KR101380470B1 - Light irradiation apparatus - Google Patents

Abstract

It is providing the light irradiation apparatus which can perform the light irradiation process with high in-plane uniformity of the illuminance in the light irradiation surface of a to-be-processed object.
The light irradiation apparatus includes a long lamp having a rectangular cross-sectional shape perpendicular to the longitudinal direction in which both ends in the longitudinal direction are held by the case, and both ends in the longitudinal direction in the state where the lamp is inserted therein. And a light source element constituted by a long cylindrical coat tube having a light transmitting property therein, which is held by and provided with a cooling wind flow path therein, wherein the lamp is provided in the longitudinal direction of the coat tube. A supporter for directly supporting the coat pipe at a local position is provided, and the supporter is made of an insulating material, which is in contact with each of the corners along the four corners of the lamp to hold the lamp in between. And a support tube provided with an elastic member in contact with the inner surface of the coat tube. The contact portion is formed.

Description

[0001] LIGHT IRRADIATION APPARATUS [0002]

The present invention relates to a light irradiation apparatus.

As shown in Fig. 8, the liquid crystal panel 70 has a structure in which liquid crystal is enclosed between two glass plates. For example, many active elements (for example, thin film transistors: TFTs) are formed on one surface. 72 and a first glass plate 71 having a liquid crystal driving electrode (transparent electrode: ITO) 73 formed thereon and an alignment film 74 formed thereon, a color filter 76 and a transparent electrode on one surface thereof. The second glass plate 75 on which the 77 and the alignment layer 78 are formed is disposed so that one surface thereof faces each other through the spacer member 79, and the liquid crystal between the first glass plate 71 and the second glass plate 75. The layer 80 is formed and comprised.

In the manufacturing process of such a liquid crystal panel 70, the reaction process of a liquid crystal panel material (pretilt angle) by irradiating an ultraviolet-ray with respect to the liquid crystal panel material containing the liquid crystal containing the photoreactive substance (monomer) which superposes | polymerizes in response to an ultraviolet-ray (pretilt angle) The technique of performing expression processing and PSVA is known (refer patent document 1). In this technique, by irradiating an ultraviolet-ray to a liquid crystal panel material, applying a voltage, a photoreactive substance can be polymerized in the state which orientated the liquid crystal to a specific direction, and it can give a so-called pretilt angle to a liquid crystal by this. It is.

In the reaction treatment (PSVA) of the liquid crystal panel material using such ultraviolet rays, it is necessary to irradiate the ultraviolet rays with high irradiance to the photoreactive substance in the liquid crystal, while the photoreactive substance in the liquid crystal is exposed to a high temperature. Nothing is required.

The reaction rate of the photoreactive substance is high in temperature dependence, and if the temperature during light irradiation is high, the polymerization proceeds too much and the growth of the polymer particles becomes too large. As a result, a uniform pretilt angle is not formed, resulting in poor contrast or light leakage.

Moreover, when temperature nonuniformity arises in the light irradiation surface in a liquid crystal panel material, a difference (deviation) will arise in reaction of a photoreactive substance, and a deviation will arise in the inclination (pretilt angle) of a liquid crystal, and this liquid crystal The deviation of the slope of the product appears as a deviation of the shades in the product.

As mentioned above, in the manufacturing process of a liquid crystal panel, when performing reaction process of the liquid crystal panel material using an ultraviolet-ray, (A) the ultraviolet-ray of wavelength 300-400 nm is irradiated to a liquid crystal panel material, (B) light irradiation of a liquid crystal panel material Although high in-plane uniformity of ultraviolet illuminance in the plane and (c) low temperature rise of the liquid crystal panel material and high in-plane uniformity of temperature in the light irradiation surface of the liquid crystal panel material are required, but adversely affect the photoreactive substance. It is a fact that the ultraviolet irradiation apparatus which can perform the reaction process of a desired liquid crystal panel material is not known.

Japanese Patent Application Laid-Open No. 2003-177408

In addition, in such an ultraviolet irradiation device, a long excimer lamp having a total length of 2500 mm or more is used while being cooled by, for example, cooling air at the time of its lighting.

