KR101361545B1 - Door opening and closing device that opens and closes port door through link bar - Google Patents

Door opening and closing device that opens and closes port door through link bar Download PDF

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Publication number
KR101361545B1
KR101361545B1 KR1020130032627A KR20130032627A KR101361545B1 KR 101361545 B1 KR101361545 B1 KR 101361545B1 KR 1020130032627 A KR1020130032627 A KR 1020130032627A KR 20130032627 A KR20130032627 A KR 20130032627A KR 101361545 B1 KR101361545 B1 KR 101361545B1
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KR
South Korea
Prior art keywords
door
case
coupled
cam
link bar
Prior art date
Application number
KR1020130032627A
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Korean (ko)
Inventor
조수연
Original Assignee
주식회사 싸이맥스
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Priority to KR1020130032627A priority Critical patent/KR101361545B1/en
Application granted granted Critical
Publication of KR101361545B1 publication Critical patent/KR101361545B1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67775—Docking arrangements

Abstract

Disclosed is a door opening and closing device which is attached to a port door driven up and down to transfer a wafer by closing and opening a containing port for containing and transferring the wafer. The door opening and closing device for opening and closing a port door through a link bar comprises a first case; a link bar including an upper end in which a first cam follow is formed, an middle end which is hinge coupled to the inside of the first case and a lower end in which a second cam follow is formed; a first cam which is formed to allow the first cam follow to be moved up and down and to be rotated; a door connection part which is coupled to the first cam while being coupled to a port door; a second cam which is formed to allow the second cam follow to be moved up and down and to be rotated; a cylinder part which is coupled to the second cam to move the door connection part through a cylinder moved forward and backward; a forward and backward moving part including a first guide part which is formed to protrude toward the outside and is fixed in both sides of the first case and a second guide part which is sliding coupled to the first guide part while being coupled to the door connection part; and an upward and downward moving part for fixing the first case so that the first case can be moved up and down. Thereby, the present invention is able to provide the door opening and closing device for opening and closing a port door through a link bar, capable of opening and closing the port door connected to the upper side of the link bar inclined at a certain angle based on the two ends in the cylinder connected to the lower side of the link bar.

Description

Door opening and closing device that opens and closes the port door through a link bar {.}

The present invention relates to a door opening and closing device that opens and closes the port door through a link bar, and more particularly, the port door connected to the upper side of the link bar inclined at an angle with respect to the second stage is opened and closed in a cylinder connected to the lower side of the link bar. The door opening and closing device for opening and closing the port door through the link bar.

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus installed in a production / inspection apparatus for a semiconductor wafer, for opening and closing a door of a cassette loaded in a port.

In general, a production / inspection apparatus for a semiconductor wafer includes a storage port in which a cassette containing a plurality of semiconductor wafers is loaded, as shown in FIG.

When the cassette is loaded in the storage port, the port door of the cassette must be opened to perform a predetermined process on the semiconductor wafer in the cassette.

Accordingly, a predetermined opening is formed in the storage port to face the port door of the cassette, and a door opening / closing device of the semiconductor wafer cassette is installed at the rear thereof to move and open and move the door of the cassette through the opening. .

The door opening and closing apparatus of the conventional semiconductor wafer cassette was moved downward after the port door was rotated backward by a predetermined angle (about 15 °) to open the opening of the storage port.

On the other hand, when closing the storage port, the port door is moved upward in the inclined state, and then rotated forward to seal the opening of the storage port.

However, in the door opening and closing apparatus of the conventional semiconductor wafer cassette as described above, since the port door must be rotated by a predetermined angle when the port door is opened and closed, foreign matter enters the cassette by the airflow generated during the rotation and enters the semiconductor wafer. There was a problem of causing fatal damage.

In addition, since the port door is rotated by a predetermined angle when opening and closing the port door, the port door is inclined at a predetermined angle with respect to the opening of the storage port by the rotation, making it difficult to open and close the door and occupy a lot of work space. There was a problem.

An object of the present invention devised to solve the problems as described above, the port through the link bar is opened and closed in the cylinder connected to the lower side of the link bar is connected to the upper side of the link bar inclined at a predetermined angle relative to the second stage To provide a door opening and closing device that the door is opened and closed.

In addition, another object of the present invention is to provide a door opening and closing device in which the port door is opened and closed through a link bar that opens and closes the port door for convenient wafer transfer, and moves the opened and closed port door up and down to minimize the work space. .

