the illumination optical system house 108 corresponding to the position-matched stage portion 106 irradiates light through the illumination optical system included therein Thereby exposing the object to be exposed.

In one embodiment, the illumination optical system house 108 may fix the illumination optical system to the camera section 116 and away from the camera section 116. Further, in one embodiment, the illumination optical system house 108 corresponds one-to-one with the stage portion 106, and each illumination optical system house 108 can operate independently.

The arm robot 109 includes a load arm 110, an unload arm 112 and an arm robot guide 114. The load arm 110 and the unloading arm 112 are vertically A lifter 120 and a load / unload part 122. [

The arm robot 109 unloads the object to be exposed at the first position via the unloading arm 112 and loads the object to be exposed at the first position via the rod arm 110. [ At this time, the unloading arm 112 unloads the object to be exposed unloaded from the first position to the second carrying unit 104 and unloads it to the second carrying unit 104, and the rod arm 110 moves to the first carrying unit 102 ) Is moved to the first position and the exposure target is loaded at the first position.

In other words, after the unloading object is unloaded from the stage portion 106 in which the unloading arm 112 has moved to the first position, a new object to be exposed can be loaded into the stage portion 106 by the rod arm 110 .

In one embodiment, the arm robot 109 is parallel to an imaginary axis connecting the first and second carriers 102 and 104 and includes a first carrier 102 and a second carrier 104 The rod arm 110 and the unload arm 112 can be moved in parallel through the arm robot guide 114 spaced apart from the imaginary axis.

In one embodiment, when the object to be exposed is unloaded from the first position via the unloading arm 112, the arm robot 109 simultaneously moves the rod arm 110 and the unloading arm 112 in parallel.

For example, the arm robot 109 moves the object to be exposed unloaded from the first position through the unload arm 112 to the second carrying unit 104 and simultaneously moves the first carrying unit (not shown) 102 to the first position.

The exposure apparatus has four illumination optical system houses 108 on the house support frame 130. [ Four illumination optical system houses 108 may be disposed on the upper portion of the camera unit 116. [

The house support frame 130 includes a plurality of vertical supports 202 vertically disposed on the upper surface of the support 100 and a horizontal support 202 vertically disposed on each of the vertical supports 202, (204).

The vertical support 202 separates the illumination optical system house 108 and the camera section 116 so that the camera section 116 can move left and right away from the illumination optical system house 108.

The horizontal support 204 is a support that can support the remaining portion except the light output portion 134 where light is output from each illumination optical system house 108.

FIGS. 2A to 2D are views for explaining a camera unit and a camera support frame in FIG. 1. FIG. 2B is a plan view of the camera unit and the camera support frame, FIG. 2C is a front view of the camera unit and the camera support frame, FIG. 2D is a side view of the camera unit and the camera support frame, to be.

2A to 2D, the camera supporting frame 132 includes a first camera moving part 310a, a second camera moving part 310b, a first camera mounting part 312, a second camera mounting part 314, A vertical support 320, a horizontal support 322, first camera portion guides 324a and 324b and second camera portion guides 326a and 326b.

The camera moving units 310a and 310b move the camera mounting units 312 and 314 left and right along the camera unit guides 324a and 324b and 326a and 326b to move the camera unit 116a To 116d can be moved to the left and right.

The camera support frame 132 includes three vertical supports 320 vertically disposed on the upper surface of the support 100 inside the vertical support 202 of the house support frame 130, And a horizontal support 322 disposed perpendicularly to each vertical support 320.

The vertical support body 320 separates the illumination optical system house 108 formed above the camera sections 116a to 116d and the mask holder 124 formed below the camera sections 116a to 116d, 116d can be moved apart between the illumination optical system house 108 and the mask holder 124. [

The horizontal support body 322 is a support body capable of supporting the remaining portions excluding the camera portions 116a to 116d capable of capturing the lower portion. The horizontal support body 322 includes first and second camera portion guides 324a and 324b, Guides 326a and 326b are formed.

The camera units 116a to 116d are disposed on the first camera mount 312 and the second camera mount 314 and the first camera mount 312 and the second camera mount 314, 324a, and 324b, and the second camera portion guides 326a and 326b.

The camera sections 116a to 116d move between the spaces created by the respective vertical supports 202 and horizontal supports 204 of the illumination optical system house 108. [ At this time, the camera mounting portions 312 and 314 move left and right along the camera portion guides 324a, 324b, 326a, and 326b by driving the camera moving portions 310a and 310b.

