KR101322234B1 - Path Generating System for Synchronized Stage and Scanner - Google Patents

Path Generating System for Synchronized Stage and Scanner Download PDF

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KR101322234B1
KR101322234B1 KR1020100079261A KR20100079261A KR101322234B1 KR 101322234 B1 KR101322234 B1 KR 101322234B1 KR 1020100079261 A KR1020100079261 A KR 1020100079261A KR 20100079261 A KR20100079261 A KR 20100079261A KR 101322234 B1 KR101322234 B1 KR 101322234B1
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stage
path
scanner
speed
control unit
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KR20120016797A (en
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김경한
이제훈
서정
김정오
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한국기계연구원
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Abstract

The present invention provides a stage transfer command, a stage control unit for controlling the position and speed of the stage; An auxiliary control unit connected to the stage control unit and receiving a stage feed amount and a speed signal from the stage control unit; And a scanner control unit connected to the auxiliary control unit, the scanner control unit receiving a transfer change amount and a stage direction of the stage, wherein a command value of the position and speed of the scanner calculated by the scanner control unit is transmitted to the stage control unit. Provides a path generation system for the stage and scanner.
According to the present invention, it is possible to synchronize and use a stage and a scanner which have conventionally been used individually, thereby improving the processing performance of the conventional stage and the scanner.

Figure R1020100079261

Description

Path Generating System for Synchronized Stage and Scanner

The present invention relates to a path generation device for a synchronized stage and a scanner, and more particularly, to a path generation system for a synchronized stage and a scanner capable of improving processing performance.

The laser processing device scans the laser at a certain point according to the construction method and the purpose of use, and processes the desired shape by driving only the XY axis stage while condensing with a focusing lens and 2-axis or 3-axis while the workpiece is stopped. The method of processing the shape with a scanner with a mirror attached to the galvano motor, the technique of welding with a laser scanner while moving the articulated robot, and the multi-speed positioning system that analyzes and processes the data of the low speed xy stage controller and the high speed scanner controller separately. Production methods and processing methods.

It is possible to process the desired shape by driving only the XY axis stage, but the processing speed is slower than that of the scanner, and the method of processing the shape with the scanner is possible at high speed, but the processing area is narrow, so the large area For this purpose, the method of laser on the fly processing while moving the stage is useful. Conventional Laser on the fly processing is a technology that processes the workpiece without stopping during transportation by modifying the processing data by changing the product's movement according to the moving speed of the conveyor belt moving only in one direction. It is mainly used for marking the serial number of the product by flowing the product to the conveyor belt.

Recently, laser scanners are widely applied in the fields of ultra-precision and ultra-fast processing, but there are limitations in the field of application because of the limited area of the scanner. However, as semiconductor components have become larger in recent years, the necessity of driving the scanner and the stage at the same time has increased, and a study on a device capable of driving the scanner and the stage at the same time is needed to improve processing performance and speed.

Furthermore, there is a need to develop equipment for synchronizing the scanners with the stages and scanners used separately.

The present invention is to solve the above problems, the present invention is to calculate the optimal path of the stage and the scanner for the same drawing, to provide a path generation system of the synchronized stage and scanner that can improve the processing performance will be.

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The present invention is a stage control unit for commanding the transfer of the stage, the stage control unit for controlling the position and speed of the stage, the auxiliary control unit connected to the stage control unit, and receives the stage feed amount and the speed signal from the stage control unit, connected to the auxiliary control unit, the stage The first step of setting the acceleration and deceleration time (Ta) of the stage passing through the inflection point of the machining path shown in the machining drawing and the scanner path generation system comprising a scanner control unit for receiving the transfer change amount and the direction of the stage; A second step of extracting the stage path from the machining path, a third step of calculating the stage speed from the machining path, a fourth step of subtracting the stage speed from the machining speed to be processed along the machining path, and To extract the scanner path by integrating the scanner speed with unit time A fifth step and a sixth step of determining whether or not the machining path is within the working area of the scanner while the stage is moving, and correcting the path of the stage by applying NURBS interpolation if it is not determined. In the case where the paths of the stages are set identically in the sections having different processing complexity, the path generation system of the synchronized stage and the scanner characterized in that the speed of the stage decreases as compared with the processing section having a low complexity. To provide.
Here, the inflection point means that the direction of the machining path is changed, the acceleration and deceleration time is characterized in that constant within the machining path.

