CN103712298B - The accurate air-conditioning device controlling Waste Heat Reuse high efficiency dust free room Constant Temperature and Humidity Chambers - Google Patents

The accurate air-conditioning device controlling Waste Heat Reuse high efficiency dust free room Constant Temperature and Humidity Chambers Download PDF

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Publication number
CN103712298B
CN103712298B CN201310359454.3A CN201310359454A CN103712298B CN 103712298 B CN103712298 B CN 103712298B CN 201310359454 A CN201310359454 A CN 201310359454A CN 103712298 B CN103712298 B CN 103712298B
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air
cold
producing medium
order
humidity
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CN103712298A (en
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金权中
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EGENC
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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B27/00Machines, plants or systems, using particular sources of energy
    • F25B27/02Machines, plants or systems, using particular sources of energy using waste heat, e.g. from internal-combustion engines
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F12/00Use of energy recovery systems in air conditioning, ventilation or screening
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/001Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems in which the air treatment in the central station takes place by means of a heat-pump or by means of a reversible cycle
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F2203/00Devices or apparatus used for air treatment
    • F24F2203/10Rotary wheel
    • F24F2203/1024Rotary wheel combined with a humidifier
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F2203/00Devices or apparatus used for air treatment
    • F24F2203/10Rotary wheel
    • F24F2203/1056Rotary wheel comprising a reheater
    • F24F2203/106Electrical reheater
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02BCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B30/00Energy efficient heating, ventilation or air conditioning [HVAC]
    • Y02B30/56Heat recovery units
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P80/00Climate change mitigation technologies for sector-wide applications
    • Y02P80/10Efficient use of energy, e.g. using compressed air or pressurized fluid as energy carrier
    • Y02P80/15On-site combined power, heat or cool generation or distribution, e.g. combined heat and power [CHP] supply

Abstract

The present invention relates to the air-conditioning device that a kind of air to supplying filters and is controlled temperature and humidity to the dust free room of semiconductor manufacturing facility, particularly relate to a kind of air-conditioning device controlling Waste Heat Reuse high efficiency dust free room Constant Temperature and Humidity Chambers for precision, it reclaims the used heat being emitted into air from existing air conditioning system, be equivalent to the other energy of this waste heat energy regenerating without supply and regulate humidity, used heat is recycled coil and condensation coil is divided into multistage with classification (STEP), to change the dehumidifying load of vaporizer according to indoor load or the variation of exogenous QI load, the thermal change of heating in condenser is controlled it is thus possible to effectively accurate.

