KR101298022B1 - Substrate transfer apparatus - Google Patents

Substrate transfer apparatus Download PDF

Info

Publication number
KR101298022B1
KR101298022B1 KR1020110078876A KR20110078876A KR101298022B1 KR 101298022 B1 KR101298022 B1 KR 101298022B1 KR 1020110078876 A KR1020110078876 A KR 1020110078876A KR 20110078876 A KR20110078876 A KR 20110078876A KR 101298022 B1 KR101298022 B1 KR 101298022B1
Authority
KR
South Korea
Prior art keywords
carrier arm
shaft
pinion gear
support block
substrate
Prior art date
Application number
KR1020110078876A
Other languages
Korean (ko)
Other versions
KR20130016771A (en
Inventor
배기환
Original Assignee
주식회사 케이엔제이
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 케이엔제이 filed Critical 주식회사 케이엔제이
Priority to KR1020110078876A priority Critical patent/KR101298022B1/en
Publication of KR20130016771A publication Critical patent/KR20130016771A/en
Application granted granted Critical
Publication of KR101298022B1 publication Critical patent/KR101298022B1/en

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H7/00—Gearings for conveying rotary motion by endless flexible members
    • F16H7/08—Means for varying tension of belts, ropes, or chains
    • F16H7/10—Means for varying tension of belts, ropes, or chains by adjusting the axis of a pulley
    • F16H7/12—Means for varying tension of belts, ropes, or chains by adjusting the axis of a pulley of an idle pulley
    • F16H7/1209—Means for varying tension of belts, ropes, or chains by adjusting the axis of a pulley of an idle pulley with vibration damping means
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Robotics (AREA)
  • General Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Nonlinear Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

본 발명은 기판반송장치에 관한 것으로서, 보다 상세하게는 이송축을 최소화하면서도 반송암의 처짐을 방지할 수 있는 기판반송장치에 관한 것이다.
본 발명에 의한 기판반송장치는 구동원; 상기 구동원에 의해 회전하는 샤프트; 상기 샤프트에 구비되는 적어도 1 이상의 피니언기어; 상기 피니언기어와 치합하는 랙이 형성되는 반송암; 상기 반송암의 수평이동을 안내하는 지지블록; 및 상기 반송암의 양측 단부와 지지블록 사이에 텐션을 인가하여 상기 반송암의 처짐을 방지하는 텐션수단;을 포함한다. The present invention relates to a substrate transfer apparatus, and more particularly, to a substrate transfer apparatus capable of preventing sagging of the transfer arm while minimizing the transfer axis.
Substrate transport apparatus according to the present invention is a drive source; A shaft rotating by the drive source; At least one pinion gear provided on the shaft; A carrier arm having a rack engaged with the pinion gear; A support block for guiding a horizontal movement of the carrier arm; And tension means for applying tension between both ends of the carrier arm and the support block to prevent the carrier arm from sagging.

Description

기판반송장치{SUBSTRATE TRANSFER APPARATUS}Substrate Transfer Equipment {SUBSTRATE TRANSFER APPARATUS}

본 발명은 기판반송장치에 관한 것으로서, 보다 상세하게는 이송축을 최소화하면서도 반송암의 처짐을 방지할 수 있는 기판반송장치에 관한 것이다. The present invention relates to a substrate transfer apparatus, and more particularly, to a substrate transfer apparatus capable of preventing sagging of the transfer arm while minimizing the transfer axis.

일반적으로 평판디스플레이 패널이나 원판유리 등(이하, '기판'이라고 한다)을 이송하는 방법은 수평상태로 이송하는 방법과 기립상태로 이송하는 방법이 있다. Generally, a flat panel display panel, a disc glass, or the like (hereinafter, referred to as a 'substrate') may be transported in a horizontal state or in a standing state.

