KR101200719B1 - Clamping device for connecting pipes - Google Patents

Clamping device for connecting pipes Download PDF

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Publication number
KR101200719B1
KR101200719B1 KR1020120054841A KR20120054841A KR101200719B1 KR 101200719 B1 KR101200719 B1 KR 101200719B1 KR 1020120054841 A KR1020120054841 A KR 1020120054841A KR 20120054841 A KR20120054841 A KR 20120054841A KR 101200719 B1 KR101200719 B1 KR 101200719B1
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KR
South Korea
Prior art keywords
rotating member
groove
hole
long hole
fixing
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KR1020120054841A
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Korean (ko)
Inventor
김형동
허의행
이종중
박종운
Original Assignee
김형동
박종운
이종중
허의행
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Application filed by 김형동, 박종운, 이종중, 허의행 filed Critical 김형동
Priority to KR1020120054841A priority Critical patent/KR101200719B1/en
Application granted granted Critical
Publication of KR101200719B1 publication Critical patent/KR101200719B1/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L23/00—Flanged joints
    • F16L23/04—Flanged joints the flanges being connected by members tensioned in the radial plane
    • F16L23/08—Flanged joints the flanges being connected by members tensioned in the radial plane connection by tangentially arranged pin and nut
    • F16L23/10—Flanged joints the flanges being connected by members tensioned in the radial plane connection by tangentially arranged pin and nut with a pivoting or swinging pin
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L2201/00—Special arrangements for pipe couplings
    • F16L2201/20—Safety or protective couplings

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Clamps And Clips (AREA)

Abstract

PURPOSE: A clamp device for connecting pipes is provided to maintain the airtightness of connected pipes because a bolt and a nut are not easily unfastened by external influences and vibration. CONSTITUTION: A clamp device for connecting pipes comprises a first rotating member(100), a fixing member, a movable member(500), and an operating member(400). The fixing member is perpendicularly installed from the top of the first rotating member to an elongated hole(110). The movable member is fixed to the fixing member with an elastic member and allowed to be rotated. The movable member comprises a fitting hole(510) in one side, a stop protrusion(540) in the bottom side, a protruding portion(520) in the front side, and a stop projection(530) in the rear side. The stop protrusion is fitted into a fitting groove(130) and the movable member is selectively fitted into an anti-loosening groove(810). The operating member comprises rotary knobs(410) and a cam unit(421). The rotary knobs are installed on both sides of a connecting piece(420) penetrating through the elongated hole of the first rotating member. The cam unit is formed on the outer periphery of one side of the connecting piece and operates the protruding portion of the operating member.

Description

배관 연결용 클램프 장치{Clamping device for connecting pipes}Clamping device for connecting pipes}

본 발명은 배관 연결용 클램프 장치에 관한 것으로, 더욱 상세히는 반도체 제조장비에 사용되는 배관 연결용 클램프 장치가 배관의 진동 등에 의해 결속력이 저하되면서 배관 연결부위의 기밀이 누설되는 현상을 방지할 수 있도록 한 배관 연결용 클램프 장치에 관한 것이다.
The present invention relates to a clamping device for pipe connection, and more particularly to the pipe connecting clamp device used in semiconductor manufacturing equipment to prevent the leakage of airtightness of the pipe connection portion while the binding force is reduced by vibration of the pipe. A clamping device for a pipe connection.

일반적으로 반도체 제조공정은 크게 전 공정과 후 공정으로 구분할 수 있으며, 전 공정은 각종 프로세스 챔버 내에서 웨이퍼(Wafer)상에 박막을 증착하고, 증착된 박막을 선택적으로 에칭하는 과정을 반복적으로 수행하여 특정의 패턴을 가공함으로써, 반도체 칩(Chip)을 제조하는 공정이다. In general, the semiconductor manufacturing process can be largely divided into a pre-process and a post-process, the pre-process is to repeatedly deposit the thin film on the wafer (Wafer) in various process chambers, and selectively etching the deposited thin film by It is a process of manufacturing a semiconductor chip by processing a specific pattern.

또한 후 공정은 전 공정에서 제조된 칩을 개별적으로 분리한 후, 리드 프레임과 결합하여 완제품으로 조립하는 공정을 말한다.In addition, the post-process refers to a process of separately separating the chips manufactured in the previous process, and then assembled with the finished product by combining with the lead frame.

이때, 웨이퍼 상에 박막을 증착하거나 웨이퍼 상에 증착된 박막을 에칭하는 공정의 경우 주로 고진공의 공정 챔버에서 공정가스를 주입하여 이루어지는데 공정챔버에 공정가스를 공급하기 위해서는 가스라인이 연결되어 있다.In this case, a process of depositing a thin film on a wafer or etching a thin film deposited on a wafer is mainly performed by injecting a process gas in a high vacuum process chamber, and a gas line is connected to supply a process gas to the process chamber.

