KR101342306B1 - Turbo molecular pump and particle trap for turbo molecular pump - Google Patents

Abstract

The turbomolecular pump includes a rotor 30 having a multi-stage rotating blade 32 and rotating at high speed, a plurality of fixed blades 33 alternately arranged in the pump axial direction with respect to the rotating blade 32, and a rotating blade. The pump housing 34, which accommodates the 32 and the fixed blade 33, and has an inlet port 21a formed thereon, and is formed closer to the inlet port side of the rotor 30, and on the inner diameter side of the rotor blade base than the source of the rotating blade. The disk 150 which is arrange | positioned so that it may oppose, and the cylindrical net structure 153a, 153b arrange | positioned between the inlet port 21a and the rotor 30 and intertwined with the fine wire, and the particle scattered by the rotor net It captures inside the structures 153a and 153b.

Description

Particle traps for turbomolecular pumps and turbomolecular pumps {TURBO MOLECULAR PUMP AND PARTICLE TRAP FOR TURBO MOLECULAR PUMP}

The present invention relates to turbomolecular pumps and particle traps for turbomolecular pumps.

Turbomolecular pumps are used in etching processes such as semiconductor production and CVD processes. When particles, such as a reaction product, flow in into the turbomolecular pump from the vacuum chamber in which these processes are performed, a particle may be scattered by the rotor which rotates at high speed, and the peninsula particle may reach the vacuum chamber in some cases. As a result, there is a problem that the peninsula particles adhere onto the wafer, which degrades the production yield of the semiconductor.

As a structure which reduces the backflow of such a peninsula particle to the vacuum chamber, the structure as described in patent documents 1-3 is proposed. In patent document 1, the vane which catches a particle is formed in the inner peripheral surface of a pump casing, and a particle is scattered in the vanishing direction by a rotating blade. In patent document 2, the trapping member which consists of a rubber material, a sponge material, a cotton material, etc. in a pump casing, and a buffer member with a small repulsion coefficient are formed. Moreover, in patent document 3, the planar body which consists of stainless steel felt and the felt of fluororesin is provided as a particle capture mechanism.

Japanese Unexamined Patent Publication No. 2006-307823 Japanese Unexamined Patent Publication No. 2007-211696 Japanese Unexamined Patent Publication No. 2007-180467

However, there is a problem in that the capturing members such as disappearance, rubber material, sponge material, cotton material, and felt cannot be sufficiently captured. Moreover, in the structure of patent document 3, since the disk shaped capture member is formed in the vicinity of the inlet port, there exists a fault that the exhaust velocity fall by forming a capture member is large.

A first aspect of the turbomolecular pump according to the present invention comprises a rotor having a multi-stage rotating blade and rotating at high speed, a plurality of fixed blades alternately arranged in the pump axial direction with respect to the rotating blade, the rotating blade and the fixed blade. A pump housing having an intake port formed therein, a disk formed closer to the intake port side of the rotor and disposed so as to face an inner diameter side than the source of the rotating blade of the rotor, and a cylindrical net formed between the intake port and the rotor and intertwined with fine wires The structure is provided, and the particles scattered by the rotor are captured inside the mesh structure.

Moreover, you may be provided with two or more plate-like net structures arrange | positioned radially with respect to a cylindrical net structure and perpendicular | vertical to a pump inlet port.

A second aspect of the turbomolecular pump according to the present invention comprises a rotor in which a multi-stage rotating blade is formed and rotates at high speed, a plurality of fixed blades alternately arranged in the pump axial direction with respect to the rotating blade, the rotating blade and the fixed blade. A pump housing having an intake port formed therein; a disk formed near the intake port side of the rotor and arranged to face an inner diameter side of the rotor blade base; and a net structure formed along the inner wall of the pump housing and intertwined with fine wires. Equipped.

In addition, it may be provided with a protective net which is formed so as to surround the disk and the disk, and has a net area in which a plurality of openings are formed, and prevents foreign matter from entering the pump housing through the inlet.

