KR101364623B1 - 게터 물질을 함유한 마이크로기계 소자를 제조하는 방법 및이러한 방법에 의해 제조된 소자 - Google Patents

게터 물질을 함유한 마이크로기계 소자를 제조하는 방법 및이러한 방법에 의해 제조된 소자 Download PDF

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KR101364623B1
KR101364623B1 KR1020087016396A KR20087016396A KR101364623B1 KR 101364623 B1 KR101364623 B1 KR 101364623B1 KR 1020087016396 A KR1020087016396 A KR 1020087016396A KR 20087016396 A KR20087016396 A KR 20087016396A KR 101364623 B1 KR101364623 B1 KR 101364623B1
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getter material
support
silicon
intermediate layer
supports
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KR20080081019A (ko
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에네아 리찌
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사에스 게터스 에스.페.아.
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00261—Processes for packaging MEMS devices
    • B81C1/00277—Processes for packaging MEMS devices for maintaining a controlled atmosphere inside of the cavity containing the MEMS
    • B81C1/00285—Processes for packaging MEMS devices for maintaining a controlled atmosphere inside of the cavity containing the MEMS using materials for controlling the level of pressure, contaminants or moisture inside of the package, e.g. getters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Micromachines (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Glass Compositions (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)
KR1020087016396A 2005-12-06 2006-11-28 게터 물질을 함유한 마이크로기계 소자를 제조하는 방법 및이러한 방법에 의해 제조된 소자 Active KR101364623B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
ITMI2005A002343 2005-12-06
IT002343A ITMI20052343A1 (it) 2005-12-06 2005-12-06 Processo per la produzione di dispositivi micromeccanici contenenti un materiale getter e dispositivi cosi'prodotti
PCT/IT2006/000824 WO2007066370A1 (en) 2005-12-06 2006-11-28 Process for manufacturing micromechanical devices containing a getter material and devices so manufactured

Publications (2)

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KR20080081019A KR20080081019A (ko) 2008-09-05
KR101364623B1 true KR101364623B1 (ko) 2014-02-19

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KR1020087016396A Active KR101364623B1 (ko) 2005-12-06 2006-11-28 게터 물질을 함유한 마이크로기계 소자를 제조하는 방법 및이러한 방법에 의해 제조된 소자

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US (1) US7833880B2 (enExample)
EP (1) EP1957395B1 (enExample)
JP (1) JP5015947B2 (enExample)
KR (1) KR101364623B1 (enExample)
CN (1) CN101291873B (enExample)
AT (1) ATE480495T1 (enExample)
AU (1) AU2006322862C1 (enExample)
CA (1) CA2623020C (enExample)
DE (1) DE602006016850D1 (enExample)
DK (1) DK1957395T3 (enExample)
ES (1) ES2348613T3 (enExample)
IL (1) IL191756A (enExample)
IT (1) ITMI20052343A1 (enExample)
NO (1) NO20081994L (enExample)
RU (1) RU2401245C2 (enExample)
TW (1) TWI325409B (enExample)
WO (1) WO2007066370A1 (enExample)