또한 수평상태로 이송하는 방법은 기판의 상면을 진공으로 흡착하여 이송하는 방법이 있다. 그러나 기판의 상면에 회로패턴이 형성된 경우에는 진공흡착방식을 이용할 수 없다. In addition, the method of transporting in a horizontal state is a method of absorbing and transporting the upper surface of the substrate by vacuum. However, when the circuit pattern is formed on the upper surface of the substrate, the vacuum adsorption method cannot be used.

따라서 이러한 경우에는 기판의 하면을 지지한 상태에서 이송하게 되는데, 종래에는 일축로봇을 이용한다. 도 1 및 도 2을 참조하면, 일축로봇은 구동원이 구비되는 이송축(100)과, 상기 이송축(100)의 상면에서 수평 왕복운동하는 한 쌍의 반송암(110)을 포함한다. 따라서 상기 반송암(110)에 기판(S)을 올려 놓은 상태에서 상기 반송암(110)을 이송축(100)의 반대방향으로 수평이동하여 기판을 이송하는 것이다. Therefore, in this case, the lower surface of the substrate is supported while being transported, conventionally using a uniaxial robot. 1 and 2, the uniaxial robot includes a feed shaft 100 provided with a driving source, and a pair of transfer arms 110 horizontally reciprocating on an upper surface of the feed shaft 100. Accordingly, in the state in which the substrate S is placed on the transfer arm 110, the transfer arm 110 is horizontally moved in the opposite direction to the transfer shaft 100 to transfer the substrate.

위와 같은 일축로봇은 이송하는 기판의 면적이 크고 무거운 경우에는 반송암(110)이 처지는 현상이 발생하게 된다. 따라서 종래에는 대면적 기판을 이송하는 경우, 반송암(110)의 처짐을 방지하기 위하여 이송축(100)이 되는 구조물의 면적을 크게 제작하여 왔다. 이렇게 함으로써 반송암(110)을 안정적으로 지지하여 처짐을 방지하기 위한 것이다. In the case of the uniaxial robot as described above, when the area of the substrate to be transported is large and heavy, the transfer arm 110 may sag. Therefore, conventionally, when transporting a large area substrate, in order to prevent sagging of the transfer arm 110, the area of the structure serving as the transfer shaft 100 has been largely manufactured. By doing so, the carrier arm 110 is stably supported to prevent sag.

그러나 이송축(100)을 이루는 구조물이 필요 이상으로 크게 제작되어 설비의 공간을 많이 차지하는 문제점이 있다. However, there is a problem that the structure forming the feed shaft 100 is made larger than necessary to occupy a lot of space of the equipment.

본 발명은 상술한 문제점을 해결하기 위하여 안출된 것으로서 본 발명의 목적은 이송축의 면적을 최소화하면서도 반송암의 처짐을 방지할 수 있는 기판반송장치를 제공함에 있다. SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object of the present invention is to provide a substrate transport apparatus capable of minimizing the area of the transport shaft while preventing sagging of the transport arm.

위와 같은 기술적 과제를 해결하기 위하여 본 발명에 의한 기판반송장치는 구동원; 상기 구동원에 의해 회전하는 샤프트; 상기 샤프트에 구비되는 적어도 1 이상의 피니언기어; 상기 피니언기어와 치합하는 랙이 형성되는 반송암; 상기 반송암의 수평이동을 안내하는 지지블록; 및 상기 반송암의 양측 단부와 지지블록 사이에 텐션을 인가하여 상기 반송암의 처짐을 방지하는 텐션수단;을 포함한다. In order to solve the above technical problem, the substrate transport apparatus according to the present invention is a drive source; A shaft rotating by the drive source; At least one pinion gear provided on the shaft; A carrier arm having a rack engaged with the pinion gear; A support block for guiding a horizontal movement of the carrier arm; And tension means for applying tension between both ends of the carrier arm and the support block to prevent the carrier arm from sagging.

