KR101645082B1 - Substrate transfer robot, substrate transfer system and method for detecting placement state of substrate - Google Patents

Substrate transfer robot, substrate transfer system and method for detecting placement state of substrate Download PDF

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Publication number
KR101645082B1
KR101645082B1 KR1020140060159A KR20140060159A KR101645082B1 KR 101645082 B1 KR101645082 B1 KR 101645082B1 KR 1020140060159 A KR1020140060159 A KR 1020140060159A KR 20140060159 A KR20140060159 A KR 20140060159A KR 101645082 B1 KR101645082 B1 KR 101645082B1
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South Korea
Prior art keywords
substrate
hand
center
center line
robot
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KR1020140060159A
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Korean (ko)
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KR20140137311A (en
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요시키 기무라
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가부시키가이샤 야스카와덴키
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1679—Programme controls characterised by the tasks executed
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H01L21/67265—Position monitoring, e.g. misposition detection or presence detection of substrates stored in a container, a magazine, a carrier, a boat or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/40—Robotics, robotics mapping to robotics vision
    • G05B2219/40087—Align hand on workpiece to pick up workpiece, peg and hole
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00—Robots
    • Y10S901/02—Arm motion controller
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00—Robots
    • Y10S901/46—Sensing device

Abstract

The object of the present invention is to provide a substrate carrying robot capable of detecting the arrangement state of a substrate in a substrate mounting portion even when the arm of the substrate carrying robot is relatively short.
The control unit 133 of the substrate transfer robot 13 is configured such that the hand 131 is moved in the vertical direction relative to the front surface of the cassette 30 with respect to the substrate storage center line 141, The detection unit 150 detects the arrangement state of the substrate 110 in the cassette 30 while being inclined toward the turning center C1 of the robot.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a substrate transfer robot, a substrate transfer system,

The present invention relates to a substrate transport robot, a substrate transport system, and a method of detecting a disposition state of a substrate.

BACKGROUND ART [0002] A substrate transfer apparatus (substrate transfer robot) having a hand provided with a transmission type optical sensor for detecting an arrangement state of a substrate placed in a substrate storage cassette is known (see, for example, Patent Document 1). In the above-described Patent Document 1, a hand having a substantially V-shape (a shape in which the distal end is branched) is provided at the tip of the carrying arm of the substrate carrying apparatus (substrate carrying robot). A transmission type optical sensor including a light emitter for illuminating the beam and a light receiver for receiving the beam is provided at the tip of the hand. In the above-described Patent Document 1, a substantially V-shaped hand (a light emitter and a light receiver) is positioned below a substrate disposed in the cassette storage cassette, and then the hand is moved upward. At this time, on the basis of whether or not the light receiver has received the beam, it is configured to detect the arrangement state (the presence or absence of the substrate, the posture, and the projection state from the cassette) arranged in the substrate storage cassette.

In the conventional substrate transfer apparatus (substrate transfer robot) as in Patent Document 1, the hand center line (a straight line connecting the rotation center of the hand and the center of the substrate holding when the substrate is held in the hand) And is configured to detect the arrangement state of the substrate disposed in the substrate storage cassette in a state in which the substrate storage cassette is arranged in a direction perpendicular to the front surface of the substrate storage cassette.

Japanese Patent Application Laid-Open No. 2010-219209

However, in the conventional substrate transport apparatus (substrate transport robot), in order to detect the arrangement state of the substrates arranged in the substrate storage cassettes in a state in which the hand center lines are arranged in a direction perpendicular to the front surface of the substrate storage cassettes When the hand central line can not be arranged in the vertical direction with respect to the front surface of the substrate storage cassette due to the relatively short transfer arm of the substrate transfer robot, it is disposed in the substrate storage cassette (substrate loading portion) A problem that the arrangement state of the substrate can not be detected is considered.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a substrate transfer robot capable of detecting the arrangement state of a substrate on a substrate loading section even when the arm of the substrate transfer robot is relatively short, A substrate transport system, and a method of detecting the arrangement state of the substrate.

The substrate transport robot according to the first aspect includes a hand portion provided with a detecting portion for detecting the arrangement state of the substrate on the substrate mounting portion and a control portion, In a state in which the substrate is placed in a tilted position toward the center of rotation of the substrate transfer robot with respect to the substrate holding center line in the vertical direction with respect to the substrate holding section.

In the substrate transfer robot according to the first aspect, as described above, when the hand portion is tilted toward the center of rotation of the substrate transfer robot relative to the substrate storage center line perpendicular to the front surface of the substrate loading portion, It is possible to detect the arrangement state of the substrate on the substrate mounting portion by the detecting portion in a state where the hand portion is brought close to the center of the turning center of the substrate transfer robot, The arrangement state of the substrate in the substrate mounting portion can be detected even when the arm of the carrier robot is relatively short.

The substrate transport system according to the second aspect includes a substrate transport robot disposed in a substrate transport robot mounting region surrounded by the substrate loading section and the processing apparatus, and the substrate transport robot includes: Wherein the control unit controls the hand unit such that when the hand unit is tilted toward the center of rotation of the substrate transfer robot relative to the substrate storage center line perpendicular to the front surface of the substrate loading unit, And the detecting section detects the arrangement state of the substrate in the mounting section.

In the substrate transfer system according to the second aspect, as described above, the hand portion is inclined to the center of the substrate transfer center line of the substrate transfer robot in a direction perpendicular to the front surface of the substrate loading portion, The arrangement state of the substrate on the substrate mounting portion can be detected by the detecting portion in a state in which the hand portion approaches the center of the turning center of the substrate transport robot, It is possible to provide a substrate transport system capable of detecting the arrangement state of the substrate in the substrate mounting section even when the arm of the substrate transport robot is relatively short.