As means for cooling the excimer lamp, for example, it is conceivable to install a transparent tube having a light transmissive state in which the excimer lamp has been inserted therein, and to distribute the cooling wind inside the coat tube, but the excimer lamp is long. When it is, it is necessary to flow a strong cooling wind, such as an air volume of 20-30 m / sec, for example, inside a coat pipe.

However, in this cooling method, the excimer lamp is shaken by turbulence in the outer tube, and the lamp breaks due to the vibration.

In addition, the excimer lamp is shaken to change the size and position of the region to which light is irradiated from the excimer lamp, resulting in a problem that the illuminance uniformity on the light irradiation surface of the object to be treated is impaired.

This invention is made | formed based on the above circumstances, It aims at providing the light irradiation apparatus which can perform the light irradiation process with high in-plane uniformity of the illuminance in the light irradiation surface of a to-be-processed object.

The light irradiation apparatus of this invention is a long lamp | ramp whose rectangular cross-sectional shape perpendicular | vertical to the longitudinal direction in which the both ends of the longitudinal direction were hold | maintained by the case, and the both ends of the longitudinal direction in the state in which the said lamp was inserted in the inside. And a light source element constituted by a long cylindrical coat tube having a light transmitting property therein, which is held by the case and forms a cooling wind flow path therein,

Inside the coat tube, a supporter for directly supporting the lamp against the coat tube at a local position in its longitudinal direction is provided.

The said supporter is provided with the supporter main body which consists of an insulating material which contact | connects each part along four corners of the said lamp, and hold | maintains the said lamp, and the said supporter main body has elasticity which contacts the inner surface of the said outer tube | pipe. It is characterized by the outer tube contact part provided with a member.

In the light irradiation apparatus of the present invention, the lamp includes an excimer lamp having a reflector layer having an opening extending in the longitudinal direction of the bulb, formed on the inner surface of the bulb,

It is preferable that the said supporter has the structure in which the space part which permeate | transmits the radiated light from the excimer lamp radiated | emitted through the said opening part was formed in the area | region facing the opening part of the said reflector layer.

In such a structure, the said supporter main body is comprised so that the two arm members of the whole hooked shape may be connected, respectively, and spaced apart so that each front-end | tip of the said arm member may be located outside the area | region which opposes the opening part of the said reflector layer. It can be provided in the installed state, and it can be set as the structure in which the said space part was formed.

According to the light irradiation apparatus of this invention, the supporter which directly supports a lamp | ramp with the outer tube | pipe which hold | maintained both ends in the case is a state in which the lamp | ramp interposed and hold | maintained the lamp | ramp in contact with each part along four corners of a lamp. The inner surface of the tube is pressed against by the elastic member constituting the outer tube contact portion and held in the outer tube so that the degree of the lamp shaking in the vertical direction by the cooling wind circulated inside the outer tube can be reduced. Therefore, the light irradiation process with high in-plane uniformity of illuminance in the light irradiation surface of a to-be-processed object can be performed, and it can avoid that a lamp is damaged by a vibration.

BRIEF DESCRIPTION OF THE DRAWINGS It is explanatory drawing which shows the outline of the internal structure in one structural example of the ultraviolet irradiation device which concerns on this invention.
FIG. 2 is an enlarged cross-sectional view of a part of the ultraviolet irradiation device shown in FIG. 1.
FIG. 3 is an explanatory diagram schematically showing an arrangement example of a light source element in the light source unit of the ultraviolet irradiation device shown in FIG. 1.
4 is a cross-sectional view showing the outline of the configuration of one example of an excimer lamp used in the ultraviolet irradiation device according to the present invention cut into a cross section perpendicular to the longitudinal direction of the lamp.
5 is a perspective view illustrating an outline of a configuration of an example of a supporter.
FIG. 6 is a plan view of the supporter shown in FIG. 5 as viewed from the side opposite to the light emission direction of the supported excimer lamp. FIG.
7 is a cross-sectional view showing a support structure for the outer tube of the excimer lamp.
8 is a cross-sectional view illustrating the outline of a structure of a liquid crystal panel.

