TW475034B - Evacuation device - Google Patents

Abstract

The present invention provides an evacuation device, which comprises: a first vacuum pump; a one-way discharge valve and a filter. The first vacuum pump is connected to a vacuum chamber for reducing the pressure in the vacuum chamber; and the first vacuum pump is connected to a gas source for cleaning by providing a gas at a pressure higher than the outside pressure to remove the particles generated by the operation of the first vacuum pump. The one-way discharge valve is installed on the first vacuum pump and opens when the pressure in the first vacuum pump is higher than an outside pressure so that the gas inside the first vacuum pump flows through the one-way discharge valve and out of the first vacuum pump. The filter is installed between the one-way discharge valve and the first vacuum pump for filtering out the particles. When cleaning the first vacuum pump, the particles will be filtered by the filter before the particles reach the one-way discharge valve so that the opening/closing of the one-way valve will not be affected.

Description

475034

——— Case No. 8811MI— Amendment I. V. Description of the invention (1). 2. _____________________ One—J • The present invention relates to a vacuum pumping device, especially a method that can prevent the vacuum pumping caused by cleaning the internal devices. Failed evacuation device.

Among the semiconductor equipment, the evacuation device has been a very extensive device, often installed on an etch machine or a CVD machine (CVD machine) to provide a process station. Requires a vacuum degree of 咼. In order to speed up the evacuation speed, the evacuation device is mostly divided into two main devices, which are distinguished by the ability of evacuation. One is called the first vacuum pump (high vacuum pump) and the other is called the second vacuum pump (low vacuum pump) When a vacuum chamber is to be evacuated from atmospheric pressure, first insert the milk with the second true fruit to quickly reduce the pressure of the vacuum grab to a predetermined range Q a ^, then turn off the second empty pump, start the first vacuum pump, and then Reduce the vacuum chamber = gas S to a lower range for the process. The first vacuum pump may be low in type Z. The pump (cryopump) condenses the gas inside the liquid with liquid nitrogen (heart) or helium (He) and discharges it. It can make the pressure in the vacuum chamber straight to the hair and ears (ΐ0ΓΓ). ). The second vacuum pump may be a mechanical pump or the like. The working fruit ’uses a # wheel or a roller to discharge the gas, and it can only reach a pressure of about 10-1 to 10_5 torr. ^ 2 And with the increase of the use time, the condensation in the cryopump gradually accumulates some solids formed by gas condensation, which is like ice ig Shr '9 image' and thus slowly reduces the condensation performance of the cryopump. Therefore, the low temperature chestnuts will be regenerated for a period of time after a shortage of disasters-after a period of time, the water phase love & table action will be used to restore the low temperature pump performance. Ancient heart = Refer to Figure 1, which is a schematic diagram of a conventional vacuum pumping device. The pump 1 and the knife 3 have a cryopump 12 in communication with a vacuum chamber 15. While one

475034 V. Description of the invention (2) The clean gas source 14 is connected to the cryopump 12 to provide nitrogen gas at a pressure higher than the external pressure. The cryopump 12 is provided with an exhaust pipe 19 and the exhaust pipe is provided with a relief valve 20. The evacuation device further comprises a mechanical pump 16. The mechanical pump 16, the cryopump 12 and the vacuum chamber 15 are connected by a connecting pipe 18 '. Each connecting pipe 18 is provided with a control valve 22 for controlling the gas flow between the parts. In the regeneration process of the cryopump 12, the temperature of the cryopump 2 is raised to ^ 10 VK ·, and then the cryopump-1 is flushed with nitrogen gas through the air supply pipe 14 and then the air pressure is reduced to 5 〇 // technical ear (t 〇rr), the rate of rise following the detection pressure (rate of rise) is lower than every minute ίο # consumption ear, that is, no air leakage, if there is no problem, finally the cryopump 1 2 Reduce to working temperature and prepare to work. When the cryopump is flushed, the high-pressure gas is freed from the exhaust pipe 19 and the one-way exhaust valve 20 is pushed out to discharge into the atmosphere. All the gas in the cryopump 12 will also sublimate the return gas accompanied by nitrogen breakdown. Ί into the atmosphere. … In the regeneration process of the cryopump 12, high-pressure nitrogen flushes the cryopump 12 =, and some particles in the cryopump 12 may be discharged from the cryopump 12 from the one-way exhaust valve 20. In addition, the particles have a great chance to attach to the one-way exhaust valve = the oil seal ring (0-ring sea0), which caused the single-shang exhaust valve to be completely ^ separated 1 ^^; 17 ^^ ^ J ^. There is no way to reduce the air pressure to 5〇 # in the regeneration process, or the air pressure rises at a rate higher than 10 // torr per minute, both of which indicate that failure to evacuate will cause the machine to issue a fault alarm (a 1 arm ), And the engineer does not want to check and repair, the regeneration must be redone. ^ In view of this, the main purpose of the present invention is to provide a vacuum