Moreover, you may comprise the net structure by arrange | positioning the cloth-shaped net formed by weaving fine wire in layer form.

In addition, the thin wire may be comprised with the stainless steel thin wire, and may be comprised with the alumina silica fiber whose ratio of silica is 6 to 10%.

A third aspect of the turbomolecular pump according to the present invention is a casing having a first flange connected to an inlet flange of a turbomolecular pump and a second flange connected to an exhaust flange on the vacuum apparatus side, and a turbomolecular body disposed within the casing. And a cylindrical net structure formed by weaving fine wires to trap particles scattered by the rotor of the pump therein.

The disk may be provided on the first flange side so as to face the upper surface of the rotor of the turbomolecular pump, and has a disk whose diameter is equal to or smaller than the diameter of the rotational blade base of the rotor of the turbomolecular pump.

It also has a circular region whose diameter dimension is equal to or less than the diameter of the rotary blade base of the rotor of the turbomolecular pump, and a net region formed to surround the circular region and having a plurality of openings formed therein, and into the turbomolecular pump through the inlet flange. A protective net may be provided to prevent foreign matter from entering.

Moreover, you may arrange | position radially with respect to a cylindrical mesh structure, and may provide two or more plate-shaped network structures along the axial direction of a 1st and 2nd flange.

In addition, the thin wire may be comprised with the stainless steel thin wire, and may be comprised with the alumina silica fiber whose ratio of silica is 6 to 10%.

According to the present invention, it is possible to provide a turbomolecular pump which prevents backflow of peninsula particles while suppressing a decrease in exhaust speed.

1 is a cross-sectional view showing a schematic configuration of a turbomolecular pump according to the present invention.
2 is a diagram showing a schematic configuration of a CVD film-forming apparatus on which the turbo molecular pump 10 is mounted.
3 is an enlarged view of a portion where the baffle 15 of the turbomolecular pump is formed.
4 is a perspective view of the baffle 15.
5 is a view showing the baffle 15 seen from the intake port side.
FIG. 6: is a figure explaining the net structure 153 of a laminated structure, FIG. 6 (a) is an exploded perspective view of the net structure 153, and FIG. 6 (b) is a figure which shows the net 155. FIG.
FIG. 7: is a figure which shows a modification, FIG.7 (a) shows a 1st modification and FIG.7 (b) shows a 2nd modification.
FIG. 8 is a diagram showing a mesh structure 153 in the case where the pump casing 34 is cylindrical, and FIG. 8A shows a case where the mesh structure 153 is formed on the baffle, and FIG. ) Represents the case where the mesh structure 153 is formed on the inner circumferential surface of the pump casing 34.
9 is a diagram illustrating a second embodiment.
10 is a plan view of the protection net 101.
FIG. 11: is a figure which shows the structure of the particle trap unit 100 when the protective net 101 is formed in the turbo molecular pump side of the casing 102. FIG.
12 is a diagram illustrating a modification of the particle trap unit 100.
13 is a diagram illustrating a modification of the frame 152 and the mesh structure 153.

EMBODIMENT OF THE INVENTION Hereinafter, the best form for implementing this invention with reference to drawings is demonstrated.

First Embodiment

1 is a cross-sectional view showing a schematic configuration of a turbomolecular pump according to the present invention. In the pump casing 34, the rotor 30 is formed so that it may rotate freely. The turbomolecular pump 10 shown in FIG. 1 is a magnetic bearing pump, and the rotor 30 is non-contactedly supported by electromagnets 37 and 38 constituting a five-axis magnetic bearing. The rotor 30 magnetically floated by the magnetic bearing is driven to rotate at high speed by the motor 36.