Hereinafter, embodiments of the present invention will be described in detail.

1 is an explanatory view showing an outline of an internal structure in one structural example of an ultraviolet irradiation device according to the present invention, and FIG. 2 is an enlarged cross-sectional view showing a part of the ultraviolet irradiation device shown in FIG. 1.

This ultraviolet irradiation apparatus is largely distinguished, and is comprised by the light source part 10, the cooling part 40, the light guide part 50, and a power supply part (not shown).

The light source part 10 is equipped with the light source part housing member 11 which has the box shape in the whole which has 11 C of light irradiation openings which open downward.

Inside the light source portion housing member 11, a case 12 having a substantially H-shaped cross section is provided, and the light source portion is formed by a flat partition 12A extending in the horizontal direction constituting the case 12. The inner space of the housing member 11 is divided up and down.

The lower space part partitioned by the partition 12A becomes the light source unit arrangement space part 15 in which the light source unit 20 is arrange | positioned, The upper space part corresponds to the light source unit 20, for example, the transformer 35 The electric body arrangement space part 16 in which the electric body, such as) is arrange | positioned.

Moreover, one end side area in the light source part housing member 11 is partitioned by one end wall 13 extending in the vertical direction constituting the case 12 and one end wall 11A of the light source part housing member 11. The light source portion housing member has a common guiding space 18 for introducing cooling wind into each of the electric field arrangement space portion 16 and the light source unit arrangement space portion 15 formed. The common end-winding part formed in the other end side area | region in 11 by the other end wall 14 extended in the up-down direction which comprises the case 12, and the other end wall 11B of the light source part housing member 11. (排風 用) has a space 19.

One end wall 13 of the case 12 is provided with a guide air vent 13A for introducing cooling air into the electric field arrangement space portion 16, and the other end wall 14 is equipped with electric cooling air. Ventilation vents 14A for exhausting air from the layout space 16 are formed.

As shown in FIG. 3, the light source unit 20 has a long excimer lamp 25 and a state in which the excimer lamp 25 is inserted therein, which emits light having a light emission peak at a wavelength of 300 to 400 nm, respectively. A plurality of light source elements 21 constituted by, for example, a cylindrical long elongated coat tube 24 provided to extend along a furnace excimer lamp 25 is, for example, an axis center of each excimer lamp 25. They are located in the same plane and extend in parallel to each other, and are arranged in parallel at equal intervals.

In the excimer lamp 25 constituting each light source element 21, both ends in the longitudinal direction are flush with the one end wall 13 and the other end wall 14 of the case 12 via the lamp holder 22. It is held at the level, and the outer tube 24 has one end opening 24A positioned in the guiding space 18 and the other end opening 24B positioned in the blast space 19. In the state, both ends in the longitudinal direction are fixed to the one end wall 13 and the other end wall 14 of the case 12 at the same horizontal level.

The excimer lamp 25 constituting the light source unit 20 emits ultraviolet light of 300 nm to 400 nm, which is a wavelength suitable for polymerizing a photoreactive substance (monomer) included in, for example, a liquid crystal in a liquid crystal panel material. will be.

4 is a cross-sectional view showing the outline of the configuration of one example of an excimer lamp used in the ultraviolet irradiation device according to the present invention, cut into a cross section perpendicular to the longitudinal direction of the lamp.

This excimer lamp 25 is provided with the elongate bulb 26 whose cross-sectional shape in the cross section perpendicular | vertical to the longitudinal direction in which the discharge space S was formed inside was rectangular shape, The inside of this bulb 26 Xenon gas is enclosed with, for example, gas for discharge. Here, the bulb 26 consists of quartz glass, for example.

On the outer surfaces of the upper wall 26A and the lower wall 26B in the bulb 26, for example, one pair of mesh-shaped electrodes, i.e., one electrode 27A serving as a high voltage feed electrode and ground The other electrode 27B serving as an electrode is disposed to face each other so as to extend in the longitudinal direction.