The method for detecting the arrangement state of the substrate according to the third aspect is characterized in that the hand portion is moved so as to be tilted toward the center of rotation of the substrate transport robot relative to the substrate accommodating center line in the vertical direction with respect to the front surface of the substrate mounting portion, And the hand part is inclined toward the center of rotation of the substrate carrying robot relative to the substrate accommodating center line in a direction perpendicular to the front surface of the substrate mounting part so that the arrangement state of the substrate in the substrate mounting part is detected by a detecting part And a step of detecting the light beam.

In the third aspect of the present invention, in the method of detecting the arrangement state of the substrate, in the state in which the hand portion is tilted toward the center of rotation of the substrate transfer robot relative to the substrate storage center line perpendicular to the front surface of the substrate mounting portion, And detecting a placement state of the substrate in the substrate loading section by the detecting section provided in the hand section so that the placement state of the substrate in the substrate loading section is detected by the detecting section in a state in which the hand section is brought close to the turning center side of the substrate carrying robot It is possible to provide a method of detecting the arrangement state of the substrate, which can detect the arrangement state of the substrate in the substrate mounting portion even when the arms of the substrate carrying robot are relatively short.

The substrate transport robot according to the fourth aspect includes a hand portion provided with a detection portion for detecting the arrangement state of the substrate on the substrate mounting portion and includes a hand portion for detecting the arrangement state of the substrate on the substrate mounting portion by the detecting portion, The hand portion is set at a position inclined to the turning center side of the substrate carrying robot with respect to the substrate holding center line in a direction perpendicular to the front surface of the substrate mounting portion as viewed in plan view.

In the substrate transport robot according to the fourth aspect, as described above, the position of the hand portion when the detection portion detects the arrangement state of the substrate on the substrate mounting portion as viewed from the top, The arrangement state of the substrate in the substrate mounting portion is detected by the detecting portion in a state in which the hand portion is brought close to the center of the turning center of the substrate transfer robot by setting the substrate to the position at an inclined position with respect to the substrate transfer center line in the vertical direction with respect to the front face, It is possible to detect the arrangement state of the substrate in the substrate mounting portion even when the arms of the substrate carrying robot are relatively short.

According to the above substrate transfer robot, the substrate transfer system and the method for detecting the arrangement state of the substrate, it is possible to detect the arrangement state of the substrate in the substrate mounting section even when the arms of the substrate transfer robot are relatively short.

Fig. 1 is a plan view showing the entire configuration of a substrate processing system according to the first embodiment.
2 is a schematic side view showing the overall configuration of the substrate processing system according to the first embodiment.
3 is a perspective view showing the substrate transport robot of the substrate processing system according to the first embodiment.
4 is a view for explaining the position of the hand portion in the mapping operation of the substrate transport system according to the first embodiment.
5 is a view for explaining the position of the hand portion when the substrate is mounted on the cassette.
6 is a view for explaining the position of the hand portion in a state in which the hand center line is aligned with the board receiving center line;
Fig. 7 is a view for explaining the position of the hand portion in the mapping operation of the substrate transport system according to the second embodiment. Fig.

Hereinafter, embodiments will be described with reference to the drawings.

(First Embodiment)

First, the configuration of the substrate processing system 100 according to the first embodiment of the present invention will be described with reference to Figs. 1 to 4. Fig.

1 and 2, the substrate processing system 100 includes a substrate transfer system 10 for transferring the substrate 110 and a processing apparatus 20. The substrate transfer system 10 includes a substrate processing apparatus 10, The substrate processing system 100 is configured to transfer the substrate 110 to the processing apparatus 20 by the substrate transfer system 10 and to transfer the substrate 110 to the semiconductor device So as to execute the processing in the manufacturing process of FIG.

The plate transport system 10 includes a plurality of (four) load ports 12 provided with a robot mounting region 11 and a cassette (substrate storage cassette) 30 for housing the substrate 110 and a robot mounting region And a substrate transport robot 13 disposed in the substrate transport path 11. The substrate transport system 10 is a system for transporting the substrate 110 between the cassette 30 and the processing apparatus 20 by the substrate transport robot 13. [ The cassette 30 is an example of a " substrate mounting portion ". The robot mounting area 11 is an example of a " substrate carrying robot mounting area ".

The substrate transport system 10 includes an outer shape having a size matching the mounting area of the load port 12 and the robot mounting area 11 on which the substrate carrying robot 13 is mounted as viewed from above (Outline shape shown by the broken line in Fig. 1). The robot mounting area 11 is a rectangular box-shaped area viewed from a plane surrounded by a front wall 111 on which the load port 12 is disposed, a rear wall 201 of the processing apparatus 20, and side walls. The substrate transport system 10 further includes an unillustrated FFU (fan filter unit) and is configured to keep the air in the robot mounting area 11 clean. The front wall 111 and the rear wall 201 are opposed to each other in the X direction and the longitudinal direction (Y direction) along the front wall 111 and the rear wall 201 is a lateral direction do. The robot mounting area 11 has a width W1 in the front-rear direction and a width W2 in the lateral direction.