In addition, another object of the present invention is to provide a door opening and closing device in which the port door is opened and closed through a link bar formed on the outside of the storage port and easily repaired by minimizing the failure of the opening and closing device by simplifying the structure. .

According to a feature of the present invention for achieving the object as described above, the present invention, the door opening and closing the door is attached to the port door is driven up and down so that the wafer is transported by sealing and opening the receiving port is received and transported An apparatus comprising: a link bar comprising a first case, an upper end having a first cam follower formed therein and a lower end hinged to the inside of the first case, and a lower end having a second cam following formed therein; A first cam formed to be rotatable, a door connecting portion to be coupled to the first cam and coupled to a port door, a second cam follower to be shangdong and rotatable, a second cam to be coupled to the second cam and moving forward and backward A cylinder part for moving the door connection part through a cylinder, protruding outwardly, the first guide part and the first guide part fixed to both sides of the first case; Sliding coupled, jeonhuyi including a second guide portion that is coupled to the door coupling Eastern; And a shanghai east part for fixing the first case and moving the first case up and down.

In addition, the Shanghai East part, the second case; A first case fixing part coupled to one side of the first case; A second case fixing part coupled to the other side of the first case; A moving part formed in the second case, coupled to the first case fixing part and the first case fixing part, and configured to move the second case fixing part up and down; And a shock absorber formed in the second case, the second case fixing part coupled to be movable in Shanghai, and balancing the first case so that the first case is not shaken at the same time. .

In addition, the link bar is characterized in that the upper end is inclined at a predetermined angle toward the port door on the basis of the interruption.

The first guide part may include a first fixing member fixed to the door connecting part and a first moving member slidingly coupled to the first fixing member, and the second guide part may include the second guide part. A second fixing member fixed to the part; And a second moving member slidingly coupled to the second fixing member and slidingly coupled to the first moving member.

The first cam follower may be formed to protrude from both sides of the link bar, and the first cam may be formed at both sides to which the first cam follower is coupled. It characterized in that it comprises a; first cam coupling hole is made in the form of a long hole so as to enable copper.

The second cam follower may be formed to protrude from both sides of the link bar, and the second cam may be formed at both sides to which the second cam follower is coupled. It characterized in that it comprises a; second cam coupling hole is made in the form of a long hole so as to enable the copper.

According to the present invention as described above, the port door connected to the upper side of the link bar inclined at a predetermined angle relative to the second stage provides a door opening and closing device that the port door is opened and closed through the link bar is opened and closed in the cylinder connected to the lower side of the link bar. can do.

In addition, according to the present invention, it is possible to provide a door opening and closing device in which the port door is opened and closed through a link bar that opens and closes the port door for convenient wafer transfer, and moves the opened and closed port door up and down to minimize the work space.

In addition, according to the present invention, it is possible to provide a door opening and closing device for simplifying the structure to minimize the failure of the opening and closing device, the port door is opened and closed through the link bar is installed on the outside of the storage port for easy repair.

