KR101243313B1 - Vacuum dry apparatus - Google Patents

Abstract

PURPOSE: A vacuum dryer is provided to prevent the damage of a flow pin by using a support pin which can be slid. CONSTITUTION: A vacuum dryer includes a main body, a housing(120), an elevating plate, support pins, and a pumping unit. The elevating plate is installed in the lower side of the housing. The support pins loads an object(50) and supports it. A fixing pin is fixed to the elevating plate.

Description

Vacuum Drying Equipment {VACUUM DRY APPARATUS}

The present invention relates to a vacuum drying apparatus for drying a solvent contained in a coating liquid applied to a substrate by using a vacuum.

A coating liquid such as a photoresist is applied to a substrate for a flat panel display device used in an LCD (Liquid Crystal Display), an OLED (Organic Light Emitting Diodes) display, or a field emission display (FED). And in order to apply | coat a coating liquid uniformly to a board | substrate, it mixes and apply | coats a solvent, such as a solvent, to a coating liquid. The coating liquid applied to the substrate is coated by a material in a later step.

The solvent contained in the coating liquid evaporates naturally, but it takes a long time for the solvent to evaporate completely. Therefore, after evaporating the solvent naturally, coating a substance on the coating liquid takes a lot of time, thus decreasing productivity. do. If a substance is coated on the coating liquid in a state in which the solvent contained in the coating liquid is not completely removed, pores are formed in the cured coating layer due to the solvent remaining in the coating liquid when the coating liquid is cured. As a result, the quality of the substrate is degraded.

For the same reason as above, a vacuum drying apparatus has been developed and used for applying a coating liquid to a substrate and then forcibly evaporating and removing the solvent contained in the coating liquid using a pressure difference.

Generally, a vacuum drying apparatus has a lower housing and an upper housing which form a chamber which is a closed space in which a substrate is loaded and dried. The lower housing is fixed, and the upper housing is installed to be elevated on the upper side of the lower housing. When the upper housing is lowered and sealed to the lower housing, the chamber is formed between the lower housing and the upper housing.

A plurality of support pins are installed on a lower surface of the lower housing to support the substrate loaded into the chamber. Since the substrate is supported by the support pin protruding upward from the bottom of the lower housing, it is convenient when the substrate is loaded into or unloaded from the chamber by supporting the substrate with a robot arm.

The structure of the support pin of the conventional vacuum drying apparatus is demonstrated with reference to FIG.

As shown, in the conventional vacuum drying apparatus, the lower end side of the support pin 13 is fixed to a support plate (not shown) installed on the lower surface of the lower housing 11 or on the outside of the lower housing 11.

However, when the substrate 50 flows while the substrate 50 is mounted on the support pin 13, the support pin 13 may be damaged by the flow of the substrate 50, and the support pin 13 may be damaged. The substrate 50 may be scratched and the substrate 50 may be damaged. Therefore, there was a disadvantage that the reliability of the product is lowered.

Prior art related to vacuum drying apparatus is disclosed in Korea Patent Publication No. 10-2011-0077338.

The present invention has been made to solve the problems of the prior art as described above, the object of the present invention is to prevent the damage to the substrate by the support pin while preventing the support pin is damaged by the substrate to be dried It is to provide a vacuum drying apparatus that can improve the reliability of the product.

Vacuum drying apparatus according to the present invention for achieving the above object, the main body; A housing which is installed inside the main body, and has a plurality of through holes formed on a lower surface of the main body, and forms a chamber in which a dry object is loaded and dried; A plurality of movable upper and lower sides of the housing, mounted on and supported by the to-be-loaded body loaded in the chamber while the upper end side passes through the through-hole and enters and exits the chamber; Support pins; It is installed on one side of the body and includes a pumping means for reducing the chamber to a vacuum.

In the vacuum drying apparatus according to the present invention, a support pin on which a substrate is mounted and supported is slidably installed. Therefore, when a to-be-flowing body flows in the state in which the to-be-supported body is mounted and supported by the support pin, a support pin flows with a to-be-dried body. Therefore, the flow pin is prevented from being damaged by the dry body, and the dry body is prevented from being damaged by the flow pin, thereby improving the reliability of the product.