또한 공정 챔버의 기압을 조절하고 공정 챔버에서 반응하고 남은 공정가스 또는 반응가스를 배기하기 위하여서는 배기라인이 연결되어 있다.In addition, an exhaust line is connected to control the air pressure of the process chamber and to exhaust the remaining process gas or the reaction gas after reacting in the process chamber.

그리고 가스라인 또는 배기라인은 필연적으로 연결부분을 포함하고 있기 때문에 이러한 연결부분에는 배관 연결부가 형성되고 그 배관 연결부는 기밀을 유지하기 위해 클램프 장치로 연결되는 것이 일반적이다.In addition, since the gas line or the exhaust line inevitably includes a connection part, a pipe connection part is formed in such a connection part, and the pipe connection part is generally connected by a clamp device to maintain airtightness.

이와 같은 클램프 장치의 선행기술로는 대한민국 특허출원 2007-0084594호「진공배관용 클램프」가 개시되어 있으며, 그 외 다수의 선행 기술이 제안된 바 있다.The prior art of such a clamp device is disclosed in the Republic of Korea Patent Application No. 2007-0084594 "clamps for vacuum piping", a number of other prior art has been proposed.

그러나 종래에 사용되는 클램프 장치의 경우 배관의 진동 및 외부영향에 의해 클램프의 결속력이 약해지면서 배관 연결부위의 기밀이 누설되는 문제점이 있었다.
However, the clamp device used in the related art has a problem in that the tightness of the clamp is weakened by the vibration and external influence of the pipe, and the airtightness of the pipe connection part is leaked.

따라서 본 발명은 상술한 바와 같은 문제점을 해소하기 위해 안출된 것으로, 본 발명의 실시예는 배관의 진동에 의해 배관 연결용 클램프 장치의 결속력을 더욱 견고히 할 수 있도록 한 배관 연결용 클램프 장치와 관련된다.
Accordingly, the present invention has been made to solve the above problems, the embodiment of the present invention relates to a pipe connecting clamp device that can further solidify the binding force of the pipe connecting clamp device by the vibration of the pipe. .

본 발명의 바람직한 일 실시예에 의하면, 한쪽은 연결부재의 상측과 제1힌지핀에 힌지결합되며, 다른쪽은 전면으로 끼움홈이 형성되고 양측면에는 서로 통하는 장공이 형성된 제1회전부재; 한쪽은 연결부재의 하측과 제2힌지핀에 힌지결합되고, 다른쪽은 양측면에 고정공이 형성된 제2회전부재; 하부는 고정핀에 의해 제2회전부재의 고정공과 힌지결합되고 상부는 나선부가 형성되며, 제1회전부재의 끼움홈에 끼워져 설치되는 체결볼트; 체결볼트의 나선부에 체결되며, 외측둘레에는 풀림방지홈이 다수개 형성된 너트; 제1회전부재의 장공 내부에 위치하여 제1회전부재의 상면으로부터 수직으로 장공까지 관통되는 고정부재에 회전가능하게 고정될 수 있도록 한쪽에 끼움공이 형성되고, 저면에는 걸림턱이 형성되며, 전면에는 돌출부가 형성되고, 후면에는 걸림돌기가 형성된 가동부재; 작동부재의 저면에 위치하여 고정부재에 의해 고정되면서 한쪽은 작동부재의 걸림턱에 걸리고, 다른 한쪽은 제1회전부재의 장공 내면에 지지되는 탄성부재; 제1회전부재의 장공을 관통하는 연결부의 양단에는 회전노브가 설치되고, 연결부의 한쪽 외측둘레에는 가동부재의 돌출부를 작동시키는 캠부가 형성된 작동부재;와 관련된다.According to a preferred embodiment of the present invention, one side is hinged to the upper side and the first hinge pin of the connection member, the other side is the first groove is formed in the front groove and both sides are formed through the long hole through each other; One side is hinged to the lower side and the second hinge pin of the connecting member, the other side of the second rotating member formed with a fixing hole on both sides; The lower portion is hinged to the fixing hole of the second rotating member by a fixing pin, the upper portion is formed with a spiral, the fastening bolt is inserted into the fitting groove of the first rotating member; It is fastened to the spiral portion of the fastening bolt, the outer periphery nut formed with a plurality of loosening prevention grooves; A fitting hole is formed at one side so as to be rotatably fixed to a fixing member which is located inside the long hole of the first rotating member and vertically penetrates from the upper surface of the first rotating member to the long hole. A protruding portion is formed and a rear surface of the movable member having a locking projection; An elastic member positioned on the bottom surface of the operating member and fixed by the fixing member, the one end of which is caught by the locking jaw of the operating member, and the other of which is supported on the inner surface of the long hole of the first rotating member; The rotary knob is provided at both ends of the connecting portion penetrating the long hole of the first rotating member, and an operating member having a cam portion configured to operate the protrusion of the movable member at one outer circumference of the connecting portion.