The cassette 30 is a front opening type semiconductor wafer accommodating container conforming to SEMI (Semiconductor Equipment and Materials International) standard, and is called FOUP (Front Open Unified Pod). 1 and 2, the cassette 30 has a container body 301 having a front opening 302 and a container door 303 detachably fitted in the front opening 302 . The cassette 30 closes an inner space surrounded by the container body 301 and the container door 303 to form a local clean area and is configured to accommodate a plurality of substrates 110 in the container body 301 . The cassette 30 is configured such that a plurality of substrates 110 can be mounted on the container body 301 at different height positions. For example, the four cassettes 30 have 25 mounting positions in the vertical direction, and a maximum of 25 boards 110 can be stacked and housed.

The load port 12 has a function of holding the cassette 30 for accommodating the substrate 110 and opening and closing the inside of the cassette 30 with respect to the robot mounting area 11. The load port 12 is provided adjacent to the front wall 111 at the front side (X1 direction side) of the robot mounting area 11 and is arranged in the Y direction along the front wall 111. [ The load port 12 has a mounting base 121, a front plate 122, and a port door 123. The load port 12 is configured such that one cassette 30 can be fixedly attached to and detached from the upper surface of the mounting table 121. The front plate 122 is formed in a vertical plane along the Y direction and constitutes a part of the front wall 111 of the robot mounting area 11. The front plate 122 has a window shape (frame shape) in which an opening 124 is formed, and the opening 124 is opened and closed by the port door 123. The load port 12 is provided with a door opening / closing mechanism (not shown). The door opening and closing mechanism grasps the port door 123 and the container door 303 of the cassette 30 and draws the container door 303 rearward (in the X2 direction) from the opening 124 and downward (in the Z2 direction) To the robot mounting area 11 and closes the port door 123 and the container door 303 when the cassette 30 is taken out.

1 to 3, the substrate carrying robot 13 includes an edge grip type hand part 131 for accessing the cassette 30 and capable of holding the substrate 110, An arm 132 for moving the substrate carrying robot 13, and a control unit 133 for controlling each part of the substrate carrying robot 13. The arm 132 is connected to the hand portion 131 at the distal end of the arm 132 and at the same time the ends of the arm 132 are pivotable from the pivot center And a plurality of arm portions sequentially connected to each other. More specifically, the substrate transfer robot 13 further includes a base member 134 and a support shaft 135. In this embodiment, the arm 132 is provided with a first arm portion 136 and a second arm portion 136. [ And two arm portions of the second arm portion 137. In the first embodiment, the pivot center C1 of the first arm portion 136 is located closer to the front wall 111 where the load port 12 is disposed than the rear wall 201 of the processing apparatus 20 The rotation center C1 of the first arm portion 136 may be disposed at a position close to the back wall 201. In this case,

The support shaft 135 is supported by the base member 134. The support shaft 135 is formed so as to extend in a direction perpendicular to the upper surface of the base member 134. One end of the first arm portion 136 is connected to the upper end of the support shaft 135. The first arm portion 136 is configured to be rotatable within a horizontal plane with the support shaft 135 as a rotation shaft. One end of the second arm portion 137 is connected to the other end of the first arm portion 136. The second arm portion 137 is configured to be rotatable within a horizontal plane with the other end connected to the first arm portion 136 as a turning center. A hand 131 is connected to the other end of the second arm 137. The hand portion 131 is configured so as to be rotatable in a horizontal plane around a connecting portion with the second arm portion 137 as a turning center. Further, the hand portion 131 is configured to be able to support the edge (outer periphery) of the substrate 110. As described above, the substrate carrying robot 13 moves the pivoting center C1 of the first arm 136, the pivotal center C2 of the second arm 137, and the pivotal center C3 of the hand 131, It is possible to independently (separately) rotate the first arm portion 136, the second arm portion 137, and the hand portion 131 around the three rotation center axes of the hand portion 131 and the arm portion 131, respectively. The rotation center C1 of the first arm portion 136 is also the center of rotation of the rotation of the support shaft 135 of the entire arm 132 as described above.

The first arm portion 136 and the second arm portion 137 are formed such that the link lengths are substantially equal to each other. 1, the link length of the first arm portion 136 from the pivot center C1 of the first arm portion 136 to the pivot center C2 of the second arm portion 137 The link length of the second arm portion 137 from the pivot center C2 of the second arm portion 137 to the pivot center C3 of the hand portion 131 is substantially the same and is the length L. This suppresses complicated operation control of each part when the substrate 110 is carried, compared with the case where the link lengths of the first arm 136 and the second arm 137 are different from each other. The hand length H from the rotation center C3 of the hand portion 131 to the substrate holding center 138 is determined by the length L of the first arm portion 136 and the second arm portion 137, And the maximum length including the substrate 110 when the hand portion 131 holds the substrate 110 is substantially equal to the total length of the first arm portion 136 (second arm portion 137) The hand length H is set. The operation range of the arm 132 including the first arm portion 136 and the second arm portion 137 is a radius of 2L.

The substrate carrying robot 13 can vertically move the first arm 136, the second arm 137 and the hand 131 integrally by moving the support shaft 135 up and down . Thereby, the substrate carrying robot 13 can carry out the loading / unloading of the substrate 110 with respect to the entire mounting position where the cassette 30 is disposed at the different height position.

4, a hand portion 131 is provided with a detection portion (not shown) for detecting the arrangement state of the substrate 110 (disposed in the cassette 30) in the cassette 30, (Not shown). Specifically, the hand portion 131 is configured to branch at the distal end side, and the detection portion 150 is provided at the distal end side of one hand and the distal end of the other hand portion 131, respectively. The detection unit 150 includes, for example, a transmission type optical sensor including a transmission type sensor composed of a light emitter disposed on one end side and a light receiver disposed on the other side.

