KR101342352B1 - Cutting machine and method for processing cylinderical ingot block into square columnar block - Google Patents

Abstract

assignment
The four side stripping cutting process of a cylindrical ingot is performed and the generation amount of the cutting waste at the time of forming in a square pillar ingot is aimed at being reduced.
Solution
The outer peripheral left and right shake magnetic compensation mechanism 96 which sandwiches the rotary cutting edges 91a and 91b of the thin thickness of the cutting device 1 is newly formed, and the cutting method of an ingot is previously made into the rotary cutting edge 91a, After performing the groove | channel cutting process cut into 1 / 2b by 91b), the ingot was rotated, the other half groove | channel was processed into the rotary cutting blades 91a and 91b, and it changed into the half cut method which cuts a side surface.

Description

CUTTING MACHINE AND METHOD FOR PROCESSING CYLINDERICAL INGOT BLOCK INTO SQUARE COLUMNAR BLOCK}

 The present invention pinches a clamp mechanism comprising a headstock with an encoder having a function of rotating a cylindrical ingot block around its rotary C axis and a tailstock, and cuts the four side surfaces thinly by a rotary cutting blade. The present invention relates to a cutting device for processing into a rectangular columnar block and a method for processing a cylindrical ingot block into a rectangular columnar block using the cutting device.

The cylindrical ingot block, which is a raw material of a disk-shaped single crystal silicon substrate used for a semiconductor substrate and a square single crystal silicon substrate used for a substrate of a solar cell, is a C of single crystal silicon ingot grown by Czochralski method (CZ method). Both ends of the shaft are cut out, and then sandwiched by a clamping device comprising a spindle and a tailstock having a function of rotating, cylindrical grinding to remove corrugated irregularities on the outer circumferential surface, and again 200 mm, 250 mm, 400 mm, It is cut | disconnected or wire cut | disconnected by the inner peripheral edge into lengths of 500 mm, 800 mm, etc., and it is marketed as an outer peripheral surface smooth cylindrical single crystal silicon ingot block.

This outer circumferential smooth cylindrical single crystal silicon ingot block is provided for slice processing to a thin board | substrate by the multi-wire saw of the next process. Alternatively, the four side and four corner corner portions of the square pillar-shaped block which are supplied from the ingot block manufacturer to the solar cell substrate manufacturer and peeled off four sides on an outer peripheral edge and processed are chamfered, and are subjected to the multi-wire saw of the next step. Is supplied to the slice processing stage to a thin substrate.

Japanese Patent Laid-Open No. 2005-123527 (Patent Document 1), when manufacturing a plurality of semiconductor segments constituting a solar cell from a cylindrical semiconductor single crystal ingot,

The semiconductor single crystal ingot is divided into a plurality of wafer regions having a predetermined thickness by an axial orthogonal cross section, and on the main surface of each wafer region, a pair of parallel first parallel partition lines at positions symmetrical with respect to the wafer center point; Similarly, the pair of second parallel dividing lines is set in a form orthogonal to each other such that the first parallel dividing line is longer than the second parallel dividing line, and the wafer region is set in the in-plane direction of the main surface with a set of these parallel dividing lines. Three kinds of wafer segment regions formed by partitioning, that is, a first segment region having a rectangular shape including the wafer center point, and a bow type corresponding to the long side of the first segment region among the remaining regions of the first segment region. The first segment of the third segment region of the bow shape corresponding to the short side in the same manner as the two segment region. A rectangular shape based on the station segment and the first semiconductor, and said second plurality each produced sheet of the second segment of the semiconductor hwalhyeong based on the segment area,

While collecting only the first cell based on the first semiconductor segment of the rectangular shape, and arranged a plurality of sheets in a lattice shape at regular intervals in the long side direction and the short side direction, respectively, to manufacture a first solar cell module,

Only the second cells based on the second arch semiconductor segment are collected, and the plurality of second semiconductor segments are arranged in plural sheets at regular intervals in a first direction orthogonal to the string and a second direction parallel to the string. The present invention proposes a method of manufacturing a solar cell module, which comprises arranging the second solar cell module.

Japanese Laid-Open Patent Publication No. 2005/076333 (Patent Document 2) discloses a headstock having a function of cutting out the C-axis both end surfaces of the single crystal silicon ingot grown by the Czochralski method (CZ method), and then rotating it. It clamps to the clamp device which consists of a tailstock, and removes the wrinkle-shaped unevenness | corrugation of an outer peripheral surface by cylindrical grinding, and reads the crystal orientation of the C-axis vertical direction of the obtained outer peripheral surface smooth disk shaped single crystal silicon ingot with an infrared detector, based on an analysis peak Disclosed is a method in which a crystal orientation is specified by drawing a line with a red marker pen and cut into a plurality of blocks by die saw along this red specific mark.

Moreover, Unexamined-Japanese-Patent No. 2009-233819 (patent document 3) has a headstock which has a function which cuts out C-axis both end surfaces of the single crystal silicon ingot nurtured by the Czochralski method (CZ method), and then rotates it. And a clamping device formed of a core and a tailstock, and grinding the cylinder to remove corrugated irregularities of the outer circumferential surface, and reading the crystal orientation in the vertical direction of the C axis of the obtained outer circumferential smooth disk-shaped single crystal silicon ingot with an X-ray analysis device. The red mark is given on the basis of the orientation line, and then, the grinding wheel is used for orientation flat and / or notch processing along the red mark line, and then the multi-wire saw is used to slice into a thin substrate. It starts.

As for the method of cutting this cylindrical ingot block into a square column-shaped block, this patent applicant is a 4-side stripping cutting device of the following cylindrical ingot block in Claim 1 of the Japanese Patent Application No. 2011-14761 specification (patent document 4). Suggested.

a) a work table formed to reciprocate in a left-right direction on a guide rail formed in a left-right direction on a machine casing,

b) a clamp mechanism comprising a pair of headstock and tailstock mounted separately on the worktable from side to side,

c) a drive mechanism for reciprocating the work table in the horizontal direction, on which the work supported by the clamp mechanism is placed;

d) from the right direction to the left direction in the direction of viewing the work table from the front side of the compound chamfering processing apparatus;

e) loading / unloading stage of cylindrical ingot block,

f) a standby position stage of the clamp mechanism formed behind the loading / unloading stage,

g) a position where the pair of outer circumferential edges (rotary cutting edges) of the clamp mechanism are interposed therebetween so that their diameters of the rotary cutting edges face each other and are above the height position of the workpiece supporting shafts. A side stripping slicing stage of a cylindrical ingot block formed around the guide rail with the rotary cutting edge (tool) axis positioned so that the rotary cutting edge (tool) axis is located at

And

h) a determination direction detection stage in which a determination direction detection device of an ingot block is provided at a load port position of the loading / unloading stage;

4-side stripping cutting device of the cylindrical ingot block formed.

Moreover, in Claim 2 of the said patent document 4, using the said four side stripping cutting apparatus, the method of chamfering a cylindrical ingot block into a prismatic ingot block was proposed through the following process.

(1) A spindle with an encoder having a function of rotating a cylindrical ingot block, which is a workpiece (workpiece), through the load port by means of the loading mechanism at the loading / unloading stage about the rotation C axis of the clamp mechanism. It carries in between a stand and a tailstock, and advances a tailstock and clamps a cylindrical ingot block to a clamp mechanism.