Description

The accurate air-conditioning device controlling Waste Heat Reuse high efficiency dust free room Constant Temperature and Humidity Chambers
Technical field
The present invention relates to a kind of air to supplying to the dust free room of semiconductor manufacturing facility filter and right The air-conditioning device that temperature and humidity is controlled, particularly relates to a kind of efficient for precision control Waste Heat Reuse The air-conditioning device of rate dust free room Constant Temperature and Humidity Chambers, it reclaims and is emitted into the useless of air from existing air conditioning system Heat, it is not necessary to supply is equivalent to the other energy of this waste heat energy regenerating and regulates humidity, and used heat is recycled coil And condensation coil is divided into multistage with classification (STEP), with according to indoor load or the variation of exogenous QI load And change the dehumidifying load of vaporizer such that it is able to the accurate heat change controlling heating in condenser effectively Change.
Background technology
In general, the product such as quasiconductor or liquid crystal indicator is keeping the dust free room (Clean of high cleanliness Room) manufacture in.It addition, in order to prevent dust or polluter along with the air of inflow dust free room Flow into, and temperature and the humidity of leaked-in air are adjusted to optimal conditions (12 DEG C 90%) and use Exogenous QI air-conditioning device.
It addition, the major part (about 90%) of the energy consumed in the manufacturing engineering of quasiconductor or liquid crystal indicator For electric power, therein 40% is consumed by air-conditioning equipment, the most electricity usage consumed in air-conditioning equipment Constitute in the manner and in order to process the exogenous QI air-conditioning dress of the exogenous QI imported in dust free room in operating Put.
Therefore, reduce, only by minimizing exogenous QI load, the electric power that exogenous QI air-conditioning device is used, it is also possible to Expect extraordinary energy-saving effect.
Therefore, constantly in research for by the heat recovery of the gas of discharge and use and importing the pre-of exogenous QI Heat or pre-cooling, realize energy-conservation method to reduce exogenous QI load.
But, in the case of exogenous QI air-conditioning device, owing to consuming considerable energy, there are the following problems, That is: preheat only by the heat reclaiming discharged gas or pre-cooling imports exogenous QI, will be unable to full fully Foot is for energy-conservation demand.
Further, the cooling load of dust free room is big, and in summer, the humidity of exogenous QI is high and the load that dehumidifies occupies major part, Therefore to the humidity regulation when dust free room carries out air regulation, air-conditioning device is configured to major part load For cooling down, dehumidify and carry out with other heating the system of reheating, the problem of cooling and dehumidifying is as follows, it may be assumed that For indoor design temperature, humidity, after indoor design temperature supercooling to dew point temperature dehumidifying, Again reheating (Reheating) is to proper temperature, thus due to cooling and both opposite effect of heating, Energy is occurred to cross the phenomenon of consumption.
Summary of the invention
For solving it is an object of the invention to of the problems referred to above, it is provided that a kind of to semiconductor manufacturing facility The air of dust free room supply carries out the air-conditioning device filtering and being controlled temperature and humidity, particularly provides A kind of air-conditioning device controlling Waste Heat Reuse high efficiency dust free room Constant Temperature and Humidity Chambers for precision, it reclaims from existing Some air conditioning systems are emitted into the used heat of air, it is not necessary to supply be equivalent to this waste heat energy regenerating other energy and Regulation humidity, recycles coil by used heat and condensation coil is divided into multistage, with root with classification (STEP) The dehumidifying load of vaporizer is changed such that it is able to effectively accurate according to indoor load or the variation of exogenous QI load Control the thermal change of heating in condenser.
In order to achieve the above object, Waste Heat Reuse high efficiency constant temperature and humidity is controlled according to the precision that is used for of the present invention The air-conditioning device of device, is a kind of air handling system, and this air handling system includes: vaporizer, in order to right Intake air carries out air regulation;Condenser, constitutes ON/OFF circulation and holds with the refrigeration controlling described vaporizer Amount;Conduit, is used for making cold-producing medium circulate between described vaporizer and described condenser;Valve, in order to control System is by the flow path of the cold-producing medium of described pipe flow;Thermophore, between described conduit, in order to Unnecessary heat energy in the heat that savings produces along with described vaporizer and the action of described condenser;And Compressor.The air-conditioning device of the present invention is characterised by, it is single that described condenser is provided with the condensation of multiple cold-producing medium Unit, it is equally distributed over the cold-producing medium of inflow and carries out condensation action respectively, single in the condensation of each cold-producing medium The rear end of unit is provided with the multiple valves in order to switch discharge refrigerant according to control signal such that it is able to essence Close control cold-producing medium condensation efficiency;Described air-conditioning device includes: reheater, and it is provided with multiple cold-producing medium Reheating unit, according to along with described thermophore and the action of described compressor and the action of described vaporizer and The degree of the used heat of discharge, reheats cold-producing medium according to control signal, thus regulates the expansion of cold-producing medium with shadow Rehearsing with musical accompaniment the air themperature put, it is equally distributed over the cold-producing medium of inflow and carries out reheating action respectively, The front end of each described cold-producing medium reheating unit is provided with in order to switch cold-producing medium row according to control signal The multiple valves put such that it is able to accurate control refrigerant heat efficiency;Multiple solenoid valve, it is positioned at The used heat discharged along with described thermophore and the action of described compressor is supplied to described reheater side Conduit between, in order to control the amount of cold-producing medium transmitted to described reheater side;And humidifier, its In order to part distribution fine water droplets selected in the intake air carrying out air regulation, to affect row The air humidity put.
According to inventive feature as above, the present invention can expect following effect, i.e. summer because of The humidity of exogenous QI is high and during dehumidifying, supercooling causes temperature to reduce, it is therefore desirable to add again Heat, now can consume more heat energy, the off-premises station that existing air conditioner produces when using cooling air Waste heat discharge is to the mode in air, and it is contemplated that reclaim the used heat to airborne release, it is not necessary to supply phase Humidity is regulated when the other energy of the energy in this used heat.Further, the present invention can expect following additional Effect: by reclaiming the used heat of off-premises station and carrying out reheating and compensate the temperature being over cooled, and keep permanent Fixed felicity condition.
Further, it is divided into multistage by used heat being recycled coil and condensation coil with classification (STEP), To change the dehumidifying load of vaporizer according to indoor load or the variation of exogenous QI load such that it is able to effectively The accurate thermal change controlling to generate heat in condenser.
