KR101254934B1 - High efficiency homoiothermic humidistat for clean room utilizing waste heat air conditioner for precision control - Google Patents

High efficiency homoiothermic humidistat for clean room utilizing waste heat air conditioner for precision control Download PDF

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KR101254934B1
KR101254934B1 KR1020120111414A KR20120111414A KR101254934B1 KR 101254934 B1 KR101254934 B1 KR 101254934B1 KR 1020120111414 A KR1020120111414 A KR 1020120111414A KR 20120111414 A KR20120111414 A KR 20120111414A KR 101254934 B1 KR101254934 B1 KR 101254934B1
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refrigerant
waste heat
control
air
evaporator
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KR1020120111414A
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Korean (ko)
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김권중
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주식회사 이지이엔씨
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Priority to CN201310359454.3A priority patent/CN103712298B/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B27/00—Machines, plants or systems, using particular sources of energy
    • F25B27/02—Machines, plants or systems, using particular sources of energy using waste heat, e.g. from internal-combustion engines
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F12/00—Use of energy recovery systems in air conditioning, ventilation or screening
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/001—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems in which the air treatment in the central station takes place by means of a heat-pump or by means of a reversible cycle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F2203/00—Devices or apparatus used for air treatment
    • F24F2203/10—Rotary wheel
    • F24F2203/1024—Rotary wheel combined with a humidifier
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F2203/00—Devices or apparatus used for air treatment
    • F24F2203/10—Rotary wheel
    • F24F2203/1056—Rotary wheel comprising a reheater
    • F24F2203/106—Electrical reheater
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
    • Y02B30/56—Heat recovery units
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P80/00—Climate change mitigation technologies for sector-wide applications
    • Y02P80/10—Efficient use of energy, e.g. using compressed air or pressurized fluid as energy carrier
    • Y02P80/15—On-site combined power, heat or cool generation or distribution, e.g. combined heat and power [CHP] supply

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Air Conditioning Control Device (AREA)
  • Central Air Conditioning (AREA)

Abstract

PURPOSE: An air conditioning device for precisely controlling a high-efficiency thermo-hygrostat of a clean room using waste heat is provided to control humidity without supplying additional energy by using the waste heat emitted to the atmosphere and to maintain proper conditions by compensating the overcooled temperature with the collected waste heat of an outdoor unit. CONSTITUTION: An air conditioning device for precisely controlling a high-efficiency thermo-hygrostat of a clean room using waste heat comprises an evaporator(230), a condenser(110), pipes(140), a valve, an accumulator(130), a compressor(120), a reheating heater(210A), solenoid valves(220), and a humidifier(240). The condenser comprises multiple refrigerant condensing units to condense refrigerant. Multiple valves are arranged in the rear end of the refrigerant condensing units to control the discharge of the refrigerant according to control signals so that the condensed efficiency of the refrigerant can be precisely controlled. The reheating heater reheats the refrigerant to control the expansion of the refrigerant. The solenoid valves are positioned between the pipes which supply waste heat, discharged by the operation of the accumulator and the compressor, to the reheating heater and controls the amount of the refrigerant transferred to the reheating heater. The humidifier distributes droplets to some of air-conditioned inlet air so that the humidity of discharged air can be affected. [Reference numerals] (110) Condenser; (120) Compressor; (130) Accumulator; (210A) Reheating heater; (210B) Sub heater; (230) Evaporator; (240) Humidifier; (AA,BB) Stop valve; (CC) Receiver tank; (DD,HH,JJ) Check valve; (EE) Filter dry; (FF) Observation amount; (GG) Evaporation valve; (II) Expansion valve;

Description

폐열 이용 고효율 클린룸 항온항습기 정밀제어를 위한 공조장치{High efficiency homoiothermic humidistat for clean room utilizing waste heat air conditioner for precision control}High efficiency homoiothermic humidistat for clean room utilizing waste heat air conditioner for precision control