1 is a view showing the structure of a support pin of a conventional vacuum drying apparatus.
2 is a perspective view of a vacuum drying apparatus according to an embodiment of the present invention.
3 is a perspective view of the housing portion shown in FIG. 2;
Figure 4 is an enlarged perspective view of the lower housing shown in FIG.
5 is a top perspective view of FIG. 4.
Figure 6 is an enlarged perspective view of the expansion tube and the support pin shown in Figures 4 and 5.
7 is a cross-sectional view of FIG. 6.

DETAILED DESCRIPTION OF THE INVENTION The following detailed description of the invention refers to the accompanying drawings that illustrate specific embodiments in which the invention may be practiced. These embodiments are described in sufficient detail to enable those skilled in the art to practice the invention. It should be understood that the various embodiments of the present invention are mutually exclusive, but need not be mutually exclusive. For example, certain features, specific structures, and features described herein may be implemented in other embodiments without departing from the spirit and scope of the invention in connection with one embodiment. It is also to be understood that the position or arrangement of the individual components within each disclosed embodiment may be varied without departing from the spirit and scope of the invention. The following detailed description, therefore, is not to be taken in a limiting sense, and the scope of the present invention is defined only by the appended claims, along with the full scope of equivalents to which such claims are entitled. The length, area, thickness, and shape of the embodiments shown in the drawings may be exaggerated for convenience.

Hereinafter, with reference to the accompanying drawings will be described in detail a vacuum drying apparatus according to an embodiment of the present invention.

Figure 2 is a perspective view of a vacuum drying apparatus according to an embodiment of the present invention, Figure 3 is a perspective view of the housing portion shown in Figure 2, Figure 4 is an enlarged perspective view of the lower housing shown in FIG.

As shown, the vacuum drying apparatus according to the present embodiment includes a main body 110 forming an appearance, and the housing 120 is installed inside the main body 110. In the housing 120, a chamber 120a, which is an enclosed space in which a to-be-dried object 50, such as a flat panel display substrate, is loaded and dried, is formed.

The to-be-dried body 50 is coated with a coating liquid such as a photoresist, and the coating liquid contains a solvent such as a solvent or the like. When the to-be-dried body 50 is loaded into the chamber 120a, the chamber 120a is decompressed to a vacuum state, whereby the solvent contained in the coating liquid applied to the to-be-dried body 50 is forcibly evaporated by the pressure difference. do.

The housing 120 has a lower housing 121 fixed to the main body 110 and an upper housing 125 that is supported by a portion of the main body 110 above the lower housing 121 and is installed to be elevated. When the upper housing 125 is lowered, the upper housing 125 and the lower housing 121 are sealed to form a sealed chamber 120a. Then, when the upper housing 125 is raised, the upper housing 125 and the lower housing 121 is spaced apart, thereby opening the chamber 120a. When the chamber 120a is opened, the to-be-dried body 50 is loaded into the chamber 120a or unloaded from the chamber 120a.

The upper housing 125 is elevated by the first driving means 131 such as a motor or a cylinder fixed to the main body 110. In addition, one side of the main body 110 is provided with a pumping means 135 such as a vacuum pump for reducing the chamber 120a in a vacuum state when the chamber 120a is sealed. The pumping means 135 is preferably in communication with the lower surface of the lower housing 121 and the upper surface of the upper housing 125 to uniformly dry the to-be-dried body 50 to depressurize the chamber 120a.

When the to-be-dried body 50 is loaded into the chamber 120a, when the to-be-dried body 50 comes into contact with the inner bottom surface of the lower housing 121, the to-be-dried body 50 is supported by a robo arm (not shown). When loading the 50 into the chamber 120a or unloading the to-be-dried body 50 from the chamber 120a, there is no gap between the to-be-dried body 50 and the lower surface of the lower housing 121, which is inconvenient. .

Then, when the to-be-dried body 50 is loaded into the chamber 120a, when the to-be-dried body 50 comes into contact with the inner bottom surface of the lower housing 121, the bottom surface of the lower housing 121 by the pumping means 135 is outside. Pumping into the furnace can be disturbed.

