KR101209552B1 - 몰드 언더필 공정의 마스킹 테이프용 점착제 조성물 및 그를 이용한 마스킹 테이프 - Google Patents
몰드 언더필 공정의 마스킹 테이프용 점착제 조성물 및 그를 이용한 마스킹 테이프 Download PDFInfo
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- KR101209552B1 KR101209552B1 KR1020110102320A KR20110102320A KR101209552B1 KR 101209552 B1 KR101209552 B1 KR 101209552B1 KR 1020110102320 A KR1020110102320 A KR 1020110102320A KR 20110102320 A KR20110102320 A KR 20110102320A KR 101209552 B1 KR101209552 B1 KR 101209552B1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/565—Moulds
- H01L21/566—Release layers for moulds, e.g. release layers, layers against residue during moulding
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J133/00—Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
- C09J133/04—Homopolymers or copolymers of esters
- C09J133/06—Homopolymers or copolymers of esters of esters containing only carbon, hydrogen and oxygen, the oxygen atom being present only as part of the carboxyl radical
- C09J133/08—Homopolymers or copolymers of acrylic acid esters
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J175/00—Adhesives based on polyureas or polyurethanes; Adhesives based on derivatives of such polymers
- C09J175/04—Polyurethanes
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/20—Adhesives in the form of films or foils characterised by their carriers
- C09J7/22—Plastics; Metallised plastics
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
- C09J7/35—Heat-activated
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
- C09J7/38—Pressure-sensitive adhesives [PSA]
- C09J7/381—Pressure-sensitive adhesives [PSA] based on macromolecular compounds obtained by reactions involving only carbon-to-carbon unsaturated bonds
- C09J7/385—Acrylic polymers
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2203/00—Applications of adhesives in processes or use of adhesives in the form of films or foils
- C09J2203/326—Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2301/00—Additional features of adhesives in the form of films or foils
- C09J2301/30—Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier
- C09J2301/302—Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier the adhesive being pressure-sensitive, i.e. tacky at temperatures inferior to 30°C
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2301/00—Additional features of adhesives in the form of films or foils
- C09J2301/30—Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier
- C09J2301/304—Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier the adhesive being heat-activatable, i.e. not tacky at temperatures inferior to 30°C
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73201—Location after the connecting process on the same surface
- H01L2224/73203—Bump and layer connectors
- H01L2224/73204—Bump and layer connectors the bump connector being embedded into the layer connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
- H01L2924/1815—Shape
- H01L2924/1816—Exposing the passive side of the semiconductor or solid-state body
- H01L2924/18161—Exposing the passive side of the semiconductor or solid-state body of a flip chip
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Adhesive Tapes (AREA)
- Adhesives Or Adhesive Processes (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Wire Bonding (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Laminated Bodies (AREA)
Abstract
본 발명의 몰드 언더필 공정의 마스킹 테이프용 점착제 조성물 및 그를 이용한 마스킹 테이프는 개선된 아크릴 이형 점착층을 구성함으로써 기존의 아크릴 이형 점착층의 PCB 표면 점착제 잔사(residue) 및 봉지재(EMC) 종류에 따른 표면 얼룩 문제를 개선할 수 있다. 따라서 PCB 표면에 점착제 잔사를 방지하여 공정 불량률을 낮출 수 있으며 여러 가지 EMC 종류에 따른 표면 얼룩 문제를 개선하여 MUF 공정에 사용되는 다양한 봉지재로의 적용이 가능하다는 장점이 있다.
Description
도2는 DEFCP의 MUF 공정에서 본 발명의 마스킹 테이프가 적용되는 공정 모식도이다.