(2) The crystal azimuth of the cylindrical ingot block rotated by the motor of the main shaft of the clamping device is measured by the sensor of the crystal direction detecting device provided at the front side of the sandwiched cylindrical ingot block. A rotation of C axis 1 (360 °) is made while reading the rotation angle by the encoder to display the correlation between the C axis rotation angle of the cylindrical ingot block and the cylindrical ingot block crystal orientation.

(3) Select an angle θ of any of the encoder rotation angles representing the four crystal orientations displayed, and this angle is the position of the encoder rotation angle 45 ° with respect to the radial cutting blade radial direction (cutting start C axis position) The C axis is rotated so as to be centered on the crystal orientation position of the cylindrical ingot block.

(4) Moving the worktable which mounts the said clamp mechanism in the direction of a pair of rotary cutting blades which rotates, and exceeds the height of the front-back surface of the cylindrical ingot block by said pair of rotary cutting blades more than 1/2. The groove processing of length is performed. At the time of this groove processing, a cooling liquid is supplied to the front and back surfaces of a rotary cutting blade.

(5) Next, the C axis of the cylindrical ingot block is rotated by 180 ° using the servo motor of the spindle.

(6) The worktable for mounting the clamp mechanism in the direction of the rotating pair of cutting blades is moved so that the height of the front and rear surfaces of the cylindrical ingot block by the pair of rotating cutting blades is more than 1/2. The groove processing of the length to make is cut | disconnected, and the circular arc side surface before and behind of a cylindrical ingot block is cut | disconnected. During this cutting operation, a cooling liquid is supplied to the front and rear surfaces of the rotary cutting blade.

(7) Subsequently, the C axis of the cylindrical ingot block cut in two sides is rotated by 90 ° using the servo motor of the spindle.

(8) Move the work table on which the clamp mechanism is mounted in the direction of the pair of rotary cutting blades to be rotated to reduce the height of the remaining front and rear surfaces of the cylindrical ingot block by the pair of rotary cutting blades. Groove of excess length is performed. At the time of this groove processing, a cooling liquid is supplied to the front and back surfaces of a rotary cutting blade.

(9) Next, the C axis of the cylindrical ingot block is rotated by 180 ° using the servo motor of the spindle.

(10) The height of the front and rear surfaces of the cylindrical ingot block by the pair of rotary cutting edges is moved by moving the work table on which the clamp mechanism is mounted in the direction of the pair of rotary cutting edges to rotate. The groove processing of the said length is performed, the arcuate side surface before and behind of a cylindrical ingot block is cut | disconnected, and it processes into a square columnar ingot block. During this cutting operation, a cooling liquid is supplied to the front and rear surfaces of the rotary cutting blade.

The four side stripping cutting device 1 is fully automatic, and compared with a commercially available ingot slicer four side cutting device, the time for processing one cylindrical single crystal silicon ingot block into a square column shape block is about 1/2 ) Has the advantage. However, as a result of starting a square columnar single crystal silicon ingot block using this four side stripping cutting device 1 in the presence of a solar cell substrate manufacturer, (1) in the side stripping process by an outer edge, a single crystal There has been a desire to further reduce the amount of silicon ingot cutting debris to be equal to the amount of cutting debris generated by the die saw blade.

On the other hand, Japanese Patent Application Laid-Open No. Hei 10-500194 (Patent Document 5) and US Pat. No. 5,548,208 (Patent Document 6) disclose a self-compensating water static bearing structure of a main shaft (spindle).

Japanese Laid-Open Patent Publication 2005-123527 Japanese Patent Publication No. 2005/076333 Japanese Unexamined Patent Publication No. 2009-233819 Japanese Patent Application No. 2011-129754 Specification (Unpublished) Japanese Patent Application Publication No. 10-500194 U.S. Patent # 5484208

MEANS TO SOLVE THE PROBLEM In order to reduce the generation amount of the cutting debris by an outer peripheral blade (rotary cutting blade), the thickness of the diamond electrodeposition blade formed in the width | variety of 5-8 mm at the outer peripheral edge of the disk-shaped base of 500-600 mm diameter is 4-5 mm. Was solved by reducing the thickness to a thickness of 1.3 to 2.5 mm, and a follow-up experiment showed that the outer edges were shaken left and right at the time of rotation of the outer edges and did not lead to half the cutting chips. .

MEANS TO SOLVE THE PROBLEM The present inventors examined whether the self-compensation type hydrostatic bearing structure described in the said patent document 5 and patent document 6 was not applicable to the left-right shake prevention of an outer edge, and the outer blade left and right shake magnetic compensation pad which can be combined with a coolant supply nozzle is considered. By setting it as the structure, it turned out that the left-right shake of the outer peripheral edge which arises by rotation of the said outer peripheral blade can be suppressed.

Next, the present inventors stop cutting one side of one pass of a circuit ingot passing through the rotary cutting blade in order to reduce the motor load power applied to the rotary cutting blade at the time of ingot cutting of the rotary cutting blade having a thickness of 1.3 to 2.5 mm. To form a cutting groove in one half of the one-circuit ingot passing through the rotary cutting edge, and rotating the ingot 180 °, and then forming a cutting groove in one half of the one side of the through one circuit ingot passing through the rotary cutting blade. As a result of performing a process of cutting one side, the remaining portion cut out at the last moment when one side is cut out from the ingot body generates chipping, and 0.5-1 mm is applied to both ends of the cut and remaining ingot body. It turned out that chipping of four points was found. Since the pitching point of these four points is an edge part of a square pillar-shaped ingot, it turns off at the time of square board formation by the wire cutting which is a later process, and a board | substrate product loss rate is very small.

An object of the present invention is to provide a cutting device in which chipping does not occur in a square column ingot obtained when the cylindrical ingot is cut into a square column ingot by the half-cut method. Moreover, using this cutting device, there is provided a method of cutting a cylindrical ingot into a square column ingot.

Claim 1 of the present invention,

a) a work table formed to reciprocate in a left-right direction on a guide rail formed in a left-right direction on a machine casing,

b) a clamp mechanism consisting of a pair of spindle head and tail stock mounted separately on the work table from side to side, each support shaft (work support shaft) on the spindle head and tail stock facing each other; Clamp mechanism which formed the auxiliary support mechanism which each auxiliary support body can linearly contact and contact with the left end or the right end of a workpiece at a lower position,

c) a drive mechanism for reciprocating the work table in the horizontal direction, on which the work supported by the clamp mechanism is placed;

d) from the right direction to the left direction in the direction of viewing the work table from the front side of the compound chamfering processing apparatus;

e) loading / unloading stage of cylindrical ingot block,

f) a standby position stage of the clamp mechanism formed behind the loading / unloading stage,

g) a side stripping slicing stage of a work (cylindrical ingot block) formed before and after the guide rail so that the pair of rotary cutting edges face each other with the rotary cutting edge diameter surfaces facing each other with the work support shaft of the clamp mechanism therebetween,

And

h) the inner edge of the rotary cutting edge positioned in the side stripping slicing stage, inward of the diamond blade tip, at the cylindrical ingot block side stripping initiation position, and pressurized to an upper position of the cylindrical silicon ingot block to be cut. A pair of coolant supply pads are formed on the front and rear surfaces with the rotary cutting blades interposed therebetween, and branched the supply pipes of the pressurized liquid supplied by the pump, and presses the tip of each of the branched supply pipes. It is to provide a four-side stripping cutting device of a cylindrical ingot block characterized in that a rotating cutting blade left and right shake magnetic compensation mechanism that faces the liquid storage space of the cooling liquid supply pad is formed.