또한 상기 텐션수단은, 상기 지지블록에 구비되는 제1스프라켓과, 상기 반송암의 양측 끝단에 각각 구비되는 제2 및 제3스프라켓과, 상기 제1 내지 제3스프라켓을 따라 회전되는 체인을 포함한다. In addition, the tension means includes a first sprocket provided in the support block, second and third sprockets respectively provided at both ends of the transfer arm, and a chain rotated along the first to third sprockets. .

또한 상기 텐션수단은, 상기 지지블록에 구비되는 제1롤러와, 상기 반송암의 양측 끝단에 각각 구비되는 제2 및 제3롤러와, 상기 제1 내지 제3롤러를 따라 회전되는 벨트를 포함한다. In addition, the tensioning means includes a first roller provided in the support block, second and third rollers provided at both ends of the transfer arm, and a belt rotated along the first to third rollers. .

또한 상기 벨트는 타이밍벨트인 것이 바람직하다. In addition, the belt is preferably a timing belt.

또한 상기 피니언기어는 상기 샤프트의 양측 끝단에 구비되는 것이 바람직하다. In addition, the pinion gear is preferably provided at both ends of the shaft.

또한 상기 피니언기어는 상기 샤프트의 양측 끝단 사이에 구비되는 것이 바람직하다. In addition, the pinion gear is preferably provided between both ends of the shaft.

본 발명에 따르면, 이송축을 최소화하면서도 반송암의 처짐을 방지할 수 있는 효과가 있다. According to the present invention, there is an effect that can prevent the sag of the carrier arm while minimizing the feed shaft.

도 1 및 도 2는 종래 기판반송장치에 관한 것이다.
도 3 내지 도 5는 본 발명에 의한 기판반송장치에 관한 것이다.
도 6은 본 발명에 의한 기판반송장치의 작동상태를 나타낸 것이다. 1 and 2 relates to a conventional substrate transport apparatus.
3 to 5 relates to a substrate transport apparatus according to the present invention.
Figure 6 shows the operating state of the substrate transport apparatus according to the present invention.

이하, 첨부된 도면을 참조하여 본 발명에 의한 실시예의 구성 및 작용을 설명한다. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a configuration and an operation of an embodiment according to the present invention will be described with reference to the accompanying drawings.

도 3 및 도 4를 참조하면, 본 발명에 의한 기판반송장치(1)는 베이스(10)와, 구동원(11)과, 샤프트(14)와, 피니언기어(30)와, 반송암(40)과, 지지블록(21)을 포함한다. 3 and 4, the substrate transport apparatus 1 according to the present invention includes a base 10, a drive source 11, a shaft 14, a pinion gear 30, and a transfer arm 40. And a support block 21.

상기 베이스(10)의 중심에는 구동원(11)이 구비되고, 양측에는 각각 지지블록(21)이 설치된다. A driving source 11 is provided at the center of the base 10, and support blocks 21 are installed at both sides thereof.

또한 상기 베이스(10) 상에는 샤프트(14)가 위치되는데, 상기 샤프트(14)의 중심과 구동원(11)의 회전축(12) 사이에는 벨트(13)로 연결되어 있다. 따라서 구동원(11)이 작동하면 회전축(12)의 회전력은 벨트(13)에 의해 샤프트(14)로 전달되어 샤프트(14)가 회전된다. In addition, a shaft 14 is positioned on the base 10, and is connected by a belt 13 between the center of the shaft 14 and the rotation shaft 12 of the driving source 11. Therefore, when the driving source 11 is operated, the rotational force of the rotating shaft 12 is transmitted to the shaft 14 by the belt 13 to rotate the shaft 14.

또한 상기 샤프트(14)의 양측은 상기 지지블록(21)의 내측벽을 관통하는데, 양측 단부에는 각각 피니언기어(30)가 구비된다. 따라서 구동원(11)의 동작으로 피니언기어(30)가 회전되는 것이다. In addition, both sides of the shaft 14 pass through the inner wall of the support block 21, the pinion gear 30 is provided at each end portion. Therefore, the pinion gear 30 is rotated by the operation of the drive source 11.