Thus, when the to-be-dried body 50 is loaded into the chamber 120a, a plurality of support pins 140 (see FIG. 5) for supporting the to-be-dried body 50 apart from the inner lower surface of the lower housing 121 (see FIG. 5). It is installed to be movable.

The support pin 140 is provided with a lower end on an elevating plate 150 installed to be elevated on and under the lower housing 121. Therefore, as the lifting plate 150 moves up and down, the support pin 140 also moves up and down. The upper end side of the support pin 140 penetrates the through hole 122 (see FIG. 5) formed in the lower surface of the lower housing 121, and the to-be-dried body 50 loaded into the chamber 120a while entering and exiting the chamber 120a. Support.

Since the support pin 140 is installed to be elevated, the support pin 140 may protrude upward from the lower surface of the lower housing 121 as necessary. Then, the support pin 140 can reduce the space of the chamber 120a as compared to the structure in which the support pin 140 always protrudes above the lower surface of the lower housing 121.

A base plate 160 is fixed to a portion of the main body 110 below the elevating plate 150, and a second driving means (not shown) such as a motor or a cylinder for elevating the elevating plate 150 is provided at the base plate 160. Is installed.

Since the support pin 140 penetrates the through hole 122, a vacuum of the chamber 120a may leak between an outer circumferential surface of the support pin 140 and an inner circumferential surface of the through hole 122. In order to prevent this, the expansion tube 170 is installed on the outer portion of the lower surface of the lower housing 121 in which the through hole 122 is formed.

The expansion tube 170 will be described with reference to FIGS. 4 to 6. 5 is a top perspective view of FIG. 4, and FIG. 6 is an enlarged perspective view of the flexible tube and the support pins shown in FIGS. 4 and 5.

As shown, the expansion pipe 170, the center portion is wrapped around the support pin 140, the upper side is sealingly coupled to the lower surface of the lower housing 121, the lower side is sealingly coupled to the elevating plate 150 elevating plate 150 ) As new ascend. At this time, the support pin 140 is non-contact with the expansion pipe 170, the expansion pipe 170 does not interfere with the movement of the support pin 140.

Then, the support pin 140 is located in the expansion tube 170, the interior of the expansion tube 170 is closed and maintains the same vacuum as the chamber 120a, and eventually the support pin 140 and The portion between the through holes 122 is sealed.

O-ring 181 between the expansion pipe 170 and the lower housing 121 in order to seal more stably between the expansion pipe 170 and the lower housing 121 and between the expansion pipe 170 and the lifting plate 150. This interposition is provided, and an O-ring 185 (see FIG. 7) is interposed between the expansion and contraction pipe 170 and the lifting plate 150.

In addition, the upper surface of the expansion tube 170 is formed with an arthropath 171 into which the O-ring 181 is inserted, and the O-ring 185 is formed on the lower surface of the expansion tube 170. A settling path 173 (see FIG. 7) is formed to be inserted.

The to-be-dried body 50 is mounted and supported by the support pin 140. However, when the support pin 140 is fixed, the support pin 140 may be damaged by the flow of the dry object 50, or the dry object 50 may be scratched and damaged by the support pin 140. .

In order to prevent this, the support pin 140 of the vacuum drying apparatus according to the present embodiment is formed to flow with the dry object 50 when the dry object 50 flows. The support pin 140 will be described with reference to FIGS. 6 and 7. 7 is a cross-sectional view of FIG. 6.

As shown, the support pin 140 includes a fixing pin 141 located on the lower side and a moving pin 145 located on the upper side.

The fixing pin 141 is fixed to the lower end side of the lifting plate 150, the upper end side is formed in a flat plane. Flow pin 145 is formed in a flat plane on the lower end side is slidably installed on the upper surface (upper surface) of the fixing pin 141, the upper side passes through the through hole 122 (see Fig. 5), the upper end The to-be-dried body 50 is mounted and supported.

In this case, the upper end side of the fixing pin 141 and the lower end side of the floating pin 145 are supported by being wrapped in the bushing 191 and formed in a plane to face the upper surface of the fixing pin 141 and the floating pin 145. Between the bottom surface of the ball 193 is interposed. Then, a gap is formed between the outer circumferential surface of the bottom surface of the floating pin 145 and the outer circumferential surface of the bushing 191. Therefore, the floating pin 145 is slid on the fixing pin 141.