The rotor 30 is provided with a plurality of rotary blades 32 and a cylindrical screw rotor 31. On the other hand, on the fixed side, a plurality of stages of the fixed blade 33 alternately arranged with the rotary blade 32 with respect to the axial direction, and the screw stator 39 formed on the outer circumferential side of the screw rotor 31 are formed. Each fixed blade 33 is mounted on the base 40 via the spacer ring 35. When the pump casing 34 having the inlet flange 21 is fixed to the base 40, the laminated spacer ring 35 is sandwiched between the base 40 and the pump casing 34 so that the fixed blade 33 is positioned. Is determined.

An exhaust port 41 is formed in the base 40, and a bag pump is connected to the exhaust port 41. By rotating the rotor 30 at high speed by the motor 36 while magnetically floating, the gas molecules on the inlet port 21a side are exhausted to the exhaust port 41 side.

FIG. 2 is a diagram showing an example of the semiconductor manufacturing apparatus 1 on which the turbo molecular pump 10 is mounted, showing a schematic configuration of a CVD film deposition apparatus. The turbo molecular pump 10 is attached to the exhaust port 4 formed in the lower part of the process chamber 2 via the gate valve 5. The process gas is supplied to the process chamber 2 by the gas supply part 6.

In such a film forming apparatus, particles of a submicron order are often generated due to chemical reaction of the film forming process, sliding of mechanical parts, or the like. When these particles enter the turbomolecular pump 10 through the inlet port 21a, they are scattered by the rotor rotating at high speed. As described above, when these peninsula particles reach the process chamber, the particles adhere onto the wafer, causing deterioration in the production yield of the semiconductor.

In order to reduce such adverse effects on semiconductor production of the peninsula particles, in the turbomolecular pump 10 of the present embodiment, a mechanism for capturing particles introduced from the intake port 21a before entering the rotor 30 and the rotor A baffle 15 having a mechanism for trapping the peninsula particles scattered at 30 was formed in the pump casing 34.

3 and 4 are diagrams illustrating the baffle 15. 3 is an enlarged view of a portion where the baffle 15 of FIG. 1 is formed. 4 is a perspective view of the baffle 15. The baffle 15 is attached to the flange 21 of the pump casing 34. As shown in FIG. 4, the baffle 15 includes a disc 150, a support 151, a frame 152, and a net structure 153. The frame 152 has a rib structure and has radial ribs 152c for connecting the inner ring 152a, the outer ring 152b, and the rings 152a and 152b.

The plurality of struts 151 are fixed to the inner circumferential surface of the inner ring 152a at equal intervals, and the disk 150 is fixed to the lower end of each strut 151. As shown in FIG. 3, the length of the support | pillar 151 is set so that the disk 150 may be arrange | positioned in the vicinity of the upper surface of the rotor 30. As shown in FIG. The rotor 30 is magnetically floated and rotates at high speed, but slightly up and down in the axial direction depending on the gas load. Therefore, the disk 150 is arrange | positioned in the position which does not contact the rotor 30 even if the rotor 30 moves up and down. Moreover, the outer diameter dimension of the disk 150 is set to below the diameter dimension of the base part of the rotating blade 32 so that the disk 150 may not block the upper direction of the rotating blade 32. As shown in FIG.

The plate-like net structure 153 is formed so as to cover the outer circumferential surface of the inner ring 152a, the inner circumferential surface of the outer ring 152b, and one surface of the radial rib 152c, as indicated by reference numerals 153a to 153c. In addition, arrangement | positioning of the mesh structure 153c shown in FIG. 4 is applied when the rotor 30 is a structure which rotates clockwise when viewed from the inlet port side. When the rotor 30 is rotated counterclockwise, it is preferable to attach the net structure 153c so that the opposite side surface of the radial rib 152c may be covered.

5 shows the baffle 15 seen from the intake port side. The broken line shows the 1st-stage rotating blade 32 of the rotor 30. As shown in FIG. The particles that fall from the inlet port 21a into the pump and pass through the baffle 15 fall on the disk 150 in the center portion or on the rotary blade 32 that is outer peripheral than the disk 150. Particles dropped on the disc 150 remain on the disc and therefore do not return to the apparatus side.

