CN103712298A - Air conditioning device for precisely controlling high-efficiency thermo-hygrostat of a clean room by using waste heat - Google Patents
Air conditioning device for precisely controlling high-efficiency thermo-hygrostat of a clean room by using waste heat Download PDFInfo
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- CN103712298A CN103712298A CN201310359454.3A CN201310359454A CN103712298A CN 103712298 A CN103712298 A CN 103712298A CN 201310359454 A CN201310359454 A CN 201310359454A CN 103712298 A CN103712298 A CN 103712298A
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B27/00—Machines, plants or systems, using particular sources of energy
- F25B27/02—Machines, plants or systems, using particular sources of energy using waste heat, e.g. from internal-combustion engines
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F12/00—Use of energy recovery systems in air conditioning, ventilation or screening
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/001—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems in which the air treatment in the central station takes place by means of a heat-pump or by means of a reversible cycle
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F2203/00—Devices or apparatus used for air treatment
- F24F2203/10—Rotary wheel
- F24F2203/1024—Rotary wheel combined with a humidifier
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F2203/00—Devices or apparatus used for air treatment
- F24F2203/10—Rotary wheel
- F24F2203/1056—Rotary wheel comprising a reheater
- F24F2203/106—Electrical reheater
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
- Y02B30/56—Heat recovery units
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P80/00—Climate change mitigation technologies for sector-wide applications
- Y02P80/10—Efficient use of energy, e.g. using compressed air or pressurized fluid as energy carrier
- Y02P80/15—On-site combined power, heat or cool generation or distribution, e.g. combined heat and power [CHP] supply
Abstract
The invention relates to an air conditioning device for filtering air supplied to a clean room of a semiconductor manufacturing device and for controlling temperature and humidity, and especially relates to an air conditioning device for precisely controlling a high-efficiency thermo-hygrostat of a clean room by using waste heat. Waste heat discharged from a conventional air conditioning system is recycled to control humidity without supplying additional energy equivalent to the energy of the waste heat. The waste heat is then divided into multiple segments by using coils, condensing coils and steps, so dehumidification loads of an evaporator are changed based on changes of indoor loads or outer air loads, and thus changes of heat in a condenser can be controlled in an effective and precise manner.
Description
Technical field
The present invention relates to the aircondition that air that a kind of dust free room of subtend semiconductor manufacturing facility supplies with filters and temperature and humidity is controlled, particularly relate to a kind of aircondition that utilizes high efficiency dust free room Constant Temperature and Humidity Chambers for precision control used heat, it reclaims the used heat that is disposed to atmosphere from existing air-conditioning system, without being equivalent to the other energy of this waste heat energy regenerating, supply regulates humidity, used heat is recycled to coil and condensation coil is divided into multistage with classification (STEP), to change the humidity load of removing of evaporimeter according to the change of indoor load or outer gas load, thereby the thermal change of effectively generating heat in accurate control condenser.
Background technology
In general, the product such as semiconductor or liquid crystal indicator is manufactured in the dust free room (Clean room) that keeps high cleanliness.In addition, in order to prevent that dust or polluter from flowing into along with flowing into the air of dust free room, and the temperature of leaked-in air and humidity are adjusted into optimal conditions (12 ℃ 90%) and use outer gas aircondition.
In addition, the major part of the energy consuming in the manufacturing engineering of semiconductor or liquid crystal indicator (approximately 90%) is electric power, 40% being consumed by air-conditioning equipment wherein, the most electricity usage consuming in air-conditioning equipment forms in mode as above in running and in order to the outer gas aircondition of the outer gas that imports in processing dust free room.
Therefore, only by reducing outer gas, load to reduce the electric power that outer gas aircondition is used, also can expect extraordinary energy-saving effect.
Therefore, constantly preheating or the precooling for the gas outside importing by the heat recovery of the gas of discharge use in research, thus to reduce outer gas load, realize energy-conservation method.