또한 상기 한 쌍의 지지블록(21)의 상부에는 각각 반송암(40)의 수평왕복운동을 안내하는 안내부(20)가 구비된다. In addition, the upper portion of the pair of support blocks 21 is provided with a guide portion 20 for guiding the horizontal reciprocating motion of the carrier arm 40, respectively.

또한 상기 한 쌍의 반송암(40)의 하면에는 상기 피니언기어(30)와 치합하는 랙(41)이 형성되어 있다. In addition, a rack 41 engaged with the pinion gear 30 is formed on the lower surface of the pair of carrier arms 40.

특히, 본 실시예(1)는 상기 반송암(40)의 처짐을 방지하기 위하여 텐션수단(50)이 더 구비된다. In particular, the present embodiment (1) is further provided with a tension means 50 to prevent sagging of the carrier arm (40).

도 4를 참조하면, 본 실시예에서 텐션수단(50)은 지지블록(21)에 구비되는 제1롤러(51c)와, 상기 반송암(40)의 외측벽 양측에 각각 구비되는 제2 및 제3롤러(51a,51b)와, 상기 제1롤러 내지 제3롤러(51a~51c)를 따라 회전하는 벨트(52)를 포함한다. 또한 상기 벨트(52)의 이동경로를 단순화하기 위하여 지지블록(21)에 한 쌍의 아이들롤러(51d,51e)가 더 구비된다. Referring to FIG. 4, in the present embodiment, the tension means 50 includes first and second rollers 51c provided on the support block 21 and second and third sides provided on both sides of the outer wall of the transfer arm 40, respectively. The rollers 51a and 51b and the belt 52 which rotates along the said 1st-3rd rollers 51a-51c are included. In addition, a pair of idle rollers 51d and 51e are further provided on the support block 21 to simplify the movement path of the belt 52.

도 5를 참조하면, 반송암(40)이 기판의 하중 또는 반송암 자체의 하중(P0)에 의해 처짐이 발생하게 되면, 텐션수단(50)에 의해 작용하는 힘(P1)이 발생하게 된다. 이러한 힘(P1)은 수평력(Px)과 수직력(Py)의 벡터의 합인데, 여기서 수직력(Py)은 처짐의 원인이 되는 하중(P0)과 반대방향으로 작용하므로 반송암(40)의 처짐을 방지할 수 있는 것이다. Referring to FIG. 5, when the carrier arm 40 sags due to the load of the substrate or the load P0 of the carrier arm itself, the force P1 acting by the tension means 50 is generated. This force P1 is the sum of the vector of the horizontal force Px and the vertical force Py, where the vertical force Py acts in the opposite direction to the load P0 that causes the deflection so that the deflection of the carrier arm 40 is prevented. It can be prevented.

한편, 본 실시예와 달리 본 발명에 의한 텐션수단은 제1롤러 내지 제3롤러는 제1스프라켓 내지 제3스프라켓으로 대체하고, 벨트 대신 체인으로 구성하는 것도 가능하다. On the other hand, unlike the present embodiment, in the tension means according to the present invention, the first roller to the third roller may be replaced with the first sprocket to the third sprocket, and may be configured as a chain instead of a belt.

이하, 본 실시예의 작동상태를 설명한다. Hereinafter, the operating state of this embodiment will be described.

도 6을 참조하면, 반송암(40)이 도면상 좌측에 대기한 상태에서 기판(S0)이 반송암(40)의 상부에 안착되면, 텐션수단(50)에 의해 상술한 바와 같이 처짐이 방지된다. 한편, 반송암(40)에 기판(S0)이 로딩되면 구동원(11)을 구동하고, 그에 의해 회전축이 회전하면 벨트에 의해 샤프트가 회전되게 된다. Referring to FIG. 6, when the substrate S0 is seated on the upper portion of the carrier arm 40 while the carrier arm 40 is waiting on the left side in the drawing, deflection is prevented as described above by the tension means 50. do. On the other hand, when the substrate SO is loaded on the carrier arm 40, the driving source 11 is driven. When the rotating shaft rotates, the shaft is rotated by the belt.