1 is an exploded perspective view showing a mapping apparatus according to an embodiment of the present invention;
2 is a perspective view showing a state in which a mapping apparatus according to an embodiment of the present invention is closed;
3 is a perspective view showing a state in which a mapping apparatus according to an embodiment of the present invention is open;
4 is a bottom view showing a state in which the mapping apparatus according to the embodiment of the present invention is closed;
5 is a bottom view showing a state in which the mapping apparatus according to the embodiment of the present invention is open;
6 to 7 are perspective views showing a door opening / closing apparatus according to an embodiment of the present invention.
8 is an exploded perspective view showing a door opening / closing apparatus according to an embodiment of the present invention.
Fig. 9 is a perspective view showing the front and rear moving parts of the door opening / closing device according to the embodiment of the present invention.
FIG. 10 is a perspective view of the front and rear moving parts of the door opening and closing device according to the embodiment of the present invention.
Fig. 11 is a perspective view showing the front and rear moving parts of the door opening and closing device according to the embodiment of the present invention.
12 is an exploded perspective view showing the front and rear moving parts of the door opening and closing device according to the embodiment of the present invention.
13 is a perspective view showing the upper and lower portions of the door opening and closing apparatus according to the embodiment of the present invention.
14 is an exploded perspective view showing the upper and lower portions of the door opening and closing apparatus according to the embodiment of the present invention.
15 is a side view showing an opening and closing operation of the door opening / closing apparatus according to the embodiment of the present invention
16 is a rear perspective view illustrating a door opening / closing apparatus according to an embodiment of the present invention.
17 is a rear perspective view showing the door opening and closing part of the door opening / closing device and the operation of the guide member according to the embodiment of the present invention.
18 is a flowchart showing a mapping apparatus and a method of providing a door opening / closing apparatus according to an embodiment of the present invention
19A to 19B are a side view and a transmission plane view showing a preparation state according to an embodiment of the present invention.
20A and 20B are a side view and a transmission plane view of a port door according to an embodiment of the present invention,
FIGS. 21A and 21B are a side view and a transmission plane view showing a state in which a port door reaches a mapping start position according to an embodiment of the present invention;
FIGS. 22A and 22B are a side view showing a state in which the mapping bar is opened according to an embodiment of the present invention,
23A and 23B are a side view and a transmission plane view showing a state in which the port door reaches the mapping end position according to the embodiment of the present invention;
24A and 24B are a side view and a transmission plane view showing a state where the mapping bar is closed according to the embodiment of the present invention
25A and 25B are a side view and a transmission plan view showing a state in which mapping according to an embodiment of the present invention is completed.

Advantages and features of the present invention and methods for achieving them will be apparent with reference to the embodiments described below in detail with the accompanying drawings. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. To fully disclose the scope of the invention to those skilled in the art, and the invention is only defined by the scope of the claims. Like reference numerals refer to like elements throughout.

Hereinafter, the present invention will be described with reference to the drawings for describing a door opening and closing device in which a port door is opened and closed through a link bar according to embodiments of the present invention.

2 is a perspective view illustrating a state in which a mapping apparatus according to an embodiment of the present invention is closed. FIG. 3 is a schematic diagram of a mapping apparatus according to an embodiment of the present invention. FIG. 4 is a bottom view showing a state where the mapping apparatus according to the embodiment of the present invention is closed, FIG. 5 is a view showing the state where the mapping apparatus according to the embodiment of the present invention is opened It is the bottom surface.

1 to 5, the door opening and closing device 200 that opens and closes the port door through the link bar of the present invention includes a mapping sensor 110, a mapping bar 120, a first cylinder 140, and a coupling part 150. It includes.

Here, the mapping sensor 110 includes a transmitter 112 and a receiver 114.

The mapping sensor 110 emits a signal from the transmitter 112. The receiver 114 senses the signal and detects the presence or absence of the wafer according to whether the receiver 114 senses the signal.

The mapping bar 120 is formed such that the transmitter 112 and the receiver 114 of the mapping sensor 110 are opposed to each other.

At least one of the transfer members 130 is rotatably installed at one side of the mapping bar 120.

In addition, it is preferable that two conveying members 130 are formed, and the other side of each conveying member 130 is formed to be rotatable through the coupling portion 150, and the other side of the first conveying member 130a It is preferable that the rotation wheel 132 is formed and the sensor wheel 134 is formed on the other side of the second transfer member 130b.

And, the first cylinder 140, one side is connected to the rotation wheel 132 fixed to the transfer member 130, the other side is rotatably coupled to the coupling portion 150, the first cylinder 140 Rotating the rotation wheel 132 through the forward retreat of) to transfer the mapping bar 120.

Accordingly, the first cylinder 140 is rotatably fixed to the engaging part 150 and rotates the turning wheel 132 at the time of advancing and retreating to rotate the conveying member 130 and, according to the rotation of the conveying member 130, Thereby transporting the bar 120.

The first cylinder 140 moves forward when the port door 300 is moved to the mapping start position and the first cylinder 140 is retracted when the port door 300 is moved to the mapping end position.

As the first cylinder 140 advances, the mapping sensor 110 formed on the mapping bar 120 starts to detect the presence or absence of the wafer and terminates the detection of the presence or absence of the wafer in accordance with the retreat of the first cylinder 140 .

The engaging portion 150 includes the turning radius limiting members 160a and 160b and the rotation detecting sensor.

The coupling unit 150 is rotatably fixed to the transfer member 130 and the first cylinder 140 and is coupled to the port door 300.