The invention of claim 2 is to provide a method of sandwiching a work (cylindrical ingot block) using the four side stripping cutting device according to claim 1 and cutting the work into a square column-shaped work through the following steps. .

(1) It carries in between the headstock and the tailstock of the clamp mechanism in a loading / unloading stage, and advances a tailstock and clamps a cylindrical workpiece by a clamp mechanism.

(2) The length exceeding 1/2 of the height of the front and rear surfaces of the cylindrical workpiece by the pair of rotary cutting edges by moving the work table on which the clamp mechanism is mounted in the direction of the pair of rotary cutting edges to rotate. Carry out groove processing. In this groove processing, cooling liquid is supplied to the front and rear surfaces of the rotary cutting blade from the rotary cutting blade left and right shake magnetic compensation mechanisms.

(3) Next, the C axis of the cylindrical work is rotated 180 ° using the servo motor of the main shaft.

(4) The auxiliary support mechanism of the main shaft and the auxiliary support mechanism of the tail stock are linearly moved so that each of the auxiliary supports abuts on the cylindrical work end and the lower portion of the cylindrical work end is sandwiched.

(5) Moving the worktable which mounts the said clamp mechanism in the direction of the said pair of rotary cutting blades, and exceeding the height of the front-back surface of the cylindrical workpiece by the said pair of rotary cutting blades more than 1/2. The groove processing of length is performed, and the circular arc side surface before and behind of a cylindrical workpiece is cut | disconnected. During this cutting process, the cooling liquid is supplied to the front and rear surfaces of the rotary cutting blade from the rotary cutting blade left and right shake magnetic compensation mechanisms.

(6) The auxiliary support mechanism of the main shaft and the auxiliary support mechanism of the tailstock are retracted to move away from each side of the cylindrical work end to open the clamping portion of the cylindrical work end lower portion, and the two cut sides are dropped.

(7) Subsequently, the C axis of the workpiece having the two side surfaces cut is rotated 90 ° using the servo motor of the main shaft.

(8) Moving the work table on which the clamp mechanism is mounted in the direction of the rotating pair of rotary cutting blades to exceed the height of the remaining front and rear surfaces of the workpiece by the pair of rotary cutting blades of more than 1/2; The groove processing of length is performed. In this groove processing, cooling liquid is supplied to the front and rear surfaces of the rotary cutting blade from the rotary cutting blade left and right shake magnetic compensation mechanisms.

(9) Then, the C axis of the work is rotated 180 ° using the servo motor of the main shaft.

(10) The auxiliary support mechanism of the main shaft and the auxiliary support mechanism of the tail stock are linearly moved so that each of the auxiliary supports is brought into contact with the work end so as to sandwich the lower end of the work end.

(11) A length exceeding 1/2 of the height of the front and rear surfaces of the workpiece by the pair of rotary cutting blades by moving the work table for mounting the clamp mechanism in the direction of the pair of rotary cutting blades to rotate. The groove processing is performed to cut the arc side surfaces before and after the cylindrical workpiece. During this cutting process, the cooling liquid is supplied to the front and rear surfaces of the rotary cutting blade from the rotary cutting blade left and right shake magnetic compensation mechanisms.

(12) The auxiliary support mechanism of the headstock and the tail support mechanism of the tailstock are retracted to move away from each side of the cylindrical work end to open the pinch of the lower end of the cylindrical work end, and the two cut sides are dropped to form a square. A columnar workpiece is obtained.

The invention of claim 3 provides a method of sandwiching a work by using the four side stripping cutting device according to claim 1 and cutting the work into a square column-shaped work through the following steps.

(1) It carries in between the headstock and the tailstock of the clamp mechanism in a loading / unloading stage, and advances a tailstock and clamps a cylindrical workpiece by a clamp mechanism.

(2) The length exceeding 1/2 of the height of the front and rear surfaces of the cylindrical workpiece by the pair of rotary cutting edges by moving the work table on which the clamp mechanism is mounted in the direction of the pair of rotary cutting edges to rotate. Carry out groove processing. In this groove processing, cooling liquid is supplied to the front and rear surfaces of the rotary cutting blade from the rotary cutting blade left and right shake magnetic compensation mechanisms.

(3) Next, the C axis of the cylindrical work is rotated 90 degrees using a servo motor of the main shaft.

(4) Moving the worktable which mounts the said clamp mechanism in the direction of the said 1 pair of rotary cutting blades, and exceeding the height of the front-back surface of the cylindrical workpiece by the said 1 pair of rotary cutting blades more than 1/2. The groove processing of length is performed. During this groove processing, cooling liquid is supplied to the front and rear surfaces of the rotary cutting blade from the rotary cutting blade left and right swing magnetic compensation mechanisms.

(5) Next, the C axis of the cylindrical workpiece having four grooves is rotated by 90 ° using the servo motor of the main shaft.

(6) The auxiliary support mechanism of the main shaft and the auxiliary support mechanism of the tail stock are linearly moved so that each of the auxiliary supports abuts on the cylindrical work end so as to sandwich the lower portion of the cylindrical work end.

(7) Moving the worktable which mounts the said clamp mechanism in the direction of the said pair of rotary cutting blades, and exceeding the height of the front-back surface of the cylindrical workpiece by the said pair of rotary cutting blades more than 1/2. The groove processing of length is performed, and the circular arc side surface before and behind of the said cylindrical workpiece is cut | disconnected. During this cutting process, the cooling liquid is supplied to the front and rear surfaces of the rotary cutting blade from the rotary cutting blade left and right shake magnetic compensation mechanisms.

(8) The auxiliary support mechanism of the headstock and the tail support mechanism of the tailstock are retracted to move away from each side of the cylindrical work end to open the pinch under the cylindrical work end, and to drop the cut side surface. .

(9) Then, the C axis of the work is rotated 90 ° or -270 ° using the servo motor of the main shaft.

(10) The auxiliary support mechanism of the main shaft and the auxiliary support mechanism of the tail stock are linearly moved so that the respective auxiliary supports come into contact with the work end, and the lower portion of the work end is clamped.

(11) A length exceeding 1/2 of the height of the front and rear surfaces of the workpiece by the pair of rotary cutting blades by moving the work table for mounting the clamp mechanism in the direction of the pair of rotary cutting blades to rotate. The groove processing is carried out, and circular arc side surfaces before and after the workpiece are cut. During this cutting process, the cooling liquid is supplied to the front and rear surfaces of the rotary cutting blade from the rotary cutting blade left and right shake magnetic compensation mechanisms.

(12) The auxiliary support mechanism of the headstock and the tail support mechanism of the tailstock are retracted to move away from each side of the work end to open the pinch of the lower part of the work end, and the two cut sides are dropped to form a square pillar. Get a walk.

When both sides of the cylindrical workpiece are cut by the rotary cutting blade, the upper slit and the lower slit in the state where the lower surfaces of both ends of the cylindrical workpiece on which the cutting grooves (slits) of the cylindrical workpiece have already been formed are sandwiched by the auxiliary support mechanism. Since this is communicated and cut | disconnected, the load of the cutting both side pieces loaded at the communication point of both slits is distributed, and chipping does not generate | occur | produce in the cutting end point of a cylindrical workpiece.