But in the situation of gas aircondition, owing to consuming considerable energy, there are the following problems outside, that is: only by reclaiming the heat of institute's emission gases, come preheating or precooling to import outer gas, cannot meet for energy-conservation demand fully.
And, the cooling load of dust free room is large, outside summer, the humidity of gas is high and occupy major part except humidity load, therefore for the humidity regulation when dust free room is carried out to air conditioning, aircondition is configured to most of load for cooling, dehumidify and carry out the system of heat again with other heating, the problem of cooling and dehumidifying is as follows, that is: for indoor design temperature, humidity, by indoor design temperature supercooling to dew-point temperature and after dehumidifying, again again heat (Reheating) to proper temperature, thereby due to cooling and the two opposite effect of heating, there is energy and cross the phenomenon of consumption.
Summary of the invention
For the object of the invention is to of addressing the above problem, the aircondition that provides air that a kind of dust free room of subtend semiconductor manufacturing facility is supplied with to filter and temperature and humidity is controlled, particularly provide a kind of and control for precision the aircondition that used heat utilizes high efficiency dust free room Constant Temperature and Humidity Chambers, it reclaims the used heat that is disposed to atmosphere from existing air-conditioning system, without being equivalent to the other energy of this waste heat energy regenerating, supply regulates humidity, used heat is recycled to coil and condensation coil is divided into multistage with classification (STEP), to change the humidity load of removing of evaporimeter according to the change of indoor load or outer gas load, thereby the thermal change of effectively generating heat in accurate control condenser.
In order to achieve the above object, according to of the present invention, for precision, controlling the aircondition that used heat utilizes high efficiency Constant Temperature and Humidity Chambers, is a kind of air handling system, and this air handling system comprises: evaporimeter, in order to intake air is carried out to air conditioning; Condenser, forms the refrigeration capacity that ON/OFF circulates to control described evaporimeter; Conduit, for circulating cold-producing medium between described evaporimeter and described condenser; Valve, in order to control by the flow path of the mobile cold-producing medium of described conduit; Storage heater, between described conduit, the unnecessary heat energy in the heat producing along with the action of described evaporimeter and described condenser in order to savings; And compressor.Aircondition of the present invention is characterised in that, described condenser is provided with a plurality of condensation of refrigerant unit, it is assigned to equably the cold-producing medium of inflow and carries out respectively condensation action, in the rear end of each condensation of refrigerant unit, be provided with in order to according to control signal and a plurality of valves of switch cold-producing medium discharge, thereby can accurately control condensation of refrigerant efficiency, described aircondition comprises: reheater, it is provided with a plurality of cold-producing medium reheating units, the degree of the used heat discharging according to the action of the action along with described storage heater and described compressor and described evaporimeter, according to control signal heating and cooling agent again, thereby regulate the expansion of cold-producing medium with the air themperature of impact discharge, it is assigned to equably the cold-producing medium of inflow and heats respectively action again, described in each, the front end of cold-producing medium reheating unit is provided with in order to according to control signal and a plurality of valves of switch cold-producing medium discharge, thereby can accurately control the cold-producing medium efficiency of heating surface, a plurality of solenoid valve, it is supplied between the conduit of described reheater side at the used heat that the action along with described storage heater and described compressor is discharged, in order to control the amount of the cold-producing medium transmitting to described reheater side, and humidifier, it is in order to carrying out selecteed a part of distribution fine water droplets in the intake air of air conditioning, to affect the air humidity of discharge.
According to feature of the present invention as above, the present invention can expect following effect,, in the humidity high process that dehumidify of summer because of outer gas, supercooling causes temperature to reduce, and therefore need to heat again, now can consume more heat energy, the waste heat discharge of the off-premises station that existing air conditioner produces while adopting cooling-air is to the mode in atmosphere, and the present invention is intended to reclaim the used heat to airborne release, without supply, be equivalent to this used heat energy other energy and regulate humidity.And the present invention can expect following additional effect: by reclaiming the used heat of off-premises station and heating again to compensate by overcooled temperature, and keep constant felicity condition.
