CN103016324B - 用于泵中的机械活塞的位置控制的系统和方法 - Google Patents

用于泵中的机械活塞的位置控制的系统和方法 Download PDF

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Publication number
CN103016324B
CN103016324B CN201210365592.8A CN201210365592A CN103016324B CN 103016324 B CN103016324 B CN 103016324B CN 201210365592 A CN201210365592 A CN 201210365592A CN 103016324 B CN103016324 B CN 103016324B
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CN
China
Prior art keywords
motor
pump
brushless
frequency
piston
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201210365592.8A
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English (en)
Chinese (zh)
Other versions
CN103016324A (zh
Inventor
G·戈纳拉
J·塞德罗恩
I·加什盖
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/US2005/042127 external-priority patent/WO2006057957A2/en
Application filed by Entegris Inc filed Critical Entegris Inc
Priority claimed from CN2006800506657A external-priority patent/CN101356373B/zh
Publication of CN103016324A publication Critical patent/CN103016324A/zh
Application granted granted Critical
Publication of CN103016324B publication Critical patent/CN103016324B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F04B17/03—Pumps characterised by combination with, or adaptation to, specific driving engines or motors driven by electric motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/0009—Special features
    • F04B43/0081—Special features systems, control, safety measures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2201/00—Pump parameters
    • F04B2201/02—Piston parameters
    • F04B2201/0201—Position of the piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2201/00—Pump parameters
    • F04B2201/12—Parameters of driving or driven means
    • F04B2201/1208—Angular position of the shaft

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Reciprocating Pumps (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
CN201210365592.8A 2005-11-21 2006-11-20 用于泵中的机械活塞的位置控制的系统和方法 Active CN103016324B (zh)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
USPCT/US2005/042127 2005-11-21
PCT/US2005/042127 WO2006057957A2 (en) 2004-11-23 2005-11-21 System and method for a variable home position dispense system
US74166005P 2005-12-02 2005-12-02
US60/741,660 2005-12-02
US84172506P 2006-09-01 2006-09-01
US60/841,725 2006-09-01
CN2006800506657A CN101356373B (zh) 2004-11-23 2006-11-20 用于泵中的机械活塞的位置控制的系统

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN2006800506657A Division CN101356373B (zh) 2004-11-23 2006-11-20 用于泵中的机械活塞的位置控制的系统

Publications (2)

Publication Number Publication Date
CN103016324A CN103016324A (zh) 2013-04-03
CN103016324B true CN103016324B (zh) 2016-08-10

Family

ID=39592976

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201210365592.8A Active CN103016324B (zh) 2005-11-21 2006-11-20 用于泵中的机械活塞的位置控制的系统和方法

Country Status (6)

Country Link
EP (1) EP1954946B1 (https=)
JP (2) JP5339915B2 (https=)
KR (2) KR101279747B1 (https=)
CN (1) CN103016324B (https=)
TW (2) TWI493107B (https=)
WO (1) WO2007061957A2 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9753443B2 (en) * 2014-04-21 2017-09-05 Synerject Llc Solenoid systems and methods for detecting length of travel
DE102015201884B4 (de) * 2015-02-04 2023-07-27 Schaeffler Technologies AG & Co. KG Fluidische Betätigungsanordnung
FR3050513B1 (fr) * 2016-04-26 2018-11-16 Erca Dispositif de distribution de produit liquide ou pateux
DE102017112975B3 (de) * 2017-06-13 2018-10-25 KNF Micro AG Membranpumpe
JP6920923B2 (ja) * 2017-08-25 2021-08-18 株式会社Ｓｃｒｅｅｎホールディングス ポンプ装置および基板処理装置
DE102019117731A1 (de) * 2019-07-01 2021-01-07 Ebm-Papst St. Georgen Gmbh & Co. Kg Verfahren zur Positionserfassung der Membran einer elektromotorisch angetriebenen Membranpumpe

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5772899A (en) * 1989-03-28 1998-06-30 Millipore Investment Holdings Limited Fluid dispensing system having independently operated pumps
US5947702A (en) * 1996-12-20 1999-09-07 Beco Manufacturing High precision fluid pump with separating diaphragm and gaseous purging means on both sides of the diaphragm
CN1321221A (zh) * 1999-09-03 2001-11-07 巴克斯特国际公司 泵控制系统和方法
CN1331783A (zh) * 1998-11-23 2002-01-16 米利波尔公司 用于精密泵设备的泵调节器
US6348124B1 (en) * 1999-12-14 2002-02-19 Applied Materials, Inc. Delivery of polishing agents in a wafer processing system
US6506030B1 (en) * 1999-01-05 2003-01-14 Air Products And Chemicals, Inc. Reciprocating pumps with linear motor driver
CN1434557A (zh) * 2001-12-21 2003-08-06 德昌电机股份有限公司 无刷直流电机

