KR101279747B1 - 펌프에 있어서 기계식 피스톤의 위치 제어를 위한 시스템및 방법 - Google Patents

펌프에 있어서 기계식 피스톤의 위치 제어를 위한 시스템및 방법 Download PDF

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Publication number
KR101279747B1
KR101279747B1 KR1020087014266A KR20087014266A KR101279747B1 KR 101279747 B1 KR101279747 B1 KR 101279747B1 KR 1020087014266 A KR1020087014266 A KR 1020087014266A KR 20087014266 A KR20087014266 A KR 20087014266A KR 101279747 B1 KR101279747 B1 KR 101279747B1
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South Korea
Prior art keywords
pump
motor
discharge
brushless
piston
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KR1020087014266A
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Korean (ko)
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KR20080068918A (ko
Inventor
조오지 곤넬라
제임스 세드론
이라즈 가쉬가이
Original Assignee
엔테그리스, 아이엔씨.
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Priority claimed from PCT/US2005/042127 external-priority patent/WO2006057957A2/en
Application filed by 엔테그리스, 아이엔씨. filed Critical 엔테그리스, 아이엔씨.
Publication of KR20080068918A publication Critical patent/KR20080068918A/ko
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F04B17/03—Pumps characterised by combination with, or adaptation to, specific driving engines or motors driven by electric motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/0009—Special features
    • F04B43/0081—Special features systems, control, safety measures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2201/00—Pump parameters
    • F04B2201/02—Piston parameters
    • F04B2201/0201—Position of the piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2201/00—Pump parameters
    • F04B2201/12—Parameters of driving or driven means
    • F04B2201/1208—Angular position of the shaft

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Reciprocating Pumps (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR1020087014266A 2005-11-21 2006-11-20 펌프에 있어서 기계식 피스톤의 위치 제어를 위한 시스템및 방법 Active KR101279747B1 (ko)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
USPCT/US2005/042127 2005-11-21
PCT/US2005/042127 WO2006057957A2 (en) 2004-11-23 2005-11-21 System and method for a variable home position dispense system
US74166005P 2005-12-02 2005-12-02
US60/741,660 2005-12-02
US84172506P 2006-09-01 2006-09-01
US60/841,725 2006-09-01
PCT/US2006/044907 WO2007061957A2 (en) 2005-11-21 2006-11-20 System and method for position control of a mechanical piston in a pump

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020137007190A Division KR101283259B1 (ko) 2005-11-21 2006-11-20 펌프에 있어서 기계식 피스톤의 위치 제어를 위한 시스템 및 방법

Publications (2)

Publication Number Publication Date
KR20080068918A KR20080068918A (ko) 2008-07-24
KR101279747B1 true KR101279747B1 (ko) 2013-06-27

Family

ID=39592976

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020087014266A Active KR101279747B1 (ko) 2005-11-21 2006-11-20 펌프에 있어서 기계식 피스톤의 위치 제어를 위한 시스템및 방법
KR1020137007190A Active KR101283259B1 (ko) 2005-11-21 2006-11-20 펌프에 있어서 기계식 피스톤의 위치 제어를 위한 시스템 및 방법

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020137007190A Active KR101283259B1 (ko) 2005-11-21 2006-11-20 펌프에 있어서 기계식 피스톤의 위치 제어를 위한 시스템 및 방법

Country Status (6)

Country Link
EP (1) EP1954946B1 (https=)
JP (2) JP5339915B2 (https=)
KR (2) KR101279747B1 (https=)
CN (1) CN103016324B (https=)
TW (2) TWI493107B (https=)
WO (1) WO2007061957A2 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9753443B2 (en) * 2014-04-21 2017-09-05 Synerject Llc Solenoid systems and methods for detecting length of travel
DE102015201884B4 (de) * 2015-02-04 2023-07-27 Schaeffler Technologies AG & Co. KG Fluidische Betätigungsanordnung
FR3050513B1 (fr) * 2016-04-26 2018-11-16 Erca Dispositif de distribution de produit liquide ou pateux
DE102017112975B3 (de) * 2017-06-13 2018-10-25 KNF Micro AG Membranpumpe
JP6920923B2 (ja) * 2017-08-25 2021-08-18 株式会社Ｓｃｒｅｅｎホールディングス ポンプ装置および基板処理装置
DE102019117731A1 (de) * 2019-07-01 2021-01-07 Ebm-Papst St. Georgen Gmbh & Co. Kg Verfahren zur Positionserfassung der Membran einer elektromotorisch angetriebenen Membranpumpe

Citations (2)