On the inner surface of the bulb 26, a reflector layer 30 having an opening 30A extending in the longitudinal direction of the bulb 26 is formed, and the inner surface region and the reflector layer 30 of the reflector layer 30 are also formed. The glass powder layer 31 is formed in the inner surface area | region of the bulb 26 in which opening part 30A of this is located, and the phosphor layer 32 is formed on the inner surface of the glass powder layer 31. As shown in FIG. In this excimer lamp 25, the opening part 30A of the reflector layer 30 is formed in the inner surface area | region of the lower wall 26B of the bulb 26, and the light output part is formed by the area | region where the reflector layer is not formed. 38 is formed.

The reflector layer 30 is made of, for example, a mixture of silica and alumina.

Moreover, as glass which comprises the glass powder layer 31, for example, borosilicate glass (Si-BO type glass) and aluminosilicate glass (Si-Al-O type glass), barium silicate glass, or these Based on either composition, the glass etc. which added alkaline-earth oxide, alkali oxide, and metal oxide can be illustrated.

As the phosphor constituting the phosphor layer 32, for example, europium-activated strontium borate (Sr-BO: Eu (hereinafter referred to as "SBE"), a center wavelength of 368 nm) phosphor, cerium-activated aluminic acid Magnesium lanthanum (La-Mg-Al-O: Ce (hereinafter referred to as "LAM"), center wavelength 338 nm (broad) phosphor, gadolinium, praseodymium activated lanthanum phosphate (La-PO: Gd, Pr (hereinafter , "LAP: Pr, Gd".), Center wavelength 311 nm) fluorescent substance etc. can be illustrated.

The outer tube 24 is, for example, a cylindrical material made of a light-transmitting material that transmits light in a wavelength range of 300 to 400 nm, for example, quartz glass, and has a length substantially the same as that of the excimer lamp 25.

The cooling part 40 is provided with the box-shaped cooling part housing member 41 in the upper part of the light source part housing member 11, for example, In the inside of this cooling part housing member 41, For example, the cooling fan 42, such as an axial fan, and the heat exchanger 43 for heat dissipation, such as a water cooling radiator, are arrange | positioned upstream of the said cooling fan 42, for example.

For example, in each of the light source elements 21, the cooling fan 42 has a flow rate of cooling air flowing through the inside of the coat tube 24 of 10 to 30 m / sec, and an air blowing amount of 50 to 250 m ³ / min. It has a blowing ability which can supply cooling wind of.

The internal space of the cooling unit housing member 41 is a space for the guiding portion 18 of the light source unit 10 and the air blowing through the ventilation ducts 45 provided on both sides of the cooling unit housing member 41. It communicates with the space 19, whereby the cooling wind supplied from the cooling fan 42 is introduced into the electric field arrangement space 16 through the guiding space 18 in the light source unit 10 and In addition, it is introduced into the outer tube 24 in each light source element 21 and is introduced into the heat exchanger 43 for heat dissipation in the cooling unit 40 through the air space 19. The cooling mechanism which forms a circulation cooling wind flow path is comprised.

The light guide unit 50 is a spacer, so as to secure a sufficient distance between the light source unit 20 and the object to be processed W while ensuring a sufficient amount of ultraviolet irradiation to the object to be processed W. Also has a function, has a size corresponding to the opening 11C for light irradiation in the light source housing member 11, the inner circumferential surface is formed by a reflecting surface, for example, rectangular frame light guide partitioning the processing space The member 51 is attached so that it may extend downward from the lower surface of the light source part 10, and is comprised.

Reference numeral 58 in FIG. 1 denotes a stage where the mounting surface is horizontal, for example, the liquid crystal panel member, which is the object to be processed W, positioned below the light guide portion 50. It is a stage stand.