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US5018A (en) * 1847-03-13 Improvement in machinery for combing wool
JPS63255575A (ja) * 1987-04-10 1988-10-21 Yoshimoto Seisakusho:Kk ポンプ装置
US5312233A (en) 1992-02-25 1994-05-17 Ivek Corporation Linear liquid dispensing pump for dispensing liquid in nanoliter volumes
US5336884A (en) * 1992-07-01 1994-08-09 Rockwell International Corporation High resolution optical hybrid absolute incremental position encoder
JPH11356081A (ja) * 1998-06-09 1999-12-24 Matsushita Electric Ind Co Ltd インバータ装置
US6390780B1 (en) * 1998-09-24 2002-05-21 Rule Industries, Inc. Pump and controller system and method
US7029238B1 (en) * 1998-11-23 2006-04-18 Mykrolis Corporation Pump controller for precision pumping apparatus
US6575264B2 (en) * 1999-01-29 2003-06-10 Dana Corporation Precision electro-hydraulic actuator positioning system
US6464464B2 (en) * 1999-03-24 2002-10-15 Itt Manufacturing Enterprises, Inc. Apparatus and method for controlling a pump system
JP2001342989A (ja) * 2000-05-30 2001-12-14 Matsushita Electric Ind Co Ltd Ｄｃポンプの駆動制御方法
JP2002106467A (ja) * 2000-09-28 2002-04-10 Techno Excel Co Ltd トラバース機構駆動式流体ポンプ
US6520520B2 (en) * 2000-10-31 2003-02-18 Durrell U. Howard Steering stabilizer with trimming accumulator
JP4576739B2 (ja) * 2001-04-02 2010-11-10 パナソニック電工株式会社 ポンプ用モータ駆動制御装置
JP4684478B2 (ja) * 2001-07-04 2011-05-18 株式会社荏原製作所 給水装置の制御方法
US6914543B2 (en) * 2002-06-03 2005-07-05 Visteon Global Technologies, Inc. Method for initializing position with an encoder
JP4191437B2 (ja) * 2002-06-26 2008-12-03 並木精密宝石株式会社 基板一体型ブラシレスモータ
JP2004225672A (ja) * 2003-01-27 2004-08-12 Ebara Densan Ltd 回転機械の運転制御装置
US20050173463A1 (en) * 2004-02-09 2005-08-11 Wesner John A. Dispensing pump having linear and rotary actuators
EP1602826B1 (fr) * 2004-06-04 2007-06-27 Société Industrielle de Sonceboz S.A. Entrainement de pompe

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5772899A (en) * 1989-03-28 1998-06-30 Millipore Investment Holdings Limited Fluid dispensing system having independently operated pumps
US5947702A (en) * 1996-12-20 1999-09-07 Beco Manufacturing High precision fluid pump with separating diaphragm and gaseous purging means on both sides of the diaphragm
CN1331783A (zh) * 1998-11-23 2002-01-16 米利波尔公司 用于精密泵设备的泵调节器
US6506030B1 (en) * 1999-01-05 2003-01-14 Air Products And Chemicals, Inc. Reciprocating pumps with linear motor driver
CN1321221A (zh) * 1999-09-03 2001-11-07 巴克斯特国际公司 泵控制系统和方法
US6348124B1 (en) * 1999-12-14 2002-02-19 Applied Materials, Inc. Delivery of polishing agents in a wafer processing system
CN1434557A (zh) * 2001-12-21 2003-08-06 德昌电机股份有限公司 无刷直流电机

Also Published As

Publication number Publication date
TWI493107B (zh) 2015-07-21
CN103016324A (zh) 2013-04-03
KR20080068918A (ko) 2008-07-24
TWI405905B (zh) 2013-08-21
WO2007061957B1 (en) 2007-12-06
KR20130036380A (ko) 2013-04-11
EP1954946A4 (en) 2010-05-26
EP1954946A2 (en) 2008-08-13
JP2013150549A (ja) 2013-08-01
TW201350680A (zh) 2013-12-16
WO2007061957A2 (en) 2007-05-31
JP2009529847A (ja) 2009-08-20
EP1954946B1 (en) 2014-11-05
JP5339915B2 (ja) 2013-11-13
TW200726914A (en) 2007-07-16
KR101279747B1 (ko) 2013-06-27
KR101283259B1 (ko) 2013-07-11
WO2007061957A8 (en) 2007-08-16
WO2007061957A3 (en) 2007-10-04
JP5674853B2 (ja) 2015-02-25

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