KR101722916B1 - 5-axis device fabricating surface continuously based on laser scanner and control method for the device - Google Patents

5-axis device fabricating surface continuously based on laser scanner and control method for the device Download PDF

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Publication number
KR101722916B1
KR101722916B1 KR1020150079785A KR20150079785A KR101722916B1 KR 101722916 B1 KR101722916 B1 KR 101722916B1 KR 1020150079785 A KR1020150079785 A KR 1020150079785A KR 20150079785 A KR20150079785 A KR 20150079785A KR 101722916 B1 KR101722916 B1 KR 101722916B1
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KR
South Korea
Prior art keywords
axis
workpiece
scanner
stage
axis driving
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KR1020150079785A
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Korean (ko)
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KR20160143286A (en
Inventor
이철수
김동수
최인휴
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씨에스캠 주식회사
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
    • B23K26/0861—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane in at least in three axial directions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a five-axis surface continuous machining apparatus and a control method thereof, including a scanner for machining a surface of a workpiece; Moving means for moving the workpiece along a scan path, and tilt adjusting means for adjusting a tilt of the workpiece such that a surface of the workpiece comes into contact with the scanner vertically; And a control board for controlling the stage and the scanner based on the scan path, and a control method therefor.

Description

FIELD OF THE INVENTION [0001] The present invention relates to a 5-axis surface continuous machining apparatus and a control method thereof,

The present invention relates to a 5-axis surface continuous machining apparatus and a control method thereof, and more particularly, to a 5-axis surface continuous machining apparatus and a control method thereof for causing laser machining to be successively performed perpendicularly to the surface of a workpiece by 5-axis control .

As a large area processing using a laser, a step & scanning method is used. This is a method in which the stage is stopped and the stage is moved to the next step and then processed by a scanner. In this case, there is a drawback that the machining speed is slow and a seam due to discontinuous machining occurs at the scan boundary.

Korean Patent Publication No. 10-2013-0134863 (published on December 10, 2013)

The present invention has been proposed in order to solve the problem according to the conventional method in which a seam due to discontinuous machining is generated at the scan boundary surface and is a machining apparatus for continuously performing precision machining on the surface of a workpiece by forming a scan path, And to provide the above objects. Specifically, the present invention provides a machining apparatus for controlling the stage so that the scanner scans the surface of the workpiece vertically, and correcting the errors generated in the stage control by the scanner to continuously perform precision machining on the surface of the workpiece, and a control method thereof I want to.

In order to achieve the above object, the present invention provides, as a first feature, a scanner for processing a surface of a workpiece; Moving means for moving the workpiece along a scan path, and tilt adjusting means for adjusting a tilt of the workpiece such that a surface of the workpiece comes into contact with the scanner vertically; And a control board for controlling the stage and the scanner based on the scan path.

At this time, the moving means includes an X-axis driving portion, a Y-axis driving portion and a Z-axis driving portion for moving the workpiece in X-axis, Y-axis and Z-axis directions, respectively, Axis drive, a Z-axis drive, an A-axis drive, and a C-axis drive based on the scan path and the surface inclination of the workpiece, Axis drive unit, the Y-axis drive unit, the Z-axis drive unit, the A-axis drive unit, and the C-axis drive unit.

At this time, the control board generates a correction command for correcting an error between the respective driving commands and actual movement of the stage, and the scanner can correct the scanning range according to the correction value of the correction command.

In this case, the correction command may include an inertia error correction value for correcting an error caused by the inertia of the stage.

In order to achieve the above object, the present invention provides, as a second feature, a scanner for processing a surface of a workpiece; Moving means for moving the workpiece along a scan path, and tilt adjusting means for adjusting a tilt of the workpiece such that a surface of the workpiece comes into contact with the scanner vertically; And a control board for controlling the stage and the scanner, the method comprising the steps of: (a) generating a scan path such that the scan range of the scanner passes over the entire surface of the workpiece; (b) generating a drive command to drive the moving means past the scan path; (c) generating a drive command to drive the tilt adjustment means such that the surface of the workpiece abuts vertically with the scanner; (d) generating a correction command for correcting an error between the driving command and the actual movement of the stage; And (e) machining the surface of the workpiece based on the correction command.

In this case, the correction command may include an inertia error correction value for correcting an error caused by the inertia of the stage.

According to the 5-axis surface continuous machining apparatus and the control method thereof according to the present invention, the stage is controlled so that the scanner scans the surface of the workpiece vertically, and the error generated in the stage control is corrected by the scanner, It is possible to perform precision machining.