The method may further include setting the number of smoothing points, and the nub interpolation may be performed according to the set number of smoothing points.
In addition, as the acceleration and deceleration time increases, the path of the stage is curved and softened, and the path of the stage is shortened. As the acceleration and deceleration time increases, the speed of the scanner increases while the speed of the stage decreases. Can be.

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On the other hand, in the case where the paths of the stages are set to be the same in the sections in which the complexity of the machining is different, the speed of the stage may be reduced in the machining section having a higher complexity than in the machining section having a low complexity.

Furthermore, the sum of the motion vectors of the stage and the scanner may be the same as the machining path where the machining takes place.

According to the present invention, it is possible to increase the processing speed and continuous processing due to the cooperative machining of the scanner and the stage. It is possible to improve the quality of the workpiece by applying a variety of stage paths according to the processing drawings and processing conditions. For example, when the acceleration / deceleration time of the stage, that is, the acceleration / deceleration area is increased, the path of the stage is shortened and smooth stage movement is realized.

In addition, according to the present invention, even if the acceleration / deceleration time of the stage is different, an error message and the deviation area are displayed when a section that is out of the work area of the scanner is displayed so that the user can change the stage path while changing the acceleration / deceleration time.

According to the present invention, it is possible to synchronize and use a stage and a scanner which have conventionally been used individually, thereby improving the processing performance of the conventional stage and the scanner.

1 is a schematic diagram of a path generation system according to the present invention;
2A is a diagram showing a relationship between a machining path, a scanner compensation, and a stage feed path;
2b is a simplified diagram of the data flow of a path generation system;
3 is a block diagram illustrating FIG. 2B in more detail.
Figure 4 is a flow chart illustrating a path generation method using the present invention.
5A-5C illustrate an algorithm for extracting stage speeds and paths from a machine drawing.
Fig. 6 is a diagram showing an algorithm for calculating a scanner speed from processing speed and stage speed.
7 is a flowchart illustrating a path correction process of a stage in FIG. 4 in detail.
8 and 9 are diagrams illustrating a machining path and a movement path of a stage according to different stage acceleration and deceleration times.
10 is a view before the path correction is made, Figure 11 is a view showing after the path correction is made.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.

1 is a schematic diagram of a path generation system according to the present invention. This will be described below with reference to Fig.

The path generation system according to the present invention includes a stage controller 10 capable of driving the stage and the scanner in synchronization, an auxiliary controller 20 connected to the stage controller 10, and a scanner controller 30 connected to the auxiliary controller 20. ). Finally, the path calculated by the scanner controller 30 may be transmitted to the laser controller 40.

The stage control unit 10 synchronizes the scanner and the stage by inputting the position and velocity of the stage to the scanner control unit 30 through an encoder signal. Synchronized scanner and stage that can move in 1 axis (x axis), 2 axis (x, y axis), 3 axis (x, y, z axis) and 2 axis (x, y axis) scanners are combined with each other It becomes a linked system. The present invention can minimize the path of the stage from the processing drawing and can minimize the stage acceleration and deceleration to generate a smooth path. When the stage path is generated by the path generation software applied in the present invention, the stage speed change amount is also obtained by differentiating the path in unit time.

FIG. 2A is a diagram illustrating a relationship between a machining path, a scanner compensation, and a stage transfer path, and FIG. 2B is a diagram briefly illustrating a data flow of a path generation system. A description with reference to FIGS. 2A and 2B is as follows.

As shown in FIG. 2A, the machining path vector is represented by the sum of the stage transfer vector and the scanner transfer vector. The scanner transport vector is the same as the scanner compensation vector.

Referring to FIG. 2B, in the stage controller 10, positions and speeds P1 and P3 of the stage are transmitted to the auxiliary controller 20. At this time, the stage controller 10 transmits the stage feed amount and the speed signal to the auxiliary controller 20.