본 발명은 반도체 제조설비의 클린룸으로 공급되는 공기의 여과 그리고 온도와 습도를 제어하는 공조장치에 관한 것으로, 특히 기존 공조시스템에서 대기로 방출되는 폐열을 회수하여 해당 폐열의 에너지만큼 별도의 에너지 공급이 없이 습도를 조절하도록 하며 폐열 재이용 코일 및 응축 코일을 다단으로 STEP 구분하여 실내 부하 또는 외기 부하의 변동에 따라 증발기의 제습 부하가 변동되므로 응축기에서 발열되는 열량 변화를 효과적으로 정밀하게 제어하기 위한 폐열 이용 고효율 클린룸 항온항습기 정밀제어를 위한 공조장치에 관한 것이다.The present invention relates to an air conditioner for controlling the temperature and humidity of the air supplied to the clean room of the semiconductor manufacturing equipment, and in particular, by recovering the waste heat discharged to the atmosphere from the existing air conditioning system to supply energy as a separate energy of the waste heat Humidity can be controlled without using the waste heat, and the dehumidification load of the evaporator is changed according to the change of the indoor load or the outside load by separating the waste heat reuse coil and the condensation coil in multiple stages. An air conditioner for precise control of a high efficiency clean room thermo-hygrostat.

일반적으로, 반도체나 액정표시장치와 같은 물품의 제조는 고 청정도가 유지되는 클린룸(Clean room) 내에서 이루어지게 된다. 한편 클린룸으로 유입되는 공기를 통해 먼지나 오염물질이 유입되는 것을 방지하고, 유입되는 공기의 온도 및 습도를 최적의 조건(12℃ 90%)으로 조정하기 위하여 외기공조장치가 사용되고 있다.In general, manufacturing of articles such as semiconductors and liquid crystal displays is performed in a clean room where high cleanliness is maintained. On the other hand, the outside air conditioner is used to prevent the inflow of dust or pollutants through the air flowing into the clean room, and to adjust the temperature and humidity of the incoming air to the optimum conditions (12 ℃ 90%).

한편 반도체나 액정표시장치의 제조공정에서 소요되는 에너지의 대부분(약 90%)은 전력이고, 이중 40%를 공조설비가 소비하게 되며, 공조설비에서 소비되는 대부분의 전력은 상기와 같이 구성되어 클린룸으로 도입되는 외기를 처리하는 외기공조장치를 작동하는데 사용되고 있다.On the other hand, most of the energy required in the manufacturing process of semiconductors and liquid crystal displays (about 90%) is electric power, of which 40% is consumed by air conditioning equipment, and most of the power consumed by air conditioning equipment is configured as described above and is clean. It is used to operate the outside air conditioning system to handle the outside air introduced into the room.

따라서 외기부하를 감소시켜 외기공조장치에서 사용되는 전력을 감소시키는 것만으로도 매우 큰 에너지 절감효과를 기대할 수 있게 된다.Therefore, it is possible to expect a very large energy saving effect only by reducing the external load and reducing the power used in the external air conditioner.

이에 클린룸으로부터 배출되는 배기의 열을 회수하여 도입외기의 예열이나 예냉에 사용함으로써 외기부하를 감소시켜 에너지를 절감하는 방법에 대한 많은 연구가 진행되고 있다.Accordingly, many studies have been conducted on how to reduce energy by reducing external load by recovering heat from the exhaust discharged from the clean room and using it for preheating or precooling the introduced outside air.

그러나 외기공조장치의 경우, 상당히 많은 에너지를 소모함에 따라 배기의 열을 회수하여 도입외기를 예열 또는 예냉하는 것만으로는 에너지 절감에 대한 요구를 충분히 만족하지 못하는 문제점이 있었다.However, in the case of the outdoor air conditioner, there is a problem in that it is not enough to satisfy the demand for energy saving simply by preheating or precooling the introduced outdoor air by recovering the heat of the exhaust as a considerable amount of energy is consumed.