That is, the first camera unit guides 324a and 324b and the second camera unit guides 326a and 326b move the camera mounts 312 and 314 to the left and right on the same horizontal line of each stage unit 106. In one embodiment, the camera sections 116a-116d may move away from the illumination optical system house 108 and the mask holder 124. [

The camera unit guides 324a, 324b, 326a, and 326b move the camera mounts 312 and 314 in the left and right directions of the exposure apparatus.

For example, the first camera part guides 324a and 324b move the first camera parts 116a and 116b mounted on the first camera mounting part 312 and position them on the first stage part 106a. At this time, the first camera units 116a and 116b perform alignment with respect to the mask and the exposure target. The first camera part guides 324a and 324b move the first camera mounting part 312 to the upper part of the second stage part 106b to align the first camera part 312 with the first camera part 312, The first camera mounting portion 312 is moved back to the original position (i.e., the position of the first stage portion 106a) by causing the camera portions 116a and 116b to perform positioning on the upper portion of the second stage portion 106b. Upper position).

As described above, since the camera units 116a to 116d used for alignment between the mask and the exposure subject are movable left and right, one of the camera units 116a to 116d can be moved relative to the plurality of stages 106a to 106d Alignment can be performed or a plurality of stages 106a to 106d can be aligned with one of the camera sections 116a to 116d.

The camera support frame 132 may be provided inside the house support frame 130, or alternatively may be provided under the house support frame 130. In one embodiment, the camera support frame 132 is mounted on the upper portion of the support 100 such that the camera portions 116a-116d mounted on the camera mounts 312, 314 are positioned in line with the mask on the mask holder 124 Respectively.

The camera mounts 312 and 314 are rectangular shaped supports including an empty space for mounting the camera units 116a to 116d.

The horizontal support body 322 is also a rectangular support having an empty space therein. The first camera unit guides 324a and 324b are disposed on the upper surface located in the left side of the exposure apparatus. The first camera unit guides 324a and 324b are disposed on the right side of the exposure apparatus. And second camera portion guides 326a and 326b are disposed on the upper surface. Both sides of the camera unit guides 324a, 324b, 326a and 326b are spaced apart by a predetermined distance and the camera units 116a to 116d can be positioned between both sides of the camera unit guides 324a, 324b, 326a and 326b . That is, the first camera sections 116a and 116b may be positioned between the first and second camera section guides 324a and 324b, and the second camera sections 116c and 116d may be positioned between the second camera section guides 326a and 326b As shown in Fig.

The first camera unit guides 324a and 324b and the second camera unit guides 326a and 326b have camera mounts 312 and 314 for mounting the camera units 116a to 116d, respectively. The first camera unit guides 324a and 324b and the second camera unit guides 326a and 326b are mounted on the camera mounting portions 312a and 312b in which the camera units 116a to 116d are protruded in the direction of the empty space inside the horizontal support body 322, , 314). That is, the camera mounting portions 312 and 314 protrude the camera portions 116a to 116d, respectively, so that the camera portions 116a to 116d can photograph the lower portion through the empty space inside the horizontal support body 322. [

In one embodiment, the first camera portion guides 324a and 324b and the second camera portion guides 326a and 326b may have camera mounts 312 and 314 corresponding to half the number of the stage portions 106, respectively have. For example, two camera mounts 312, 314 may be provided for the four stage portions 106.

The intervals of the camera units 302a to 302d and 302e to 302h mounted on the respective camera mounting portions 312 and 314 may be the same. For example, each of the camera mounting portions 312 and 314 can mount four camera portions 302a to 302d and 302e to 302h, respectively, and four camera portions 302a to 302d of the first camera mounting portion 312, And the four camera units 302e to 302h of the second camera mounting unit 314 are spaced equidistantly.

Each of the camera mounts 312 and 314 has vertical adjusters 316a to 316d on the side thereof and the vertical adjusters 316a to 316d are arranged such that the camera units 302a to 302d and 302e to 302h are mounted on the camera mounts 312, 314, and the height of the camera units 302a to 302d and 302e to 302h is moved up and down through the guide.

Each of the camera mounts 312 and 314 is provided with spacing adjusters 318a to 318d on both upper sides thereof and the gap adjusting units 316a to 316d are mounted on the camera mounts 312 and 314, The camera units 302a to 302d and 302e to 302h can be mounted on the guides so that the camera units 302a to 302d and 302e to 302h can be moved left and right through the left and right movable guides The camera units 302a to 302d and 302e to 302h can be moved back and forth through the back and forth movable guides to adjust the distance between the camera units 302a to 302d and 302e to 302h.