As shown in Fig. 3, the control unit 133 is taught in advance the operation of each part when the substrate 110 is carried by the hand unit 131. Fig. Specifically, the control unit 133 controls the operation of carrying out the loading / unloading operation of the substrate 110 related to each of the four cassettes 30 and the operation for detecting the arrangement state of the substrate 110 disposed in the cassette 30 Operation), the operation of each part is taught in advance.

4, in the first embodiment, the control section 133 is configured to hold the substrate 110 on the pivotal center C3 of the hand section 131 and the hand section 131, The hand center line 139 which is a straight line connecting the substrate holding center 138 in the case where the substrate holding center 138 is brought into contact with the substrate holding center 138 in the case where the substrate 110 is mounted on the cassette 30 and the substrate holding center 140 of the cassette 30 (The cassette 30 (the front wall 111 of the robot mounting area 11), which is a straight line connecting the pivot center C3 of the robot mounting area 11, 131 ) Of the substrate transfer robot 13 (the center of rotation C1 of the first arm portion 136 (see FIG. 5 and FIG. 6) ) Side of the cassette 30, the detection unit 150 detects the arrangement state of the substrate 110 placed in the cassette 30. [ More specifically, the control unit 133 determines whether or not the straight line 142 connecting the pair of detecting units 150 extends in the plane of the substrate 110 as viewed from above, and at the same time the hand unit 131 does not contact the substrate 110 The hand center line 139 is tilted toward the turning center C1 of the substrate transfer robot 13 at a predetermined inclination angle within the horizontal plane with respect to the substrate housing center line 141, 110) is detected by the detecting unit (150). The detailed operation (mapping operation) for detecting the arrangement state of the substrate 110 will be described later.

In the first embodiment, the control section 133 determines that the hand center line 139 is inclined at a predetermined inclination angle &thetas; relative to the substrate storage center line 141 with respect to the turning center of the substrate transfer robot 13 C1 and the rotational center C3 of the hand portion 131 is positioned on the side of the turning center C1 of the substrate transfer robot 13, (Not shown). The control unit 133 rotates the hand unit 131 toward the center of rotation C1 of the substrate transfer robot 13 about the substrate storage center 140 of the substrate 110 disposed in the cassette 30 The hand center line 139 is inclined toward the center of rotation C1 of the substrate transport robot 13 at a predetermined inclination angle with respect to the substrate accommodating center line 141 so that the arrangement state of the substrate 110 is And is configured to be detected by the detection unit 150. That is, the hand portion 131 is moved in the R direction (center) about the substrate storage center 140 of the substrate 110 from the state in which the hand center line 139 shown in Fig. 6 coincides with the substrate storage center line 141 The hand center line 139 is inclined toward the center of rotation C1 of the substrate transport robot 13 at a predetermined inclination angle? Relative to the substrate storage center line 141 by moving the circumferential phase.

In the first embodiment, the position of the hand portion 131 for detecting the arrangement state of the substrate 110 disposed in the cassette 30 by the detection unit 150 is determined based on the position of the substrate storage center 140 previously taught, To the control unit 133 so that the hand center line 139 is tilted toward the center of rotation C1 of the substrate transport robot 13 at a predetermined inclination angle with respect to the substrate receiving center line 141 . The predetermined inclination angle? In which the hand center line 139 is inclined with respect to the substrate accommodating center line 141 is set within a range in which the hand portion 131 does not contact the cassette 30 The control section 133 is configured so as to calculate the position of the cassette 30 within the cassette 30, which is set by the SEMI standard. Concretely, in the mapping operation such that the hand 131 (the substrate holding center 138) is arranged at a predetermined interval with respect to the cassette 30, based on the substrate storage center 140 previously taught The position of the hand portion 131 of the hand 131 is calculated.

1, the position of the hand portion 131 at the time of detecting the arrangement state of the substrate 110 from the turning center C1 of the substrate carrying robot 13 The distance D to the pivot center C3 of the hand portion 131 located is the sum of the total link lengths of the arms 132 including the first arm portion 136 and the second arm portion 137 The link length L of the first arm portion 136 and the link length L of the second arm portion 137 = 2L. More specifically, the distance D from the turning center C1 of the substrate carrying robot 13 to the turning center C3 of the hand portion 131 is equal to the distance D between the first arm portion 136 and the second arm portion (D < 2L), which is the sum of the total link lengths of the arms 132,

As shown in Figs. 1 and 2, the processing apparatus 20 has a rear wall 201 on the side (X1 direction side) where the substrate carrying robot 13 and the cassette 30 are arranged. The back face wall 201 is formed in a vertical plane along the Y direction. The rear wall 201 is disposed substantially parallel to the front wall 111 so as to face the front wall 111. [ In addition, an opening portion 202 having a substantially rectangular shape is formed in the rear wall 201. The opening 202 has an opening width B in the horizontal direction (Y direction) in which the substrate 110 can be inserted, as shown in Fig. 2, the opening 202 is a movable range of the substrate transfer robot 13 in the height direction of the first arm 136, the second arm 137, and the hand 131, And an opening length H1 in a larger height direction (Z direction).

The substrate transport robot 13 transports the substrate 110 in the cassette 30 to the mounting position in the processing apparatus 20 through the opening 202 and the substrate 110) to a predetermined mounting position in the cassette 30. As shown in Fig.