The auxiliary control unit 20 may perform a function of an adapter connecting the stage control unit 10 and the scanner control unit 30. In other words, the auxiliary control unit 20 performs the intermediate media function of the stage control unit 10 and the scanner control unit 30 so that the stage control unit 10 and the scanner control unit 30 are not initially connected to each other. As a result of the addition of the auxiliary control unit 20, data may be transmitted and received between the stage control unit 10 and the scanner control unit 30. In addition, the auxiliary control unit 20 calculates the transfer change amount and the stage direction of the stage and transfers it to the scanner control unit 30. That is, the auxiliary control unit 20 transmits the position change amount and the direction (ΔP, direction) of the stage to the scanner control unit 30.

The scanner controller 30 calculates the scanner feed amount by subtracting the stage feed amount from the processing drawing as a reference, wherein the stage feed amount is a value including the stage feed error. The scanner controller 30 calculates the position of the scanner, calculates the scanner compensation P ′, and transfers the data to the stage controller 10.

3 is a block diagram illustrating FIG. 2 in more detail. This will be described below with reference to Fig.

The present invention is the main controller 50 connected to the scanner control unit 30 and the stage control unit 10, the stage control unit 10, the auxiliary control unit 20, the scanner control unit 30 and the laser controller 40 It includes.

In the main controller 50, software that applies an algorithm for branching a path between a scanner and a stage is driven to generate a path according to a process drawing, a process condition, and a user's request. At this time, the stage has a characteristic that the acceleration / deceleration section is relatively longer than the scanner which can almost ignore the acceleration / deceleration section. Thus, the stage is responsible for the approximate portion of the machining drawing, and the scanner is primarily responsible for the inflection point of the machining drawing. In addition, the main controller 50 designates the speed of the stage, and inputs a path and a speed of the stage to the stage controller 10.

The stage controller 10 receives a stage position and a speed to control a transfer command and a position / speed of the stage. The stage controller 10 includes a position controller 12, a velocity controller 14, a stage driver 16, and a stage position sensor 18. do. The position controller 12 and the speed controller 14 determine the first stage position / speed input signal and the next input signal, subtract the signal, and instruct the stage driver 16 of the stage feed amount. The stage position sensor makes it possible to know the stage current position. The stage position and the feed amount of the unit time, that is, the stage speed, calculated by the stage controller 10 are input to the auxiliary controller 20 through an encoder signal.

The auxiliary control unit 20 may perform a function of an adapter connecting the stage control unit 10 and the scanner control unit 30. In addition, the auxiliary control unit 20 calculates the transfer change amount and the stage direction of the stage and inputs it to the scanner control unit 30.

The scanner controller 30 includes a position controller 32, a velocity controller 34, a scanner driver 36, and a scanner position sensor 38. do. The scanner control unit 30 calculates the feed amount of the scanner by subtracting the stage feed amount from the machining drawing by the stage position information by the encoder signal. Similarly, the scanner speed is calculated by subtracting the machining speed set by the constraint and the stage speed. The calculated transfer amount and speed information of the scanner are transmitted to the scanner driver 36 to drive the galvanometer of the scanner. The scanner driver 36 commands the transfer angle of the galvanometer. The scanner position sensor 38 provides a command value of the position and speed of the scanner.

The value calculated by the scanner position sensor 38 is transmitted to the stage control unit 10, in particular the speed controller 14. It may then be determined whether the machining drawing is out of the machining area of the scanner. The position command command of such a scanner is to control to vary the speed of the stage. In this case, when the use area of the scanner is to be variably designated, when the position information of the scanner is out of a desired position, the position of the stage is adjusted by changing the speed of the stage.

4 is a flowchart illustrating a path generation method using the present invention. This will be described below with reference to Fig.

When creating a path between the stage and the scanner, the work area of the scanner can be set as a constraint. The area near the center area can be set as the work area of the scanner to minimize distortion of the boundary of the work area. In other words, it is possible to designate an effective scanner working area from the scanner center by applying a percentage of the scanning area. Acceleration and deceleration limits, acceleration G and speed limits can also be set, taking into account the performance of the stage and scanner. Although the setting of the initial constraint is not shown in FIG. 4, it is possible to set various desired constraints according to a corresponding algorithm and proceed with the path generation process below. Among the constraints, the stage and scanner relative speed to maintain a constant processing speed are as follows.