Further, by used heat being recycled to coil and condensation coil, with classification (STEP), be divided into multistage, to change the humidity load of removing of evaporimeter according to the change of indoor load or outer gas load, thereby precision is controlled the thermal change of generating heat in condenser effectively.
Accompanying drawing explanation
Fig. 1 illustrates the detailed structure of aircondition and the illustration figure of system that utilizes high efficiency dust free room Constant Temperature and Humidity Chambers for precision control used heat of the present invention;
Fig. 2 is for of the present inventionly controlling for precision the concept map of control method that used heat utilizes the aircondition of high efficiency Constant Temperature and Humidity Chambers in order to illustrate.
The specific embodiment
About above-mentioned purpose of the present invention and a plurality of advantage, those skilled in the art can understand more clearly by the preferred embodiments of the present invention of describing hereinafter with reference to accompanying drawing.
First, the technological thought adopting in the present invention is described, in the humidity high process that dehumidify of summer because of outer gas, supercooling causes temperature to reduce, therefore need to heat again, now can consume more heat energy, the waste heat discharge of the off-premises station that existing air conditioner produces while adopting cooling-air is to the mode in atmosphere, and the present invention is intended to reclaim the used heat to airborne release, without supply, be equivalent to this used heat energy other energy and regulate humidity.
And the present invention expects following additional effect: by reclaiming the used heat of off-premises station and heating again to compensate by overcooled temperature, and keep constant felicity condition.
And then, in order more critically to control a series of actions of reclaiming used heat and controlling, the condensing unit and the reheating unit that form condenser and reheater are configured to multistage, on the input/output terminal of each member of formation that is configured to multistage, arrange in order to regulate the valve of the I/O amount of cold-producing medium, thereby carry out ON/OFF according to control signal, move to realize trickle control.
Fig. 1 is the aircondition that utilizes high efficiency dust free room Constant Temperature and Humidity Chambers for precision control used heat of the present invention, in humidity high summer, when outer gas is supplied to dust free room inside, relative humidity uprises and need to dehumidify, in order to regulate humidity, air conditioner carries out cooling and dehumidifying operation and causes indoor temperature step-down, for compensation temperature, heats.
Therefore, aircondition of the present invention is following system, that is: the heat discarding from off-premises station under cooling and dehumidifying operation mode is recycled in air conditioner, make the temperature of condenser reduce to improve the coefficient of performance of refrigerator, so can effectively save energy cost.
Basic structure of the present invention comprises: evaporimeter 230, in order to intake air is carried out to air conditioning; Condenser 110, forms the refrigeration capacity that ON/OFF circulates to control above-mentioned evaporimeter 230; Conduit 140, for circulating cold-producing medium between above-mentioned evaporimeter 230 and condenser 110; Valve (not giving drawing reference numeral), in order to control by the flow path of the mobile cold-producing medium of above-mentioned conduit 140; Storage heater 130, between above-mentioned conduit 140, the unnecessary heat energy in the heat producing along with the action of above-mentioned evaporimeter 230 and condenser 110 in order to savings; And compressor 120.
Now, above-mentioned condenser 110 is provided with a plurality of condensation of refrigerant unit, it is assigned to equably the cold-producing medium of inflow and carries out respectively condensation action, in the rear end of each condensation of refrigerant unit, be provided with in order to according to control signal and a plurality of valves of switch cold-producing medium discharge, thereby can accurately control condensation of refrigerant efficiency.
And, on the cold-producing medium I/O conduit 140 of above-mentioned condenser 110, being respectively arranged with tripartite's valve A, B, this tripartite's valve A, B change switching direction according to ratio control signal.
Aircondition of the present invention comprises reheater 210A, it is along with the action of above-mentioned storage heater 130 and compressor 120 and the action of evaporimeter 230 and the degree of the used heat discharging, according to control signal heating and cooling agent again, thereby regulate the expansion of cold-producing medium with the air themperature of impact discharge, above-mentioned reheater 210A is also provided with a plurality of cold-producing medium reheating units, it is assigned to equably the cold-producing medium of inflow and heats respectively action again, at the front end of each cold-producing medium reheating unit, be provided with in order to according to control signal and a plurality of valves of switch cold-producing medium discharge, thereby can accurately control the cold-producing medium efficiency of heating surface.