이때 제1회전부재의 장공을 포함하는 양측면에는 회전노브의 저면 일부가 끼워질 수 있도록 설치홈을 형성한 것이다.At this time, the mounting groove is formed on both side surfaces including the long hole of the first rotating member so that a part of the bottom surface of the rotary knob can be fitted.

또한 설치홈에 설치공을 형성한 후 그 설치공에 스프링과 볼을 순차적으로 끼워넣어 고정시키고, 회전노브의 저면에는 걸림홈을 형성하여 볼이 걸림홈에 선택적으로 걸려 고정될 수 있도록 한 것이다.
In addition, after the installation hole is formed in the installation groove, the spring and the ball are sequentially inserted into the installation hole and fixed, and the bottom of the rotary knob is formed so that the ball can be selectively hooked to the locking groove.

본 발명에 따른 배관 연결용 클램프 장치에 따르면 클램프 장치의 결속력을 유지시켜주는 볼트와 너트가 진동 또는 외부의 영향에 의해 쉽게 풀리는 현상을 방지함에 따라 배관의 진동에 따라 클램프의 결속력이 떨어지게 되면서 기밀이 유지되지 못하는 현상을 효과적으로 방지할 수 있는 것이다.
According to the clamp device for pipe connection according to the present invention, the bolt and nut for maintaining the binding force of the clamp device is prevented from loosening easily due to vibration or external influences, so that the tightness of the clamp is reduced according to the vibration of the pipe. It can effectively prevent the phenomenon that cannot be maintained.

도 1 은 본 발명의 일 실시예에 의한 배관 연결용 클램프 장치의 사시도를 나타낸다.
도 2 는 본 발명의 일 실시예에 의한 배관 연결용 클램프 장치의 측면도를 나타낸다.
도 3 은 본 발명의 일 실시예에 의한 배관 연결용 클램프 장치의 분리 사시도를 나타낸다.
도 4a 는 본 발명의 일 실시예에 의한 배관 연결용 클램프 장치의 요부 평단면도를 나타낸다.
도 4b 는 본 발명의 다른 실시예에 의한 배관 연결용 클램프 장치의 요부 평단면도를 나타낸다.1 is a perspective view of a clamp device for pipe connection according to an embodiment of the present invention.
Figure 2 shows a side view of a clamp device for pipe connection according to an embodiment of the present invention.
Figure 3 shows an exploded perspective view of the clamping device for pipe connection according to an embodiment of the present invention.
4A is a cross-sectional view illustrating main parts of a clamp device for pipe connection according to an embodiment of the present invention.
4B is a sectional view showing the principal parts of a clamping device for pipe connection according to another embodiment of the present invention.

이하 본 발명의 바람직한 실시예를 첨부된 도면을 토대로 상세하게 설명하면 다음과 같다. 이 과정에서 도면에 예시된 선들의 두께나 구성요소의 크기 등은 설명의 명료성과 편의상 과장되게 예시되어 있을 수도 있다.Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. In this process, the thicknesses of the lines illustrated in the drawings, the size of components, and the like may be exaggerated for clarity and convenience of description.

또한 후술되는 용어들은 본 발명에서의 기능을 고려하여 정의된 용어들로서 이는 사용자, 운용자의 의도 또는 관례에 따라 달라질 수 있다. 그러므로 이러한 용어들에 대한 정의는 본 명세서 전반에 걸친 내용을 토대로 하여 내려져야 할 것이다.In addition, terms to be described later are terms defined in consideration of functions in the present invention, which may vary according to the intention or convention of a user or an operator. Therefore, the definitions of these terms should be made based on the contents throughout the specification.

본 발명에 의한 클램프 장치는 반도체 제조장비에서 사용되는 배관 연결부위에 기밀의 유지를 위하여 설치되는 것으로, 도면에 예시된 바와 같이 제1회전부재(100)는 반원형상을 가지며, 한쪽 끝은 연결부재(300)의 상측과 제1힌지핀(170)에 의해 회전이 가능하도록 결합되고, 반대쪽 끝은 전면으로 일정한 깊이의 끼움홈(130)이 형성되며 그 양측면은 서로 관통되는 장공(110)이 형성된 것이다.The clamp device according to the present invention is installed to maintain airtightness at a pipe connection portion used in semiconductor manufacturing equipment. As illustrated in the drawing, the first rotating member 100 has a semicircular shape, and one end thereof is a connecting member. The upper side of the 300 and the first hinge pin 170 is coupled so as to be rotatable, the opposite end is formed with a fitting groove 130 of a predetermined depth to the front side and its sides are formed with a long hole 110 through each other will be.