더욱이 클린룸은 냉방 에너지 부하가 크고, 여름철 외기의 습도가 높아 제습부하가 대부분을 차지하며, 따라서 클린룸 공조시 습도조절을 위해 대부분은 냉각 제습하고 별도의 난방으로 재열하는 시스템으로 구성되는데, 냉각제습의 문제점은 실내 설정 온·습도를 해당하는 노점온도까지 과냉각하여 제습한 후 다시 적정온도까지 재열(Reheating)하므로, 냉각과 가열이라는 상반된 작용으로 인하여 에너지 과소비 현상이 발생한다는 것이다.In addition, the clean room has a large cooling energy load and high humidity in the summer outside, so the dehumidification load occupies most of the room. Therefore, most of the clean room is composed of a system of cooling dehumidification and reheating by separate heating. The problem of dehumidification is that the indoor setting temperature and humidity are supercooled to a corresponding dew point temperature and dehumidified, and then reheated to an appropriate temperature, and energy consumption is caused by the opposite action of cooling and heating.

상술한 문제점을 해소하기 위한 본 발명의 목적은, 반도체 제조설비의 클린룸으로 공급되는 공기의 여과 그리고 온도와 습도를 제어하는 공조장치에 관한 것으로, 특히 기존 공조시스템에서 대기로 방출되는 폐열을 회수하여 해당 폐열의 에너지만큼 별도의 에너지 공급이 없이 습도를 조절하도록 하며 폐열 재이용 코일 및 응축 코일을 다단으로 STEP 구분하여 실내 부하 또는 외기 부하의 변동에 따라 증발기의 제습 부하가 변동되므로 응축기에서 발열되는 열량 변화를 효과적으로 정밀하게 제어하기 위한 폐열 이용 고효율 클린룸 항온항습기 정밀제어를 위한 공조장치를 제공하는 데 있다.SUMMARY OF THE INVENTION An object of the present invention for solving the above problems relates to an air conditioning apparatus for controlling the filtration and temperature and humidity of air supplied to a clean room of a semiconductor manufacturing facility, in particular to recover the waste heat emitted to the atmosphere from the existing air conditioning system By controlling the humidity without supplying energy as much as the energy of the waste heat, the waste heat reuse coil and the condensation coil are divided into STEP stages and the dehumidification load of the evaporator is changed according to the change of the indoor load or the outside load. Waste heat is used to effectively control change precisely. To provide an air conditioning system for precise control of a high efficiency clean room thermo-hygrostat.