The substrate transfer robot 13 is configured such that the substrate holding center 138 in the case where the substrate 110 is held on the hand portion 131 as viewed in plan is the cassette open / close region 125 of the load port 12 (Not shown) of the port 12 is an operation area ensured for opening and closing the cassette 30 and is a region of the width (width in the X direction) W3 defined by the SEMI standard (The position at which the access to the cassette 30 is started), the hand center line 139 is inclined (see Fig. 4 or Fig. 7) with respect to the substrate accommodating center line 141 So that the hand 131 can be moved. Thereafter, the substrate carrying robot 13 moves the substrate holding center 138 in the cassette 30 in the state in which the hand center line 139 coincides with the substrate holding center line 141 (see Fig. 5) And is configured to be able to move the hand portion 131 so as to reach the receiving center 140. For example, when the cassette 30 is accessed from the cassette 30a farther from the substrate transport robot 13 than the cassette 30a, the hand center line 139 is inclined relative to the substrate storage center line 141 .

Next, an operation (mapping operation) for detecting the arrangement state of the substrate 110 disposed in the cassette 30 of the substrate transport system 10 according to the first embodiment will be described.

4, a straight line 142 connecting a pair of detecting portions 150 extends in the plane of the substrate 110, and a state in which the hand portion 131 does not contact the substrate 110 The hand center 131 is inclined toward the center of rotation C1 of the substrate carrying robot 13 at a predetermined inclination angle with respect to the substrate housing center line 141 (Positioned). At this time, the hand portion 131 is disposed below (or above) the substrate 110.

Next, by moving the hand portion 131 upward (or downward), the detection unit 150 detects the arrangement state of the substrate 110 disposed in the cassette 30. [ Specifically, the presence or absence of the substrate 110 is detected based on whether or not the light emitted from the light emitter of the detection unit 150 formed of the transmission type optical sensor is received by the light receiver. Further, the inclination state of the substrate 110 is detected based on the distance at which the light emitted from the light emitter is shielded by the substrate 110. For example, if the distance covered by the substrate 110 is longer than the distance covered by the substrate 110 when the substrate 110 is not inclined, it is determined that the substrate 110 is inclined.

In the first embodiment, as described above, the hand portion 131 is provided on the side of the cassette 30 (the front wall 111 of the robot mounting area 11) The control unit 133 is configured to detect the arrangement state of the substrate 110 with the detection unit 150 in a tilted state with respect to the turning center C1 of the substrate transportation robot 13. [ The detection unit 150 detects the arrangement state of the substrate 110 disposed in the cassette 30 in a state in which the hand unit 131 is brought close to the pivotal center C1 side of the substrate transfer robot 13 Even when the arm 132 (the first arm 136 and the second arm 137) of the substrate transfer robot 13 is relatively short, it is possible to reduce the size of the substrate 110 placed in the cassette 30 The placement state can be detected.

In the first embodiment, the hand center line 139 is inclined at a predetermined inclination angle (?) With respect to the substrate accommodating center line 141, as viewed in plan, from the center of rotation C1 of the substrate carrying robot 13, The control unit 133 is configured to detect the arrangement state of the substrate 110 disposed in the cassette 30 by the detection unit 150. [ As a result, the hand center line 139 can be prevented from moving relative to the cassette 30 due to the relatively short arm 132 (first arm portion 136 and second arm portion 137) of the substrate transfer robot 13 It is possible to detect the arrangement state of the substrate 110 disposed in the cassette 30 even when it can not coincide with the substrate storage center line 141 in the vertical direction with respect to the front face.

In the first embodiment, the hand portion 131 is configured to be branched at the distal end side as described above, and a pair of detection portions 150 are provided on the pair of tip ends of the branched hand portions 131, The straight line 142 connecting the pair of detecting portions 150 extends in the direction of the substrate 110 and at the same time the hand central line 139 is in contact with the substrate 110, The detection unit 150 detects the arrangement state of the substrate 110 in a state inclined toward the center of rotation C1 of the substrate transport robot 13 at a predetermined inclination angle with respect to the substrate storage center line 141 And constitutes a timing control unit 133. As a result, even when the hand portion 131 is tilted, whether or not a straight line connecting the pair of detecting portions 150 (light emitters and light receiving units) extends over the substrate 110 (light emitted from the light emitters, It is possible to easily detect the arrangement state of the substrate 110 arranged in the cassette 30. [

In the first embodiment, as described above, the hand center line 139 is inclined with respect to the center line C1 of the substrate transfer robot 13 at a predetermined inclination angle &thetas; The position of the substrate 110 is detected by the detector 150 in a state in which the rotation center C3 of the hand portion 131 is positioned on the side of the turning center C1 of the substrate transport robot 13, The control unit 133 is configured so as to detect it. Thereby, even when the arm 132 (first arm portion 136 and second arm portion 137) of the substrate transfer robot 13 is relatively short, the rotation center C3 of the hand portion 131 It is possible to easily detect the arrangement state of the substrate 110 disposed in the cassette 30 by positioning it on the side of the turning center C1 of the substrate transportation robot 13. [

In the first embodiment, the center of rotation C1 of the substrate carrying robot 13 is centered on the substrate storage center 140 of the substrate 110 disposed in the cassette 30 as viewed in plan, In a state in which the hand center line 139 is inclined toward the center C1 of the substrate transfer robot 13 at a predetermined inclination angle with respect to the substrate accommodating center line 141, The control unit 133 is configured to detect the arrangement state of the substrate 110 by the detection unit 150. [ A pair of branched ends of the hand portion 131 are spaced apart from each other along the outer periphery of the substrate 110 disposed in the cassette 30 about the substrate storage center 140 at a constant interval The position of the hand portion 131 is positioned so that the tip of the hand portion 131 can be prevented from coming into contact with the substrate 110. [

The first embodiment differs from the first embodiment in that a hand portion 131 located at the position of the hand portion 131 when detecting the arrangement state of the substrate 110 from the turning center C1 of the substrate transport robot 13, (2L) of the sum of the total link lengths of the arms 132 including the first arm portion 136 and the second arm portion 137 is equal to or shorter than the sum of the total link lengths of the first arm portion 136 and the second arm portion 137 . This reduces the length of the arm 132 (the first arm 136 and the second arm 137), thereby reducing the length of the hand portion 131 It is possible to reliably detect the disposition state of the substrate 110 disposed in the cassette 30. [0158] As shown in Fig.