On the other hand, particles dropped on the rotating blade 32 are scattered by the rotating blade 32 which rotates at high speed. In FIG. 5, the rotary blade 32 is rotated clockwise like the arrow R. Particles dropped on the rotary blade 32 are likely to scatter in the tangential direction because they are forced in the tangential direction. In Fig. 5, some of the trajectories P in the case where the particles were simply scattered in the tangential direction were shown. Since it scatters in a tangential direction in this way, it is thought that more penetrating particles enter the mesh structure 153b on the outer circumferential side.

The net structure 153 consists of the fine wires, such as a metal wire, weaved as mentioned later, and the magnitude | size of a mesh is larger than the particle | grain size. Thus, the peninsula particles incident on the mesh structure 153 revolve around some of the wires on the surface portion, but most of the particles penetrate into the structure and repeat the collision with the wires inside. By repeating the collision, the kinetic energy of the peninsula particle becomes small, and finally, it is captured inside the mesh structure 153.

6A illustrates an example of the mesh structure 153. As the mesh structure 153, a cloth net 155 constituting the mesh spring described in JP 2006-132741 is used, for example. As shown in FIG.6 (b), the net 155 knits fine metal wires, such as a stainless steel wire, by the knitting machine. In addition, you may use the thing which made the wave | bristle knitted net between crimping rollers, and formed it as the net 155. Instead of a fine metal wire net, a cloth formed by weaving alumina silica fibers made of alumina and silica may be used. In that case, in order to acquire moderate flexibility, it is preferable to make the ratio of silica into 6 to 10%. The method of weaving the fine metal wires is not limited to Meriyasu knitting, but may be plain weave.

Since the net structure 153 of this embodiment is comprised from the net 155 which woven the metal wire etc., the clearance gap is large compared with the conventional capture member which made the metal fiber the felt form. Therefore, the peninsula particles easily penetrate into the inside of the net structure 153 and are reliably captured.

On the other hand, in the case of a felt trapping member, short fibers are compressed to form a felt, so that the structure becomes more dense than the net 155, and the peninsular particles are less likely to enter the inside of the trapping member. Therefore, it is difficult for the high speed peninsula particle to make enough collisions to lose kinetic energy, so that the capture rate is lower than that of the net structure 153. As a result, the particles which are not captured are scattered again by the rotor 30 and flow back from the inlet port 21a to the process chamber side while repeating such a peninsula. That is, in the conventional structure in which the capture rate fell, the probability that a peninsula particle flows back to a process chamber becomes high.

In addition, in this embodiment, when the mesh | net with a coarse net 155 is laminated | stacked, it is easy to penetrate into the inside of the net structure 153 by the peninsula particle. In that case, the same mesh may be laminated, and what is close to the surface may make the mesh coarse, and may change the coarseness of the mesh with each layer so that it may be slightly denser with respect to the mesh of the inner layer in which a particle is captured. Moreover, when laminating relatively flat nets, such as a metal mesh, it is preferable to make a metal volume large and to make it penetrate easily inside a peninsula particle by laminating | stacking and laminating | stacking a metal mesh.

The disk 150 is formed to prevent particles from scattering on the upper surface (non-rotating blade portion) of the rotor 30. In this embodiment, since the disk 150 is arrange | positioned in the vicinity of the upper surface of the rotor 30, there is almost no difference in conductance with or without the disk 150, and the fall of the exhaust velocity by forming the disk 150 is reduced. It can prevent. Moreover, since the plate-shaped net structure 153 is formed perpendicular to the flange face so that the face faces immediately to the side, the opening ratio when viewed from the inlet port 21a can be made as large as possible, and the exhaust rate decrease can be suppressed. have. That is, the baffle 15 in the present embodiment can reliably capture the peninsula particles while minimizing the decrease in the exhaust speed.