상기와 같은 목적을 달성하기 위한 본 발명에 따른 폐열 이용 고효율 클린룸 항온항습기 정밀제어를 위한 공조장치의 특징은, 입구 공기를 공기조화하기 위한 증발기와, 상기 증발기의 냉방 용량을 제어하도록 온/오프 사이클링을 이루는 응축기와, 상기 증발기와 응축기사이의 냉매 순환을 위한 도관과, 상기 도관을 통해 흐르는 냉매의 흐름경로를 제어하기 위한 밸브, 및 상기 도관 사이에 위치하며 상기 증발기와 응축기의 동작에 따라 발생되는 열중 여분의 열에너지를 축적하는 축열기와 압축기를 구비한 공기조화 시스템에 있어서: 상기 응축기는 다수의 냉매 응축수단을 구비하고 유입되는 냉매를 균등 분배받아 각각 응축 동작하되 각각의 냉매 응축수단의 후단에 제어신호에 의해 냉매 배출을 온오프하는 다수의 밸브를 구비함으로써 냉매 응축효율을 세밀 제어할 수 있도록 구성되며; 상기 축열기와 압축기의 동작과 증발기의 동작에 따라 배출되는 폐열의 정도에 따라 제어신호에 의해 배출 공기 온도에 영향을 미치도록 냉매의 팽창을 조절하기 위해 냉매를 재가열하도록 다수의 냉매 재가열 수단을 구비하고, 유입되는 냉매를 균등 분배받아 각각 재가열 동작하되 각각의 냉매 재가열수단의 전단에 제어신호에 의해 냉매 배출을 온오프하는 다수의 밸브를 구비함으로써 냉매 가열효율을 세밀 제어할 수 있도록 구성된 재가열히터와; 상기 축열기와 압축기의 동작에 따라 배출되는 폐열을 상기 재가열히터측으로 공급하는 도관사이에 위치하며 상기 재가열히터측으로 전달되는 냉매의 량을 제어하는 다수의 솔레노이드 밸브; 및 배출 공기 습도에 영향을 미치도록 공기조화된 입구 공기의 선택된 일부에 미세 물방울을 분포시키는 가습기를 포함하는 것을 그 특징으로 한다.Features of the air conditioner for precise control of the high efficiency clean room constant temperature and humidity chamber using waste heat according to the present invention for achieving the above object, the evaporator for air conditioning the inlet air, on / off to control the cooling capacity of the evaporator A condenser for cycling, a conduit for circulating refrigerant between the evaporator and the condenser, a valve for controlling the flow path of the refrigerant flowing through the conduit, and the conduit, which is generated according to the operation of the evaporator and the condenser An air conditioning system having a heat accumulator and a compressor that accumulate extra thermal energy in heat, wherein the condenser has a plurality of refrigerant condensing means and is equally distributed with the refrigerant flowing therein to condense operation, respectively. Refrigerant is provided by a plurality of valves for turning on and off the refrigerant discharge by a control signal. It is configured to allow fine control efficiency; And a plurality of refrigerant reheating means for reheating the refrigerant to control the expansion of the refrigerant so as to influence the discharge air temperature by a control signal according to the operation of the heat storage and the compressor and the amount of waste heat discharged according to the operation of the evaporator. Re-heating heater configured to control the heating efficiency of the refrigerant by providing a plurality of valves for re-heating operation by receiving evenly distributed refrigerant, and having a plurality of valves on / off of the refrigerant discharge by a control signal in front of each refrigerant reheating means; ; A plurality of solenoid valves positioned between conduits for supplying the waste heat discharged according to the operation of the heat storage unit and the compressor to the reheating heater side and controlling the amount of refrigerant transferred to the reheating heater side; And a humidifier for distributing fine water droplets in selected portions of the air-conditioned inlet air to affect the exhaust air humidity.

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상술한 본 발명에 따른 특징으로 인해 기대되는 효과로는, 하절기 외기의 습도가 높아 제습을 하는 과정에서 과냉각으로 온도가 낮아져 재 가열이 이루어지는데 많은 열에너지가 소모되는데, 기존의 공조기는 공기를 냉각하는 과정에서 발생하는 실외기의 폐열을 대기 중에 방출하는 방식이었으나, 본 발명에서는 대기로 방출되는 폐열을 회수하여 해당 폐열의 에너지만큼 별도의 에너지 공급이 없이 습도를 조절하도록 하며, 또한 실외기의 폐열을 회수하고 재가열하여 과냉각된 온도를 보정하며 적정 조건을 일정하게 유지하는 부가적인 효과를 기대한다.As expected effects due to the above-described features of the present invention, the humidity of the outside air is high in summer, and in the process of dehumidification, the temperature is lowered by supercooling to reheat, which consumes a lot of thermal energy. In the present invention, the waste heat of the outdoor unit generated in the process is discharged to the atmosphere, but in the present invention, the waste heat emitted to the atmosphere is recovered to control humidity without supplying energy as much as the energy of the waste heat, and also to recover the waste heat of the outdoor unit. Reheating compensates for overcooled temperatures and expects the additional effect of keeping the proper conditions constant.