| EMC구분 | Epoxy 수지종류 | Filler content[%] | 이형성분 | 특성1(흐름성) | 특성2(이형력) |
| Hitachi Chemical CEL-9750ZHF10 |
Biphenyl형 epoxy | 90 | PE왁스 | 흐름성이 가장 좋음 | 이형력이 좋지 않음 |
| Sumitomo EMEG700 | OCN(ortho cresol novolac)형 epoxy | 80 | 천연왁스 + PE왁스 | 흐름성이 적당한 수준 | 이형력이 보통수준 |
| Panasonic ECOM E | multi관능기형 epoxy | 75 | 실리콘 이형제 | 흐름성이 가장 좋지 않음 | 이형력이 가장 좋음 |
| 구분 | PCB Residue | EMC 얼룩 | 이형특성 | 점착력 [gf/inch] |
표면저항[Ω/□] | |||
| Sumitomo EMC EMEG700 |
Panasonic ECOM E | Hitachi EMC CEL-9750ZHF10 |
점착면 | 필름면 | ||||
| 실시예 1 | O | O | O | O | O | 30 | 1010 | 105 |
| 실시예 2 | O | O | O | O | O | 20 | 1010 | 105 |
| 실시예 3 | O | O | O | O | O | 45 | 1010 | 105 |
| 실시예 4 | O | O | O | O | O | 40 | 1010 | 105 |
| 실시예 5 | O | O | O | O | O | 25 | 1010 | 105 |
| 비교예 1 | X | O | O | O | O | 3 | 1010 | 105 |
| 비교예 2 | O | O | X | O | O | 40 | 1010 | 105 |
| 비교예 3 | O | O | O | O | X | 100 | 1010 | 105 |
| 비교예 4 | O | O | O | O | O | 30 | 1014 | 109 |
12, 12'.. 대전방지층 13.. 점착제층
14.. 상판 몰드 15.. 하판 몰드
16.. PCB 기판 17.. 칩(Chip)
18.. 솔더볼(Solder ball) 19.. EMC
Claims (8)
- (a) 아크릴계 공중합체 100 중량부에 대하여; (b) 열경화제 1~20 중량부; (c) 에너지선 경화형 우레탄 수지 5~40 중량부; (d) 에너지선 경화형 실리콘 수지 0.1~5중량부; 및 (e) 에너지선 개시제;를 포함하는 몰드 언더필(Molded Underfill, MUF) 공정의 마스킹 테이프용 점착제 조성물.
- 제1항에 있어서, 에너지선 경화형 우레탄 수지는 알리파틱 2-관능 우레탄 아크릴레이트(Aliphatic difunctional urethane acrylate), 알리파틱 3-관능 우레탄 아크릴레이트(Aliphatic trifunctional urethane acrylate), 알리파틱 6-관능 우레탄 아크릴레이트(Aliphatic hexafunctional urethane acrylate), 아로마틱 2-관능 우레탄 아크릴레이트(Aromatic difunctional urethane acrylate), 아로마틱 3-관능 우레탄 아크릴레이트(Aliphatic trifunctional urethane acrylate), 아로마틱 6-관능 우레탄 아크릴레이트(Aromatic hexafunctional urethane acrylate)아로마틱 우레탄아크릴레이트(aromatic urethane acrylate) 및 알리파틱 우레탄아크릴레이트(aliphatic urethane acrylate)로 구성된 군으로부터 선택되는 하나 이상인 것을 특징으로 하는 상기 마스킹 테이프용 점착제 조성물.
- 제1항에 있어서, 상기 에너지선 경화형 실리콘 수지는 실리콘 디아크릴레이트(silicone diacrylate), 실리콘 헥사아크릴레이트(silicone hexaacrylate), 실리콘 폴리에스테르 아크릴레이트(Silicone Polyester acrylate), 실리콘 우레탄 아크릴레이트(Silicone Urethane acrylate) 및 실리콘 우레탄 메타아크릴레이트(Silicone Urethane methacrylate)로 구성된 군으로부터 선택되는 하나 이상인 것을 특징으로 하는 상기 마스킹 테이프용 점착제 조성물.
- 제1항에 있어서, 상기 열경화제는 멜라민계 경화제인 것을 특징으로 하는 상기 마스킹 테이프용 점착제 조성물.
- 내열성 기재;
상기 내열성 기재의 일면 또는 양면에 형성된 대전방지층; 및
상기 대전방지층 상에 형성되고, 제1항의 점착제 조성물로부터 제조되는 점착제층;을 포함하는 것을 특징으로 하는 몰드 언더필 공정용 마스킹 테이프. - 제5항에 있어서, 상기 내열성 기재는 폴리이미드 필름, 폴리에틸렌테레프탈레이트 필름, 폴리에틸렌나프탈레이트 필름 및 폴리부틸렌테레프탈레이트 필름으로 구성된 군으로부터 선택되는 어느 하나인 것을 특징으로 하는 상기 몰드 언더필 공정용 마스킹 테이프.
- 제5항에 있어서, 상기 점착제층의 폴리시드 실리콘 웨이퍼(polished silicon wafer)면에 대한 상온 점착력은 50gf/inch 이하인 것을 특징으로 하는 상기 몰드 언더필 공정용 마스킹 테이프.