7 is a diagram illustrating a modification of the present embodiment. In the 1st modification shown to FIG. 7A, the conductance fall by the baffle 15 is further made small, and it is set as the structure which places more importance on exhaust velocity. Therefore, the inner ring 152a and the radial rib 152c shown in FIG. 4 and the mesh structures 153a and 153c formed in them were omitted. A plurality of support beams 152d are formed radially from the outer ring 152b, and the support 151 is fixed to these support beams 152d.

As shown in Fig. 5, since the peninsula particles scattered by the rotor 30 proceed in the outer circumferential direction, the probability of penetrating the peninsula particles directly to the apparatus side is very small. That is, what is reflected in the pump several times is considered to flow back to the apparatus side. Therefore, even if the mesh structures 153a and 153c formed in the inner ring 152a and the radial ribs 152c are omitted, the decrease in particle capture rate may be considered small.

In the second modification shown in FIG. 7B, instead of the outer ring 152b and the net structure 153b shown in FIG. 7A, the net structure 153d is disposed on the inner circumferential surface of the pump casing 34. Formed directly. Also in this case, the fall of exhaust speed can be suppressed as much as possible.

In embodiment mentioned above, although the diameter became small so that the pump casing 34 might become constricted in the vicinity of a flange, the modification shown in FIG. 8 shows the case where the pump casing 34 is applied to a cylindrical pump. FIG. 8A corresponds to FIG. 3, and FIG. 8B corresponds to FIG. 7B. In the case of the structure of FIG. 8B, the net structure 153e disposed on the disk 150 and the inner surface of the pump casing is formed, but the outer ring 152b and the net structure 153b are formed as shown in FIG. 7A. Almost the same structure as in the case of forming a.

In addition, in embodiment mentioned above, although the frame 152 of the baffle 15 was made into the rib structure, it does not matter even if it is not a rib structure. Moreover, you may make it small the thermal emissivity of the surface of the disk 150, and to reduce the heat radiation effect between the process chamber and the rotor 30.

Second Embodiment

9 is a diagram showing a second embodiment of the present invention. In 1st Embodiment mentioned above, the particle | grain capture baffle 15 was formed in the pump casing 34 of a turbomolecular pump. However, not all turbomolecular pumps have the structure which attaches the baffle 15 as mentioned above in a pump casing. Therefore, in the second embodiment described below, even a turbomolecular pump having a configuration in which the baffle 15 is not attached to the pump casing, a particle trap unit that can be additionally attached will be described later.

9 shows a particle trap unit 100 mounted to a turbomolecular pump. The particle trap unit 100 is composed of a frame 152, a net structure 153, a casing 102, and a protective net 101. The frame 152 and the mesh structure 153 are the same as the frame 152 and the mesh structure 153 of the baffle 15 shown in FIG. That is, the particle trap unit 100 captures the peninsula particles scattered by the rotor 30 and prevents the peninsula particles from flowing back from the turbomolecular pump side to the apparatus side.

The frame 152 is fixed to the casing 102 by fastening the fixing part 152b to the casing 102 with the screw 105. The mesh structure 153 is attached to the frame 152. The casing 102 is provided with the flange 102a fixed to the flange 21 of the turbomolecular pump 10, and the flange 102b fixed to the apparatus side. For example, as shown in FIG. 2, when connecting the turbomolecular pump 10 to the process chamber 2 via the gate valve 5, the flange 102b of the apparatus side is connected to the gate valve 5. As shown in FIG. Connected. When the turbomolecular pump 10 is directly connected to the process chamber 2, the flange 102b is connected to the process chamber 2. In other words, the particle trap unit 100 is formed so as to be interposed between the turbomolecular pump 10 and the apparatus side.

The sealant (O-ring) 106 is attached to the flange 102b. When the flange 102b is fastened to the gate valve 5 by the bolt 104, the gap between the gate valve 5 and the flange 102b is sealed by the sealing material 106. On the other hand, on the flange 102a side, the seal member (O ring) 21b is attached to the flange 21 of the turbomolecular pump 10. When the flange 102a and the flange 21 are fastened by the bolt 103, the clearance gap between the flange 102a and the flange 21 is sealed by the sealing material 21b.