Even if the width of the diamond blade tip of the rotary cutting edge is as narrow as 1.2 to 2.5 mm, the cutting depth of the cylindrical ingot block of the diamond blade tip is 1 to 5 mm in excess of 1/2 of the target groove cutting depth (h). Since the limit is exceeded (h / 2 + 1 to 5 mm), the area where the diamond edge of the rotary cutting edge is in contact with the groove cutting portion of the cylindrical ingot block is cut at the ingot side with the diamond edge of the rotary cutting edge. It is about 1/2 when doing so. Therefore, the load on the electric motor does not increase too much. Moreover, the generation amount of ingot cutting waste is also reduced by making the width | variety of the diamond blade tip of a rotary cutting blade into 1.2-2.5 mm. Moreover, the diameter of a rotary cutting blade can be made small at 450-550 mm.

Rotating cutting blade right and left shake When the magnetic compensation mechanism rotates left and right on the rotating cutting blade and approaches the liquid storage space port side of the pressurized cooling liquid supply pad provided on the front side, the pressure of the liquid storage space of the pad increases. On the contrary, the pressure of the liquid storage space of the pressurized cooling liquid supply pad provided in the rear side falls. Therefore, when the pressure of the liquid storage space of the pressurized cooling liquid supply pad provided in the front side becomes more than a certain pressure, the rotary cutting blade which rocked left and right to the front side will be pushed back toward the liquid storage space opening of the pressurized cooling liquid supply pad provided in the rear side. As the rotary cutting blade is pushed back, the pressure of the liquid storage space of the pressurized cooling liquid supply pad provided on the front side decreases, and the pressure of the liquid storage space of the pressurized cooling liquid supply pad provided on the rear side increases. When the pressure of the liquid storage space of the pressurized coolant supply pad provided on the rear side becomes higher than a certain pressure, the rotary cutting blades swinging left and right are pushed back toward the liquid storage space port of the pressurized coolant supply pad provided on the front side. Therefore, the left and right swing widths of the rotary cutting blades can be limited according to the magnitude of the pressurized coolant supply pressure, and the amount of cutting chips in the ingot block can be reduced.

1 is a plan view of a four side stripping cutting device.
2 is a top view of a four side stripping cutting device.
It is a figure which shows the main shaft of a clamp mechanism, FIG. 3A is the figure which looked at the workpiece support side of a main shaft, and FIG. 3B is a front view of the auxiliary support mechanism seen from the front of a main shaft.
4 is a partial plan view of the clamp mechanism in which the auxiliary support mechanism of the clamp mechanism is enlarged.
5 is a front sectional view of the rotary cutting blade left and right shake magnetic compensation mechanism.
It is a front view of the clamp apparatus which shows the state of the workpiece clamped by the clamp mechanism and the auxiliary support mechanism.
Fig. 7 is a flow diagram showing a step of inserting a cylindrical ingot block into a cylindrical ingot block with a rotary cutting blade to produce a rectangular columnar single crystal ingot block shape, wherein the ingot block is viewed from the side of the clamp device.
FIG. 8 is a flow diagram of another embodiment showing a step of inserting a cylindrical ingot block into a cylindrical ingot block with a rotary cutting blade to produce a square column-shaped ingot block shape, wherein the ingot block is viewed from the side of the clamp device. FIG.

The side stripping cutting device 1 of the cylindrical ingot block shown to FIG. 1 and FIG. 2 is equipped with the structural member of h) in the following a).

a) a work table 4 formed to reciprocate in a left-right direction on a guide rail 3, 3 formed in the left-right direction on the machine casing 2;

b) Clamp mechanism 7 which consists of a pair of spindle head 7a and tail stock 7b mounted separately on the said work table 4 from left and right, The said headstock 7a and tailstock 7b. ) The auxiliary support 7a ₁₁ , 7b ₁₁ linearly contacts the left end or the right end of the work at the lower position than the respective support shafts 7a ₁ , 7b ₁ on the main shaft face and the tailstock face facing each other. Clamp mechanisms (see FIGS. 4 and 6), which form auxiliary support mechanisms 7'a ₁ , 7'b ₁ ,

c) a drive mechanism (7am) for reciprocating the work table (4) on which the work (w), supported by the clamp mechanism (7), is placed on the left and right directions,

d) in the direction in which the said work table 4 is seen from the front side of the cutting device 1, and also turned from a right direction to a left direction,

e) loading / unloading stage of the work 8R,

f) the standby position stage 70 of the clamp mechanism 7 formed behind the loading / unloading stage 8R,

g) the guide rails 3 and 3 such that the pair of rotary cutting edges 91a and 91b face each other with the workpiece cutting shafts 7a ₁ and 7b ₁ between the clamping mechanisms facing each other. Side stripping slicing stage 90 of cylindrical silicon ingot block (work) formed before and after

h) a position inside the outer peripheral edge diamond edges 91ag, 91bg of the rotary cutting edge positioned in the side stripping slicing stage 90, in the cylindrical silicon ingot block side stripping initiation position, the cut being A pair of pressurized coolant supply pads 96a and 96b are formed on the front and rear surfaces with the rotary cutting blade interposed at the upper position of the work, and the supply pipe 96k of the pressurized liquid supplied by the pump 96p is divided into two branches. (96k ₁ , 96k ₂ ) and the rotary cutting blade left and right shake magnetic compensation mechanism 96 in which the tip of each branched supply pipe is faced to the liquid storage space 96v of the pair of pressurized coolant supply pads 96a and 96b. (See Figures 5 and 6).

The branch pipes 96k ₁ and 96k _{2 are} provided with pressure regulating throttle valves 96z and 96z. In addition, the cooling liquid in the cooling liquid storage tank 96t is supplied to the supply pipe 96k by driving the pump 96p. As shown in FIG. 4, a pair of heat-resistant resin pressurized coolant supply pads 96a and 96b such as poly (tetrafluoroethylene), nylon 6, 10, PEEK, and glass fiber reinforced epoxy resin are shown on the outer peripheral edges 91a and 91b. It may further form on the ingot block feeding side, and may increase the cooling efficiency of a peripheral blade and the left-right shake self-compensation ability. As for the distance between the outer peripheral edges 91a and 91b diameter surface and the liquid storage space flange of the said pressurized cooling liquid supply pad 96a, 96b, 0.01-0.05 mm is preferable. The shape of the pressurized cooling liquid supply pads 96a and 96b may be an air type or a square shape. The flanges 96f and 96f supporting the pressurized coolant supply pads 96a and 96b are fixed to the inner wall of the rotary cutting edge protection cover 91c. As for the pressure of the pressurized cooling liquid supplied to the supply pipe 96k by the pump 96p, 20-20 Kgf / cm <2>, and 2-20 liter / min of coolant amount are preferable.

Returning to FIG. 1 and FIG. 2, the ingot block conveyance mechanism 13 and the ingot stocker 14 constituting the loading / unloading stage 8R together with the clamp mechanism 7 are formed of the work table 4. It is attached to the front side. The structure of the ingot block conveyance mechanism 13 and the ingot stocker 14 is disclosed in detail in FIGS. 1-5 of Unexamined-Japanese-Patent No. 2011-136382 by this patent applicant. This ingot block conveyance mechanism 13 and the ingot stocker 14 can be obtained in a market.