Page 5 475034 V. Description of the invention (3) The device can prevent particles from being on the regenerative oil seal ring, which can reduce the dimension of the machine. According to the above purpose, the air-saving device includes, the process is attached to the repair time (d ownt The first vacuum pump one-way exhaust valve (i me) o Ming proposed a vacuum pumping device. Vacuum valve and a filter. The first vacuum knows the quot; I »force, and the first is true to the first to remove the first true pump connected to the air pump and the high pressure gas to the exhaust valve on the first vacuum pump when the pressure is greater than an external pressure The first vacuum pump is opened to discharge to the exhaust valve between the first vacuum pump and the vacuum pump. The advantage of the present invention is to filter the high-pressure gas flow, and intercept it to the one-way cleaner. Closed, leading to the true filter, the machine will not be affected by particles, improving the efficiency of mass production. A single empty cabin. The exhaust gas used by the clean air pump is used to reduce the pressure of the gas source in the vacuum chamber. It provides an external source for filtering the particles such as the first one. —R—W— I. '1 Net first exhaust valve failed to exhaust air The vacuum pump is set on the generated particles. When the pressure in the vacuum pump flows through the unidirectional and unidirectional vacuum pumps, the particles will be removed by the filter valve during the discharge, causing a one-way exhaust valve. Therefore, as long as the regular maintenance affects, the normal working drawings can be simply explained: 1 In order to make the above-mentioned objects, features and advantages of the present invention more comprehensible, a preferred embodiment is given below with the accompanying drawings The detailed description is as follows: 'Figure 1 is a schematic diagram of a conventional vacuum pumping device. Fig. 2 is a schematic diagram of a vacuum pumping device of the present invention.

475034 V. Description of the invention (4) | Figure 3 is a schematic diagram of the device near the filter in Figure 2. Explanation of symbols: 32 first vacuum pump 34 clean gas source 35 vacuum chamber 36 second vacuum pump 38 connection pipe 40 one-way exhaust valve 42 filter 44 oil seal ring 46 exhaust pipe 50 0 control valve embodiment: see FIG. 2 is a schematic diagram of a vacuum device according to the present invention. The present invention is an evacuation device capable of preventing vacuum failure caused by cleaning internal devices. The vacuum device of the present invention includes a first j vacuum pump 32, a one-way exhaust valve 40, and a cleaner 42. The first vacuum pump | 32 is connected to a vacuum chamber 35, so as to reduce the pressure A in the vacuum chamber 35, and the first! A vacuum pump 32 is connected to a clean gas source 34 to provide a gas having a pressure higher than the external pressure to remove particles generated during the operation of the first vacuum pump 32. The cryopump 32 is provided with an exhaust pipe 46. A one-way exhaust valve 40 is provided on the exhaust pipe 46,

When the pressure in the first vacuum pump 32 is greater than an external pressure, it is turned on so that the gas in the first vacuum pump 32 flows through the one-way exhaust valve 40 to discharge the first true I

^ E_88H8644 V. Description of the invention (5) Month = pump 32. The filter 42 is provided between the one-way exhaust valve 40 and the first straight line for filtering out the particles. Vacuum pump 32 The vacuum pumping device of the present invention further includes a vacuum pump 32 and a sapphire stone OP t ^ one vacuum pump 36. First. • A real pump 36 and vacuum chamber 3 5 and far &# π. Then, each connection 瞢 connection officer 38 is connected to r ^ ^ 38 and there is a control valve 50 on the 5 to control each adjacent eight μ μ-pass. When vacuuming, first use the second straight: the milk space between the swords to a predetermined & Luo μ ^ ^ /, the mercury puff will pump the true breast pressure of the empty chamber 35, and then turn off the second straight * Ye μ vacuum view continues to evacuate to a lower Qi Zhuo], two, changed from the first-degree of air. ^ That is, the true first vacuum pump 32 and the second straight H required for the process, for example, the first vacuum ",: the pump 36 is equipped with many types of devices 1 0_5 ~ 1 〇-7 (t ( The method of making the air pressure of the vacuum chamber reach a different working method is to use liquid helium to vacuum the & mercury-hungry oil. The second vacuum pump 36 is to make straight *: the corpse hole is cold and discharged. (Torr) bh m ^ A mechanical pump with a pressure of 10-1 to 10-5 torr, and the mechanical pump is symmetrical: the roller squeezes out the gas grabbed by the vacuum: Gear or dry sound: Read the 3rd picture, the 3rd picture is the unconscious picture of the device near the filter in the second picture. The early exhaust valve 40 is set at the control opening and closing of the opening. One of the openings of 46 is used to provide an oil seal ring (oil) 4I, between the gas chamber 40 and the exhaust pipe 46 to make the one-way exhaust valve 40 tight * early exhaust valve 40 When closing, use the empty pump 32. Seal it to prevent outside air from entering the first. As shown in Figure 3, 滹 清 哭 42 is-metal mesh VJ., Inside the exhaust pipe 46, Filter into metal The mesh is rolled into a cone