The turning radius limiting members 160a and 160b included in the engaging portion 150 limit the advance and retreat of the first cylinder 140 and limit the turning radius of the turning wheel 132. [

The turning radius limiting members 160a and 160b restrict the turning radius of the turning wheel 132 that is rotated when the first cylinder 140 is moved forward and the turning wheel 132 that rotates when the first cylinder 140 is retracted It is advisable that two are installed so as to limit the turning radius.

Further, the rotation detection sensor senses the advance and retreat of the first cylinder (140).

Here, the rotation detection sensor includes a sensor wheel 134, a first sensor 136, and a second sensor 138.

Sensor wheel 134 is coupled to the transfer member 130, it is preferably located on one surface or the other surface of the coupling surface.

The sensor wheel 134 contacts the first sensor 136 when the first cylinder 140 moves forward, and contacts the second sensor 138 when the first cylinder 140 retreats. Characterized in that.

Therefore, the sensor wheel 134 is formed in a fan shape and rotated by a predetermined angle so that when the mapping bar 120 reaches the position when the first cylinder 140 moves forward and backward, the first sensor 136 or the first It is desirable to contact the two sensors 138.

The first sensor 136 is formed in the coupling part 150 to be in contact with the sensor wheel 134 when the first cylinder 140 is advanced.

The second sensor 138 is formed in the coupling part 150 to contact the sensor wheel 134 when the first cylinder 140 is retracted.

6 is a perspective view showing a door opening / closing device according to an embodiment of the present invention, FIG. 8 is an exploded perspective view showing a door opening / closing device according to an embodiment of the present invention, FIG. 10 is a perspective view showing the front and rear moving parts of the door opening and closing device according to the embodiment of the present invention, and FIG. 11 is a front view and a rear view showing the front and rear moving parts of the door opening and closing device according to the embodiment of the present invention. 12 is an exploded perspective view showing a front and rear moving parts of a door opening / closing device according to an embodiment of the present invention, FIG. 13 is a perspective view showing the upper and lower moving parts of the door opening and closing device according to the embodiment of the present invention, 15 is an exploded perspective view of a door opening / closing device according to an embodiment of the present invention. Fig. 15 is a side view showing an opening and closing operation of the door opening / closing device according to the embodiment of the present invention, A perspective view showing the rear door opening and closing device according to an embodiment of the present invention, Figure 17 is a rear perspective view of the door opening and closing operation of the guide member of the door opening and closing device according to an embodiment of the invention.

6 to 17, the door opening and closing device 200 in which the port door is opened and closed through the link bar of the present invention includes a front and rear moving part 210 and a shanghai east part 260.

When the cylinder included in the cylinder part 250 advances, the port door 300 coupled to the door connecting part 235 is opened. In the cylinder part 250, The port door 300 coupled to the door connecting portion 235 is closed.

The first guide portion 214 is formed so as to protrude outward and is fixed to both sides of the first case 212.

The first guide unit 214 includes a first fixing member 215 fixed to the first case 212 and a first moving member 216 slidingly coupled to the first fixing member 215 .

The second guide portion 236 is coupled to the first guide portion 214 so as to be parallel to the first guide portion 214.

The second guide portion 236 includes a second fixed member 237 fixed to the second guide portion 236 and a second fixed member 237 slidingly coupled to the first movable member 216, And a second shifting member 238 slidingly engaged.

That is, the first fixing member 215 and the first moving member 216 of the first guide portion 214 and the second fixing member 237 and the second moving member 238 of the second guide portion 236 The door connecting portion 235 is moved by the movement of the first moving member 216 coupled to the first fixing member 215 such that the first moving member 216 can move parallel to the first fixing member 215, 2 moving member 238 and the second fixing member 237 coupled to the second moving member 238 so as to be movable in parallel.

Therefore, the movement distance of the door connecting portion 235 increases due to the engagement of the first guide portion 214 and the second guide portion 236. [

The link bar 220 includes a lower end formed with a stop 224 and a second cam follower 226 which are hinged to the inside of the first case 212 and the upper end where the first cam follower 222 is formed.

The upper end of the link bar 220 is inclined at a predetermined angle in the direction of the port door 300 with respect to the stop 224.

The first cam followers 222 protrude from both sides of the link bar 220.

The second cam followers 226 protrude from both sides of the link bar 220.