Figure 112010052831543-pat00001

The present invention sets the acceleration / deceleration time Ta of the stage while passing through the inflection point of the machining path shown in the machining drawing (S10). At this time, the inflection point is a point that the direction of the processing path is changed, it may be located in plurality on the processing path according to the complexity of the processing drawing. Typically, the processing path shown in the processing drawings is made up of various curves and straight lines, and a portion where bending or inclination occurs or changes in the processing path may be an inflection point.

In particular, the acceleration / deceleration time Ta can be constant within the processing path. If the acceleration / deceleration time is constant, the acceleration / deceleration time does not vary according to the specificity of the machining path, and thus it is convenient in that the user does not have to consider various specificities.

In addition, according to the user's convenience, the acceleration / deceleration time Ta may be differentially given according to the change amount of the inflection point in the drawing, and in this case, the process of correcting the path by the post-processing process may be shortened.

Then, the path of the stage is extracted from the processing path (S12). The extraction of the path may be performed by reading the processing path shown in the processing drawing and calculating the processing speed and the acceleration / deceleration time of the stage within the inflection point. When the acceleration / deceleration time is determined, the acceleration / deceleration area is automatically designated, and the stage changes smoothly in the acceleration / deceleration area. The path extraction method of the stage can be made in a manner applied to the stage used normally.

Next, the stage speed is calculated from the processing path (S14). The method of calculating the speed of the stage will be described with reference to FIG. 5.

Then, the scanner speed is obtained by subtracting the stage speed from the machining speed processed along the machining path (S20). A method of obtaining the scanner speed will be described with reference to FIG. 6.

The scanner path is extracted by integrating the obtained scanner speed with respect to the unit time (S22).

At this time, it is determined whether the processing path is within the working area of the scanner while the stage is moving (S30). Even if the stage moves in the same way, if the working area of the scanner is narrowed when setting the constraints, the machining path is likely to be out of the working area of the scanner. On the other hand, if the working area of the scanner is widened when setting the constraints, the machining path is likely to enter the working area of the scanner.

If it is determined in step S30 that the scanner does not enter the working area of the scanner, the path of the stage is corrected by applying a NURBS interpolation method (S40).

Although not shown in FIG. 4, the paths and speeds of the stage and the scanner calculated by the process of FIG. 4 are input to the processor in the NC data format, and the machining operation is performed by the stage and the scanner synchronized based on the input data. Can be.

5A to 5C are diagrams showing an algorithm for extracting a stage speed and a path from a machining drawing. FIG. 5A shows the contents of two paths, stage path 1 and stage path 2, calculated with different stage acceleration / deceleration times for the same machining path. FIG. 5B shows the stage speed extracted by calculating the machining speed in the x-axis direction in FIG. 5A, and FIG. 5C shows the stage speed extracted by calculating the machining speed in the y-axis direction in FIG. 5A. A description with reference to FIGS. 5A to 5C is as follows.

The machining speed according to the machining conditions is set from the machining drawings. At this time, it is preferable that the processing speed to be processed according to the processing drawing is constant. When the processing speed is constant, the synchronized stage and the scanner process the workpiece at a constant speed, thereby reducing processing errors that may occur due to acceleration and deceleration during processing.

As shown in FIG. 5A, when the stage acceleration / deceleration time is changed, the movement path of the stage is changed. Since the stage path 1 has a shorter acceleration / deceleration time than the stage path 2, the stage path 2 can be made a smoother path than the stage path 1. In other words, since the acceleration / deceleration time for the stage to pass through the inflection point is longer compared to the stage path 1 in the stage path 2, the stage path 2 has a gentler curve than the stage path 1.

According to the movement path of the stage set as described above, the stage speed may be calculated in the x-axis and y-axis directions as shown in FIGS. 5B and 5C. The stage path can be calculated by integrating the stage speeds with time, respectively.

As shown in FIGS. 5B and 5C, it can be seen that the stage path 2 has a long acceleration / deceleration time.

6 is a diagram illustrating an algorithm for calculating the scanner speed from the machining speed and the stage speed. A description with reference to FIG. 6 is as follows.

Subtracting the speed of the stage from the processing speed, the speed of the scanner can be obtained as shown in FIG. Because the stage and the scanner operate in synchronization, the motion vector sum of the stage and the scanner is the same as the machining path where the machining takes place.