And in the light source element 21 which comprises the light source unit 20 of the said ultraviolet irradiation device, it is local in the longitudinal direction of the excimer lamp 25 in the inside of the outer tube 24, for example. In the position, for example, the center position, the supporter 60 which directly supports the excimer lamp 25 with respect to the outer tube 24 is provided. Here, the supporter 60 should just be arrange | positioned in the center part area | region separated from the both ends of the excimer lamp 25 in the longitudinal direction, for example 700 mm or more, and the number of supporters 60 is not limited to one, either. .

For example, as shown in Fig. 5 and Fig. 6, the supporter 60 includes two arms of the excimer lamp 25, in which two arm members 62 and 63 are connected by screws (not shown). The supporter main body 61 which is hold | maintained between the members 62 and 63 is provided.

One arm member 62 is provided with a base 62A extending opposite to the upper wall 26A of the bulb 26 in the supported excimer lamp 25 and one end of the base 62A. The inclination part 62B which extends and inclines downwards continuously, and the tip part 62C which is continuous to this inclination part 62B and extends downward inwardly are hook-shaped (hook shape), and inclination part 62B ) And two edges (for example, the left wall of the bulb 26 in FIG. 4, the upper wall 26A), and the two corners in the bulb 26 of the excimer lamp 25 on the inner surface of the tip portion 62C. A lamp contact portion 64 having an arcuate contact surface in contact with the corner portion 26C along the corner of the lower wall 26B is formed. Reference numeral 62D shown in FIG. 5 denotes a screw hole for connecting screws to which a screw (not shown) to connect the two arm members 62 and 63 is mounted.

The other arm member 63 is continuous with the base 63A extending opposite to the upper wall 26A of the bulb 26 in the supported excimer lamp 25 and one end of the base 63A. The inclined portion 63B which is inclined downwardly and extends, the tip portion 63C which is continuous to the inclined portion 63B and extends inward downward, and is continuously connected to the other end of the base 63A and is perpendicular to the base 63A. The whole having the connection part 63D extended upwards is a hook shape (hook shape), and is in the bulb 26 of the excimer lamp 25 in the inner surface of the inclination part 63B, and the inner surface of the tip part 63C. A lamp contact having an arcuate contact surface in contact with each corner 26C along two edges (for example, the right wall of the bulb 26 and the corners of the upper wall 26A and the lower wall 26B in FIG. 4) 64) is formed.

The reason why the lamp contact portion 64 is formed at the position in contact with the corner portion 26C of the excimer lamp 25 is that the corner portion 26C of the bulb 26 is relatively high in strength and narrow in width. This is because when a force is applied to the pair of opposing walls (for example, the left wall and the right wall of the bulb 26 in FIG. 4), a problem arises in that the excimer lamp 25 is damaged by stress concentration. .

In the supporter 60, the outer surfaces of the tip portions 62C and 63C of the one arm member 62 and the other arm member 63, and the connecting portion 63D of the other arm member 63. At three places on the upper surface, a coat tube contact portion 65 which elastically contacts the inner surface of the coat tube 24 is formed.

The outer tube contact portion 65 is preferably formed at three or more positions in the supporter main body 61, whereby the outer tube 24 is provided in all directions in the cross section perpendicular to the longitudinal direction. It can be a retained configuration.

For example, if the structure of the outer tube contact part 65 in the upper surface of the connection part 63D of the other arm member 63 is demonstrated concretely, the outer tube contact part 65 is the other arm member ( An elastic member, which is screwed on the upper surface of the connecting portion 63D of the connecting portion 63, for example, is formed of a substantially trapezoidal leaf spring 66 as viewed from the side made of metal, and a top plate portion of the leaf spring 66. At least one of the screw mounting through holes formed in each of the substrate portions 66B of the leaf spring 66 is formed by a buffer member 68 that is screwed and fixed to an outer surface of the 66A. 66C, whereby the leaf spring 66 is in a state (slack fit) that can slide in the longitudinal direction with respect to the supporter main body 61.

The same applies to the configuration of the outer tube contact portion 65 in the tip portion 62C of one arm member 62 and the tip portion 63C of the other arm member 63.

