KR101226746B1 - Automatic opening and closing device for foup - Google Patents

Automatic opening and closing device for foup Download PDF

Info

Publication number
KR101226746B1
KR101226746B1 KR1020120023029A KR20120023029A KR101226746B1 KR 101226746 B1 KR101226746 B1 KR 101226746B1 KR 1020120023029 A KR1020120023029 A KR 1020120023029A KR 20120023029 A KR20120023029 A KR 20120023029A KR 101226746 B1 KR101226746 B1 KR 101226746B1
Authority
KR
South Korea
Prior art keywords
door
opening
base plate
closing
arm
Prior art date
Application number
KR1020120023029A
Other languages
Korean (ko)
Inventor
유정호
Original Assignee
유정호
나노세미콘(주)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 유정호, 나노세미콘(주) filed Critical 유정호
Priority to KR1020120023029A priority Critical patent/KR101226746B1/en
Application granted granted Critical
Publication of KR101226746B1 publication Critical patent/KR101226746B1/en

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Power-Operated Mechanisms For Wings (AREA)

Abstract

PURPOSE: An automatic foup opening and closing device is provided to reduce time and manpower by automatically opening and closing a door without the operation of a worker. CONSTITUTION: A stage(100) fixes a foup. A base plate(200) is orthogonally connected to the stage. A door connecting member is movably arranged on the rear of the base plate. A door(300) is connected to one end of the door connecting member. A door opening and closing link module is connected to the other end of the door connecting member.

Description

Loosen automatic switchgear {AUTOMATIC OPENING AND CLOSING DEVICE FOR FOUP}

The present invention relates to an automatic pull opening and closing device, and more particularly, it is possible to easily open and close the substrate in the pull (foup) for mounting the substrate for manufacturing a semiconductor device without the manual labor of the operator, and to improve the automation and efficiency of the work For loosening automatic switchgear.

In order to manufacture a semiconductor device, a process in which a substrate goes through various manufacturing processes is required. Specifically, various manufacturing processes are performed on the substrate through an etching apparatus, a cleaning apparatus, a drying apparatus, and the like.

In general, the substrates are mounted in a lot in a lot and transferred, and the transferred substrates enter the process chamber in a single unit to perform the manufacturing processes.

Here, a pull opener is coupled to take out the substrate mounted on the pull, and the pull opener is generally composed of a door that opens and closes the cover of the pull. The cover of the pool and the opening of the pool are in close contact with each other, and the opening of the pool is closed by the cover of the pool by turning the knob on the cover of the pool.

By the way, when the operator opens and closes the cover of the pull through manual work, there is an inconvenience of opening and closing the cover of the pull by hand every time the substrate is taken out. As a result, the worker has trouble opening and closing the cover of the pull, and the work efficiency is reduced, and the push opening and closing part is easily damaged when the cover of the pull is pushed by hand and the handle is repeatedly closed.

In addition, Korean Laid-Open Patent Publication No. 2008-0072258 discloses a technique for opening and closing the cover of the pool through a stable operation by pushing the cover of the pool in the direction of the opening of the pool, and pushing the plate in the opposite direction.

However, the method of opening and closing the cover of the pull as described above, there is a limit that the operator pushes the cover of the pull by hand directly to open and close.

It is an object of the present invention to enable the operator to open and close the cover of the pull automatically through a power source without directly opening or closing the cover of the pull by hand, thereby improving the working efficiency of the worker and the It is an object of the present invention to provide an automatic release switch for preventing a breakdown of a cover.

The automatic pull opening and closing device of the present invention for achieving the above object is connected to the stage on the flat plate to fix the pull to mount the substrate, orthogonal to the stage at one end of the stage, the upper and lower substrates A base plate having an access portion formed therein, a door connection member disposed on a rear surface of the base plate and movable up and down, connected to one end side of the door connection member to open and close the access portion, and connected to the other end side of the door connection member; A door opening and closing link module, a lifting motor for providing power to the door opening and closing link module, a guide member for guiding a portion of the door opening and closing link module to move up and down, and a side surface of the door connecting member, It includes a locking projection to guide the movement, the door opening and closing link module is the win By receiving power from the motor moves the door connecting member, characterized in that for opening and closing the door.