The said ingot block conveyance mechanism 13 clamps one ingot block stored in the V-shaped shelf end of the work stocker 14 with a pair of hooks, and hangs up a workpiece | work by raising both hooks, and then , Retreat, move in the right direction, descend, position in front of the load port 8, and retract again to move the workpiece from the load port 8 between the spindle 7a and the tail stock 7b of the clamping device 7. Bring in After one end of the work is brought into contact with the center support shaft 7a ₁ of the spindle 7a, the tail stock 7b is moved to the right with the air cylinder 7e, and the other end is attached to the center support shaft 7b ₁ . Abut and support the work with the work suspended in the air. Subsequently, the two hooks are spaced apart to open the grip of the work, and then the holding table supporting both the hooks is raised, moved to the left direction, and retracted to the front side again so that both hooks are moved in the ingot block conveyance mechanism 13. Return to the standby position.

The side stripping slicing stage 90 includes a clamp device 7, left and right moving guide rails 3 and 3 for a work table 4 on which the clamp device 7 is mounted, and a headstock of the clamp mechanism ( One pair (91a, 91b) of rotary cutting edges bearing on one pair of spindle shafts (92a, 92b) that are movable back and forth with the workpiece support shafts (7a ₁ , 7b ₁ ) of the tailstock 7b interposed therebetween. It is composed of a slicing head 9 formed before and after the work table with the work table interposed so that the diameter faces thereof.

As shown in FIG. 4 and FIG. 6, the clamp mechanism 7 consists of the main shaft 7a and the tail stock 7b which can hold | maintain the workpiece | work w in a horizontal direction, and the said main shaft 7a. And the auxiliary support 7'a ₁₁ , 7 'at the left end or the right end of the work at positions lower than the respective center support shafts 7a ₁ , 7b ₁ on the main shaft face and the tailstock face facing each other. Auxiliary support mechanisms 7'a ₁ , 7'a ₁ , 7'b ₁ , 7'b ₁ , which b ₁₁ ) can move in a straight line, are formed. The linear moving means of the auxiliary supports 7'a ₁₁ and 7'b ₁₁ may be any of a cylinder mechanism and a combination mechanism of a motor and a ball screw. It said support shaft (support shaft work) lower than the position (7a _1, 7b ₁₎ is preferably a work section position extending over the slit width is defined by the rotating cutting blade.

The front and rear movement of the rotary cutting blades 91a and 91b is carried out with tool tables 94t and 94t equipped with servo motors 93m and 93m for rotating the spindle shafts 92a and 92b bearing the rotary cutting blades 91a and 91b. Is rotated by a motor drive ball screw (not shown) with the motors 94m and 94m. The moving direction of the forward or backward movement of the tool table 94t depends on whether the rotation axis of the servo motor 94m is a clockwise rotation or a counterclockwise rotation.

The pair of rotary cutting edges 91a and 91b are bearings on the pair of spindle shafts 92a and 92b, and these spindle shafts are driven and rotated by the servo motors 93m and 93m, thereby rotating cutting blades 91a and 91b. ) Is rotated with respect to the workpiece at the rotational speed of 50 to 7,500 min ^{- 1} in the same clockwise rotation direction (the rotation directions of both spindle axes are opposite to each other). The spindle axes 92a and 92b are movable to the surface stripping start position of the ingot block by moving the tool tables 94t and 94t back and forth. The spindle shafts 92a and 92b have a pair of rotary cutting edges 91a and 91b opposed to each other with the workpiece cutting shafts 7a ₁ and 7b ₁ of the clamp mechanism interposed therebetween. Further, the rotary cutting blade shaft cores 92a and 92b are positioned on the guide rails 3 and 3 such that the rotary cutting blade shaft cores 92a and 92b are positioned at a position above the height position of the work support shaft C axis. It forms before and behind with respect to, and comprises the side stripping slicing stage 90 of a cylindrical ingot block.

The work table 4 is movable at a speed of 5 to 200 mm / minute, and the lifting and lowering of the rotation shafts 92a and 92b is capable of moving up and down to 100 mm.

As the said rotary cutting blades 91a and 91b, a diamond fine particle is 5-10 mm in width, 1.2-2.5 in diameter at the outer peripheral edge (thickness 1.0-2.0 mm) of the steel sheet of 450-600 mm in diameter, and 1-2 mm in thickness. A diamond cutter electrodeposited in mm is used.

By moving the worktable 4 which mounts the clamp mechanism 7 which clamps the C axis | shaft of a workpiece to the horizontal direction to the left direction, the front and back of a workpiece cross section contact a pair of rotary cutting edges 91a and 91b, and these rotations The surface stripping cutting process which peels thinly the cylindrical workpiece front surface and back surface to circular arc shape by a cutting blade is performed. In this surface stripping cutting process, cooling liquid is supplied to the rotary cutting blades 91a and 91b from the rotary cutting blade left and right shake magnetic compensation mechanisms 96. When the surface stripping cutting process of the front and back surfaces of a workpiece | work is complete | finished, the support shaft of the spindle 7a of the clamp mechanism 7 is rotated 90 degrees, and centering the circular arc surface of the workpiece | work which surface stripping cutting process was not performed in the front-back position (position Next, the work table 4 is moved to rotate the pair of rotary cutting edges 91a and 91b with the servo motors 93m and 93m to perform the remaining surface stripping cutting process. The surface stripping cutting time of the four sides of the cylindrical ingot block is a cylindrical single crystal silicon having a diameter of 200 mm and a height of 250 mm for 10 to 20 minutes, a diameter of 200 mm, and a height of 500 mm in a cylindrical single crystal silicon ingot block. This can be done in ingot blocks for 22 to 27 minutes.

The method of performing the four side stripping cutting process of a workpiece | work (cylindrical single crystal silicon ingot block) using the said cutting device 1, and processing it into a square columnar ingot block is performed through the following process.

(1) A holding table for holding one work mounted on the stocker 14 with both hooks using the transport mechanism 13 of the work w in the loading stage 8R, and then supporting both hooks ( 13f) is raised and moved to the left direction, and the slide surface 13s of the fixing base 13f, which is screwed on the back surface to the ball screw rotated and driven by the servo motor, on the guide rail 13g formed on the side of the column. Slides into the load port 8 side, and then the work spindle with the encoder having a function of lowering the work by driving the air cylinder 13p to rotate around the rotation C axis of the clamp mechanism 7 ( After carrying in between 7a) and the tailstock 7b, the tailstock is advanced and the workpiece | work w is clamped to the clamp mechanism 7.

(2) C axis one rotation while irradiating a laser beam toward the C axis of the workpiece from the displacement sensor provided at the front side of the sandwiched workpiece w, and reading the C axis rotation angle by the motor of the main shaft of the clamp device with the encoder. It rotates (360 degree) and displays the correlation of a rotation angle and a pulse peak.

(3) Select an angle θ of any one of the encoder rotation angles representing the four pulse peaks displayed, and this angle is the position of the encoder rotation angle 45 ° with respect to the radial cutting blade radial direction (cutting start C axis position) The C axis is rotated so as to be located at the center of the cut crystal orientation position of the workpiece.