As a material which comprises the supporter main body 61 and the buffer member 68, the insulating material which is excellent in heat resistance, UV resistance, and electrical insulation is used, for example, As such an insulating material, For example, fluororesin materials, such as PTFE, are used. Can be illustrated.

As for the supporter 60, as shown in FIG. 7, the four lamp contact parts 64 in the inner surface of the supporter main body 61 are each four parts of the bulb 26 in the excimer lamp 25, respectively. In the state where the excimer lamp 25 was sandwiched and held so as to receive a part of the bulb 26 in contact with the 26C, each of the three coat tube contact portions 65 was plated on the inner surface of the coat tube 24. It is press-contacted by the spring elasticity of the spring 66, and is hold | maintained by the outer tube 24 by all directions in the cross section perpendicular | vertical to the longitudinal direction, for example.

That is, although the excimer lamp 25 is inserted and arrange | positioned in the coat tube 24 in the state in which the supporter 60 was attached, the coater tube contact part of the supporter 60 at the time of insertion of the excimer lamp 25 is carried out. The leaf spring 66 constituting the 65 is compressed by the inner surface of the coat tube 24 through the buffer member 68 in the axial center direction of the coat tube 24 while being lengthened by the action of the long hole 66C. It slides in the direction to elastically deform, and is pressed against the inner surface of the outer tube 24 by the restoring force of the leaf spring (66).

The supporter 60 is an excimer lamp radiated through the opening part 30A (light emitting part 38) to the area | region which opposes the opening part 30A of the reflector layer 30 in the excimer lamp 25 ( Lamp contact portion 64 formed on tip portion 62C of one arm member 62 in a cross section perpendicular to the longitudinal direction of excimer lamp 25 in a state where a space portion through which radiated light passes from 25 is formed. Edge of the abutment surface of the lamp contact portion 64 formed at the tip edge of the abutment surface of the abutment surface and the tip portion 63C of the other arm member 63, in addition to the region corresponding to the opening 30A of the reflector layer 30. It is provided in the excimer lamp 25 in the state which spaced so that it might be located, and the light path | path was formed.

The supporter 60 is an inner surface of the supporter main body 61, specifically, an inner surface of the bases 62A and 63A of the two arm members 62 and 63 and one electrode (high voltage feed electrode) 27A. It is provided in the excimer lamp 25 in the state in which the space | gap K was formed so that this contact might not be carried out. With such a configuration, it is possible to reliably avoid that one electrode 27A formed by, for example, screen printing or the like falls off due to an unexpected force when the supporter 60 is mounted.

An example of the configuration of the above-described ultraviolet irradiation device is that the total length of the excimer lamp 25 is 2800 mm, the vertical and horizontal dimensions are 43 mm x 15 mm, the lamp output is 2 kW, and the total length of the outer tube 24 is 2500 mm, the inner diameter. The 76 mm and the thickness are 2.5 mm, and the lengthwise dimension (the dimension in the vertical direction in FIG. 6) of the supporter 60 is 80 mm, and the maximum dimension in the width direction (the dimension in the left and right directions in FIG. 6) is 75 mm. to be.

The number of light source elements 21 constituting the light source unit 20 is, for example, 32, and the separation distance p between the light source elements 21 adjacent to each other is, for example, 87 mm.

The operation of the ultraviolet irradiation device will be described.

In this ultraviolet irradiation device, the excimer lamp 25 in the state where the flat target object W (for example, liquid crystal panel material) is carried in by the transfer robot (not shown) and placed on the stage 58. When the high frequency voltage is boosted and supplied from the power supply portion to the one electrode 27A in the () by the transformer 35 provided in the electric field arrangement space 16, it discharges through the dielectric material constituting the bulb 26. A dielectric barrier discharge occurs in the space S, and excimer molecules are formed by the dielectric barrier discharge, and the phosphor layer 32 is formed by light emitted from the excimer molecule (172 nm vacuum ultraviolet light in the case of xenon gas). Phosphors are excited and, for example, ultraviolet rays of 300 to 400 nm are emitted through the light emitting portion 38, that is, the bottom wall 26B of the bulb 26 is transmitted, and the opening of the other electrode 27B is opened. It passes through and exits.