- 제5항에 있어서, 상기 점착제층의 표면저항은 점착층 면이 1011Ω/□이하인 것을 특징으로 하는 상기 몰드 언더필 공정용 마스킹 테이프.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020110102320A KR101209552B1 (ko) | 2011-10-07 | 2011-10-07 | 몰드 언더필 공정의 마스킹 테이프용 점착제 조성물 및 그를 이용한 마스킹 테이프 |
| JP2012006652A JP5548711B2 (ja) | 2011-10-07 | 2012-01-17 | モールドアンダーフィル工程のマスキングテープ用粘着剤組成物およびそれを用いたマスキングテープ |
| TW101101984A TWI445786B (zh) | 2011-10-07 | 2012-01-18 | 用於模壓底膠充填製程之遮蔽膠帶黏著劑合成物及使用此種黏著劑合成物之遮蔽膠帶 |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020110102320A KR101209552B1 (ko) | 2011-10-07 | 2011-10-07 | 몰드 언더필 공정의 마스킹 테이프용 점착제 조성물 및 그를 이용한 마스킹 테이프 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR101209552B1 true KR101209552B1 (ko) | 2012-12-06 |
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| Application Number | Title | Priority Date | Filing Date |
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| KR1020110102320A Expired - Fee Related KR101209552B1 (ko) | 2011-10-07 | 2011-10-07 | 몰드 언더필 공정의 마스킹 테이프용 점착제 조성물 및 그를 이용한 마스킹 테이프 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP5548711B2 (ko) |
| KR (1) | KR101209552B1 (ko) |
| TW (1) | TWI445786B (ko) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SG10201807671QA (en) | 2014-03-07 | 2018-10-30 | Agc Inc | Mold release film, process for its production and process for producing semiconductor package |
| WO2016002026A1 (ja) | 2014-07-02 | 2016-01-07 | 日立化成株式会社 | 転写形感光性屈折率調整フィルム |
| WO2016013587A1 (ja) | 2014-07-24 | 2016-01-28 | 日立化成株式会社 | 感光性樹脂組成物、感光性フィルム、パターン基板、感光性導電フィルム及び導電パターン基板 |
| JP6605846B2 (ja) | 2015-06-03 | 2019-11-13 | 日東電工株式会社 | マスキング用粘着テープ |
| WO2017056131A1 (ja) | 2015-09-30 | 2017-04-06 | 日立化成株式会社 | 転写形感光性屈折率調整フィルム |
| JP6767763B2 (ja) * | 2016-03-29 | 2020-10-14 | 三井化学東セロ株式会社 | 成形品の外観に優れるプロセス用離型フィルム、その用途、及びそれを用いた樹脂封止半導体の製造方法 |
| CN109153904A (zh) * | 2016-05-13 | 2019-01-04 | 3M创新有限公司 | 热稳定的基于硅氧烷的保护膜 |
| KR102345171B1 (ko) * | 2016-07-28 | 2021-12-30 | 닛토덴코 가부시키가이샤 | 세퍼레이터를 구비한 보강용 필름 |
| JP2018161448A (ja) * | 2017-03-27 | 2018-10-18 | 日本絨氈株式会社 | タイルカーペット |
| CN112250818A (zh) * | 2020-09-27 | 2021-01-22 | 长春一汽富维东阳汽车塑料零部件有限公司 | 一种可重复利用水性聚氨酯遮蔽材料及其制备方法 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005166904A (ja) * | 2003-12-02 | 2005-06-23 | Hitachi Chem Co Ltd | 半導体モールド用離型シート |
| CN101842455A (zh) * | 2007-10-16 | 2010-09-22 | 电气化学工业株式会社 | 粘合剂、粘合片、多层粘合片以及生产电子部件的方法 |
| JP2011253833A (ja) * | 2008-09-29 | 2011-12-15 | Denki Kagaku Kogyo Kk | 半導体部材製造方法及び粘着テープ |
| JP2010263041A (ja) * | 2009-05-01 | 2010-11-18 | Nitto Denko Corp | ダイアタッチフィルム付きダイシングテープおよび半導体装置の製造方法 |
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2011
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| Publication number | Publication date |
|---|---|
| TW201315786A (zh) | 2013-04-16 |
| JP2013084873A (ja) | 2013-05-09 |
| JP5548711B2 (ja) | 2014-07-16 |
| TWI445786B (zh) | 2014-07-21 |
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