(4) The work table 4 on which the clamp mechanism 7 is mounted is moved in the direction in which the pair of rotary cutting edges 91a and 91b to be rotated moves the pair of rotary cutting edges 91a and 91b. The height h of the front and back surface of the workpiece | work w by an outer peripheral edge is given the groove | channel processing of the length exceeding h / 2 1-3 mm. At the time of this groove processing, the pump 96p is pumped into the liquid storage space 96v of the pair of pressurized coolant supply pads 96a and 96b by the rotary cutting blade left and right shaking magnetic compensation mechanism 96 on the front and rear surfaces of the rotary cutting blade. Cooling liquid of 20-35 Kgf / cm <2> pressure is supplied at the ratio of 2-20 liter / min using (refer to I of FIG. 7).

(5) The C axis of the cylindrical ingot block is rotated by 180 ° using the servo motor of the spindle 7a (see II in FIG. 7).

6, each of the auxiliary support supports the auxiliary mechanism (7'a _1, 7'a ₁₎ and the secondary support mechanism of the tail stock _{(7b) (7'b 1, 7'b} 1) of the headstock (7a) 7'a ₁₁ and 7'b ₁₁ are linearly moved to abut against the cylindrical work end to sandwich the lower end of the cylindrical work end (see FIG. 6).

(7) The work table 4 mounting the clamp mechanism 7 is moved in the direction of the pair of rotary cutting edges 91a and 91b to rotate to the pair of rotary cutting edges 91a and 91b. The groove of length exceeding 1/2 is performed by the height of the front and back surface of a cylindrical ingot block by this, and the circular arc side surface of the front and back of a cylindrical ingot block is cut | disconnected. In this cutting process, the liquid storage space 96v of the pair of pressurized coolant supply pads 96a and 96b is formed on the front and rear surfaces of the rotary cutting blades 91a and 91b by the rotary cutting blade left and right swing magnetic compensation mechanism 96. ), The cooling liquid of 20-35 Kgf / cm <2> pressure is supplied in the ratio of 2-20 liter / min using the pump 96p.

8, each of the auxiliary support supports the auxiliary mechanism (7'a _1, 7'a ₁₎ and the secondary support mechanism of the tail stock _{(7b) (7'b 1, 7'b} 1) of the headstock (7a) (7'a ₁₁ , 7'b ₁₁ ) is retracted and moved away from the cylindrical work end side to open the clamping portion of the lower end of the cylindrical work end, and the two cut sides are dropped (see III in Fig. 7).

(9) The C axis of the cylindrical ingot block cut in two sides is rotated by 90 ° using the servo motor of the main shaft 7a (see IV in FIG. 7).

(10) A cylindrical shape by the pair of rotary cutting edges 91a and 91b by moving the work table on which the clamp mechanism 7 is mounted in the direction of the pair of rotary cutting edges 91a and 91b to rotate. Groove processing of length exceeding 1/2 is performed on the height of the remaining front and rear surfaces of the ingot block. In this groove processing, the liquid storage space 96v of the pair of pressurized coolant supply pads 96a and 96b is formed on the front and rear surfaces of the rotary cutting blades 91a and 91b by the rotary cutting blade left and right shake magnetic compensation mechanism 96. Cooling liquid of 20-35 Kgf / cm <2> pressure is supplied in the ratio of 2-20 liter / min using the pump 96p (refer to V of FIG. 7).

(11) Next, the C axis of the cylindrical ingot block is rotated 180 ° using the servo motor of the main shaft 7a (see VI in FIG. 7).

12, each auxiliary support supports the auxiliary mechanism (7'a _1, 7'a ₁₎ and the secondary support mechanism of the tail stock _{(7b) (7'b 1, 7'b} 1) of the headstock (7a) 7'a ₁₁ and 7'b ₁₁ are linearly moved to abut against the work end of the cylindrical ingot block to sandwich the lower end of the work end.

(13) The work table 4 on which the clamp mechanism 7 is mounted is moved in the direction of the pair of rotary cutting edges 91a and 91b to be rotated to the pair of rotary cutting edges 91a and 91b. The height of the front and rear surfaces of the cylindrical ingot block (work) is increased by a groove length exceeding 1/2, and the arcuate side surfaces of the front and rear surfaces of the ingot block are cut and processed into a square columnar ingot block. In this cutting process, the liquid storage space 96v of the pair of pressurized coolant supply pads 96a and 96b is formed on the front and rear surfaces of the rotary cutting blades 91a and 91b by the rotary cutting blade left and right swing magnetic compensation mechanism 96. ), The cooling liquid of 20-35 Kgf / cm <2> pressure is supplied in the ratio of 2-20 liter / min using the pump 96p (refer FIG. 7).

14, each auxiliary support supports the auxiliary mechanism (7'a _1, 7'a ₁₎ and the secondary support mechanism of the tail stock _{(7b) (7'b 1, 7'b} 1) of the headstock (7a) (7'a ₁₁ , 7'b ₁₁ ) retreats so that it may move away from the said work end side, the clamping of the lower end of the said work end is open | _released , and the cut | disconnected 2 side surface is dropped to obtain a square pillar shaped workpiece | work.

(15) The work table 4 is moved to the clamp mechanism standby stage 70, and the square pillar-shaped block is gripped by the hook of the conveyance mechanism 13 of the ingot block w in the loading / unloading stage 8R. Then, the tail stock 7b is retracted to release the restraint of the square pillar block by the clamp mechanism 7.

(16) Both hooks of the transfer mechanism 13 of the ingot block are shifted onto the stocker 14, and then both hooks are opened to mount the square column-shaped block on the shelf on the stocker 14.

As a processing method of another aspect which performs the four side stripping cutting process of a cylindrical single crystal silicon ingot block (work) using the said cutting device 1, and processes it into a square columnar ingot block, you may substitute by the following process.

(1) One cylindrical silicon ingot block (work) mounted on the stocker 14 is gripped with both hooks using the conveying mechanism 13 of the cylindrical ingot block in the loading stage 8R, and then The slide surface 13s of the said support base 13f which raised the support stand 13f which supports both hooks, moved to the left direction, and screwed the back surface to the ball screw rotated and driven by a servo motor was attached to the column side surface. The guide rail 13g formed is slid to enter the load port 8 side, and then the cylindrical ingot block is lowered by the drive of the air cylinder 13p to rotate around the rotation C axis of the first clamp mechanism 7. After carrying in between the headstock 7a and the tailstock 7b with the encoder having a function of rotating, the tailstock is advanced to clamp the cylindrical silicon ingot block w to the first clamp mechanism 7. .

(2) The laser beam is irradiated toward the C axis of the cylindrical single crystal silicon ingot block from a displacement sensor provided on the front side of the sandwiched cylindrical single crystal silicon ingot block, and the rotation angle of the C axis by the motor of the main shaft of the clamp device is encoder. The C axis is rotated by one rotation (360 °) while reading to display the correlation between the rotation angle and the pulse peak.

(3) Select an angle θ of any one of the encoder rotation angles representing the four pulse peaks displayed, and this angle is the position of the encoder rotation angle 45 ° with respect to the radial cutting blade radial direction (cutting start C axis position) The C axis is rotated so as to be located at the center of the crystal orientation position of the cylindrical single crystal silicon ingot block.