이로 인해 양측에 구비된 피니언기어(30)가 회전하면 랙 피니언 동작에 의해 반송암(40)이 반대측으로 이동하게 되어 기판(S1)이 이송된다. Therefore, when the pinion gear 30 provided on both sides rotates, the carrier arm 40 moves to the opposite side by the rack pinion operation, and the substrate S1 is transferred.

1: 기판반송장치 10: 베이스
11: 구동원 12: 회전축
13: 벨트 14: 샤프트
21: 지지블록 30: 피니언기어
40: 반송암 41: 랙
50: 텐션수단 51a~51e: 롤러
52: 벨트 1: substrate transport apparatus 10: base
11: drive source 12: rotating shaft
13: belt 14: shaft
21: support block 30: pinion gear
40: carrier arm 41: rack
50: tension means 51a to 51e: roller
52: belt

Claims (6)

삭제delete 구동원;
상기 구동원에 의해 회전하는 샤프트;
상기 샤프트에 구비되는 적어도 1 이상의 피니언기어;
상기 피니언기어와 치합하는 랙이 형성되는 반송암;
상기 반송암의 수평이동을 안내하는 지지블록; 및
상기 반송암의 양측 단부와 지지블록 사이에 텐션을 인가하여 상기 반송암의 처짐을 방지하는 텐션수단;을 포함하며,
상기 텐션수단은,
상기 지지블록에 구비되는 제1스프라켓과,
상기 반송암의 양측 끝단에 각각 구비되는 제2 및 제3스프라켓과,
상기 제1 내지 제3스프라켓을 따라 회전되는 체인을 포함하는 것을 특징으로 하는 기판반송장치.
A driving source;
A shaft rotating by the drive source;
At least one pinion gear provided on the shaft;
A carrier arm having a rack engaged with the pinion gear;
A support block for guiding a horizontal movement of the carrier arm; And
And tension means for applying tension between both ends of the carrier arm and the support block to prevent the carrier arm from sagging.
The tension means,
A first sprocket provided on the support block;
Second and third sprockets respectively provided at both ends of the carrier arm;
Substrate conveying apparatus comprising a chain rotated along the first to third sprockets.
구동원;
상기 구동원에 의해 회전하는 샤프트;
상기 샤프트에 구비되는 적어도 1 이상의 피니언기어;
상기 피니언기어와 치합하는 랙이 형성되는 반송암;
상기 반송암의 수평이동을 안내하는 지지블록; 및
상기 반송암의 양측 단부와 지지블록 사이에 텐션을 인가하여 상기 반송암의 처짐을 방지하는 텐션수단;을 포함하며,
상기 텐션수단은,
상기 지지블록에 구비되는 제1롤러와,
상기 반송암의 양측 끝단에 각각 구비되는 제2 및 제3롤러와,
상기 제1 내지 제3롤러를 따라 회전되는 벨트를 포함하는 것을 특징으로 하는 기판반송장치.
A driving source;
A shaft rotating by the drive source;
At least one pinion gear provided on the shaft;
A carrier arm having a rack engaged with the pinion gear;
A support block for guiding a horizontal movement of the carrier arm; And
And tension means for applying tension between both ends of the carrier arm and the support block to prevent the carrier arm from sagging.
The tension means,
A first roller provided on the support block;
Second and third rollers respectively provided at both ends of the carrier arm,
Substrate transport apparatus comprising a belt that is rotated along the first to the third roller.
제3항에 있어서,
상기 벨트는 타이밍벨트인 것을 특징으로 하는 기판반송장치.
The method of claim 3,
And the belt is a timing belt.
제2항 또는 제3항에 있어서,
상기 피니언기어는 상기 샤프트의 양측 끝단에 구비되는 것을 특징으로 하는 기판반송장치.
The method according to claim 2 or 3,
And the pinion gear is provided at both ends of the shaft.
제2항 또는 제3항에 있어서,
상기 피니언기어는 상기 샤프트의 양측 끝단 사이에 구비되는 것을 특징으로 하는 기판반송장치.
The method according to claim 2 or 3,
The pinion gear is a substrate transport apparatus, characterized in that provided between both ends of the shaft.
KR1020110078876A 2011-08-09 2011-08-09 Substrate transfer apparatus KR101298022B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020110078876A KR101298022B1 (en) 2011-08-09 2011-08-09 Substrate transfer apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020110078876A KR101298022B1 (en) 2011-08-09 2011-08-09 Substrate transfer apparatus