For reference, in the case of stage path 2 having a long stage acceleration and deceleration time, the movement speed of the stage is increased slowly as compared with the stage path 1, so that the movement speed of the scanner is increased compared to the stage path 1 by the difference.

The method of calculating the speed of a stage is demonstrated concretely below. In the example to be described below, the condition that the processing speed is constant is preceded.

First of all, when the second section of the machining drawing takes a more complicated form than the first section, the speed of the stage is set in the machining drawing. The first section and the second section may correspond to a case where there is a difference in the number of wrinkles having the same amplitude within the same length. At this time, the movement path of the stage, that is, the displacement is set to be the same in the first section and the second section.

The machining speed (V machining ) of the first section can be divided into the machining speed of the stage and the machining speed of the scanner, and is displayed as follows.

Figure 112010052831543-pat00002
(Where P means displacement and t means time)

On the other hand, the processing speed (V ' processing ) of the second section, which is more complicated than the first section, can be expressed as follows.

Figure 112010052831543-pat00003
(Where P means displacement and t means time)

In the above two equations, it can be seen that the stage path of the first section and the stage path of the second section are set to be the same. And because the path between the second section is complicated, ∑P ' scanner > ∑P scanner is established, and therefore the scanner speed must be high.

Since the machining speed is constant within the machining drawing, and V machining = V ' machining ,

Figure 112010052831543-pat00004
Must be established, and therefore t 2 must be increased than t 1 , and consequently the speed of the V ' stage is reduced.

As a second example, the case where the machining path of the stage is changed with respect to the same machining drawing will be described. The larger the acceleration / deceleration time Ta, the shorter the machining path of the stage. This is because the larger the acceleration / deceleration time, the more the stage can move along the smoothly curved path away from the path of the machining drawing. As shown in FIG. 2A, the stage machining path 2 has a longer acceleration / deceleration time than the stage machining path 1, and thus, the stage machining path 2 may be shorter than the stage machining path 1.

In the second example, since the conditions for constant machining time must be established as in the first example, the following equation is established.

Figure 112010052831543-pat00005

Since the travel path of the stage is reduced, the travel path of the scanner increases, and thus, ∑P ' scanner > ∑P scanner is established. Therefore, when the acceleration / deceleration time Ta increases, the stage speed decreases because the V stage > V ' stage must be established.

7 is a flowchart illustrating a path correction process of a stage in FIG. 4 in detail. This will be described below with reference to FIG.

In the case where the acceleration / deceleration time of the stage is uniformly set in the whole machining drawing, there may exist an area in which the actual machining is impossible beyond the movement path of the stage and the scanner. In order to allow such an area to be processed, in the present invention, the path is modified by the nubs interpolation method. The non-uniform Rational Basis Spline (Nurbs) interpolation method is a mathematical model commonly used in computer graphics, and thus a detailed description thereof will be omitted.

First, the stage and scanner paths are automatically generated. The solid line in the figure on the upper right represents the machining path, and the dots represent the path of the stage. The points are displayed discontinuously because they are displayed at predetermined time intervals.

The scan area is then inspected to determine if the machining path enters the working area of the scanner. When entering the work area, it is determined as a valid stage path, and when not entering, it is determined as an invalid stage path (S30). Looking at the picture on the right side of the S30 is shown in the rectangular work area of the scanner, the point of the stage is located in the center of the rectangle. In particular, the point where red dot is located in the figure on the right is the section in which the machining path is out of the working area of the scanner and is judged as an invalid stage path.

Therefore, the stage path correction step of S40 is performed. The process of S40 in FIG. 7 is examined in more detail.

First, a continuous invalid stage path is extracted (S42). The invalid stage path is a section in which the machining path is outside the working area of the scanner as described above.

Then, the number of smoothing points is set (S44). The number of points can be appropriately applied to the user's convenience or experience. As the number of smoothing points increases, stage path distortion increases, but smoother areas are possible. In the figure on the right of S44, the number of smoothing points is set to 23. For reference, the black point located above the red point replaces the red point after the correction is completed. Since the black point is located in the moving path of the stage, the black point is not included in the number of smoothing points.