(4) The work table 4 on which the clamp mechanism 7 is mounted is moved in the direction in which the pair of rotary cutting edges 91a and 91b to be rotated moves the pair of rotary cutting edges 91a and 91b. The height h of the front and rear surfaces of the cylindrical silicon ingot block w by the outer circumferential edge is subjected to groove processing having a length exceeding h / 2 by 1 to 3 mm. At the time of this groove processing, the pump 96p is pumped into the liquid storage space 96v of the pair of pressurized coolant supply pads 96a and 96b by the rotary cutting blade left and right shaking magnetic compensation mechanism 96 on the front and rear surfaces of the rotary cutting blade. Cooling liquid of 20-35 Kgf / cm <2> pressure is supplied at the ratio of 2-20 liter / min using (refer to I of FIG. 8).

(5) The C axis of the cylindrical ingot block is rotated 90 ° using the servo motor of the main shaft 7a (see II in FIG. 8).

(6) The work table 4 on which the clamp mechanism 7 is mounted is moved in the direction of the pair of rotary cutting edges 91a and 91b to be rotated to the pair of rotary cutting edges 91a and 91b. The groove processing of the length exceeding 1/2 is performed for the height of the front-back surface of the cylindrical ingot block by this. In this groove processing, the liquid storage space 96v of the pair of pressurized coolant supply pads 96a and 96b is formed on the front and rear surfaces of the rotary cutting blades 91a and 91b by the rotary cutting blade left and right swing magnetic compensation mechanism 96. ), A cooling liquid at a pressure of 20 to 35 Kgf / cm 2 is supplied at a rate of 2 to 20 liters / minute using a pump 96p (see III in FIG. 8).

(7) Next, the C axis of the cylindrical workpiece having four grooves is rotated by 90 ° using the servo motor of the main shaft 7a (see IV in FIG. 8).

8, each of the auxiliary support supports the auxiliary mechanism (7'a _1, 7'a ₁₎ and the secondary support mechanism of the tail stock _{(7b) (7'b 1, 7'b} 1) of the headstock (7a) 7'a ₁₁ and 7'b ₁₁ are linearly moved to abut against the cylindrical work end to sandwich the lower end of the cylindrical work end (see FIG. 6).

(9) The work table 4 on which the clamp mechanism 7 is mounted is moved in the direction of the pair of rotary cutting edges 91a and 91b to be rotated to the pair of rotary cutting edges 91a and 91b. The groove of length exceeding 1/2 is performed by the height of the front and back surface of a cylindrical ingot block by this, and the circular arc side surface of the front and back of a cylindrical ingot block is cut | disconnected. In this cutting process, the liquid storage space 96v of the pair of pressurized coolant supply pads 96a and 96b is formed on the front and rear surfaces of the rotary cutting blades 91a and 91b by the rotary cutting blade left and right swing magnetic compensation mechanism 96. ), The cooling liquid of 20-35 Kgf / cm <2> pressure is supplied in the ratio of 2-20 liter / min using the pump 96p (refer V in FIG. 8).

10, each auxiliary support supports the auxiliary mechanism (7'a _1, 7'a ₁₎ and the secondary support mechanism of the tail stock _{(7b) (7'b 1, 7'b} 1) of the headstock (7a) (7'a ₁₁ , 7'b ₁₁ ) is retracted and moved away from the cylindrical work end side to open the clamping of the lower end of the cylindrical work end, and falls the cut 2 side surface.

(11) Then, the C axis of the work is rotated 90 ° or -270 ° using the servo motor of the main shaft 7a (see VI in FIG. 8).

12, each auxiliary support supports the auxiliary mechanism (7'a _1, 7'a ₁₎ and the secondary support mechanism of the tail stock _{(7b) (7'b 1, 7'b} 1) of the headstock (7a) 7'a ₁₁ and 7'b ₁₁ are linearly moved to abut the work end to sandwich the lower end of the work end.

(13) The work table 4 on which the clamp mechanism 7 is mounted is moved in the direction of the pair of rotary cutting edges 91a and 91b to be rotated to the pair of rotary cutting edges 91a and 91b. The groove of length exceeding 1/2 is performed by the height of the front and back surface of a cylindrical ingot block by this, and the circular arc side surface of the front and back of a cylindrical ingot block is cut | disconnected. In this cutting process, the liquid storage space 96v of the pair of pressurized coolant supply pads 96a and 96b is formed on the front and rear surfaces of the rotary cutting blades 91a and 91b by the rotary cutting blade left and right swing magnetic compensation mechanism 96. ), The cooling liquid of 20-35 Kgf / cm <2> pressure is supplied at the ratio of 2-20 liter / min using the pump 96p (refer FIG. 8).

14, each auxiliary support supports the auxiliary mechanism (7'a _1, 7'a ₁₎ and the secondary support mechanism of the tail stock _{(7b) (7'b 1, 7'b} 1) of the headstock (7a) (7'a ₁₁ , 7'b ₁₁ ) moves backward so that it may move away from the said work end side, the clamping of the lower part of the said work end is open | _released , and the cut | disconnected 2 side surface is dropped and the square columnar workpiece w is obtained.

As mentioned above, although the cylindrical silicon ingot block was demonstrated as an example as a workpiece | work w, a log, a sapphire round bar, a ceramic round bar, a copper powder blended epoxy resin round bar, an engineering plastic round bar, etc. can also be used.

The side stripping cutting apparatus 1 of the cylindrical ingot block of this invention, and the method of processing into a square pillar-shaped block using it are the diamond edge tips 91a and 91b width (thickness of a blade) 1 whose 1.2-2.5 mm is used. Since the use of the rotary cutting blade was made possible by using the combination of the rotary cutting blade left and right shake magnetic compensation mechanism 96 and the half cut method, the generation amount of the cutting chips of the ingot block can be reduced.

1: cutting device
C: C axis (work shaft of clamping device)
w: work (cylindrical ingot block)
3: guide rail
4: work table
7: clamp mechanism
7a: headstock
7'a ₁ : Auxiliary Support Mechanism
7'a ₁₁ : auxiliary support
7b: tailstock
7'b ₁ : Assistive Support Mechanism
7'b ₁₁ : auxiliary support
8R: Loading / Unloading Stage
13: ingot block conveying mechanism
14: stalker
70: Clamp Mechanism Standby Position Stage
90: slicing stage
91a, 91b: rotary cutting blade
92a, 92b: tool axis
96: rotating cutting blade left and right shake magnetic compensation mechanism
96a, 96b: pad