더욱이 폐열 재이용 코일 및 응축 코일을 다단으로 STEP 구분하여 실내 부하 또는 외기 부하의 변동에 따라 증발기의 제습 부하가 변동되므로 응축기에서 발열되는 열량 변화를 효과적으로 정밀하게 제어하게 된다.Furthermore, by separating the waste heat reuse coil and the condensation coil into multiple stages, the dehumidification load of the evaporator is changed according to the change of the indoor load or the outside load, so that the heat change generated in the condenser can be controlled precisely and precisely.

도 1은 본 발명에 따른 폐열 이용 고효율 클린룸 항온항습기 정밀제어를 위한 공조장치의 세부 구성 및 계통 예시도
도 2는 본 발명에 따른 폐열 이용 고효율 클린룸 항온항습기 정밀제어를 위한 공조장치의 제어 방법을 설명하기 위한 개념도1 is a detailed configuration and system example of an air conditioning apparatus for precise control of high efficiency clean room constant temperature and humidity using waste heat according to the present invention
2 is a conceptual diagram illustrating a control method of an air conditioner for precise control of a high efficiency clean room constant temperature and humidity using waste heat according to the present invention.

발명의 상술한 목적과 여러 가지 장점은 이 기술 분야에 숙련된 사람들에 의해, 첨부된 도면을 참조하여 후술되는 본 발명의 바람직한 실시 예로부터 더욱 명확하게 될 것이다. BRIEF DESCRIPTION OF THE DRAWINGS The above and other objects and advantages of the present invention will become more apparent from the following detailed description of the present invention when taken in conjunction with the accompanying drawings, in which: FIG.

우선적으로 본 발명에 적용되는 기술적 사상을 살펴보면, 하절기 외기의 습도가 높아 제습을 하는 과정에서 과냉각으로 온도가 낮아져 재 가열이 이루어지는데 많은 열에너지가 소모되는데, 기존의 공조기는 공기를 냉각하는 과정에서 발생하는 실외기의 폐열을 대기 중에 방출하는 방식이었으나, 본 발명에서는 대기로 방출되는 폐열을 회수하여 해당 폐열의 에너지만큼 별도의 에너지 공급이 없이 습도를 조절하도록 하고자 하는 데 착안한 것이다.First of all, when looking at the technical concept applied to the present invention, the humidity in the summer outside the high humidity in the process of dehumidification during the dehumidification, the temperature is lowered by the reheating is consumed a lot of heat energy, the existing air conditioner is generated in the process of cooling the air Although the waste heat of the outdoor unit was released into the atmosphere, the present invention is intended to recover the waste heat discharged to the atmosphere to control the humidity without a separate energy supply as energy of the waste heat.

또한 실외기의 폐열을 회수하고 재가열하여 과냉각된 온도를 보정하며 적정 조건을 일정하게 유지하는 부가적인 효과를 기대한다.In addition, it is expected that the additional effects of recovering and reheating the outdoor unit's waste heat to correct the supercooled temperature and to keep the proper conditions constant.

더욱이 폐열을 회수하여 제어하는 일련의 동작을 보다 세밀하게 제어하기 위하여 응축기와 재가열기를 구성하는 응축수단과 재가열수단을 다단으로 구성하고 다단으로 구성되어진 각 구성요소의 입출력단자에 냉매의 입출력량을 조절하기 위한 밸브를 구비함으로써 제어신호에 의해 온/오프 동작하도록 하여 미세제어를 단성하게 된다.Furthermore, in order to more precisely control a series of operations to recover and control the waste heat, the condenser and reheater constitute a condenser and reheater in multiple stages, and the input / output amount of the refrigerant is controlled in the input / output terminals of each component composed of multiple stages. By providing a valve for performing on / off operation by a control signal, fine control is established.