$ 8Page 5. Invention Description (6)-*-Objects are placed in the exhaust pipe 46. There is a need to change the structure of the exhaust pipe 46 in this way. The filter "can be fixed to the side wall of the pipe 46 in the exhaust pipe 46. It is always convenient. Of course, you can also add one to the exhaust pipe 46: form ^ cleaner, but the cost of production will be substantial: 当 弟- When the vacuum pump 32, (Regenerate), the clean gas source 34 will provide gas to flush and clean the most easily available nitrogen in the second vacuum plant. This; the particles generated in process 2 will be carried away by nitrogen,]: 1 reaches = exhaust 阙 4 °, it will be affected by the closing of the filter head to reach the oil seal "early lice valve 40" w = the conventional vacuum pump L :: Month: The surface of the oil seal is not consistent. Think about it. Use regular maintenance for the cleaner: Machine :: The exhaust valve is often used to close the air. It can work under normal vacuum, although it is clear that the present invention can be set with _ better efficiency, any study. Museum ii ', such as, and έ Wai, when you can ^ this ^, complex 1 ^ benefits ~ do not take against the exhaust Take the non-fixed and different largest to directly place or install to the south. The regeneration uses more than one atmosphere of gas. The first vacuum pump 32 is damaged. The one-way exhaust valve 40 and the flow filter 42 are blocked by the lower surface. This will not affect the vacuum device to prevent particles from reaching the gate. Only the problem affects the bad situation, so 〇 Μ, is not limited to the week • ,, points-~ _______ the spirit of invention ^ ((....... _-shirt, the protection of this invention

Claims (1)

Case number 88118644 The scope of the patent patent I is a vacuum pumping device, including: a first vacuum pump connected to a vacuum chamber, the steam in the steam tank, used to reduce the pressure of the direct inspection, and the first vacuum pump is connected to a irrigation · / 、 The engine room :: The most powerful gas to remove the first place :: Provide early exhaust valve, which is set on the first vacuum fruit, when the pressure in the first vacuum spring is greater than an external pressure Kaiyou: two tons: —. ^ ^ ^ Ί respect and let the first airless gas flow through the one-way exhaust valve to discharge the two —, upper, taxi „„ _ — * with mining, And a filter, 6 is connected to the one-way exhaust valve and the first one; μ is used to filter out the particles. Between the two Zhenzhen pumps, 2. The device according to item 丨 of the patent application scope is a cryo pump. Among them, the first vacuum pump 3. Like the device in the scope of patent application, the first in the rabbit ★ can make the vacuum pressure of the vacuum chamber reach 10_5 ~ 10_7 Torr ft0 ^ The real pump r, 4 ,, ΐί The device according to the first item of the invention, wherein the first vacuum pump condenses the gas in the vacuum chamber with a liquid pressure fi and discharges it. 5. The device according to item 1 of the scope of patent application, wherein the first vacuum pump is additionally provided with an exhaust pipe, and the one-way exhaust valve is provided on the exhaust pipe. 6 · The device according to item 5 of the patent application, wherein the exhaust pipe is between the one-way exhaust 1. There is also an _Ou ring, when the one-way exhaust valve is closed, Used to tightly seal the Qin Xiang exhaust valve to prevent outside air from entering the first vacuum system. 7. The device according to item 5 of the scope of patent application, wherein the filter is provided in the exhaust pipe. Page 10 475034, c Case No. 88118644 c Amendment VI. The scope of the patent application where the filter is based on which the filter is based on, where the filter is based on the device according to item 1 of the scope of patent application, Made up of a mesh. 9. The device as defined in the scope of patent application No. 1 consists of a metal mesh. 10. The device as described in item 1 of the scope of patent application is composed of a metal mesh rolled into a cone. 11. The device according to item 1 of the scope of patent application, wherein the clean gas source is used to provide a gas higher than the external pressure (n i t r 0 g e η, N2). Page 11