In the first embodiment, as described above, the hand center line 139 is positioned at a predetermined position with respect to the substrate accommodating center line 141 within a range in which the hand portion 131 does not contact the cassette 30 The control unit 133 is configured to detect the arrangement state of the substrate 110 by the detection unit 150 while being inclined at the inclination angle? Toward the turning center C1 side of the substrate transportation robot 13. [ This makes it possible to detect the arrangement state of the substrate 110 disposed in the cassette 30 while reliably suppressing the hand 131 from contacting the cassette 30. [

In the first embodiment, as described above, the substrate storage center 140 of the set 30 is taught in advance, and based on the substrate storage center 140 previously taught, the hand center line 140 The arrangement state of the substrate 110 disposed in the cassette 30 in a state in which the substrate transfer robot 13 is inclined toward the center of rotation C1 of the substrate transfer robot 13 at a predetermined inclination angle? The control unit 133 is configured to calculate the position of the hand unit 131 for the detection unit 150 to detect. Unlike the case where the user teaches the position of the hand portion 131 when detecting the arrangement state of the substrate 110 placed in the cassette 30, It is possible to reduce the labor of the user at the time of doing.

(Second Embodiment)

Next, the position of the hand portion 131 for detecting the arrangement state of the substrate 110 according to the second embodiment will be described with reference to Fig. The second embodiment has a structure in which the hand portion 131 is rotated toward the turning center C1 of the substrate carrying robot 13 about the substrate receiving center 140 of the substrate 110 disposed in the cassette 30 Unlike the first embodiment (see Fig. 4), the hand holding part 131 is provided at the center of the center of rotation of the substrate transfer robot 13 with the substrate holding center 138 as the center, (131) is rotated. The configuration of the substrate transport system 10 of the second embodiment is the same as that of the first embodiment (see Figs. 1 to 3).

7, in the substrate transfer system 10 according to the second embodiment, the control unit 133 controls the substrate holding center 12 in the case where the substrate 110 is held by the hand unit 131, The hand center line 139 is pivoted to the turning center C1 side of the substrate transfer robot 13 with the center axis 138 as the center of rotation so that the hand center line 139 is inclined at a predetermined inclination angle? The detection unit 150 detects the arrangement state of the substrate 110 in a state in which it is inclined toward the turning center C1 side of the substrate transportation robot 13. [ 7, in a state where the hand center line 139 shown in Fig. 6 is aligned with the substrate storage center line 141, when the substrate 110 is held on the hand portion 131 Is positioned at the position at which the hand portion 131 is rotated toward the center of rotation C1 of the substrate carrying robot 13 about the substrate holding center 138 of the holding portion 131. [ In the second embodiment, in a state in which the hand portion 131 is moved to the state shown in Fig. 7, the mapping operation is performed similarly to the first embodiment.

In the second embodiment of the present invention as described above, the substrate holding center 138 in the case where the substrate 110 is held on the hand portion 131 is moved toward the turning center C1 side of the substrate carrying robot 13, With the hand center line 139 inclined toward the center of rotation C1 of the substrate transport robot 13 at a predetermined inclination angle with respect to the substrate accommodating center line 141, 110) is detected by the detecting unit 150. The control unit 133 is configured to detect the disposition of the first and second antennas 110, This allows the hand 131 to rotate about the substrate holding center 138 located near the substrate transfer robot 13 so that the reference point located at a position away from the substrate transfer robot 13 The hand portion 131 can be moved (positioned) to a desired position by movement of the hand portion 131 in a relatively small range, unlike the case where the hand portion 131 is rotated. The other effects of the second embodiment are the same as those of the first embodiment.

It should also be understood that the embodiments disclosed herein are illustrative and non-restrictive in all respects. The scope of the present invention is not limited to the description of the above embodiments, but is expressed by the scope of claims, and includes all modifications within the meaning and range equivalent to the claims.

For example, in the first (second) embodiment, the substrate storage center of the substrate disposed in the cassette is moved toward the center of the orbit of the substrate transfer robot with the center (center of the substrate holding center when the substrate is held in the hand) The hand is rotated around a reference point other than the substrate storage center and the substrate holding center, and the hand center line is inclined at a predetermined inclination angle with respect to the substrate storage center line toward the turning center side of the substrate carrying robot It is also good.

In the first and second embodiments, a pair of detection units (light emitters and light receivers) formed of a transmission type optical sensor are provided on the distal end side of the branched hands. However, a detection unit other than the transmission type optical sensor may be provided in the hand .

In the first and second embodiments, the distance D (see Fig. 1) from the turning center of the substrate carrying robot to the turning center of the hand located at the position of the hand when detecting the arrangement state of the substrate, (2L) of the total link length of the arm including the first arm portion and the second arm portion is shown, the distance (D) from the turning center of the substrate carrying robot to the turning center of the hand is set to be smaller than the sum (D = 2L) as the sum of the total link lengths of the arms including the first arm portion and the second arm portion.