In addition, the door opening and closing link module of the automatic automatic opening and closing device according to the present invention, the body member, the first arm member and the second arm member for connecting the body member and the door connecting member and the moving member connected to the body member And the first arm member and the second arm member are rotatably coupled to the body member about an axis formed on the body member, and the first arm member and the center around the axis formed on the door connection member. A second arm member is rotatably coupled to the door connection member.

In addition, according to the present invention, the automatic automatic opening and closing device, the opposite side of the door opening and closing link module of the moving member is in contact with the guide member, the moving member receives power by the lifting motor, by the guide member It is characterized by being guided to move up and down.

In addition, the automatic release device according to the invention, the guide groove is formed in the guide member, characterized in that the engaging projection formed on the side of the door connecting member is seated in the guide groove.

In addition, the door opening and closing link module of the automatic automatic opening and closing device according to the present invention, through the first connecting member and the body member and the second arm member of the axial shape disposed through the body member and the first arm member And a second connecting member having an axial shape, wherein the first arm member can rotate about the first connecting member, and the second arm member can rotate about the second connecting member. Characterized in that it can.

In addition, the base plate of the automatic automatic opening and closing device according to the present invention is formed with a mounting groove formed to accommodate the locking projections, characterized in that the base plate is formed with a locking projection protruding on the upper side of the mounting groove. .

In addition, the automatic unlocking device according to the present invention, the door connecting member is guided by the engaging projection is in contact with the base plate when the moving member is moved to the upper side by receiving the power from the lifting motor in the state that the entrance is open. The door connecting member moves to the seating groove side to receive the seating recess in the seating recess, and the door closes the entrance of the base plate. .

In addition, the pull automatic opening and closing device according to the present invention, the door connecting member is guided by the engaging projection is in contact with the base plate when the moving member is moved to the lower side by receiving the power from the lifting motor in the state in which the door is closed. And the door connecting member moves to the opposite side of the seating groove so that the hooking protrusion comes out of the seating groove while the catching protrusion is in contact with the seating groove, and the door opens the entrance part of the base plate. .

In addition, the automatic self-opening device according to the invention, the locking projections are formed on both side ends of the door connection member, characterized in that the seating groove and the locking jaw are formed on both sides of the base plate, respectively.

According to the present invention it is possible to open and close the door automatically without the operator's hand opening and closing the cover of the pull has an effect that can improve the work efficiency of the operator and take out the substrate more easily.

In addition, according to the present invention, by preventing the breakage of the cover of the pull due to the opening and closing of the pull using the physical force of the operator, there is an effect that can maximize the work efficiency and minimize unnecessary time and manpower waste.

1 is a rear perspective view of the automatic pull open and close device according to the present invention.
2 is a right side view of the pull automatic switchgear according to the present invention.
Figure 3 is a rear view of the automatic pull open and close device according to the invention.
4 is a view showing a driving step of the door opening and closing link module at the time of lifting and lowering of the automatic pull open and close device according to the present invention.
5 to 7 is a flow chart for explaining the operation principle of the automatic pull open and close device according to the present invention.

The present invention will now be described in detail with reference to the accompanying drawings.

1 to 3 are a rear perspective view, a right side view, and a rear view showing the configuration of a pull automatic switchgear according to the present invention. Hereinafter, the configuration of the present invention will be described with reference to FIGS. 1 to 3.

An automatic pull opening and closing device according to the present invention is connected to a stage 100 on a plate for fixing a substrate on which a substrate is mounted, one end of the stage 100 orthogonally to the stage 100, and the substrate is moved in and out of the upper portion. A base plate 200 having an entry and exit portion formed therein, a door connection member 310a and 310b disposed on a rear surface of the base plate 200 and movable up and down and connected to one end side of the door connection member 310a and 310b. Lifting motor for providing power to the door 300 for opening and closing the door, the door opening and closing link module 400 and the door opening and closing link module 400 connected to the other end side of the door connecting members 310a and 310b. 600, a guide member 500 for guiding a portion of the door opening and closing link module 400 to move up and down and formed on the side of the door connecting members 310a and 310b, so that the door connecting members 310a and 310b are formed. Jam to guide the movement of And a door 430a and 430b, and the door opening and closing link module 400 receives power from the lifting motor 600 to move the door connecting members 310a and 310b to open and close the door 300. can do.