Now, aircondition of the present invention comprises a plurality of solenoid valve 220, it is supplied between the conduit 140 of above-mentioned reheater 210A side at the used heat that the action along with above-mentioned storage heater 130 and compressor 120 is discharged, in order to control the amount of the cold-producing medium transmitting to above-mentioned reheater 210A side; And comprising humidifier 240, it is in order to carrying out selecteed a part of distribution fine water droplets in the intake air of air conditioning, to affect the air humidity of discharge.
In said structure, compressor 120 is used in when the compression pressure of the contrary lack of refrigerant circulating of formation or cold-producing medium relaxes, in order to compress refrigerant gas supplementary in corresponding refrigerant circulation.
And, aircondition of the present invention also comprises auxiliary heater 210B, this auxiliary heater 210B is in order to heat carrying out a selecteed part in the intake air of air conditioning again, air themperature with impact discharge, this auxiliary heater 210B is the member corresponding with the heater core of prior art, in the situation that the efficiency that used heat utilization of the present invention is controlled extremely reduces and uses.
There is the of the present invention of structure and characteristics as above and control for precision the control method that used heat utilizes the aircondition of high efficiency dust free room Constant Temperature and Humidity Chambers, as shown in Figure 2, the evaporimeter 230 of Fig. 1 is controlled according to the temperature sensor of Fig. 2 (1) or Temperature Humidity Sensor (3), and the reheater 210A of Fig. 1 is controlled according to the temperature sensor of Fig. 2 (2).Program logic controller) or DDC(Direct Digital Controller to passing through that the temperature (FAN Part) of air of the auxiliary heater 210B of Fig. 1 is controlled or Temperature Humidity Sensor (3) by Fig. 2 carries out temperature while controlling, will carry out PLC(Program Logic Controller to it:: direct digital controller) control.
Thus, even if the heater core (heater core) in existing mode is not set, only by reheater 210A, also can carry out the function of the heater core of existing mode, and due to can fine adjusting degree of heat or degree of condensation again, thereby can raise the efficiency, wherein said heater core is configured to and heats carrying out a selecteed part in the intake air of air conditioning again, to affect the air themperature of discharge.
And, by humidifier is set in addition, make the adjusting of humidity become easy.
About specific embodiment of the present invention, carry out diagram and explanation above, but it will be understood by those of skill in the art that within not exceeding the scope in thought of the present invention and field, can carry out multiple transformation and variation to it.
Claims (1)
1. accurate control used heat utilizes an aircondition for high efficiency dust free room Constant Temperature and Humidity Chambers, is a kind of air handling system, and this air handling system comprises: evaporimeter, in order to intake air is carried out to air conditioning; Condenser, forms the refrigeration capacity that ON/OFF circulates to control described evaporimeter; Conduit, for circulating cold-producing medium between described evaporimeter and described condenser; Valve, in order to control by the flow path of the mobile cold-producing medium of described conduit; Storage heater, between described conduit, the unnecessary heat energy in the heat producing along with the action of described evaporimeter and described condenser in order to savings; And compressor, it is characterized in that,
Described condenser is provided with a plurality of condensation of refrigerant unit, it is assigned to equably the cold-producing medium of inflow and carries out respectively condensation action, in the rear end of each condensation of refrigerant unit, be provided with in order to according to control signal and a plurality of valves of switch cold-producing medium discharge, thereby can accurately control condensation of refrigerant efficiency;
Described aircondition comprises:
Reheater, it is provided with a plurality of cold-producing medium reheating units, the degree of the used heat discharging according to the action of the action along with described storage heater and described compressor and described evaporimeter, according to control signal heating and cooling agent again, thereby regulate the expansion of cold-producing medium with the air themperature of impact discharge, it is assigned to equably the cold-producing medium of inflow and heats respectively action again, described in each, the front end of cold-producing medium reheating unit is provided with in order to according to control signal and a plurality of valves of switch cold-producing medium discharge, thereby can accurately control the cold-producing medium efficiency of heating surface
A plurality of solenoid valve, it is supplied between the conduit of described reheater side at the used heat that the action along with described storage heater and described compressor is discharged, in order to control the amount of the cold-producing medium transmitting to described reheater side, and
Humidifier, it is in order to carrying out selecteed a part of distribution fine water droplets in the intake air of air conditioning, to affect the air humidity of discharge.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020120111414A KR101254934B1 (en) | 2012-10-08 | 2012-10-08 | High efficiency homoiothermic humidistat for clean room utilizing waste heat air conditioner for precision control |
| KR10-2012-0111414 | 2012-10-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103712298A true CN103712298A (en) | 2014-04-09 |
| CN103712298B CN103712298B (en) | 2016-09-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310359454.3A Active CN103712298B (en) | 2012-10-08 | 2013-08-16 | The accurate air-conditioning device controlling Waste Heat Reuse high efficiency dust free room Constant Temperature and Humidity Chambers |
Country Status (2)
| Country | Link |
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| KR (1) | KR101254934B1 (en) |
| CN (1) | CN103712298B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107270517A (en) * | 2017-07-26 | 2017-10-20 | 美的集团武汉制冷设备有限公司 | Air-conditioning system, the control device of air-conditioning system and method |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104864495B (en) * | 2014-02-21 | 2018-12-04 | 大金工业株式会社 | Air-conditioning device |
| KR101658185B1 (en) * | 2016-03-23 | 2016-09-21 | 천두황 | Heat-pump Type thermo-hygrostate system |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN2498527Y (en) * | 2001-09-20 | 2002-07-03 | 新疆兰环水处理科技有限公司 | Energy stored central air conditioner with ground temperature |
| WO2004072560A1 (en) * | 2003-02-14 | 2004-08-26 | Hombuecher Heinz-Dieter | Method and device for recovering energy |
| JP2005030706A (en) * | 2003-07-08 | 2005-02-03 | Denso Corp | Central ventilating and air conditioning system |
| CN102384553A (en) * | 2011-11-07 | 2012-03-21 | 上海克络蒂新能源科技有限公司 | Improved structure of air source heat pump unit for temperature and humidity independent control air-conditioning system |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101227477B1 (en) * | 2005-10-05 | 2013-01-30 | 엘지전자 주식회사 | Air conditioner having volume variableness type condenser and method of control thereof |
| KR101170012B1 (en) * | 2010-06-24 | 2012-08-01 | 윤길상 | Heat pump style constant temperature humidifier |
-
2012
- 2012-10-08 KR KR1020120111414A patent/KR101254934B1/en active IP Right Grant
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- 2013-08-16 CN CN201310359454.3A patent/CN103712298B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2498527Y (en) * | 2001-09-20 | 2002-07-03 | 新疆兰环水处理科技有限公司 | Energy stored central air conditioner with ground temperature |
| WO2004072560A1 (en) * | 2003-02-14 | 2004-08-26 | Hombuecher Heinz-Dieter | Method and device for recovering energy |
| JP2005030706A (en) * | 2003-07-08 | 2005-02-03 | Denso Corp | Central ventilating and air conditioning system |
| CN102384553A (en) * | 2011-11-07 | 2012-03-21 | 上海克络蒂新能源科技有限公司 | Improved structure of air source heat pump unit for temperature and humidity independent control air-conditioning system |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107270517A (en) * | 2017-07-26 | 2017-10-20 | 美的集团武汉制冷设备有限公司 | Air-conditioning system, the control device of air-conditioning system and method |
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| Publication number | Publication date |
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| CN103712298B (en) | 2016-09-21 |
| KR101254934B1 (en) | 2013-04-16 |
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