첨부한 도 1은 본 발명에 따른 폐열 이용 고효율 클린룸 항온항습기 정밀제어를 위한 공조장치로서, 습도가 높은 하절기에는 외기를 클린룸 내부에 공급하면 상대습도가 높아져 제습이 필요한데, 습도를 조절하기 위해서 공조기에서 냉각제습 운전이 이루어져 실내의 온도가 낮아지며 온도를 보상하기 위해서 가열을 하게 된다.1 is an air conditioner for precise control of a high-efficiency clean room constant temperature and humidity chamber using waste heat according to the present invention. In summer, when humidity is high, relative humidity is required to increase the relative humidity when the outside air is supplied into the clean room. The cooling and dehumidification operation is performed in the air conditioner to lower the room temperature and to heat the temperature to compensate for the temperature.

따라서 냉각제습 운전모드에서 실외기로부터 버려지는 열을 공조기에 재활용하고, 응축기의 온도가 낮아져 냉동기의 성적계수가 향상되므로 효율적으로 에너지 비용을 절감 할 수 있는 공조시스템이다.Therefore, in the cooling and dehumidification operation mode, the heat discarded from the outdoor unit is recycled to the air conditioner, and the temperature coefficient of the condenser is lowered, thereby improving the freezing coefficient of the refrigerator.

입구 공기를 공기조화하기 위한 증발기(230)와, 상기 증발기(230)의 냉방 용량을 제어하도록 온/오프 사이클링을 이루는 응축기(110)와, 상기 증발기(230)와 응축기(110)사이의 냉매 순환을 위한 도관(140)과, 상기 도관(140)을 통해 흐르는 냉매의 흐름경로를 제어하기 위한 밸브(참조번호 미부여), 및 상기 도관(140) 사이에 위치하며 상기 증발기(230)와 응축기(110)의 동작에 따라 발생되는 열중 여분의 열에너지를 축적하는 축열기(130)와 압축기(120)를 기본적인 구성으로 한다.An evaporator 230 for air conditioning the inlet air, a condenser 110 for on / off cycling to control the cooling capacity of the evaporator 230, and a refrigerant circulation between the evaporator 230 and the condenser 110 Between the conduit 140, a valve for controlling the flow path of the refrigerant flowing through the conduit 140 (not given), and the conduit 140 and located between the evaporator 230 and the condenser. The heat accumulator 130 and the compressor 120 that accumulate extra thermal energy in heat generated by the operation of the 110 has a basic configuration.

이때 상기 응축기(110)는 다수의 냉매 응축수단을 구비하고 유입되는 냉매를 균등 분배받아 각각 응축 동작하되 각각의 냉매 응축수단의 후단에 제어신호에 의해 냉매 배출을 온오프하는 다수의 밸브를 구비함으로써 냉매 응축효율을 세밀 제어할 수 있도록 구성되어진다.At this time, the condenser 110 is provided with a plurality of refrigerant condensation means and by receiving the equally distributed refrigerant is condensed operation respectively, but having a plurality of valves on and off the refrigerant discharge by a control signal at the rear end of each refrigerant condensing means by It is configured to finely control the refrigerant condensation efficiency.

상기 축열기(130)와 압축기(120)의 동작과 증발기(230)의 동작에 따라 배출되는 폐열의 정도에 따라 제어신호에 의해 배출 공기 온도에 영향을 미치도록 냉매의 팽창을 조절하기 위해 냉매를 재가열하도록 구성된 재가열히터(210A)를 구비하는데, 상기 재가열히터(210A) 역시 다수의 냉매 재가열 수단을 구비하고 유입되는 냉매를 균등 분배받아 각각 재가열 동작하되 각각의 냉매 재가열수단의 전단에 제어신호에 의해 냉매 배출을 온오프하는 다수의 밸브를 구비함으로써 냉매 가열효율을 세밀 제어할 수 있도록 구성한다.The refrigerant is controlled to control the expansion of the refrigerant to influence the exhaust air temperature by a control signal according to the operation of the heat storage 130 and the compressor 120 and the degree of waste heat discharged according to the operation of the evaporator 230. A reheat heater 210A configured to reheat is provided. The reheat heater 210A also includes a plurality of refrigerant reheating means and is equally distributed to the refrigerant to be reheated, respectively, by a control signal at the front end of each refrigerant reheating means. By providing a plurality of valves for turning on and off the refrigerant discharge is configured to enable fine control of the refrigerant heating efficiency.