The stage 100 fixes the pull for mounting the substrate. In order to manufacture a semiconductor device, the substrate is subjected to various manufacturing processes, such as an etching apparatus, a cleaning apparatus, a drying apparatus, etc. At this time, the substrates are mounted and transported in the pool, and although not shown in FIGS. It is mounted on the (100) to mount the substrate therein. It is preferable that the shape of the box unpacked, the rear of the pool is open, the rear of the base plate 200 can be opened to take out the substrate mounted inside the pool.

The base plate 200 is connected orthogonally to the stage 100 on a flat plate at one end of the stage 100 and has an entrance for entering and exiting a substrate thereon. The entrance portion is preferably located at the top of the base plate 200 in consideration of the position of the pool on which the substrate is loaded. When the door 300 is opened, the entrance part formed in the base plate 200 may take out the substrate loaded in the pool to the rear side of the base plate 200.

The door connection members 310a and 310b are disposed to be movable on the rear surface of the base plate 200. The door connection members 310a and 310b disposed on the rear surface of the base plate 200 are moved up and down by a power source such as the lifting motor 600.

The door 300 is connected to one end side of the door connection members 310a and 310b to open and close the entrance. The door 300 is integrally connected with the door connecting members 310a and 310b so that the door 300 and the donor connecting member move together to the front or the rear of the stage 100 to open or lower the door 300 and the door 300 together. do. The door 300 moves up and down together with the door connecting members 310a and 310b so that the door 300 moves up and down to the entrance, and the door 300 moves to the stage 100 to close the entrance, and the door 300 is closed. In the door connecting member (310a, 310b) and the door 300 is moved to the opposite side of the stage 100, the door 300 is opened and then lowered to open the entrance.

The door opening and closing link module 400 is connected to the other end side opposite to the door 300 side to the door connecting members 310a and 310b. The door opening and closing link module 400 is integrated with the door connecting members 310a and 310b and the door 300 to move together when the door is opened and closed.

Lifting motor 600 provides power to the door opening and closing link module 400, it is preferably located on the opposite side of the door opening and closing link module 400 relative to the base plate (200). Lifting motor 600 provides the power to raise or lower the lifting device 520, the lifting device 520 is preferably moved up and down by a belt, the door through the door opening and closing link module 400 to be described later Move 300 to open and close it. In addition, the elevating motor 600 may be implemented by replacing with various other power sources, of course.

The guide member 500 guides a part of the door opening and closing link module 400, specifically, the moving member 480 to move up and down. The guide member 500 is formed at the lower end of the base plate 200 and guides the door opening and closing link module 400 to move up and down.

Interlocking protrusions 430a and 430b for guiding the movement of the door connecting members 310a and 310b are formed on the side surfaces of the door connecting members 310a and 310b. The locking protrusions 430a and 430b may be formed at one side of the door connection members 310a and 310b, or may be formed at both sides. The locking protrusions 430a and 430b move integrally with the door connecting members 310a and 310b when the door connecting members 310a and 310b, the door 300 and the door opening and closing link module 400 are raised or lowered.

The door opening and closing link module 400 receives power from the lifting motor 600 to move the door connecting members 310a and 310b to open and close the door 300. That is, when the lifting motor 600 transmits power to the lifting device 520 and moves the door opening / closing link module 400, guides are provided by the locking protrusions 430a and 430b formed on the side of the door connecting members 310a and 310b connected thereto. The door 300 is connected to one end of the door connecting members 310a and 310b and the door opening and closing link module 400 connected to the other end is integrally moved, and the door 300 is moved in and out. Open and close the department.

The door opening and closing link module 400 of the automatic opening and closing device according to the present invention is the first arm member (460a, 460b) for connecting the body member 440, the body member 440 and the door connecting member (310a, 310b) ) And second arm members 470a and 470b and a moving member 480 connected to the body member 440, wherein the first arm member 460a is formed around an axis formed in the body member 440. 460b) and the second arm members 470a and 470b are rotatably coupled to the body member 440, and the first arm member 460a is formed around an axis formed in the door connection members 310a and 310b. 460b and the second arm members 470a and 470b are rotatably coupled to the door connection members 310a and 310b.