In the case where the substrate carrying robot is configured to access the cassette 30b (see Fig. 1) farthest from the center of rotation of the substrate carrying robot, if D = 2L, the arm including the first arm portion and the second arm portion The link length is minimized.

In the first and second embodiments described above, the substrate carrying robot including two arm portions (the first arm portion and the second arm portion) is shown as an example of the substrate carrying robot. However, the substrate carrying robot having only one arm portion The substrate transfer robot may be a substrate transfer robot having three or more arms.

In the above-described first and second embodiments, the hand portion has the branched end side, but may have a shape other than the shape with the leading end side where the hand portion is branched.

In the first and second embodiments, a substrate transport robot having one hand portion is shown as an example of the substrate transport robot, but a substrate transport robot having two or more hand portions may be used.

In the above-described first and second embodiments, an example of the substrate transport system capable of installing four cassettes by providing four load ports has been described. However, the number of cassettes (the number of load ports) may be three or less It may be five or more.

In the first and second embodiments described above, an example of the substrate transport system for transporting the substrate by the substrate transport robot between the cassette and the processing apparatus has been described. However, the substrate transport system may be, for example, Or a substrate transfer system for transferring the substrate to an apparatus other than the processing apparatus in the semiconductor device manufacturing process, such as a temporary substrate mounting apparatus for the substrate.

In the first and second embodiments, the robot mounting region is an area interposed between the front wall and the rear wall arranged substantially parallel to each other. However, the first wall portion and the second wall portion, May be used as a robot mounting area.

In the above-described first and second embodiments, an example of detecting the arrangement state of the substrate mounted on the cassette which is the front opening type semiconductor wafer accommodating container conforming to the SEMI standard has been described. However, Or may be configured to detect the arrangement state of one wafer placed on the side of the processing apparatus.

In the first and second embodiments, an edge grip type hand portion is provided in the substrate transfer robot, but a negative pressure (vacuum) type or electrostatic zipper type hand portion may be provided in the substrate transfer robot . Furthermore, a zipper type hand unit other than edge grip type, negative pressure type and electrostatic type may be provided in the substrate transport robot.

10: substrate transport system
11: Robot mounting area (substrate carrying robot mounting area)
13: Substrate carrying robot
20: Processing device
30: Cassette (substrate mounting portion)
110: substrate
131: Hand part
132: arm
133:
136: first arm portion
137: second arm arm
138: substrate holding center
139: Hand center line
140: substrate storage center
141: substrate storage center line
150:
C1: turning center
C3: center of rotation

Claims (12)