이때 상기 축열기(130)와 압축기(120)의 동작에 따라 배출되는 폐열을 상기 재가열히터(210A)측으로 공급하는 도관(140)사이에 위치하며 상기 재가열히터(210A)측으로 전달되는 냉매의 량을 제어하는 다수의 솔레노이드 밸브(220)가 구비되며, 배출 공기 습도에 영향을 미치도록 공기조화된 입구 공기의 선택된 일부에 미세 물방울을 분포시키는 가습기(240)를 포함한다.At this time, it is located between the conduit 140 for supplying the waste heat discharged according to the operation of the regenerator 130 and the compressor 120 to the reheating heater 210A side and the amount of refrigerant delivered to the reheating heater 210A side. A plurality of solenoid valves 220 for controlling are provided and include a humidifier 240 for distributing fine water droplets in selected portions of the air-conditioned inlet air to affect the exhaust air humidity.

상기 구성 중 압축기(120)는 역순환 사이클을 이루는 냉매가 부족하거나 냉매의 압축 압력이 느슨해졌을 때 이를 보충해주기 위해 해당 냉매 사이클에 보충되는 냉매가스의 압축을 위해 사용되는 것이다.Compressor 120 of the configuration is used for the compression of the refrigerant gas to be supplemented to the refrigerant cycle to compensate for the lack of refrigerant constituting the reverse circulation cycle or when the compression pressure of the refrigerant is loosened.

이와 같은 구성과 특성을 갖는 본 발명에 따른 폐열 이용 고효율 클린룸 항온항습기 정밀제어를 위한 공조장치의 제어방식은 첨부한 도 2에 도시되어 있듯이, 도 1의 증발기(230)는 도 2의 (1)번 온도 센서 또는 (3)번의 온습도 센서에 의하여 제어하고, 도 1의 재가열기(210A)는 도 2의 (2)번 온도 센서에 의하여 제어된다.The control method of the air conditioner for precise control of the high-efficiency clean room constant temperature and humidity controller using waste heat according to the present invention having the configuration and characteristics as described above is shown in FIG. 2, the evaporator 230 of FIG. ) Is controlled by the temperature sensor (3) or the temperature and humidity sensor (3), the reheater 210A of Figure 1 is controlled by the temperature sensor (2) of FIG.

따라서 종래방식에서 배출 공기 온도에 영향을 미치도록 공기조화된 입구 공기의 선택된 일부를 재가열하도록 구성된 히터 코어를 구비하지 않더라도 재가열기(210A)만으로도 기존방식의 히터 코어의 기능을 수행 할 수 있으며, 재가열정도 혹은 응축정도를 미세조절할 수 있어 효율을 증가시킬 수 있다.Therefore, even without the heater core configured to reheat the selected part of the air-conditioned inlet air in order to affect the exhaust air temperature in the conventional method, the reheater 210A alone can perform the function of the conventional heater core and reheat. The degree of condensation can be finely adjusted to increase efficiency.

또한, 가습기를 별도로 구비함으로써 습도의 조절을 용이하도록 하였다.
In addition, by separately providing a humidifier to control the humidity.

이상의 설명에서 본 발명은 특정의 실시 예와 관련하여 도시 및 설명하였지만, 특허청구범위에 의해 나타난 발명의 사상 및 영역으로부터 벗어나지 않는 한도 내에서 다양한 개조 및 변화가 가능하다는 것을 당 업계에서 통상의 지식을 가진 자라면 누구나 쉽게 알 수 있을 것이다.While the invention has been shown and described with respect to the specific embodiments thereof, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention as defined by the appended claims. Anyone with it will know easily.