The door opening and closing link module 400 includes a body member 440 connected to the door connecting members 310a and 310b. The body member 440 connects the first connection member 490a and the second connection member 490b to allow the first connection member 490a and the second connection member 490b to rotate, lift and lower at the same time. .

The door opening and closing link module 400 includes first arm members 460a and 460b and second arm members 470a and 470b. The first arm members 460a and 460b and the second arm members 470a and 470b connect the body member 440 and the door connection members 310a and 310b. Preferably, the pair of first arm members 460a and 460b and the pair of second arm members 470a and 470b are formed in parallel with each other. The first connection member 490a connects the pair of first arm members 460a and 460b, and the second connection member 490b connects the pair of second arm members 470a and 470b. The first arm members 460a and 460b and the second arm members 470a and 470b are coupled to the door connection members 310a and 310b so that they are perpendicular to the base plate 200 when the door connection members 310a and 310b are lifted. Rotate in a counterclockwise direction (counterclockwise in FIG. 1), and when the door connecting members 310a and 310b are lowered, the outer surfaces of the first arm members 460a and 460b and the second arm members 470a and 470b. It rotates in this downward direction (clockwise in FIG. 1).

The door opening and closing link module 400 includes a moving member 480 connected to the body member 440. The moving member 480 penetrates through the guide groove 510 formed in the guide member 500 and is connected to the elevating device 520. Therefore, the power of the lifting motor 600 is transmitted to the body member 440 through the lifting device 520 and the moving member 480 to move the door connecting members 310a and 310b to open and close the door 300. .

The first arm members 460a and 460b and the second arm members 470a and 470b are coupled to the body member 440 so as to be rotatable about an axis formed in the body member 440, and the door connection members 310a and 310b. The first arm member and the second arm member are rotatably coupled to the door connecting members 310a and 310b about the axis formed in the shaft. Therefore, when the door connecting members 310a and 310b are raised and lowered, the outer sides of the first arm members 460a and 460b and the second arm members 470a and 470b rotate counterclockwise to be perpendicular to the base plate 200. When the door connecting member (310a, 310b) starts to rise. In addition, when the door connection members 310a and 310b are lowered, the outer sides of the first arm members 460a and 460b and the second arm members 470a and 470b rotate counterclockwise so that the door connection members 310a and 310b are rotated. Descend.

In the automatic self-opening device according to the present invention, the opposite side of the door opening and closing link module 400 of the moving member 480 is in contact with the guide member 500, the moving member 480 is the lifting motor ( Power is transmitted by the 600, guided by the guide member 500 is moved up and down. Accordingly, the power of the lifting motor 600 is transmitted to the door connecting members 310a and 310b through the moving member 480, so that the door connecting members 310a and 310b are lifted or lowered, and thus the door connecting members 310a and 310b. The door 300 and the door opening and closing link module 400 connected integrally are raised or lowered simultaneously.

A guide groove 510 is formed in the guide member 500 of the automatic self-opening and closing device according to the present invention, and the locking protrusions 430a, which are seated in the guide groove 510 in the door connection members 310a and 310b, 430b) is formed. Therefore, when the door connecting members 310a and 310b are raised, the locking protrusions 430a and 430b coupled to the side ends of the door connecting members 310a and 310b are seated in the seating grooves 410a and 410b. The door 300 closes the entrance while stopping the rise of 310b). In addition, when the door connection members 310a and 310b descend, the locking protrusions 430a and 430b seated in the seating grooves 410a and 410b come out, and the door connection members 310a and 310b are guide members 500. The door 300 is opened and closed by descending.

The door opening and closing link module 400 of the automatic opening and closing device according to the present invention, the first connection member 490a having an axial shape disposed through the body member 440 and the first arm members 460a and 460b. And a second connecting member 490b having an axial shape disposed through the body member 440 and the second arm members 470a and 470b, wherein the first arm members 460a and 460b are formed of the first arm member 460a and 460b. The first connecting member 490a may be rotated about its axis, and the second arm members 470a and 470b may rotate around the second connecting member 490b. Accordingly, when the first arm members 460a and 460b and the second arm members 470a and 470b rotate, the first connection member 490a and the second connection member 490b also rotate simultaneously, and the first arm member 460a. , 460b and the second arm members 470a and 470b, when the first connection member and the second connection member 490b are also raised or lowered at the same time.