10 is a plan view of the protection net 101. The protection net 101 is formed from thin plates, such as stainless steel materials. The protection net 101 has the circular area | region 101a shown by the code | symbol A, and the circular-shaped net area | region 101b shown by the code | symbol B. As shown in FIG. In the net region 101b, a plurality of openings 101d are formed by etching. In the example shown in FIG. 10, 101 d of regular hexagon openings are formed in honeycomb shape. The circular region 101a is formed by performing circular masking at the time of etching. In the peripheral portion of the protective net 101, a screw hole 101c is formed.

In the case of the structure shown in FIG. 9, although the protection net 101 is being fixed to the ring part 210 of the flange 21 of the turbomolecular pump 10 by the screw 107, the flange (of the casing 102) ( It may be simply arranged in the gap between 102a) and the ring portion 210. Moreover, as shown in FIG. 11, you may fix with a screw to the flange 102a of the turbomolecular pump side of the casing 102, or you may fix it directly to the frame 152 directly.

The diameter of the circular area 101a of the protection net 101 is set to below the diameter dimension of the base part of the rotating blade 32 of the rotor 30, and the net area 101b opposes the rotating blade 32. As shown in FIG. Doing. The turbo molecular pump 10 exhausts the gas that has passed through the net region 101b. The net area | region 101b is formed in order to prevent the foreign matter (a fragment of a wafer, a part of apparatus side components, etc.) falling in a turbomolecular pump, and to damage the rotating blade 32 and the fixed blade 33. As shown in FIG. In addition, the circular area | region 101a of the protection net 101 has the same function as the disk 150 mentioned above, and is preventing the particle from the apparatus side falling to the upper surface of the rotor 30. As shown in FIG.

In the protective net 101 described above, the circular region 101a was formed by performing circular masking when the thin plate material was etched, but even after the whole was etched into the net, the disk may be placed in the center portion. do. Moreover, also when using the net in which the metal wire was incorporated as the protection net 101, the protection net 101 is formed by laying a disk in the center part.

In the example shown in FIG. 9, the particle trap unit 100 includes the protection net 101. However, in the case of a turbomolecular pump having a dedicated protective net, the particle trap unit 100 may be configured by components except for the protective net 101.

12 is a diagram illustrating a modification of the particle trap unit 100. In the particle trap unit 100 shown in FIG. 12, the disk 150 shown in FIG. 4 was formed instead of the protection net 101 of FIG. The disc 150 is fixed to the inner ring 152a by the support 151. As shown by the solid line, the axial position of the disc 150 may be in the casing 102, and as shown by the two-point lane, the support post 151 extends to the pump side, and the disc 150 may be moved to the rotor 30. You may arrange | position in the upper vicinity.

FIG. 13 shows a modification of the frame 152 and the mesh structure 153 disposed in the casing 102. In the frame 152, radial ribs 152e are formed inside the inner ring 152a. The net structures 153f and 153g were attached to the inner circumferential surface side and the radial rib 152e of the inner ring 152a. Thus, by forming the net structures 153f and 153g at the position opposite to the upper surface of the rotor 30, even if the disc 150 and the circular region 101a are omitted, the particles scattered from the upper surface of the rotor are net structure 153f. , 153g), and the reverse flow to the apparatus side can be prevented. In the case where the circular region 101a is omitted in FIG. 10, the opening 101d is also formed in the region indicated by the reference A. FIG. Moreover, by employ | adopting a structure as shown in FIG. 13, exhaust efficiency with respect to the gas molecule which enters inside of the inner ring 152a can be improved, and the fall of exhaust velocity can be suppressed.