The first cam followers 222 and the second cam followers 226 are preferably protruded from both sides of the link bar 220. However, the first cam followers 222 and the second cam followers 226 can be rotated by the poles inserted into the holes formed in the link bars 220 It is also preferable that the roller is formed in a combined form.

The first cam 230 is formed such that the first cam follower 222 is vertically movable and rotatable.

Here, the first cam 230 includes a first cam coupling hole 232 formed on both sides to which the first cam follower 222 is coupled.

The first cam coupling hole 232 is formed in the shape of a slot so that the first cam follower 222 can move up and down.

The door connecting portion 235 engages with the first cam 230 and engages with the port door 300.

The door connecting portion 235 includes a second guide portion coupled to the first cam 230 and extending in both directions from the center to surround the first case 212 and formed inward.

The second cam 240 is formed such that the second cam follower 226 is vertically movable and rotatable.

The second cam 240 includes a second cam engagement hole 242 formed on both sides to which the second cam follower 226 is coupled.

The second cam coupling hole 242 is formed in the shape of a slot so that the second cam follower 226 can move up and down.

The cylinder portion 250 moves the door connecting portion 135 through the cylinder engaged with the second cam 240 and moving forward and backward.

Then, the upper and lower easiness portions 260 fix the first case 212 and move the first case 212 up and down.

The upper and lower easiness portions 260 include a second case 262, case fixing portions 265a and 265b, a moving portion 270a and a buffer portion 270b.

Here, the first case fixing portion 265a is coupled to one side of the first case 212. [

The second case fixing portion 265b is coupled to the other side of the first case 212. [

The moving part 270a is formed inside the second case 262 and is engaged with the first case fixing part 265a and the second case fixing part 265b and is moved up and down by external power It is preferable to move the first case fixing portion 265a up and down.

The cushioning portion 270b is formed in the second case 262 and is engaged with the second case fixing portion 265b so that the case 212 of the first case 212, Balance it

Here, the buffering portion 270b is formed inside the second case 262, and the vibration generated when the first case fixing portion 265a is moved up and down by the external power by the moving portion 270a It serves as a buffer to remove.

FIG. 18 is a flowchart showing a mapping device and a method of providing a door opening / closing device according to an embodiment of the present invention, FIGS. 19A to 19B are a side view and transmission plan view showing a ready state according to an embodiment of the present invention, FIG. 20B is a side view and a transmission plan view showing a state in which the port door is opened according to the embodiment of the present invention, FIGS. 21A to 21B are side views showing a state in which the port door has reached the mapping start position according to the embodiment of the present invention 22A and 22B are a side view and transmission plan view showing a state in which a mapping bar is opened according to an embodiment of the present invention, and Figs. 23A to 23B are views showing a state in which the port door according to the embodiment of the present invention is positioned at the mapping end position 24A and 24B are a side view and a transmission plane view showing a state in which the mapping bar is closed according to the embodiment of the present invention, , Figure 25a to Figure 25b is a side view and a plan view showing a transmission map is complete state according to an embodiment of the invention.

18 to 25B, when the port door 300 closes the storage port 310, the first cylinder 140 is fixed in the retracted state, so that when the mapping bar 120 is closed, (S110).

Then, the second cylinder 250 advances and the port door 300 fixed by the door opening / closing part 230 is opened at the storage port 310 (s120).

Then, the port door 300 is positioned at the mapping start position by the up-and-down moving part 262 so that the port door 300 can start mapping (s130).

Then, when the port door 300 is located at the mapping start position, the first cylinder 140 is advanced and fixed, and the mapping bar 120 is opened (s140).

Then, the port door 300 is moved downward by the vertically movable portion 262 to be positioned at the mapping end position (S150).

Then, when the port door 300 is positioned at the mapping end position, the first cylinder 140 is retracted and fixed, and the mapping bar 120 is closed (s160).

Then, the port door 300 reaches the lowest point and terminates the mapping of the storage port 310 (S170).

It will be understood by those skilled in the art that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive. The scope of the present invention is defined by the appended claims rather than the foregoing detailed description, and all changes or modifications derived from the meaning and scope of the claims and the equivalents thereof are included in the scope of the present invention Should be interpreted.