The base plate 200 of the automatic pull-opening device according to the present invention is formed with mounting grooves (410a, 410b) to accommodate the engaging projections (430a, 430b), the base plate 200 is the seating Protruding locking projections 420a and 420b are formed above the grooves 410a and 410b. Accordingly, when the door connecting members 310a and 310b are raised, the locking protrusions 430a and 430b coupled to the side ends of the door connecting members 310a and 310b are raised and caught by the locking jaws 420a and 420b. 410b) The door 300 is closed by sliding into the seat and at the same time.

In the automatic opening and closing device according to the present invention, the door connecting member (310a, 310b) is the moving member 480 when the moving member 480 is moved upward by receiving power from the lifting motor 600 in the open state The locking protrusions 430a and 430b are guided by contacting the base plate 200, and the locking protrusions 430a and 430b contact the locking jaws 420a and 420b, and the locking protrusions 430a and 430b thereafter. The door connecting members 310a and 310b move toward the seating grooves 410a and 410b so that the door 430b is accommodated in the seating grooves 410a and 410b, and the door 300 is located on the base plate 200. Close the entrance. In addition, the door connecting member (310a, 310b) is the locking projection (430a, 430b) when the moving member 480 is moved to the lower side by receiving the power from the lifting motor 600 in the state in which the entrance is closed Is guided by contacting the base plate 200, and the locking protrusions 430a and 430b are seated grooves 410a and 430b while the locking protrusions 430a and 430b are in contact with the mounting grooves 410a and 410b. The door connecting members 310a and 310b move outwardly from the seating grooves 410a and 410b so as to come out of the 410b, and the door 300 opens the entrance part of the base plate 200. Thereafter, the door connecting members 310a and 310b are lowered from the predetermined position.

In the automatic release device according to the present invention, the locking protrusions 430a and 430b are formed at both side ends of the door connection members 310a and 310b, respectively, and the seating grooves 410a and 410b and the locking step 420a, respectively. 420b) is preferably formed on both sides of the base plate 200, respectively.

4 is a view showing a driving step of the door opening and closing link module at the time of lifting and lowering of the automatic pull open and close device according to the present invention.

In the door opening and closing link module with the door closed, the first arm members 460a and 460b and the second arm members 470a and 470b are fixed in a shape perpendicular to the base plate 200 (step a).

When the door is opened, the outside of the first arm members 460a and 460b and the second arm members 470a and 470b starts to rotate clockwise by the power of the lifting motor, and at the same time, the locking projections ( 430a and 430b start to slip out of the seating groove 410a by the pulling force downward (step b).

When the locking protrusions 430a and 430b completely exit the seating grooves 410a and begin to descend downward, the first arm members 460a and 460b and the second arm members 470a and 470b also stop rotating clockwise. The door descends with the door connecting members 310a and 310b, and thus the door completely opens the doorway (step c).

5 to 7 is a flow chart for explaining the operation principle of the automatic pull open and close device according to the present invention.

It is a side view of the automatic release opening and closing apparatus in the state which closed the door part. In the closed state, the first arm member 460a and the second arm member 470a are in parallel with each other to maintain a stop state in a direction perpendicular to the base plate 200. The locking protrusion 430a is in a state of being seated in the seating groove 410a.

6 to 7 illustrate a process of opening and closing a completely closed entrance. The lifting motor 600 operates to provide power, and the lifting device 520 is lowered accordingly. As the elevator 520 descends, the moving member 480 connected to the elevator 520 descends along the guide groove 510 formed in the guide member 500. At the same time, the body member coupled with the moving member 480 descends, and the first arm and the second connection member connected to the body member descend according to the lowering of the body member, and thus the first arm connected with the first connection member. The second arm member 470a to which the member 460a and the second connection member are connected rotates in the clockwise direction, and the power is transmitted to the door connection members 310a and 310b so as to be provided on the side surfaces of the door connection members 310a and 310b. The combined engaging protrusion 430a starts to slide out of the seating groove 410a, and at this time, the door connecting members 310a and 310b and the door move to the opposite side of the stage. When the locking protrusion 430a completely exits the seating groove 410a, the door is opened, and from this time, the door connecting members 310a and 310b are lowered. As the door connection members 310a and 310b descend, the door connected to one end of the door connection members 310a and 310b descends, and thus the door starts to open.