On the other hand, a part of the cooling air supplied by the cooling fan 42 is driven into the electric field arrangement space 16 through the guiding space 18 in the light source unit 10, and all of the others are respectively provided. Introduced into the outer tube 24 in the light source element 21, whereby the electrical components such as the excimer lamp 25 and the outer tube 24 and the transformer 35 are cooled, and thereafter, the space portion for ventilating The cooling air is supplied to the heat exchanger 43 through 19 and is not exhausted to the outside of the apparatus, and the cooling air is supplied by the cooling fan 42 at a predetermined supply amount.

And according to the ultraviolet irradiation device of the said structure, basically, the several light source element 21 is parallel in the state in which the axis center of each excimer lamp 25 is located in the same horizontal plane, and is extended in parallel with each other. By arranging the light source unit 20, the ultraviolet light in the wavelength range of, for example, 300 to 400 nm can be irradiated with a uniform illuminance distribution to the object to be processed W. In addition, each light source element ( In 21), the outer tube 24 is installed in such a state that the excimer lamp 25 is inserted therein, whereby the excimer is caused by the cooling wind guiding function (positive wind action) by the outer tube 24. Since the bulb 26 of the lamp 25 can be directly cooled, the plurality of excimer lamps 25 are uniformly cooled for each lamp, so that the deviation of radiant heat with respect to the object W to be processed by the excimer lamp 25 itself. Can be reduced to It is possible to suppress the blowing heat ray from irradiating the object (W) to be treated, and also because the outer tube 24 itself is cooled by the cooling wind, it is possible to suppress radiant heat to the object (W) to be treated, Therefore, the temperature rise of the to-be-processed object W can be reduced, and high temperature uniformity in the surface of the to-be-processed object W can be obtained.

In addition, the supporter 60 which supports the excimer lamp 25 with respect to the outer tube 24 hold | maintained in the case 12 at each end of four places of the excimer lamp 25 in the center position in the longitudinal direction is carried out. In the state where the excimer lamp 25 was sandwiched and held in contact with 26C, the inner surface of the outer tube 24 was pressed against the inner tube contact portion 65 including the leaf spring 66 to press the outer tube 24. By having the structure maintained at), the excimer lamp 25 is cooled by the cooling wind even when the cooling air is circulated inside the coat tube 24 at a flow rate (flow rate) at which turbulence occurs in the coat tube 24. Since the degree of shaking in the vertical direction can be suppressed to be small, the light irradiation treatment with high in-plane uniformity of illuminance on the light irradiation surface of the target object W can be performed, and the excimer lamp 25 Can be prevented from being damaged by vibration.

Moreover, according to the ultraviolet irradiation device of the said structure, the following effects are acquired. That is, since the inner circumferential surface is provided with the light guide part 50 which consists of the space formed by the reflecting surface, between the light source unit 20 and the to-be-processed object W, while ensuring sufficient ultraviolet irradiation amount with respect to the to-be-processed object W, Since the separation distance of can be made large, the influence by the radiant heat of the light source unit 20 can be suppressed more reliably, the temperature rise of the to-be-processed object W can be reduced, and the to-be-processed object W is High temperature uniformity in surface can be obtained.

In addition, the excimer lamp 25 is used, and the phosphor layer 32 provided with ultraviolet rays (vacuum ultraviolet rays) in a predetermined wavelength band generated in the discharge space S of the excimer lamp 25 on the inner surface of the bulb 26. By having the structure of emitting 300-400 nm ultraviolet-rays by the action of), extra light components are not emitted to the target object W, so that the temperature rise of the target object W can be reliably reduced. have.

In addition, by being provided with the heat exchanger 43 for heat dissipation, it is possible to form a closed (closed) circulation cooling air flow path, even when the ultraviolet irradiation device is used in a clean room, for example, Since it is not necessary to receive the cooling wind from the outside of the apparatus and to exhaust the cooling wind to the outside of the apparatus, there is no need to connect a duct or the like, and the cooling mechanism can be compactly configured.