Claims (3)

입구 공기를 공기조화하기 위한 증발기와, 상기 증발기의 냉방 용량을 제어하도록 온/오프 사이클링을 이루는 응축기와, 상기 증발기와 응축기사이의 냉매 순환을 위한 도관과, 상기 도관을 통해 흐르는 냉매의 흐름경로를 제어하기 위한 밸브, 및 상기 도관 사이에 위치하며 상기 증발기와 응축기의 동작에 따라 발생되는 열중 여분의 열에너지를 축적하는 축열기와 압축기를 구비한 공기조화 시스템에 있어서:
상기 응축기는 다수의 냉매 응축수단을 구비하고 유입되는 냉매를 균등 분배받아 각각 응축 동작하되 각각의 냉매 응축수단의 후단에 제어신호에 의해 냉매 배출을 온오프하는 다수의 밸브를 구비함으로써 냉매 응축효율을 세밀 제어할 수 있도록 구성되며;
상기 축열기와 압축기의 동작과 증발기의 동작에 따라 배출되는 폐열의 정도에 따라 제어신호에 의해 배출 공기 온도에 영향을 미치도록 냉매의 팽창을 조절하기 위해 냉매를 재가열하도록 다수의 냉매 재가열 수단을 구비하고, 유입되는 냉매를 균등 분배받아 각각 재가열 동작하되 각각의 냉매 재가열수단의 전단에 제어신호에 의해 냉매 배출을 온오프하는 다수의 밸브를 구비함으로써 냉매 가열효율을 세밀 제어할 수 있도록 구성된 재가열히터와;
상기 축열기와 압축기의 동작에 따라 배출되는 폐열을 상기 재가열히터측으로 공급하는 도관사이에 위치하며 상기 재가열히터측으로 전달되는 냉매의 량을 제어하는 다수의 솔레노이드 밸브; 및
배출 공기 습도에 영향을 미치도록 공기조화된 입구 공기의 선택된 일부에 미세 물방울을 분포시키는 가습기를 포함하는 것을 특징으로 하는 폐열 이용 고효율 클린룸 항온항습기 정밀제어를 위한 공조장치.An evaporator for air conditioning the inlet air, a condenser for cycling on / off to control the cooling capacity of the evaporator, a conduit for refrigerant circulation between the evaporator and the condenser, and a flow path of the refrigerant flowing through the conduit In an air conditioning system having a valve for controlling and a regenerator and a compressor located between the conduits and accumulating extra thermal energy in heat generated by the operation of the evaporator and condenser:
The condenser is provided with a plurality of refrigerant condensing means and the equally distributed refrigerant is condensed operation respectively, but a plurality of valves on the rear end of each refrigerant condensing means by the control signal on and off the refrigerant discharge condensation efficiency Configured for fine control;
And a plurality of refrigerant reheating means for reheating the refrigerant to control the expansion of the refrigerant so as to influence the discharge air temperature by a control signal according to the operation of the heat storage and the compressor and the amount of waste heat discharged according to the operation of the evaporator. Re-heating heater configured to control the heating efficiency of the refrigerant by providing a plurality of valves for re-heating operation by receiving evenly distributed refrigerant, and having a plurality of valves on / off of the refrigerant discharge by a control signal in front of each refrigerant reheating means; ;
A plurality of solenoid valves positioned between conduits for supplying the waste heat discharged according to the operation of the heat storage unit and the compressor to the reheating heater side and controlling the amount of refrigerant transferred to the reheating heater side; And
A high-efficiency clean room constant temperature and humidity control system using waste heat, characterized in that it comprises a humidifier for distributing fine droplets to a selected portion of the air-conditioned inlet air to affect the exhaust air humidity. 삭제delete 삭제delete
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