100; Mapping device 110: Mapping sensor
112: transmitter 114: receiver
120: mapping bar 130:
130a: first conveying member 130b: second conveying member
132: turning wheel 134; Sensor wheel
136: first sensor 138: second sensor
140: first cylinder 150:
160a, 160b: turning radius limiting member 200: door opening / closing device
210: front and rear east portion 212: first case
214: first guide member 215: first fixing member
216; First moving member 220: Link bar
222: First cam follower 224: Stop
226: second cam follower 230: first cam
232: first cam engaging hole 235: door connecting portion
236: second guide member 237: second fixing member
238: second moving member 240: second cam
242: second cam engagement hole 250: cylinder part
260: Shanghai East 262: Second case
265a: first case fixing portion 265b: second case fixing portion
270a: Moving part 270b: Buffer part
300: port door 310; Storage port

Claims (6)

In the door opening and closing device attached to the port door which is driven up and down so that the wafer is transported by sealing and opening the receiving port is received and transported,
A link bar including a first case, an upper end having a first cam follower formed therein and a lower end hinged to the inside of the first case, and a lower end having a second cam following formed therein, wherein the first cam follower is formed to be movable and rotatable. A first cam, a door connection portion coupled to the first cam and coupled to a port door, a second cam follower configured to be movable and rotatable in a shanghai, and a cylinder coupled to the second cam and moving forward and backward A cylinder part for moving the door connection part, is formed to protrude outward, the first guide part fixed to both sides of the first case and the first guide part slidingly coupled to the second guide part is coupled to the door connection part To move back and forth; And
The door opening and closing device for opening and closing the port door through a link bar including a; fixed to the first case, Shanghai East for moving the first case up and down.
The method of claim 1, wherein the Shanghai East part,
Second case; A first case fixing part coupled to one side of the first case; A second case fixing part coupled to the other side of the first case; A moving part formed in the second case, coupled to the first case fixing part and the second case fixing part, and configured to move the first case fixing part up and down; And a shock absorbing portion formed in the second case, the second case fixing part coupled to be movable in Shanghai, and balancing the first case so that the first case is not shaken at the same time as the first case. Door opening and closing device that opens and closes the port door through a link bar.
The method of claim 1, wherein the link bar,
The door opening and closing device of the door door opening and closing through the link bar, characterized in that the upper end is inclined at an angle in the direction of the port door on the basis of the interruption. The method of claim 1, wherein the first guide portion,
And a first moving member fixed to the door connecting part and a first moving member slidingly coupled to the first fixing member.
The second guide portion,
A second fixing member fixed to the second guide part; And a second moving member slidingly coupled to the second fixing member and slidingly coupled to the first moving member. The method of claim 1, wherein the first cam follower,
It is characterized in that the protruding on both sides of the link bar,
The first cam,
A first cam coupling hole formed at both sides of the first cam follower to which the first cam follower is coupled, wherein the first cam follower is formed in a long hole shape so as to enable the shanghai movement. Switchgear. The method of claim 1, wherein the second cam follower,
It is characterized in that the protruding on both sides of the link bar,
The second cam,
A second cam coupling hole formed at both sides of the second cam follower to which the second cam follower is coupled, and the second cam follower having a long hole shape to enable the shanghai movement; and a door to which the port door is opened and closed through a link bar. Switchgear.



KR1020130032627A 2013-03-27 2013-03-27 Door opening and closing device that opens and closes port door through link bar KR101361545B1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102200250B1 (en) 2020-05-29 2021-01-11 주식회사 싸이맥스 Load port module provided with a Foup loadlock door, and a method for opening and closing the Load port module door and the Foup loadlock door

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003303869A (en) * 2002-04-05 2003-10-24 Sankyo Seiki Mfg Co Ltd Lid member close/open device in substrate conveying apparatus
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JP2003303869A (en) * 2002-04-05 2003-10-24 Sankyo Seiki Mfg Co Ltd Lid member close/open device in substrate conveying apparatus
KR20070100601A (en) * 2006-04-08 2007-10-11 주식회사 싸이맥스 Attaching and detaching mechanism for a port door of foup opener
KR20090013097A (en) * 2007-07-31 2009-02-04 티디케이가부시기가이샤 Lid opening/closing system for closed container and substrate processing method using same
KR101226746B1 (en) * 2012-03-06 2013-01-25 유정호 Automatic opening and closing device for foup

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KR102200250B1 (en) 2020-05-29 2021-01-11 주식회사 싸이맥스 Load port module provided with a Foup loadlock door, and a method for opening and closing the Load port module door and the Foup loadlock door

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