* Cited by examiner, † Cited by third party
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US6348124B1 (en) 1999-12-14 2002-02-19 Applied Materials, Inc. Delivery of polishing agents in a wafer processing system
US6506030B1 (en) 1999-01-05 2003-01-14 Air Products And Chemicals, Inc. Reciprocating pumps with linear motor driver

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US5018A (en) * 1847-03-13 Improvement in machinery for combing wool
JPS63255575A (ja) * 1987-04-10 1988-10-21 Yoshimoto Seisakusho:Kk ポンプ装置
US5167837A (en) * 1989-03-28 1992-12-01 Fas-Technologies, Inc. Filtering and dispensing system with independently activated pumps in series
US5312233A (en) 1992-02-25 1994-05-17 Ivek Corporation Linear liquid dispensing pump for dispensing liquid in nanoliter volumes
US5336884A (en) * 1992-07-01 1994-08-09 Rockwell International Corporation High resolution optical hybrid absolute incremental position encoder
US5947702A (en) 1996-12-20 1999-09-07 Beco Manufacturing High precision fluid pump with separating diaphragm and gaseous purging means on both sides of the diaphragm
JPH11356081A (ja) * 1998-06-09 1999-12-24 Matsushita Electric Ind Co Ltd インバータ装置
US6390780B1 (en) * 1998-09-24 2002-05-21 Rule Industries, Inc. Pump and controller system and method
CN1590761A (zh) * 1998-11-23 2005-03-09 米利波尔公司 用于精密泵设备的泵调节器
US7029238B1 (en) * 1998-11-23 2006-04-18 Mykrolis Corporation Pump controller for precision pumping apparatus
US6575264B2 (en) * 1999-01-29 2003-06-10 Dana Corporation Precision electro-hydraulic actuator positioning system
US6464464B2 (en) * 1999-03-24 2002-10-15 Itt Manufacturing Enterprises, Inc. Apparatus and method for controlling a pump system
IL142692A (en) * 1999-09-03 2005-08-31 Baxter Int Systems and methods for control of pumps
JP2001342989A (ja) * 2000-05-30 2001-12-14 Matsushita Electric Ind Co Ltd Ｄｃポンプの駆動制御方法
JP2002106467A (ja) * 2000-09-28 2002-04-10 Techno Excel Co Ltd トラバース機構駆動式流体ポンプ
US6520520B2 (en) * 2000-10-31 2003-02-18 Durrell U. Howard Steering stabilizer with trimming accumulator
JP4576739B2 (ja) * 2001-04-02 2010-11-10 パナソニック電工株式会社 ポンプ用モータ駆動制御装置
JP4684478B2 (ja) * 2001-07-04 2011-05-18 株式会社荏原製作所 給水装置の制御方法
GB0130602D0 (en) * 2001-12-21 2002-02-06 Johnson Electric Sa Brushless D.C. motor
US6914543B2 (en) * 2002-06-03 2005-07-05 Visteon Global Technologies, Inc. Method for initializing position with an encoder
JP4191437B2 (ja) * 2002-06-26 2008-12-03 並木精密宝石株式会社 基板一体型ブラシレスモータ
JP2004225672A (ja) * 2003-01-27 2004-08-12 Ebara Densan Ltd 回転機械の運転制御装置
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Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6506030B1 (en) 1999-01-05 2003-01-14 Air Products And Chemicals, Inc. Reciprocating pumps with linear motor driver
US6348124B1 (en) 1999-12-14 2002-02-19 Applied Materials, Inc. Delivery of polishing agents in a wafer processing system

Also Published As

Publication number Publication date
TWI493107B (zh) 2015-07-21
CN103016324A (zh) 2013-04-03
KR20080068918A (ko) 2008-07-24
TWI405905B (zh) 2013-08-21
WO2007061957B1 (en) 2007-12-06
KR20130036380A (ko) 2013-04-11
EP1954946A4 (en) 2010-05-26
EP1954946A2 (en) 2008-08-13
JP2013150549A (ja) 2013-08-01
TW201350680A (zh) 2013-12-16
WO2007061957A2 (en) 2007-05-31
JP2009529847A (ja) 2009-08-20
EP1954946B1 (en) 2014-11-05
JP5339915B2 (ja) 2013-11-13
TW200726914A (en) 2007-07-16
KR101283259B1 (ko) 2013-07-11
WO2007061957A8 (en) 2007-08-16
WO2007061957A3 (en) 2007-10-04
JP5674853B2 (ja) 2015-02-25
CN103016324B (zh) 2016-08-10

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