On the other hand, the stage unit 106 performs alignment with respect to the mask and the exposure target based on the images photographed through the camera units 302a to 302d and 302e to 302h mounted on the camera mounting units 312 and 314 . In one embodiment, the first stage 106a and the second stage 106b can perform alignment with respect to the mask and the exposure target object based on the image photographed through the first camera units 302a to 302d .

In another embodiment, the first stage 106a and the second stage 106b perform alignment between the mask and the exposure target object based on an image photographed through two cameras of the first camera units 302a to 302d You may.

For example, after the first camera units 302a to 302d mounted on the first camera mounting unit 312 are positioned above the first stage unit 106a, the first camera unit 302a to 302d The camera 302a may photograph the first corner area and the fourth camera 302d of the first camera parts 302a to 302d may photograph the second corner area in the diagonal direction. The exposure apparatus calculates a gap (i.e., distance) between the mask and the exposure target based on the photographed image. The first stage 106a reduces the distance between the mask and the exposure target, It is possible to perform the alignment.

The first camera moving unit 310a moves the first camera mounting unit 312 to the second stage unit 106b side along the first camera unit guides 324a and 324b and moves the first camera mounting unit 312 to the first camera mounting unit 312, The first camera unit 302a to 302d mounted on the second stage unit 106b is positioned above the second stage unit 106b and the second stage 106b is moved to the second camera unit 302b of the first camera units 302a to 302d And the third camera 302c, based on the photographed image of the third camera 302c and the third camera 302c.

The second camera moving unit 310b moves the second camera mounting unit 314 toward the third stage 106c along the second camera unit guides 326a and 326b and moves the second camera mounting unit 314 The third stage 106c is positioned at the upper portion of the third stage portion 106c and the first camera 302e and the second camera portion 302c of the second camera portion 302e to 302h 4 camera 302h to perform alignment with respect to the mask and the exposure target object based on the image photographed by the camera unit 302h.

The second camera moving section 310b moves the second camera mounting section 314 toward the fourth stage 106d along the second camera section guides 326a and 326b and moves the second camera mounting section 314 toward the second camera mounting section 314 The second camera units 116c and 116d are positioned above the fourth stage 106d and the fourth stage 106d is moved to the second camera 302f and the second camera 302f, And align the mask and the object to be exposed based on the image photographed by the third camera 302g.

FIGS. 3A and 3B are views for explaining the operation of the exposure apparatus shown in FIG. FIG. 3A is a plan view for conceptually explaining the operation of the exposure apparatus, and FIG. 3B is a side view for conceptually explaining the operation of the exposure apparatus.

3A and 3B, the first carrying unit 102 receives the exposure target 504 from the first openings 502 and carries the exposure target 504 one by one. In one embodiment, the first apertures 502 may correspond to a laminator that performs a coating process on the exposure target.

Each stage unit 106 moves the exposed object to the first positions and the arm robot 109 unloads the object to be exposed in each stage unit 106 and loads a new object to be exposed.

In one embodiment, each stage unit 106 moves each exposed exposure object to a first position for a predetermined time (e.g., 3 seconds) difference, and each stage unit 106 moves a predetermined time 12 seconds), and reciprocates the object to be exposed between the first and second positions.

For example, after the mask 508 held on the mask holder 124 is moved to the lower portion (i.e., the second position) of the camera portion 116 to receive the alignment mark formed on the mask 508 side, The stage unit 106 moves the mask 508 held by the stage unit 124 to the original position and moves the exposure target object loaded at the first position to the second position.

Thus, the alignment of the alignment mark formed on the mask 508 with the alignment mark formed on the exposure target object can be performed by the camera unit 116. [

Then, the mask 508 held on the mask holder 124 is moved to the second position, whereby the illumination optical system house 108 illuminates the object to be aligned in the second position with light And exposed.

Then, after the exposure subject is exposed, the stage unit 106 moves the exposed exposure subject to the first position.

FIG. 4 is a view for explaining the exposure operation of the exposure target in FIGS. 3A and 3B. FIG.

Referring to FIG. 4, (a) of FIG. 4 is a view for explaining a process of loading an exposure target object to be loaded on each stage unit 106.

When one of the plurality of stage units 106 has moved to the exposed position, the unloading arm 112 is moved to the first position, and the unloading object exposed by the stage unit 106 is unloaded .

The unloading arm 112 moves the exposed object to the second carrying unit 104 to unload the object to be exposed to the second carrying unit 104. At the same time, Position and loads it into the stage unit 106. [

The unloading arm 112 immediately unloads the exposure subject unloaded from the first stage portion 106a to the second carrying portion 104 and then immediately moves the stage portion 106 (for example, 106b to 106d And unloads the exposure target object from the other stage portion 106 (for example, 106b to 106d).