Accompanying drawing explanation
Fig. 1 is to illustrate that the present invention's controls Waste Heat Reuse high efficiency dust free room Constant Temperature and Humidity Chambers for precision The detailed construction of air-conditioning device and the diagrammatic illustration of system;
Fig. 2 is the sky controlling Waste Heat Reuse high efficiency Constant Temperature and Humidity Chambers for precision that the present invention is described Adjust the concept map of the control method of device.
Detailed description of the invention
About above-mentioned purpose and multiple advantage of the present invention, those skilled in the art can be by referring to accompanying drawing The preferred embodiments of the present invention being described below more clearly understand.
First, the technological thought used in the present invention is illustrated, in summer because of humidity Gao Erjin of exogenous QI During row dehumidifying, supercooling causes temperature to reduce, it is therefore desirable to reheat, and now can consume relatively Many heat energy, in the waste heat discharge of the off-premises station that existing air conditioner produces when using cooling air to air Mode, and it is contemplated that reclaim to the used heat of airborne release, it is not necessary to supply is equivalent to the energy of this used heat Other energy and regulate humidity.
Further, the present invention expects following additional effect: by reclaiming the used heat of off-premises station and carrying out reheating Compensate the temperature being over cooled, and keep constant felicity condition.
And then, in order to more critically control a series of actions reclaimed used heat and be controlled, by structure Become condenser and the condensing unit of reheater and reheating unit to be configured to multistage, be configured to each of multistage Arrange to regulate the valve of the input/output amount of cold-producing medium on the input/output terminal of member of formation, thus Carry out ON/OFF action according to control signal and realize trickle control.
Fig. 1 is the air-conditioning controlling Waste Heat Reuse high efficiency dust free room Constant Temperature and Humidity Chambers for precision of the present invention Device, in the summer that humidity is high, exogenous QI is supplied to dust free room internal time, relative humidity uprise and need into Row dehumidifying, in order to regulate humidity, air conditioner carries out cooling and dehumidifying operation and causes the temperature step-down of indoor, for Compensation temperature and heat.
Therefore, the air-conditioning device of the present invention is following system, it may be assumed that will be from room under cooling and dehumidifying operation mode The heat that outer machine discards is reused in air conditioner, makes the temperature of condenser reduce to improve the performance of fridge Coefficient, therefore, it is possible to be effectively saved energy cost.
The basic structure of the present invention includes: vaporizer 230, in order to intake air is carried out air regulation;Cold Condenser 110, constitutes ON/OFF circulation to control the refrigeration capacity of above-mentioned vaporizer 230;Conduit 140, is used for Cold-producing medium is made to circulate between above-mentioned vaporizer 230 and condenser 110;Valve (does not gives drawing reference numeral), In order to control the flow path of the cold-producing medium by the flowing of above-mentioned conduit 140;Thermophore 130, is positioned at above-mentioned Between conduit 140, in order to put aside the heat produced along with above-mentioned vaporizer 230 and the action of condenser 110 Unnecessary heat energy in amount;And compressor 120.
Now, above-mentioned condenser 110 is provided with multiple cold-producing medium condensing unit, and it is equally distributed over inflow Cold-producing medium and carry out condensation action respectively, be provided with in order to basis in the rear end of each cold-producing medium condensing unit Control signal and switch multiple valves of discharge refrigerant such that it is able to accurate control cold-producing medium condensation efficiency.
Further, the cold-producing medium input/output conduit 140 of above-mentioned condenser 110 is respectively arranged with tripartite Valve A, B, this tripartite valve A, B change opening and closing direction according to ratio control signal.
The air-conditioning device of the present invention includes reheater 210A, and it is along with above-mentioned thermophore 130 and compressor Action and the action of vaporizer 230 of 120 and the degree of used heat discharged, reheat system according to control signal Cryogen, thus regulate the expansion air themperature with impact discharge of cold-producing medium, above-mentioned reheater 210A is also Being provided with multiple cold-producing medium reheating unit, it is equally distributed over the cold-producing medium of inflow and adds Hot action, is provided with in order to switch refrigeration according to control signal in the front end of each cold-producing medium reheating unit Multiple valves of agent discharge such that it is able to accurate control refrigerant heat efficiency.
Now, the air-conditioning device of the present invention includes multiple solenoid valve 220, and it is positioned at along with above-mentioned storage Hot device 130 and the action of compressor 120 and the used heat that discharges is supplied to leading of above-mentioned reheater 210A side Between pipe 140, in order to control the amount of the cold-producing medium transmitted to above-mentioned reheater 210A side;And include adding Wet device 240, it is distributed fine water in order to a part selected in the intake air carrying out air regulation Drip, with the air humidity of impact discharge.
In said structure, compressor 120 is used in when constituting the lack of refrigerant of inverse circulation or cold-producing medium When compression pressure relaxes, in order to compress the refrigerant gas supplemented in corresponding refrigerant cycle.
Further, the air-conditioning device of the present invention also includes auxiliary heater 210B, this auxiliary heater 210B In order to reheat, to affect discharge carrying out a selected part in the intake air of air regulation Air themperature, this auxiliary heater 210B is the component corresponding with the heater core of prior art, The efficiency that the Waste Heat Reuse of the present invention controls uses in the case of extremely reducing.
Have structure as above and characteristic the present invention for precision control Waste Heat Reuse high efficiency without The control method of the air-conditioning device of dirt room Constant Temperature and Humidity Chambers, as in figure 2 it is shown, vaporizer 230 basis of Fig. 1 Temperature sensor (1) or the Temperature Humidity Sensor (3) of Fig. 2 and be controlled, the reheater of Fig. 1 210A is controlled according to the temperature sensor (2) of Fig. 2.To through the auxiliary heating of Fig. 1 The temperature (FAN Part) of the air of device 210B is controlled or by the Temperature Humidity Sensor (3) of Fig. 2 When carrying out temperature control, it will be carried out PLC(Program Logic Controller: procedure logical control system Device) or DDC(Direct Digital Controller: direct digital controller) control.
Thus, though the heater core being not provided with in existing mode (heater core), only by adding again Hot device 210A also is able to perform the function of the heater core of existing mode, and due to can fine regulation again Degree of heat or degree of condensation such that it is able to improving efficiency, wherein said heater core is configured to carrying out In the intake air of air regulation, a selected part reheats, with the air themperature of impact discharge.
Further, by additionally arranging humidifier so that the regulation of humidity becomes easy.
It is shown above with respect to only certain embodiments of the present invention and illustrates, but those skilled in the art Should be appreciated that in the range of without departing from the thought of the present invention and field, it can be carried out multiple transformation and change Change.