The effects of the present invention are not limited to those mentioned above, and other effects not mentioned can be clearly understood from the following description.

1 is a schematic view of a five-axis surface continuous machining apparatus according to the present invention.
2 is a schematic view for explaining an example in which a workpiece and a scanner scanner are vertically contacted according to the present invention.
3 is a schematic view of the inside of the scanner according to the present invention.
4 is a schematic diagram showing the difference between the movement control command and the actual motion of the stage due to the inertia of the stage.
5 is a flowchart for controlling a 5-axis surface continuous machining apparatus according to the present invention.

Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. The embodiments of the present invention can be modified into various other forms, and the scope of the present invention is not limited to the embodiments described below. The shape and the size of the elements in the drawings may be exaggerated for clarity and the same elements are denoted by the same reference numerals in the drawings.

And throughout the specification, when a part is referred to as being "connected" to another part, it includes not only "directly connected" but also "electrically connected" with another part in between. Furthermore, when a component is referred to as being "comprising" or "comprising", it is to be understood that this does not exclude other components, do.

1 is a schematic diagram of a 5-axis surface continuous machining apparatus according to an embodiment of the present invention.

Referring to FIG. 1, a five-axis surface continuous machining apparatus 100 according to the present invention includes a stage 110, a scanner 120, and a control board 130.

The workpiece 200 means a workpiece requiring processing by a laser according to a design such as a semiconductor device, a mold or a tool, and in the present invention, a workpiece having a three-

The scanner 120 is a device that performs laser machining on the surface of the work 200 according to design. The scanner 120 performs operations such as drilling, marking, and cutting.

There are many kinds of laser scanners that perform such processing, but among them, since a galvano scanner is widely used, it is explained that the scanner 120 is a galvano scanner in this embodiment.

In general, the widely used scanner 120 has an area (scan field) that can be scanned and processed at a time of several tens of m 2 mm 2.

On the other hand, since the surface of the workpiece 200 is mostly wider than the surface of the workpiece 200, the scanner 120 must move along the surface of the workpiece 200 in order to process the entire surface of the workpiece 200.

A path through which the scanner 120 moves relative to the workpiece 200 so that the scan field of the scanner 120 covers the entire surface of the workpiece 200 is referred to as a scan path. The scan path running of the scanner 120 can be performed by a method in which the scanner 120 moves with respect to the fixed workpiece 200 or the workpiece 200 is moved with respect to the fixed scanner 120. [ However, since the scanner 120 is a precision device including a laser and an optical component, it may be desirable to select a method of fixing the scanner 120 and moving the workpiece 200 along the scan path. 1, the scan path is a two-dimensional path, but this is for simplicity. The scan path is a distance (distance) between the workpiece 200 and the workpiece 200 outside the scanner 120 in accordance with the surface topography (curved surface) And a Z-axis movement for constantizing the Z-axis.

The stage 110 has means for moving the workpiece 200 along the scan path.

The stage 110 includes an X-axis driving unit, a Y-axis driving unit, and a Z-axis driving unit (each driving unit is not shown for the sake of brevity) to move the workpiece 200 fixed to the stage 110 along the scan path.

On the other hand, the stage 110 further includes an A-axis driving unit and a C-axis driving unit that rotate the work 200 about the A axis and the C axis so that the surface of the work 200 contacts the scanner 120 vertically .

The control board 130 includes a stage control unit (not shown) for controlling the stage 110, a scanner control unit (not shown) for controlling the scanner 120, and an error correction unit (not shown).

Axis motion and CAM software, and the stage control unit generates an X-axis driving unit, a Y-axis driving unit, and a Z-axis driving unit command from the cam data, and outputs the X-, Y-, and Z- The Y-axis driving section, and the Z-axis driving section.

The stage control unit generates an A-axis driving command and a C-axis driving command from the cam data, and drives the A-axis driving unit and the C-axis driving unit through the A-axis and C-axis encoder dividers, respectively.

2 is a schematic view for explaining an example in which a workpiece and a scanner scanner are vertically contacted according to the present invention. As shown, the workpiece 200 is vertically contacted with the scanner because the A axis and the C axis of the stage 110 are rotated according to the scan path. That is, the laser beam is always irradiated perpendicularly to the workpiece 200.

The scanner control unit controls the scanner 120 to perform laser processing on the surface of the work 200 by design.