A hand portion provided with a detection portion for detecting the arrangement state of the substrate in the substrate mounting portion, and a control portion,
Wherein the control unit includes a hand center line that is a straight line connecting a pivotal center of the hand unit and a center of the substrate holding unit when the substrate is held on the hand unit, In a state of being tilted toward the center of rotation of the substrate transport robot at a predetermined inclination angle with respect to the substrate storage center line which is a straight line connecting the rotation center of the hand portion when the substrate is mounted and which is perpendicular to the front surface of the substrate mount, And the detection unit detects the arrangement state of the substrate in the mounting portion,
A substrate storage center of the substrate mounting portion is previously taught,
Wherein the control unit is configured to move the substrate centering line in a state in which the hand center line is tilted toward the turning center side of the substrate transfer robot at the predetermined inclination angle with respect to the substrate accommodating center line, The position of the hand portion for detecting the arrangement state of the substrate by the detection portion is calculated,
The hand portion is configured to branch at the distal end side,
Wherein the detection unit is provided with a pair of pairs of tip ends of the hand portions that are branched,
The control unit is configured to detect the arrangement state of the substrate by the detection unit in a state in which a straight line connecting the pair of detection units extends from the plane to the substrate and the hand unit does not contact the substrate ,
Wherein the control unit controls the position of the substrate holding center of the substrate on the substrate mounting part when the hand center line coincides with the substrate accommodating center line in a plan view, The hand center line is inclined at the predetermined inclination angle with respect to the substrate accommodating center line to the turning center side of the substrate carrying robot by rotating the hand portion toward the center of the turning center of the substrate carrying robot, , And configured to detect the arrangement state of the substrate by the detection unit
Substrate transport robot. delete delete The method according to claim 1,
Wherein the control unit is configured such that when the hand center line is inclined toward the center of the turning center of the substrate transport robot at the predetermined inclination angle with respect to the substrate accommodating center line in a plan view, In the state of being positioned on the side of the turning center of the substrate
Substrate transport robot. delete delete The method according to claim 1,
A first arm portion configured to be rotatable in a horizontal plane with one end of the substrate transfer robot on a turning center side as a pivotal axis and one end portion connected to the other end portion of the first arm portion, A second arm portion configured to be rotatable in a horizontal plane with respect to the first arm portion,
Wherein a distance from a turning center of the substrate transfer robot to a turning center of the hand portion located at a position of the hand when detecting the arrangement state of the substrate is determined by a distance between the arm including the first arm portion and the second arm portion, Lt; RTI ID = 0.0 >
Substrate transport robot. The method according to claim 1,
Wherein the control unit is configured to move the hand center line in a state in which the hand center line is inclined toward the center of the turning center of the substrate transport robot at the predetermined inclination angle with respect to the substrate accommodating center line in a range in which the hand portion does not contact the substrate mounting portion , And configured to detect the arrangement state of the substrate by the detection unit
Substrate transport robot. delete And a substrate carrying robot disposed in a substrate carrying robot mounting region surrounded by the substrate mounting portion and the processing apparatus,
Wherein the substrate transport robot includes a hand portion provided with a detection portion for detecting the arrangement state of the substrate on the substrate mounting portion, and a control portion,
Wherein the control unit includes a hand center line that is a straight line connecting a pivotal center of the hand unit and a center of the substrate holding unit when the substrate is held on the hand unit, Wherein the substrate holding section is inclined to a turning center side of the substrate carrying robot at a predetermined inclination angle with respect to a substrate holding center line which is a straight line connecting the rotation center of the hand section when the substrate is mounted and which is perpendicular to the front surface of the substrate mounting section, And the detection unit detects the arrangement state of the substrate in the substrate mounting portion,
A substrate storage center of the substrate mounting portion is previously taught,
Wherein the control unit is configured to move the substrate centering line in a state in which the hand center line is tilted toward the turning center side of the substrate transfer robot at the predetermined inclination angle with respect to the substrate accommodating center line, The position of the hand portion for detecting the arrangement state of the substrate by the detection portion is calculated,
The hand portion is configured to branch at the distal end side,
Wherein the detection unit is provided with a pair of pairs of tip ends of the hand portions that are branched,
The control unit is configured to detect the arrangement state of the substrate by the detection unit in a state in which a straight line connecting the pair of detection units extends from the plane to the substrate and the hand unit does not contact the substrate ,
Wherein the control unit controls the position of the substrate holding center of the substrate on the substrate mounting part when the hand center line coincides with the substrate accommodating center line in a plan view, The hand center line is inclined at the predetermined inclination angle with respect to the substrate accommodating center line to the turning center side of the substrate carrying robot by rotating the hand portion toward the center of the turning center of the substrate carrying robot, , And configured to detect the arrangement state of the substrate by the detection unit
Substrate transport system. There is provided a method of detecting the arrangement state of a substrate in a substrate transfer system having a hand section provided with a detection section for detecting the arrangement state of the substrate in the substrate loading section and a substrate carrying robot including the control section,
A substrate storage center of the substrate mounting portion is previously taught,
The hand portion is configured to branch at the tip end side,
Wherein the detection unit is provided with a pair of pairs of tip ends of the hand portions that are branched,
Wherein the control unit is configured to determine that the hand center line that is a straight line connecting the center of rotation of the hand unit and the center of gravity of the substrate when the substrate is held on the hand unit based on the substrate storage center previously learned, And a substrate holding center line that is a straight line connecting the substrate storing center of the mounting portion and the center of rotation of the hand portion when the substrate is mounted on the substrate mounting portion and is perpendicular to the front surface of the substrate mounting portion, Calculating a position of the hand portion for detecting the arrangement state of the substrate on the substrate mounting portion by the detection portion in a state inclined to the turning center side of the robot,
From a state in which the hand center line is aligned with the substrate accommodating center line in a plan view, the center of the substrate holding center in the case where the substrate is held on the hand portion, The hand portion is in a state in which the hand center line is tilted toward the center of the turning center of the substrate transport robot at the predetermined inclination angle with respect to the substrate accommodating center line by rotating the hand portion toward the turning center side of the substrate transport robot A step of moving the hand unit to move the hand unit,
Wherein the hand portion is arranged such that a straight line connecting a pair of the detection portions as seen from a plane extends across the substrate and at the same time the hand portion is not in contact with the substrate, And a step of detecting, by the detection unit, the arrangement state of the substrate in the substrate mounting portion in a state in which the substrate is tilted to an orbiting center side of the substrate carrying robot at an angle
A method for detecting the arrangement state of a substrate. A hand portion and a control portion provided with a detection portion for detecting the arrangement state of the substrate in the substrate mounting portion,
Wherein the position of the hand portion when the detection portion detects the arrangement state of the substrate on the substrate loading portion is a position where the rotation center of the hand portion and the substrate holding center Wherein a straight line connecting a substrate storage center of the substrate loading portion and a turning center of the hand portion when the substrate is mounted on the substrate loading portion is perpendicular to the front surface of the substrate loading portion, Is set at a position inclined to the turning center side of the substrate carrying robot with respect to the center line,
A substrate storage center of the substrate mounting portion is previously taught,
Wherein the control unit is configured to move the substrate centering line in a state in which the hand center line is tilted toward the center of rotation of the substrate transfer robot at a predetermined inclination angle with respect to the substrate accommodating center line, The position of the hand portion for detecting the arrangement state of the substrate in the detection section by the detection section,
The hand portion is configured to branch at the distal end side,
Wherein the detection unit is provided with a pair of pairs of tip ends of the hand portions that are branched,
The control unit is configured to detect the arrangement state of the substrate by the detection unit in a state in which a straight line connecting the pair of detection units extends from the plane to the substrate and the hand unit does not contact the substrate ,
Wherein the control unit controls the position of the substrate holding center of the substrate on the substrate mounting part when the hand center line coincides with the substrate accommodating center line in a plan view, The hand center line is inclined at the predetermined inclination angle with respect to the substrate accommodating center line to the turning center side of the substrate carrying robot by rotating the hand portion toward the center of the turning center of the substrate carrying robot, , And configured to detect the arrangement state of the substrate by the detection unit
Substrate transport robot.
KR1020140060159A 2013-05-22 2014-05-20 Substrate transfer robot, substrate transfer system and method for detecting placement state of substrate KR101645082B1 (en)

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