Claims (1)

1. control an air-conditioning device for Waste Heat Reuse high efficiency dust free room Constant Temperature and Humidity Chambers for precision, be A kind of air handling system, this air handling system includes: vaporizer, in order to intake air is carried out air Regulation;Condenser, constitutes ON/OFF circulation to control the refrigeration capacity of described vaporizer;Conduit, is used for making Cold-producing medium circulates between described vaporizer and condenser;Valve, in order to control by described pipe flow The flow path of cold-producing medium;Thermophore, between described conduit, in order to putting aside according to described vaporizer and The action of condenser and remaining heat energy in the heat that produces;And compressor, it is characterised in that:
Described condenser is provided with multiple cold-producing medium condensing unit, and its equalization is assigned to the cold-producing medium of inflow and divides Do not carry out condensation action, be provided with in order to open according to control signal in the rear end of each cold-producing medium condensing unit Close multiple valves of discharge refrigerant such that it is able to accurate control cold-producing medium condensation efficiency;
This air-conditioning device includes:
Reheater, it is provided with multiple cold-producing medium reheating unit, according to by described thermophore and compression The action of machine and the action of vaporizer and the degree of used heat discharged, reheat cold-producing medium according to control signal, Thus regulating the expansion of cold-producing medium to affect discharged air temperature, its equalization is assigned to the cold-producing medium that flows into and divides Do not carry out reheating action, be provided with in order to according to control in the front end of cold-producing medium reheating unit each described Signal and switch multiple valves of discharge refrigerant such that it is able to accurate control refrigerant heat efficiency;
Multiple solenoid valve, it is positioned at the used heat action along with described thermophore and compressor discharged Between the conduit of the described reheater side being supplied to, in order to control the refrigeration transmitted to described reheater side The amount of agent;And
Humidifier, it is fine in order to part distribution selected in the intake air carrying out air regulation Water droplet, with the air humidity of impact discharge.
CN201310359454.3A 2012-10-08 2013-08-16 The accurate air-conditioning device controlling Waste Heat Reuse high efficiency dust free room Constant Temperature and Humidity Chambers Active CN103712298B (en)

Applications Claiming Priority (2)

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KR1020120111414A KR101254934B1 (en) 2012-10-08 2012-10-08 High efficiency homoiothermic humidistat for clean room utilizing waste heat air conditioner for precision control
KR10-2012-0111414 2012-10-08

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CN103712298B true CN103712298B (en) 2016-09-21

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CN104864495B (en) * 2014-02-21 2018-12-04 大金工业株式会社 Air-conditioning device
KR101658185B1 (en) * 2016-03-23 2016-09-21 천두황 Heat-pump Type thermo-hygrostate system
CN107270517B (en) * 2017-07-26 2019-12-10 美的集团武汉制冷设备有限公司 Air conditioning system, and control device and method of air conditioning system

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CN102384553A (en) * 2011-11-07 2012-03-21 上海克络蒂新能源科技有限公司 Improved structure of air source heat pump unit for temperature and humidity independent control air-conditioning system

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WO2004072560A1 (en) * 2003-02-14 2004-08-26 Hombuecher Heinz-Dieter Method and device for recovering energy
CN102384553A (en) * 2011-11-07 2012-03-21 上海克络蒂新能源科技有限公司 Improved structure of air source heat pump unit for temperature and humidity independent control air-conditioning system

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