Then, the nub's curve interpolation is performed (S46), and thus the stage path is regenerated (S48). Finally, the scan area is inspected again (S50) to determine whether there is a machining path outside the working area of the scanner, and if there is no invalid stage path, the path generation process is terminated.

The graph located at the bottom right of FIG. 7 shows a stage path corrected such that the interpolation is completed by the nubs interpolation method so that an invalid stage path does not exist.

8 and 9 are diagrams illustrating a machining path and a movement path of a stage according to different stage acceleration and deceleration times. Comparing FIG. 8 with FIG. 9, it can be seen that the stage path changes with stage acceleration / deceleration time. A description with reference to FIGS. 8 and 9 is as follows.

8 and 9, the processing speed is 400 mm / s, the working area of the scanner is 50 X 50 m 2 , the operating area of the scanner is 80%. The solid blue line represents the processing path and the red solid line represents the path of the stage.

8 illustrates that the stage acceleration / deceleration time is set to 50 msec, and FIG. 9 illustrates that the stage acceleration / deceleration time is set to 60 msec. .

10 is a view before the path correction is made, Figure 11 is a view showing after the path correction is made. A description with reference to FIGS. 10 and 11 is as follows.

An area marked with 'E' in the center of FIG. 10 corresponds to an invalid stage path. In this case, since the area indicated by E is out of the working area of the scanner, the machining is not performed by the scanner, and the path may be corrected as shown in FIG. 11 by applying the nubs interpolation method. According to the stage path modified by FIG. 11, the section which cannot be processed by the scanner disappears, so that the workpiece can be smoothly processed.

It is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims.

10: stage control unit 20: auxiliary control unit
30: scanner control unit 50: main control unit
S10: Process of setting acceleration / deceleration time
S20: Process of calculating the speed of the scanner
S30: Process to check if the machining path enters the working area of the scanner
S40: Process of modifying the path of the stage

Claims (6)

A stage control unit for performing a transfer command of the stage, controlling a position and a speed of the stage, an auxiliary control unit connected to the stage control unit, receiving a stage transfer amount and a speed signal from the stage control unit, and connected to the auxiliary control unit, The path generation system of the stage and the scanner including a scanner control unit that receives the transfer amount of the change and the direction of the stage,
A first step of setting the acceleration / deceleration time Ta of the stage passing through the inflection point of the machining path shown in the machining drawing;
Extracting a path of a stage from the processing path;
Calculating a stage velocity from the processing path;
A fourth step of obtaining a scanner speed by subtracting a stage speed from a machining speed processed along the machining path;
A fifth step of extracting a scanner path by integrating the scanner speed with respect to a unit time; And
Determining whether the processing path is within the working area of the scanner while the stage is moving, and if it is not determined, applying a NURBS interpolation method to modify the path of the stage; ,
In the case where the paths of the stage are set to be the same in the sections having different processing complexity, the path generation of the synchronized stage and the scanner may be slower than the processing sections having a high complexity compared to the processing sections having a low complexity. system. The method of claim 1,
The inflection point means that the direction of the processing path is changed,
The acceleration / deceleration time is constant within the processing path. The method of claim 1,
In the sixth step,
Setting a number of smoothing points,
And a nubber interpolation method according to the set number of smoothing points. The method of claim 1,
As the acceleration and deceleration time increases, the path of the stage is curved and softened, and the path of the stage is shortened.
And the speed of the scanner increases while the acceleration and deceleration time increases, while the speed of the stage decreases. delete The method of claim 1,
The path vector generation system of a synchronized stage and scanner, wherein the sum of the motion vectors of the stage and the scanner is the same as the machining path where the machining takes place.
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Title
기계와재료 제22권 제1호 통권83호 페이지 36-42 *
기계와재료 제22권 제1호 통권83호 페이지 36-42*
한국정밀공학회 2010년도 춘계학술대회논문집 페이지 733-734 *
한국정밀공학회 2010년도 춘계학술대회논문집 페이지 733-734*

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018151378A1 (en) * 2017-02-14 2018-08-23 씨에스캠 주식회사 Three-dimensional continuous laser processing device for large area
EP3630408A4 (en) * 2017-05-29 2021-04-07 ACS Motion Control Ltd. System and method for machining of relatively large work pieces

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