3, the scanner 120 includes a beam output unit 121, a focal point varying unit 122, an x-axis mirror 123, an x-axis motor 125 (see FIG. 3) a y-axis mirror 124, and a y-axis motor 126 (other components such as beam splitter and beam scanner are not shown).

The scanner control unit (not shown) pays surface machining data of the workpiece 200 from the cam data and outputs a command to drive the beam output unit 121, a focal point varying unit 122, an x-axis motor 125, And transmits the generated driving command to the scanner 120.

That is, the stage controller (not shown) moves the workpiece 200 along the scan path, and the scanner controller controls the scanner 120 to perform continuous machining on the moving workpiece 200 surface.

At this time, the stage 110 has inertia in proportion to the mass of the fixed workpiece 200 and the mass of each of the driving parts. When the scan path is changed or a sudden turn of the A axis or the C axis is required, 110) is required, an instantaneous response can not be performed due to inertia.

4 is a schematic diagram showing the difference between the movement control command and the actual motion of the stage due to the inertia of the stage.

For example, if the stage 110 must have a moved position of 'a' at t1, the stage controller must generate a driving command to move by 'a' in advance at t0 due to the inertia of the stage 110. [ Nevertheless, a control error in the portion indicated by the dashed line occurs between t0 and t1. Reducing the speed of the stage 110 moving the scan path reduces the control error but increases the processing time of the workpiece 200. [

In order to overcome this disadvantage, the present invention corrects the control error generated in the stage 110 by the scanner 120.

Since the driving instruction of the stage 110 is executed in units of milliseconds (mmsec) and the instruction of driving the scanner 120 is executed in units of microseconds (μsec), error correction instructions are generated between the driving instruction generation intervals of the stage 110 And reflects this in the control command of the scanner 120.

For example, if t0 and t1 are the interval during which the stage 110 driving instruction is executed, its value is 1 mmsec, and the execution interval of the driving instruction of the scanner 120 is 10 microseconds, 99 error correction commands are generated between t0 and t1, (120) control command.

Referring again to FIG. 4, the error correction unit generates error correction commands from a1 to a99 and reflects them in the scanner control command.

Since the movement value 'a' of the stage 110 in FIG. 4 is an example for explaining the generated error, the implementation of the actual stage 110 requires a correction value for movement of each of the X axis, the Y axis, and the Z axis Do. Therefore, the error corrector generates a correction command for each axis.

The X-axis and Y-axis correction commands are reflected in the control commands for the x-axis motor 125 and the y-axis motor 126, respectively, and the Z-axis correction command is reflected in the command for controlling the focus- That is, the three-axis correction is performed by the x-axis motor 125, the y-axis motor 126 and the focal point varying section 122.

5 is a flowchart for controlling a 5-axis surface continuous machining apparatus according to the present invention. Fig. 5 is a time-series implementation of the 5-axis surface continuous machining apparatus shown in Fig. 1, and the parts described for the stage 110, the scanner 120, and the control board 130 are applied to this embodiment as it is.

The method for controlling a 5-axis surface continuous machining apparatus according to the present invention includes a scan path generating step S410, a movement command generating step S420, a tilt adjusting command generating step S430, a correction command generating step S440, Step S450.

In step S410, the 5-axis surface continuous machining apparatus generates a scan path such that the scan range of the scanner passes over the entire surface of the workpiece. Scan path generation is generated by paging the generated cam data by computer-aided manufacturing (CAM) software. The 5-axis surface continuous machining device may take scan path data generated by a separate device.

1, the scan path is assumed to be a two-dimensional path, but the scan path includes a movement according to the surface topography (curved surface) of the workpiece 200, so that the scan path is understood as a three- .

In step S420, the 5-axis surface continuous machining apparatus generates a drive command for driving the moving means so that the scanner passes the scan path.

In step S430, the five-axis surface continuous machining apparatus generates a drive command to drive the tilt adjustment means such that the workpiece surface contacts the scanner perpendicularly along the scan path.

In step S440, the control board generates a correction command that corrects an error between the driving command and the actual movement of the stage. The correction command is a command for correcting the difference between the movement control command and the actual motion of the stage due to the inertia of the stage.

The control board applies the correction command to the scanner control command to correct the scanning range of the scanner. That is, a command tilted by the correction command value in each axis direction is generated to control the scanner.

The stage control unit, the scanner control unit, and the error correction unit have been described in detail in the foregoing, and a detailed description thereof will be omitted.

In step S450, the scanner processes the surface of the workpiece in accordance with the control command to which the correction command is applied.