Claims (3)

a) a work table formed to reciprocate in a left-right direction on a guide rail formed in a left-right direction on a machine casing,
b) a clamp mechanism consisting of a pair of spindle headstock and tailstock mounted separately on the work table from side to side, wherein the spindle headstock and tailstock face each other on a headstock face and tailstock face lower than their respective support shafts; A clamp mechanism formed on the left end or the right end of the auxiliary support mechanism, the auxiliary support mechanism capable of linearly contacting each other;
c) a drive mechanism for reciprocating the work table in the horizontal direction, on which the work supported by the clamp mechanism is placed;
d) from the right direction to the left direction in the direction of viewing the work table from the front side of the compound chamfering processing apparatus;
e) loading / unloading stage of cylindrical ingot block,
f) a standby position stage of the clamp mechanism formed behind the loading / unloading stage,
g) a side stripping slicing stage of a work (cylindrical ingot block) formed before and after the guide rail so that the pair of rotary cutting edges face each other with the rotary cutting edge diameter faces between the workpiece supporting shafts of the clamp mechanism,
And
h) at an inner position of the cylindrical ingot block side stripping initiation position, and at an upper position of the cylindrical silicon ingot block to be cut, inside the diamond edge of the outer peripheral edge of the rotary cutting edge positioned in the side stripping slicing stage. A pair of pressurized coolant supply pads are formed on the front and rear surfaces with the rotary cutting blade interposed therebetween, and the feed pipes of the pressurized liquid supplied by the pump are bifurcated, and the ends of each of the branched supply pipes are connected to each other. The four-side stripping cutting device of the cylindrical ingot block characterized by forming the rotating cutting blade left and right shake magnetic compensation mechanism which faced the liquid storage space of the pressurized coolant supply pad. As a method of clamping a cylindrical workpiece using the four side stripping cutting device according to claim 1, and cutting the workpiece into a square pillar-shaped workpiece,
(1) bringing in between the headstock and the tailstock of the clamp mechanism at the loading / unloading stage, and then advancing the tailstock to grip the cylindrical work by the clamp mechanism;
(2) The length exceeding 1/2 of the height of the front and rear surfaces of the cylindrical workpiece by the pair of rotary cutting edges by moving the work table on which the clamp mechanism is mounted in the direction of the pair of rotary cutting edges to rotate. Performing groove processing of the grooves, during which the cooling liquid is supplied to the front and rear surfaces of the rotary cutting blade from the rotary cutting blade left and right swing magnetic compensation mechanisms,
(3) next, rotating the C axis of the cylindrical workpiece by 180 ° using the servo motor of the spindle;
(4) linearly moving the auxiliary support mechanism of the main shaft and the auxiliary support mechanism of the tail stock so that each of the auxiliary supports abuts on the cylindrical work end, and sandwiching the lower portion of the cylindrical work end;
(5) Moving the worktable which mounts the said clamp mechanism in the direction of the said pair of rotary cutting blades, and exceeding the height of the front-back surface of the cylindrical workpiece by the said pair of rotary cutting blades more than 1/2. Performing groove processing of length and cutting the circular arc side surfaces before and after the cylindrical workpiece, wherein, during this cutting operation, the coolant is supplied to the front and rear surfaces of the rotary cutting blade from the rotary cutting blade left and right swing magnetic compensation mechanisms. ,
(6) retracting the auxiliary support mechanism of the main shaft and the auxiliary support mechanism of the tailstock so that each of the auxiliary supports are separated from the cylindrical work end side to open the pinch under the cylindrical work end, and dropping the two cut sides; ,
(7) then, rotating the C axis of the workpiece, whose two sides are cut, by 90 ° using the servo motor of the spindle;
(8) Moving the work table on which the clamp mechanism is mounted in the direction of the rotating pair of rotary cutting blades to exceed the height of the remaining front and rear surfaces of the workpiece by the pair of rotary cutting blades of more than 1/2; Performing groove processing of length, during which the cooling liquid is supplied to the front and rear surfaces of the rotary cutting blade from the rotary cutting blade left and right swing magnetic compensation mechanisms,
(9) then rotating the C axis of the work by 180 ° using the servo motor of the spindle;
(10) linearly moving the auxiliary support mechanism of the main shaft and the auxiliary support mechanism of the tailstock so that each of the auxiliary supports is brought into contact with the work end;
(11) A length exceeding 1/2 of the height of the front and rear surfaces of the workpiece by the pair of rotary cutting blades by moving the work table for mounting the clamp mechanism in the direction of the pair of rotary cutting blades to rotate. Performing groove processing, and cutting the arc-shaped side surfaces before and after the cylindrical workpiece, wherein, during this cutting process, the coolant is supplied to the front and rear surfaces of the rotary cutting blade from the rotary cutting blade left and right swing magnetic compensation mechanisms,
(12) The auxiliary support mechanism of the headstock and the tail support mechanism of the tailstock are retracted to move away from each side of the cylindrical work end to open the pinch of the lower end of the cylindrical work end, and the two cut sides are dropped to form a square. A method of cutting, comprising the step of obtaining a columnar workpiece. As a method of clamping a cylindrical workpiece using the four side stripping cutting device according to claim 1, and cutting the workpiece into a square pillar-shaped workpiece,
(1) bringing in between the headstock and the tailstock of the clamp mechanism at the loading / unloading stage, and then advancing the tailstock to grip the cylindrical work by the clamp mechanism;
(2) The length exceeding 1/2 of the height of the front and rear surfaces of the cylindrical workpiece by the pair of rotary cutting edges by moving the work table on which the clamp mechanism is mounted in the direction of the pair of rotary cutting edges to rotate. Performing groove processing of the grooves, during which the cooling liquid is supplied to the front and rear surfaces of the rotary cutting blade from the rotary cutting blade left and right swing magnetic compensation mechanisms,
(3) next, rotating the C axis of the cylindrical workpiece by 90 ° using the servo motor of the spindle;
(4) Moving the worktable which mounts the said clamp mechanism in the direction of the said 1 pair of rotary cutting blades, and exceeding the height of the front-back surface of the cylindrical workpiece by the said 1 pair of rotary cutting blades more than 1/2. Performing groove processing of length, during which the cooling liquid is supplied to the front and rear surfaces of the rotary cutting blade from the rotary cutting blade left and right magnetic compensation mechanisms,
(5) then, rotating the C axis of the cylindrical workpiece having four grooves formed by 90 ° using the servo motor of the spindle;
(6) linearly moving the auxiliary support mechanism of the main shaft and the auxiliary support mechanism of the tailstock so that the respective auxiliary supports come into contact with the cylindrical work ends to sandwich the lower portion of the cylindrical work ends;
(7) Moving the worktable which mounts the said clamp mechanism in the direction of the said pair of rotary cutting blades, and exceeding the height of the front-back surface of the cylindrical workpiece by the said pair of rotary cutting blades more than 1/2. Performing groove processing of length, and cutting the arcuate side surfaces before and after the cylindrical workpiece, wherein, during this cutting operation, the coolant is supplied to the front and rear surfaces of the rotary cutting blade from the rotary cutting blade left and right swing magnetic compensation mechanisms. step,
(8) retracting the auxiliary support mechanism of the main shaft and the auxiliary support mechanism of the tail stock so that the respective auxiliary supports are separated from the work end side to open the pinch of the lower part of the work end, and dropping the two cut sides;
(9) then rotating the C axis of the work by 90 ° or -270 ° using the servo motor of the spindle;
(10) pinching the lower end of the work end by linearly moving the auxiliary support mechanism of the main shaft and the auxiliary support mechanism of the tail stock so that the respective auxiliary supports come into contact with the work end;
(11) A length exceeding 1/2 of the height of the front and rear surfaces of the workpiece by the pair of rotary cutting blades by moving the work table for mounting the clamp mechanism in the direction of the pair of rotary cutting blades to rotate. Performing groove processing, and cutting the arc-shaped side surfaces before and after the work, wherein during the cutting process, the coolant is supplied to the front and rear surfaces of the rotary cutting blade from the rotating cutting blade left and right magnetic compensation mechanisms,
(12) The auxiliary support mechanism of the headstock and the tail support mechanism of the tailstock are retracted to move away from each side of the work end to open the pinch of the lower part of the work end, and the two cut sides are dropped to form a square pillar. A method of cutting, comprising the step of obtaining a workpiece.

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