At this time, the mask 508 held on the mask holder 124 is located at the lower (i.e., second) position of the camera unit 116, and the alignment mark 126 formed on the mask 508 side by the camera unit 116 .

FIG. 4B is a view for explaining the alignment process of the exposure target object, in which each stage unit 106 performs alignment with respect to the loaded exposure target object.

The mask 508 held in the mask holder 124 is moved to the original position and the exposure target object loaded with each stage portion 106 is moved to the second position. Based on the mask 508, As shown in FIG.

In other words, the camera unit 116 recognizes the reference position (i.e., the position of the alignment mark) of the mask 508 held by the mask holder 124 using a device such as a CCD camera or the like, The camera unit 610 also controls the stage unit 106 by performing data processing on a position recognized by the camera unit 610 so that the mask 508 ) And the exposure object.

In one embodiment, the stage unit 106 moves the exposure target to the second position and then moves downward (Z-axis) to stabilize the position of the stage unit 106 and align the exposure target .

In one embodiment, a predetermined first time (for example, one second) may be taken when each stage unit 106 moves the exposure target to the second position, (For example, 0.5 seconds) may be required in order to stabilize the position of the exposure object, and when the alignment of the exposure target object is to be performed, a time period obtained by adding the first time and the second time For example, 2 seconds can take.

FIG. 4C is a view for explaining the exposure process of the exposure target object to be exposed to the exposure target object loaded on each stage portion 106. FIG.

When the exposure target is aligned, the mask 508 held on the mask holder 124 is moved to the second position, and the illumination optical system exposes the exposure target by irradiating the mask 508 with light.

Accordingly, after the exposure subject is exposed, the stage portion 106 moves in the upward direction (Z-axis) to move the exposed exposure subject to the first position.

4 (d) is a view for explaining the process of moving the exposure target object in which each stage portion 106 moves the exposed target object to the first position.

After the exposure subject is exposed, the stage unit 106 moves the exposed exposure subject to the first position, and the arm robot 109 unloads the exposure subject exposed in the stage unit 106, .

FIG. 5 is a view for explaining the operation of the arm robot in the process of loading the exposure object in FIG.

5, the arm robot 109 unloads the exposure target object exposed in each stage unit 106 at a predetermined time (for example, three seconds) and loads a new exposure target object in the corresponding stage unit 106 .

In one embodiment, when the unloading arm 112 is moved to the first position, it may take a predetermined first time (for example, one second), and when the exposed object to be exposed in the first position is unloaded, The load arm 110 and the unloading arm 112 may take a second time (for example, 0.5 seconds), and when the load arm 110 and the unloading arm 112 move to the first position and the second carrying portion 104, For example, 1 second), and it may take a constant fourth time (for example, 0.5 seconds) when the load arm 110 loads a new exposure object at the first position.

In other words, in the process of loading the exposure target object in which the arm robot 109 unloads the exposure target object exposed by one stage unit 106 and loads a new exposure target object, the first through fourth time integration times (for example, 3 seconds) can take.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the present invention as defined by the following claims It can be understood that

100: Support
102 and 104:
106, 106a to 106d:
108: Lighting system house
109: Cancer Robot
110: rod arm
112: unload arm
114: Arm Robot Guide
116, 116a to 116d, 302a to 302d, 302e to 302h:
118: Stage guide
120: vertical exercise machine
122: load / unload section
124: mask holder
126: mask holder moving part
130: house support frame
132: camera support frame
134: optical output section
310a and 310b:
312, 314: camera mount
316a to 316d:
318a to 318d:
202: house vertical support
320: camera vertical support
204: house horizontal support
322: camera horizontal support
324a, 324b, 326a, and 326b:
504:
508: Mask

Claims (16)