By forming the particle trap unit 100 as shown in 2nd Embodiment, even if it is a turbomolecular pump in which the countermeasure of particle | grains was not implemented, the countermeasure with respect to the peninsula particle can be implemented without replacing a pump. In addition, by integrally forming a disk for preventing particle falling onto the upper surface of the rotor in the protection net for preventing the mixing of foreign matters, the increase in the number of parts can be suppressed and the increase in cost can be suppressed. In addition, also in 1st Embodiment, the protection net 101 shown in FIG. 10 can be used instead of the disk 150.

In the above, various embodiments and modifications have been described, but the present invention is not limited to these contents. Other aspects considered within the scope of the technical idea of the present invention are also included within the scope of the present invention.

The disclosure of the following priority basic application is incorporated herein by reference.

Japanese Patent Application No. 20091818 (filed Feb. 24, 2009)

Japanese Patent Application No. 2009251801 (filed November 2, 2009)

Claims (13)

A rotor having a multi-stage rotating blade and rotating at high speed,
A plurality of stationary blades alternately disposed in the pump axial direction with respect to the rotating blade;
A pump housing accommodating the rotary blades and the fixed blades and having an inlet;
A disk formed close to the inlet port side of the rotor and disposed to face an inner diameter side of the rotor rather than the base of the rotating blade;
A cylindrical net structure disposed between the inlet port and the rotor and formed by weaving fine wires,
A turbomolecular pump which traps particles scattered by the rotor inside the mesh structure. The method of claim 1,
A turbomolecular pump comprising a plurality of plate-like net structures disposed radially with respect to the cylindrical net structure and perpendicular to the pump inlet. A rotor having a multi-stage rotating blade and rotating at high speed,
A plurality of stationary blades alternately disposed in the pump axial direction with respect to the rotating blade;
A pump housing accommodating the rotary blades and the fixed blades and having an inlet;
A disk formed close to the inlet port side of the rotor and disposed to face an inner diameter side of the rotor rather than the base of the rotating blade;
Turbomolecular pump having a net structure formed along the inner wall of the pump housing and woven fine wire. The method according to any one of claims 1 to 3,
A turbomolecular pump having a net region formed to enclose the disk and the disk and having a plurality of openings, and having a protection net preventing foreign matter from entering the pump housing through the inlet. The method according to any one of claims 1 to 3,
The said net structure is a turbomolecular pump which arrange | positions the cloth-like net formed by weaving fine wire in layers. The method according to any one of claims 1 to 3,
Said thin wire is a turbomolecular pump comprised of stainless steel thin wire. The method according to any one of claims 1 to 3,
The said thin wire is a turbomolecular pump comprised from the alumina silica fiber whose ratio of a silica is 6 to 10%. A casing having a first flange connected to an inlet flange of a turbomolecular pump and a second flange connected to an exhaust port flange on the vacuum apparatus side;
A particle trap for a turbomolecular pump having a cylindrical net structure disposed in the casing and interwoven with fine wires to trap particles scattered by the rotor of the turbomolecular pump therein. The method of claim 8,
And a disk disposed on the first flange side so as to face the upper surface of the rotor of the turbomolecular pump and having a disk having a diameter dimension equal to or less than the diameter of the rotational blade origin of the rotor of the turbomolecular pump. The method of claim 8,
Into a turbomolecular pump through the inlet flange and having a circular region having a diameter dimension less than or equal to the diameter of the rotating blade origin of the rotor of the turbomolecular pump, and a net region formed with a plurality of openings surrounding the circular region. Particle traps for turbomolecular pumps with protective nets to prevent foreign matter from entering. 10. The method according to claim 8 or 9,
A particle trap for a turbomolecular pump, disposed radially with respect to the cylindrical mesh structure, and including a plurality of plate-shaped mesh structures along the axial direction of the first and second flanges. 10. The method according to claim 8 or 9,
The fine wire is a particle trap for a turbomolecular pump, which is composed of stainless fine wire. 10. The method according to claim 8 or 9,
The said fine wire is the particle trap for turbomolecular pumps comprised from the alumina silica fiber whose ratio of a silica is 6 to 10%.

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