Publications (2)

Publication Number Publication Date
KR20130016771A KR20130016771A (en) 2013-02-19
KR101298022B1 true KR101298022B1 (en) 2013-08-26

Family

ID=47896049

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020110078876A KR101298022B1 (en) 2011-08-09 2011-08-09 Substrate transfer apparatus

Country Status (1)

Country Link
KR (1) KR101298022B1 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20060116522A (en) * 2005-05-10 2006-11-15 삼성에스디아이 주식회사 Self adjusting apparatus of transfer system
KR20070058235A (en) * 2005-12-01 2007-06-08 박영남 Semiconductor manufacturing device
KR20070100528A (en) * 2006-04-07 2007-10-11 삼성테크윈 주식회사 Apparatus for supplying chip tray
KR20100022805A (en) * 2008-08-20 2010-03-03 세메스 주식회사 Substrate processing apparatus and method for transferring substrate of the same

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20060116522A (en) * 2005-05-10 2006-11-15 삼성에스디아이 주식회사 Self adjusting apparatus of transfer system
KR20070058235A (en) * 2005-12-01 2007-06-08 박영남 Semiconductor manufacturing device
KR20070100528A (en) * 2006-04-07 2007-10-11 삼성테크윈 주식회사 Apparatus for supplying chip tray
KR20100022805A (en) * 2008-08-20 2010-03-03 세메스 주식회사 Substrate processing apparatus and method for transferring substrate of the same

Also Published As

Publication number Publication date
KR20130016771A (en) 2013-02-19

Similar Documents

Publication Publication Date Title
US7357245B2 (en) Chain-type conveyor having direction-changing roller
KR101854044B1 (en) Tower lift having a tension roller
KR101559146B1 (en) Auto diverter for change of direction
US20120308342A1 (en) Substrate Transferring System and Substrate Transferring Method
JP2011225376A (en) Multi-gate conveyor
KR100835202B1 (en) Apparatus for transferring a substrate
KR20100081153A (en) Transferring apparatus system
KR101197954B1 (en) Tower Buffer Equipment
JP2010149962A (en) Liquid crystal glass substrate transporting apparatus
KR101031105B1 (en) Apparatus for cleaning mini display panels
KR101298022B1 (en) Substrate transfer apparatus
JP2012250809A (en) Transfer device and conveyer device
KR20150090934A (en) Substrate transfer apparatus
JP2010126292A (en) Conveying device
KR100898807B1 (en) Substrate transfer apparatus
JP2013159407A (en) Carrying device
KR20080022378A (en) The substrate transfer
KR20140003717A (en) Substrate buffer devices that it is a line, and election possible and drive way
KR20120129144A (en) Conveyor for carrying panel
JP6794976B2 (en) Transfer equipment, transfer method
JP2012096893A (en) Substrate carriage
EP2090531A1 (en) Chain-type conveyor having direction-changing roller
JP5494563B2 (en) Pallet transport device
KR20090125935A (en) Apparatus for transferring a glass and apparatus for processing a glass including the same
KR101521499B1 (en) Stocker apparatus

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20160805

Year of fee payment: 4

FPAY Annual fee payment

Payment date: 20170807

Year of fee payment: 5

FPAY Annual fee payment

Payment date: 20180814

Year of fee payment: 6

FPAY Annual fee payment

Payment date: 20190814

Year of fee payment: 7