In addition, since it is an air-cooling type, problems such as water leakage which may occur when the water-cooled type is used do not occur.

As mentioned above, since the ultraviolet irradiation device which concerns on this invention can perform the light irradiation process with high in-plane uniformity of illuminance and the in-plane uniformity of temperature in the light irradiation surface of a to-be-processed object, For example, a liquid crystal panel It becomes suitable as an ultraviolet irradiation device used by reaction process (pretilt angle expression processing) of the liquid crystal panel material in the manufacturing process of the.

As mentioned above, although embodiment of this invention was described, this invention is not limited to said embodiment, A various change can be added.

For example, in the light irradiation apparatus of the present invention, the number and positions of the outer tube contact portions formed on the supporter are not limited to those of the above embodiments, and the elastic members constituting the outer tube contact portions are also those of the above embodiments. It is not limited.

In addition, the number and arrangement | positioning method of the light source element which comprises a light source unit are not limited to the thing of the said embodiment, According to the objective, it can change a design suitably.

10:
11: light source housing member
11A: Once wall
11B: other end wall
11C: light irradiation opening
12: case
12A: bulkhead
13: Once the wall
13A: Wind vent
14: other end wall
14A: Ventilation vent
15: light source unit arrangement space
16: electric field arrangement space part
18: space for the wind
19: space for the wind
20: light source unit
21: light source element
22: lamp holder
24: coat tube
24A: Once opening
24B: other end opening
25: excimer lamp
26 bulb
26A: upper wall
26B: Lower Wall
26C: each part
27A: electrode on one side
27B: electrode on the other side
30: reflector layer
30A: opening
31: glass powder layer
32: phosphor layer
35: trance
38: light exit unit
S: Discharge space
40: cooling part
41: cooling unit housing member
42: cooling fan
43: heat exchanger
45: ventilation duct
50: light guide part
51: light guide member
58: stage
59: stage mount
60: supporter
61: supporter body
62: one arm member
63: no arm on the other side
62A, 63A: Donation
62B, 63B: slope
62C, 63C: Tip
62D: Screw hole for mounting screw
63D: Connection
64: lamp contact
65: coat contact
66: leaf spring (elastic member)
66A: Top plate
66B: substrate portion
66C: Long Hole
68: buffer member
K: void
W: Object to be processed
70: liquid crystal panel
71: first glass plate
72: active element
73: liquid crystal drive electrode
74: alignment layer
75: second glass plate
76: color filter
77: transparent electrode
78: alignment film
79: spacer member
80 liquid crystal layer

Claims (3)

A long lamp having a rectangular cross-sectional shape perpendicular to the longitudinal direction, in which both ends in the longitudinal direction are held by the case, and both ends in the longitudinal direction are held by the case while the lamp is inserted therein. It is made with a light source element constituted by a long cylindrical coat tube having a light transmitting property to form a cooling wind flow path therein,
Inside the coat tube, a supporter for directly supporting the lamp against the coat tube at a local position in its longitudinal direction is provided.
The said supporter is provided with the supporter main body which consists of an insulating material which contacts and hold | maintains the said lamp | ramp between four corners of the said lamp | ramp, and the said supporter main body has an inner surface of the said outer tube | pipe. The outer tube contact part provided with the elastic member which contacts is formed, The light irradiation apparatus characterized by the above-mentioned. The method according to claim 1,
The lamp is composed of an excimer lamp having a reflector layer having an opening extending in the longitudinal direction of the bulb, the inner surface of the bulb being formed,
The supporter is a light irradiation apparatus, characterized in that a space portion through which the radiated light from the excimer lamp radiated through the opening is formed in a region facing the opening of the reflecting material layer. The method of claim 2,
Each of the supporter main bodies is formed by connecting two arm members each having a hook shape, and are installed in such a manner that each tip end of the arm member is spaced apart from an area facing the opening of the reflector layer. The said space part is formed, The light irradiation apparatus characterized by the above-mentioned.

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