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FR2922202B1 (fr) * 2007-10-15 2009-11-20 Commissariat Energie Atomique Structure comportant une couche getter et une sous-couche d'ajustement et procede de fabrication.
EP2484629B1 (fr) * 2011-02-03 2013-06-26 Nivarox-FAR S.A. Pièce de micromécanique complexe ajourée
RU2474912C1 (ru) * 2011-08-23 2013-02-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Национальный исследовательский университет "МИЭТ" (МИЭТ) Способ получения газопоглощающей структуры
US9966319B1 (en) * 2011-10-27 2018-05-08 Global Circuit Innovations Incorporated Environmental hardening integrated circuit method and apparatus
US9935028B2 (en) 2013-03-05 2018-04-03 Global Circuit Innovations Incorporated Method and apparatus for printing integrated circuit bond connections
US9870968B2 (en) 2011-10-27 2018-01-16 Global Circuit Innovations Incorporated Repackaged integrated circuit and assembly method
RU2523718C2 (ru) * 2012-11-20 2014-07-20 Федеральное государственное автономное образовательное учреждение высшего профессионального образования "Национальный исследовательский университет "МИЭТ" (МИЭТ) Нанокомпозитная газопоглощающая структура и способ ее получения
RU2522362C1 (ru) * 2012-12-29 2014-07-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Московский государственный технический университет имени Н.Э. Баумана (МГТУ им. Н.Э. Баумана) Микроэлектромеханический взрыватель изохорический
RU2522323C1 (ru) * 2012-12-29 2014-07-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Московский государственный технический университет имени Н.Э. Баумана" (МГТУ им. Н.Э. Баумана) Микроэлектромеханический взрыватель
US10160638B2 (en) 2013-01-04 2018-12-25 Taiwan Semiconductor Manufacturing Company, Ltd. Method and apparatus for a semiconductor structure
US8847373B1 (en) * 2013-05-07 2014-09-30 Innovative Micro Technology Exothermic activation for high vacuum packaging
DE102015224499A1 (de) * 2015-12-08 2017-06-08 Robert Bosch Gmbh Spannungsreduzierung beim Laserwiederverschluss durch Temperaturerhöhung
DE102015226772A1 (de) * 2015-12-29 2017-06-29 Robert Bosch Gmbh Gettervorrichtung für ein mikromechanisches Bauelement
JP6932491B2 (ja) * 2016-10-31 2021-09-08 株式会社豊田中央研究所 Ｍｅｍｓ装置を製造する方法
CN106517082B (zh) * 2016-11-14 2017-11-03 北方电子研究院安徽有限公司 一种mems吸气剂图形化制备方法
CN109879240B (zh) * 2017-12-06 2021-11-09 有研工程技术研究院有限公司 一种厚膜吸气材料的制备方法
FR3083537B1 (fr) * 2018-07-06 2021-07-30 Ulis Boitier hermetique comportant un getter, composant integrant un tel boitier hermetique et procede de fabrication associe
US11508680B2 (en) 2020-11-13 2022-11-22 Global Circuit Innovations Inc. Solder ball application for singular die
CN112614779B (zh) * 2020-12-17 2024-12-03 苏州厚朴传感科技有限公司 一种吸气剂图形化的掩膜方式

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US4050914A (en) * 1976-07-26 1977-09-27 S.A.E.S. Getters S.P.A. Accelerator for charged particles
JP2002352700A (ja) * 2001-04-16 2002-12-06 Hewlett Packard Co <Hp> ゲッタを備える電子デバイス及びその動作方法
US6499354B1 (en) * 1998-05-04 2002-12-31 Integrated Sensing Systems (Issys), Inc. Methods for prevention, reduction, and elimination of outgassing and trapped gases in micromachined devices
KR20050092426A (ko) * 2003-01-17 2005-09-21 사에스 게터스 에스.페.아. 게터 재료 증착물 및 집적 히터를 갖는 마이크로메카니칼 또는 마이크로옵토일렉트로닉 소자, 및 이들의 제조를 위한 지지부