A guide member 195 is installed on the upper surface of the expansion pipe 170, and the flow pin 145 penetrates the guide member 195. The guide member 195 guides the lifting motion of the flow pin 145. At this time, a gap is formed between the inner circumferential surface of the guide member 195 and the outer circumferential surface of the flow pin 145. A gap allows the sliding pin 145 to slide between the inner circumferential surface of the guide member 195 and the outer circumferential surface of the flow pin 145. In addition, a gap is formed between the inner circumferential surface of the through hole 122 and the outer circumferential surface of the flow pin 145 to allow sliding of the flow pin 145.

Vacuum drying apparatus according to the present embodiment, the gap between the outer peripheral surface of the lower surface and the lower surface of the bushing 191, the ball 193 interposed between the flow pin 145 and the fixing pin 141, guide Due to the gap between the inner circumferential surface of the member 195 and the outer circumferential surface of the flow pin 145 and the gap between the inner circumferential surface of the through hole 122 and the outer circumferential surface of the flow pin 145, the flow pin 145 is formed on the fixing pin 141. Is sliding.

Then, when the to-be-dried body 50 flows in the state in which the to-be-dried body 50 is mounted and supported by the upper end of the flow pin 145, the flow pin 145 is slid by the to-be-dried body 50. FIG. This prevents the flow pin 145 from being damaged by the to-be-dried body 50 and prevents damage to the dry body 50 by the flow-pin 145.

Although the present invention has been described with reference to preferred embodiments as described above by way of example, it is not limited to the above embodiments and should be made by those skilled in the art without departing from the spirit of the present invention. Many variations and modifications are possible. Such modifications and variations are intended to fall within the scope of the invention and the appended claims.

110:
120: Housing
140: support pin
141: push pin
145: floating pin
170: expansion tube

Claims (8)

main body; A housing which is installed inside the main body, and has a plurality of through holes formed on a lower surface of the main body, and forms a chamber in which a dry object is loaded and dried; An elevating plate installed on the lower side of the housing to be elevated; A plurality of support pins having a lower end supported by the elevating plate and being elevated together with the elevating plate, and having an upper end side mounted through the through-hole to enter and exit the chamber; A vacuum drying apparatus installed on one side of the main body and including pumping means for depressurizing the chamber in a vacuum state,
The support pin is a fixed pin, the lower end side is fixed to the lifting plate, the lower end is slidably installed on the upper end of the fixing pin, the upper side penetrates the through hole and the upper end is mounted and supported by the to-be-dried body. A vacuum drying device comprising a flow pin that flows together when flowing. The method of claim 1,
The support pin is installed between the lower surface of the housing and the elevating plate to surround the support pin, and an upper side thereof is sealed to the lower surface of the housing, and a lower side thereof is coupled to the elevating plate to expand and contract the elevating plate as the elevating plate is elevated. And a stretch tube for sealing a portion between the pin and the through hole. delete The method of claim 2,
The upper end side of the fixing pin and the lower end side of the flow pin facing each other is wrapped in a bushing, characterized in that the vacuum drying apparatus. 5. The method of claim 4,
The upper end of the fixing pin and the lower end of the floating pin which are opposed to each other is formed in a flat plane, the ball is interposed between the upper surface of the fixing pin and the lower surface of the floating pin (bottom surface). Vacuum drying apparatus. The method of claim 5,
A guide member for guiding the lifting motion of the flow pin is formed on the upper surface of the expansion pipe, the support pin is a vacuum drying device, characterized in that the lifting through the guide member. The method according to claim 6,
Vacuum drying, characterized in that a gap is formed between the inner circumferential surface of the through hole and the outer circumferential surface of the flow pin, between the inner circumferential surface of the guide member and the outer circumferential surface of the flow pin, and between the outer circumferential surface of the bottom surface of the flow pin and the outer circumferential surface of the bushing, respectively. Device. The method of claim 7, wherein
The housing is fixed to the main body, the through hole is formed and the upper surface of the flexible tube is supported, and the lower housing is supported by the main body of the upper portion of the lower housing is installed to be elevated and separated from the lower housing Or an upper housing coupled to or coupled to the lower housing.

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