Due to the above process, the worker does not open the door manually by hand, and the door is automatically opened and closed to easily take out the substrate inside the pool.

As described above, the best embodiments have been disclosed in the drawings and the specification. Although specific terms have been employed herein, they are used for purposes of illustration only and are not intended to limit the scope of the invention as defined in the claims or the claims. Therefore, those skilled in the art will understand that various modifications and equivalent other embodiments are possible from this. Accordingly, the true scope of the present invention should be determined by the technical idea of the appended claims.

100: stage 200: base plate
300: door 310a, 310b: door connecting member
400: door opening and closing link module 410a, 410b: seating groove
420a, 420b: locking jaw 430a, 430b: locking projection
440: body member 460a, 460b: first arm member
470a and 470b: second arm member 480: moving member
490a: first connecting member 490b: second connecting member
500: guide member 510: guide groove
520: lifting device 600: lifting motor

Claims (9)

A stage on the flat plate to fix the pull to mount the substrate;
A base plate connected to one end of the stage orthogonally to the stage and having an entrance for entering and exiting a substrate thereon;
A door connection member movably disposed on a rear surface of the base plate;
A door connected to one end of the door connection member to open and close the door;
A door opening and closing link module connected to the other end side of the door connecting member;
A lifting motor providing power to one end of the door opening and closing link module;
A guide member for guiding the one end of the door opening and closing link module to move up and down; And
It is formed on the side of the door connecting member includes a locking projection for guiding the movement of the door connecting member,
The door opening and closing link module receives the power from the lifting motor by moving the door connecting member, by automatically opening and closing the device, characterized in that for opening and closing the door. The method according to claim 1,
The door opening and closing link module,
Body member;
A first arm member and a second arm member connecting the body member and the door connection member; And
It includes a moving member connected to the body member,
The first arm member and the second arm member are rotatably coupled to the body member about an axis formed in the body member,
The automatic opening and closing device of the automatic release device that the first arm member and the second arm member is rotatably coupled to the door connection member about an axis formed on the door connection member. The method according to claim 2,
The opposite side of the door opening and closing link module of the moving member is in contact with the guide member,
The moving member receives power by the lifting motor, the pull automatic opening and closing device, characterized in that the guide member by the guide member to move up and down. The method according to claim 3,
A guide groove is formed in the guide member, and the locking projection formed on the side of the door connection member is automatically unpacking device, characterized in that seated in the guide groove. The method according to claim 2,
The door opening and closing link module,
A first connecting member having a shaft shape disposed through the body member and the first arm member; And
A second connecting member having a shaft shape disposed through the body member and the second arm member,
The first arm member may rotate with the first connection member as an axis,
The second arm member is a pull automatic opening and closing device, characterized in that capable of rotating around the second connecting member. The method according to claim 3,
The side of the base plate is formed with a seating groove formed to accommodate the locking projections,
Pull base opening and closing device characterized in that the locking projection protruding on the upper side of the seating groove is formed on the base plate The method of claim 6,
When the moving member is moved upward by receiving power from the elevating motor, the door connecting member is guided by the locking protrusion contacting the base plate when the moving member moves upward.
After the locking projection contacts the locking jaw, the locking projection moves to the seating groove so that the locking protrusion is received in the seating groove, and the door closes the entrance of the base plate. Switchgear. The method of claim 6,
In the state in which the door is closed, the door connecting member is guided by the locking projection contacting the base plate when the moving member moves downward by receiving power from the lifting motor.
While the locking projection is in contact with the seating groove, the door connecting member is moved to the opposite side of the seating groove so that the locking protrusion exits from the seating recess, and the door is open to release the entrance of the base plate. Automatic switchgear. The method of claim 6,
The locking projections are formed at both side ends of the door connection member,
The mounting groove and the locking jaw is automatically unwinding device, characterized in that formed on both sides of the base plate.
KR1020120023029A 2012-03-06 2012-03-06 Automatic opening and closing device for foup KR101226746B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020120023029A KR101226746B1 (en) 2012-03-06 2012-03-06 Automatic opening and closing device for foup