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US5503285A (en) * 1993-07-26 1996-04-02 Litton Systems, Inc. Method for forming an electrostatically force balanced silicon accelerometer
EP0734589B1 (en) 1993-12-13 1998-03-25 Honeywell Inc. Integrated silicon vacuum micropackage for infrared devices
US5594170A (en) 1994-06-15 1997-01-14 Alliedsignal Inc. Kip cancellation in a pendulous silicon accelerometer
US5656778A (en) 1995-04-24 1997-08-12 Kearfott Guidance And Navigation Corporation Micromachined acceleration and coriolis sensor
JPH09196682A (ja) 1996-01-19 1997-07-31 Matsushita Electric Ind Co Ltd 角速度センサと加速度センサ
US5821836A (en) 1997-05-23 1998-10-13 The Regents Of The University Of Michigan Miniaturized filter assembly
RU2137249C1 (ru) * 1998-03-31 1999-09-10 Санкт-Петербургский государственный электротехнический университет Способ изготовления микромеханических приборов
US6110808A (en) * 1998-12-04 2000-08-29 Trw Inc. Hydrogen getter for integrated microelectronic assembly
JP2000182511A (ja) * 1998-12-14 2000-06-30 Yamaha Corp 電界放射型素子の製造方法
US6058027A (en) 1999-02-16 2000-05-02 Maxim Integrated Products, Inc. Micromachined circuit elements driven by micromachined DC-to-DC converter on a common substrate
US6590850B2 (en) 2001-03-07 2003-07-08 Hewlett-Packard Development Company, L.P. Packaging for storage devices using electron emissions
TW533188B (en) 2001-07-20 2003-05-21 Getters Spa Support for microelectronic, microoptoelectronic or micromechanical devices
US6923625B2 (en) 2002-01-07 2005-08-02 Integrated Sensing Systems, Inc. Method of forming a reactive material and article formed thereby
US6621134B1 (en) 2002-02-07 2003-09-16 Shayne Zurn Vacuum sealed RF/microwave microresonator
US6635509B1 (en) 2002-04-12 2003-10-21 Dalsa Semiconductor Inc. Wafer-level MEMS packaging
US7235461B2 (en) * 2003-04-29 2007-06-26 S.O.I.Tec Silicon On Insulator Technologies Method for bonding semiconductor structures together
CN1594067A (zh) * 2003-09-08 2005-03-16 华中科技大学机械科学与工程学院 一种低温集成的圆片级微机电系统气密性封装工艺
ITMI20032209A1 (it) * 2003-11-14 2005-05-15 Getters Spa Processo per la produzione di dispositivi che richiedono per il loro funzionamento un materiale getter non evaporabile.
ITMI20050616A1 (it) 2005-04-12 2006-10-13 Getters Spa Processo per la formazione di depositi getter miniaturizzati e depositi getrter cosi'ottenuti

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4050914A (en) * 1976-07-26 1977-09-27 S.A.E.S. Getters S.P.A. Accelerator for charged particles
US6499354B1 (en) * 1998-05-04 2002-12-31 Integrated Sensing Systems (Issys), Inc. Methods for prevention, reduction, and elimination of outgassing and trapped gases in micromachined devices
JP2002352700A (ja) * 2001-04-16 2002-12-06 Hewlett Packard Co <Hp> ゲッタを備える電子デバイス及びその動作方法
KR20050092426A (ko) * 2003-01-17 2005-09-21 사에스 게터스 에스.페.아. 게터 재료 증착물 및 집적 히터를 갖는 마이크로메카니칼 또는 마이크로옵토일렉트로닉 소자, 및 이들의 제조를 위한 지지부

Also Published As

Publication number Publication date
US20080293178A1 (en) 2008-11-27
US7833880B2 (en) 2010-11-16
ATE480495T1 (de) 2010-09-15
CA2623020C (en) 2015-10-20
AU2006322862A1 (en) 2007-06-14
IL191756A0 (en) 2008-12-29
DE602006016850D1 (de) 2010-10-21
KR20080081019A (ko) 2008-09-05
RU2401245C2 (ru) 2010-10-10
TW200732245A (en) 2007-09-01
CN101291873A (zh) 2008-10-22
NO20081994L (no) 2008-06-05
WO2007066370A1 (en) 2007-06-14
CN101291873B (zh) 2011-06-15
AU2006322862C1 (en) 2011-12-01
CA2623020A1 (en) 2007-06-14
EP1957395B1 (en) 2010-09-08
TWI325409B (en) 2010-06-01
ES2348613T3 (es) 2010-12-09
DK1957395T3 (da) 2011-01-03
JP5015947B2 (ja) 2012-09-05
AU2006322862B2 (en) 2011-04-28
RU2008127306A (ru) 2010-01-20
IL191756A (en) 2012-08-30
EP1957395A1 (en) 2008-08-20
JP2009518191A (ja) 2009-05-07
ITMI20052343A1 (it) 2007-06-07

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