An exposure apparatus for performing alignment between a mask held by a plurality of mask holders and an exposure target moved by a plurality of stage units,
A camera support frame having a vertical support vertically disposed on the upper surface of the support of the exposure apparatus and a horizontal support disposed on the upper portion of the vertical support;
A camera unit guide formed on the horizontal support;
A camera mount disposed on the camera unit guide;
A plurality of camera units mounted on the camera mounting unit to photograph and align the alignment marks formed on the mask side and the alignment target marks formed on the exposure target, respectively; And
And a camera moving unit for moving the camera mounting unit to the left and right along the camera unit guide.
The method of claim 1, wherein the vertical support
Wherein the illumination optical system house formed above the camera unit and the mask holder formed below the camera unit are spaced apart from each other so that the camera unit moves away from the illumination optical system house and the mask holder.
The illumination system according to claim 2, wherein the illumination optical system house
Wherein the camera unit is fixedly disposed on an upper portion of the camera unit.
The apparatus of claim 1, wherein the camera moving unit
The camera unit mounted on the camera mounting unit is moved along the camera unit guide so as to be positioned on one stage unit so that the camera unit is aligned with respect to the stage unit and then moved to the upper part of the other stage unit, So as to perform alignment with respect to the exposure apparatus.
The camera support frame according to claim 1,
Wherein the camera unit mounted on the camera mount is provided on an upper portion of a support of the exposure apparatus such that the camera unit is positioned on a straight line with the mask on the mask holder.
The camera according to claim 1, wherein the camera mount
Wherein the camera unit has a rectangular shape including an empty space inside the horizontal support member so that the camera unit can be protruded and mounted in a direction of an empty space inside the horizontal support member so that the lower portion can be photographed.
The method according to claim 1,
Further comprising a vertical adjustment unit formed on a side surface of the camera mounting unit to adjust a height of the camera unit by moving the camera unit up and down.
The method according to claim 1,
Further comprising an interval adjusting unit formed on both side surfaces of the upper portion of the camera mounting unit to adjust the interval between the camera units by moving the camera unit left or right or back and forth.
An exposure apparatus for performing alignment between a mask held by a mask holder and an exposure subject moved by a stage before performing exposure by an illumination optical system of an illumination optical system house,
A camera support frame having a vertical support vertically disposed on the upper surface of the support of the exposure apparatus and a horizontal support disposed on the upper portion of the vertical support;
A camera unit guide formed on the horizontal support;
A camera mount disposed on the camera unit guide;
A camera unit mounted on the camera mounting unit to photograph and align the alignment mark formed on the mask side and the alignment mark formed on the exposure target, respectively;
A camera moving unit for moving the camera mount unit left and right along the camera unit guide;
A vertical adjustment unit formed on a side surface of the camera mounting unit to adjust the height of the camera unit by moving the camera unit up and down; And
And an interval adjusting unit formed on both side surfaces of the upper portion of the camera mounting unit to adjust the interval between the camera units by moving the camera unit in the left or right direction or back and forth.
10. The apparatus according to claim 9, wherein the camera unit
Wherein the illumination optical system is disposed between the illumination optical system house and the mask holder and is spaced apart from the illumination optical system house and the mask holder and is moved left and right between the illumination optical system house and the mask holder.
10. The apparatus according to claim 9, wherein the camera moving unit
The camera unit mounted on the camera mounting unit is moved along the camera unit guide so as to be positioned on one stage unit so that the camera unit is aligned with respect to the stage unit and then moved to the upper part of the other stage unit, So as to perform alignment with respect to the exposure apparatus.
An exposure apparatus for performing alignment between a mask held by a mask holder and an exposure subject moved by a stage before performing exposure by an illumination optical system of an illumination optical system house,
A camera support frame having a vertical support vertically disposed on the upper surface of the support of the exposure apparatus and a horizontal support disposed on the upper portion of the vertical support;
A camera unit guide formed on the horizontal support;
A camera mount disposed on the camera unit guide;
And a control unit for controlling the stage unit to perform a data process on the recognized position to recognize the position of the alignment mark formed on the exposure target object by recognizing the reference position of the alignment mark formed on the mask side, A camera unit for performing alignment between the object and the object to be exposed; And
And a camera moving unit for moving the camera mounting unit to the left and right along the camera unit guide.
13. The apparatus of claim 12, wherein the vertical support
Wherein the illumination optical system house and the mask holder are spaced apart from each other so that the camera unit is moved between the illumination optical system house and the mask holder so as to be horizontally moved.
13. The apparatus according to claim 12, wherein the camera moving unit
The camera unit mounted on the camera mounting unit is moved along the camera unit guide so as to be positioned on one stage unit so that the camera unit is aligned with respect to the stage unit and then moved to the upper part of the other stage unit, So as to perform alignment with respect to the exposure apparatus.
13. The method of claim 12,
Further comprising a vertical adjustment unit formed on a side surface of the camera mounting unit to adjust a height of the camera unit by moving the camera unit up and down.
13. The method of claim 12,
Further comprising an interval adjusting unit formed on both side surfaces of the upper portion of the camera mounting unit to adjust the interval between the camera units by moving the camera unit left or right or back and forth.

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