The present invention has been described with reference to the preferred embodiments. It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. Therefore, the disclosed embodiments should be considered in an illustrative rather than a restrictive sense. The scope of the present invention is defined by the appended claims rather than by the foregoing description, and all differences within the scope of equivalents thereof should be construed as being included in the present invention.

100: Continuous 5-axis surface machining device
110: stage
120: Scanner
130: control board
200: Workpiece

Claims (6)

A scanner for processing the surface of the workpiece;
Moving means for moving the workpiece along a scan path, and tilt adjusting means for adjusting a tilt of the workpiece such that a surface of the workpiece comes into contact with the scanner vertically; And
And a control board for controlling the stage and the scanner based on the scan path,
Wherein the scan path is generated so that the scan range of the scanner passes over the entire surface of the workpiece,
The moving means includes an X-axis driving portion, a Y-axis driving portion and a Z-axis driving portion for moving the workpiece in the X-axis, Y-axis and Z-
The tilt adjusting means includes an A-axis driving portion and a C-axis driving portion for rotationally driving the workpiece about the A-axis and the C-axis, respectively,
The control board generates X-axis driving, Y-axis driving, Z-axis driving, A-axis driving, and C-axis driving commands based on the scan path and the surface inclination of the workpiece, Axis driving unit, the A-axis driving unit, and the C-axis driving unit,
Wherein the control board generates a correction command for correcting an error between the respective driving commands and actual movement of the stage and transmits the correction command to the scanner,
Wherein the scanner corrects the scan range in accordance with the correction value of the correction command.
delete delete The method according to claim 1,
Wherein the correction command includes an inertia error correction value for correcting an error caused by the inertia of the stage.
A scanner for processing the surface of the workpiece; Moving means for moving the workpiece along a scan path, and tilt adjusting means for adjusting a tilt of the workpiece such that a surface of the workpiece comes into contact with the scanner vertically; And a control board for controlling the stage and the scanner, wherein the moving unit includes an X-axis driving unit, a Y-axis driving unit, and a Z-axis driving unit for moving the workpiece in X-axis, Y-axis, and Z- Wherein the tilt adjusting means includes an A-axis driving portion and a C-axis driving portion for rotationally driving the workpiece about the A-axis and the C-axis, respectively, and the control board controls the X-axis and Y-axis based on the scan path and the surface inclination of the workpiece, Axis drive unit, the Y-axis drive unit, the Z-axis drive unit, the A-axis drive unit, and the C-axis drive unit to control the X-axis drive unit, the Y- A control method for an axial surface continuous working apparatus,
(a) generating a scan path such that the scan range of the scanner passes over the entire surface of the workpiece;
(b) generating a drive command to drive the moving means past the scan path;
(c) generating a drive command to drive the tilt adjustment means such that the surface of the workpiece abuts vertically with the scanner;
(d) generating a correction command for correcting an error between the driving command and the actual movement of the stage; And
(e) machining the surface of the workpiece by correcting the scan range according to the correction value of the correction command.
The method of claim 5,
Wherein the correction command includes an inertia error correction value for correcting an error caused by the inertia of the stage.
KR1020150079785A 2015-06-05 2015-06-05 5-axis device fabricating surface continuously based on laser scanner and control method for the device KR101722916B1 (en)

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KR101973512B1 (en) * 2017-02-14 2019-04-30 씨에스캠 주식회사 Apparatus for controlling laser scanner for working on 3d large-area continuously
EP3871827B1 (en) * 2018-10-22 2023-05-24 Amada Co., Ltd. Laser machining device and laser machining method
KR102186542B1 (en) * 2019-01-23 2020-12-04 경북대학교 산학협력단 Apparatus and method for making dental prostheses
CN111673292B (en) * 2020-06-04 2022-05-27 西安中科微精光子科技股份有限公司 RTCP error calibration compensation method for five-axis laser processing equipment
CN117697126A (en) * 2023-12-29 2024-03-15 武汉元禄光电技术有限公司 Method and device for laser precision machining of 3D nonmetallic forming part

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JPH04100689A (en) * 1990-08-14 1992-04-02 Tsubakimoto Chain Co Quintaxial table for laser beam machine
KR101322234B1 (en) * 2010-08-17 2013-10-28 한국기계연구원 Path Generating System for Synchronized Stage and Scanner
JP5847291B2 (en) * 2012-03-23 2016-01-20 三菱電機株式会社 Laser processing equipment
KR101688806B1 (en) 2012-05-31 2016-12-22 한국기계연구원 Auto-paging method having scanner-stage synchronization

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