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020120023029A KR101226746B1 (en) 2012-03-06 2012-03-06 Automatic opening and closing device for foup

Publications (1)

Publication Number Publication Date
KR101226746B1 true KR101226746B1 (en) 2013-01-25

Family

ID=47842666

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020120023029A KR101226746B1 (en) 2012-03-06 2012-03-06 Automatic opening and closing device for foup

Country Status (1)

Country Link
KR (1) KR101226746B1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101361545B1 (en) * 2013-03-27 2014-02-13 주식회사 싸이맥스 Door opening and closing device that opens and closes port door through link bar
KR200481041Y1 (en) * 2015-02-23 2016-08-05 주식회사 테크네스트 Wafer box inserting portion safety bar apparatus for semiconductor manufacturing device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10335406A (en) * 1997-06-02 1998-12-18 Kokusai Electric Co Ltd Door opening mechanism
KR20030031115A (en) * 2000-07-10 2003-04-18 뉴포트 코포레이션 Pod load interface equipment adapted for implementation in a fims system
US7147424B2 (en) * 2000-07-07 2006-12-12 Applied Materials, Inc. Automatic door opener
KR100714249B1 (en) * 2007-03-29 2007-05-07 주식회사 에스티에스 Rectangular gate valve

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10335406A (en) * 1997-06-02 1998-12-18 Kokusai Electric Co Ltd Door opening mechanism
US7147424B2 (en) * 2000-07-07 2006-12-12 Applied Materials, Inc. Automatic door opener
KR20030031115A (en) * 2000-07-10 2003-04-18 뉴포트 코포레이션 Pod load interface equipment adapted for implementation in a fims system
KR100714249B1 (en) * 2007-03-29 2007-05-07 주식회사 에스티에스 Rectangular gate valve

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101361545B1 (en) * 2013-03-27 2014-02-13 주식회사 싸이맥스 Door opening and closing device that opens and closes port door through link bar
KR200481041Y1 (en) * 2015-02-23 2016-08-05 주식회사 테크네스트 Wafer box inserting portion safety bar apparatus for semiconductor manufacturing device

Similar Documents

Publication Publication Date Title
KR101443457B1 (en) Transfer robot
US8317450B2 (en) Tactile wafer lifter and methods for operating the same
KR100772845B1 (en) Wafer loading equipment in semiconductor device manufacturing apparatus
KR101226746B1 (en) Automatic opening and closing device for foup
KR101634600B1 (en) Drawer device and storage device
KR20100044782A (en) Method and apparatus for providing flat panel display environmental isolation
US20080075564A1 (en) Container Carrying Equipment
KR100884257B1 (en) Device for Transfering Tray
KR20070069592A (en) Transfer robot
TW202010032A (en) Wafer carrier handling apparatus
JP2888818B1 (en) Terminal processing device for wire winding bobbin
KR102476523B1 (en) Wafer grip unit
KR20070018174A (en) Loadlock chamber of semiconductor manufacturing equipment
JP3857653B2 (en) Open cassette and open / close device for semiconductor wafer transfer
JP2002359273A (en) Opener for wafer transfer container
KR20060032088A (en) Wafer lift unit of semiconductor manufacturing apparatus
KR100757001B1 (en) Lifter of fOUP opener
JP2002203887A (en) Mini-environment system and method for operating the same
KR200370328Y1 (en) Standard mechanical interface pod
KR20120084012A (en) Supporting dvice for auto cleaner
KR100467818B1 (en) POD for wafer
KR20230166383A (en) multi stage type SMIF pod open device
WO2015052998A1 (en) Stocker and method for inserting and removing pull-out shelf unit from stocker
KR200468473Y1 (en) baffle zig
KR100769048B1 (en) A compulsion opening device of elevator door

Legal Events

Date Code Title Description
A201 Request for examination
A302 Request for accelerated examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20160121

Year of fee payment: 4

LAPS Lapse due to unpaid annual fee