그리고 제2회전부재(200) 또한 반원형상을 가지며, 한쪽 끝은 연결부재(300)의 하측과 제1힌지핀(230)에 의해 회전이 가능하도록 결합되고, 반대쪽 끝은 양측면에 고정공(210)이 형성된 것이다.And the second rotating member 200 also has a semi-circular shape, one end is coupled to be rotatable by the lower side of the connecting member 300 and the first hinge pin 230, the opposite end is fixed to the sides 210 ) Is formed.

또한 마주하는 한쪽이 연결부재(300)에 의해 고정되는 제1회전부재(100)와 제2회전부재(200)의 마주하는 다른쪽은 체결볼트(700)와 너트(800)의해 체결되어 그 결합력을 가지게 되는데, 이러한 체결볼트(700)는 하부가 고정핀(220)에 의해 제2회전부재(200)의 고정공(210)과 회전가능하게 결합됨에 따라 체결볼트(700)를 제1회전부재(100)쪽으로 회전시키면 체결볼트(700)의 상부에 형성된 나선부(710)가 제1회전부재(100)의 끼움홈(130)에 끼워지게 되는 것이다.In addition, the opposite side of the first rotating member 100 and the second rotating member 200, the opposite one of which is fixed by the connecting member 300, is fastened by the fastening bolt 700 and the nut 800, and the coupling force thereof. The fastening bolt 700 has a lower portion of the fastening bolt 700 as the first rotation member is rotatably coupled with the fixing hole 210 of the second rotating member 200 by the fixing pin 220. When rotating toward (100), the spiral portion 710 formed on the upper side of the fastening bolt 700 is fitted to the fitting groove 130 of the first rotating member 100.

그리고 체결볼트(700)의 나선부(710)에는 너트(800)가 체결되면서 그 체결력에 의해 제1회전부재(100)와 제2회전부재(200)의 결속력이 견고해질 수 있는 것이다.In addition, as the nut 800 is fastened to the spiral portion 710 of the fastening bolt 700, the binding force between the first rotating member 100 and the second rotating member 200 may be firm by the fastening force.

여기서 상기 너트(800)의 경우 배관의 진동 등에 의해 풀림현상이 발생하게 됨에 따라 너트(800)의 풀림을 방지할 수 있는 수단이 필요한 것이다.Here, in the case of the nut 800, as the loosening phenomenon occurs due to vibration of the pipe, a means for preventing loosening of the nut 800 is required.

따라서 너트(800)의 외축둘레에는 풀림방지홈(810)이 연속적으로 일정한 간격을 두고 다수개가 형성된 것이다.Therefore, the outer axis of the nut 800, the anti-loosening grooves 810 are formed in plurality at regular intervals continuously.

그리고 제1회전부재(100)의 장공(110) 내부에는 가동부재(500)가 설치되는 것인데, 가동부재(500)는 한쪽 상면에는 상하를 관통하는 끼움공(510)이 형성되고, 다른 한쪽 전면에는 일정한 높이로 돌출되는 돌출부(520)가 형성되며, 그 반대쪽 후면에는 너트(800)의 풀림방지홈(810)에 끼워지게 되는 걸림돌기(530)가 형성된 것이다.The movable member 500 is installed inside the long hole 110 of the first rotating member 100, and the movable member 500 has a fitting hole 510 penetrating up and down on one upper surface thereof, and the other front surface thereof. The protrusion 520 is formed to protrude to a certain height, the opposite side is formed with a locking projection 530 to be fitted to the anti-loosening groove 810 of the nut 800.

또한 저면에는 단턱진 형태로 걸림턱(540)이 형성된 것이다.In addition, the bottom has a locking step 540 is formed in a stepped form.

따라서 장공(110)내부에 가동부재(500)가 위치된 후 제1회전부재(100)의 상면으로부터 장공(110)까지 수직방향으로 체결되는 고정부재(120)가 가동부재(500)의 끼움공(510)에 끼워져 그 아래쪽에 체결됨에 따라 고정부재(120)를 중심으로 가동부재(500)가 어느 한쪽으로 회전될 수 있는 것이다.Therefore, after the movable member 500 is positioned inside the long hole 110, the fixing member 120 fastened vertically from the top surface of the first rotating member 100 to the long hole 110 is fitted into the movable member 500. The movable member 500 may be rotated to either side about the fixing member 120 as the 510 is fastened to the bottom thereof.

이때 상기 고정부재(120)가 회전될 때 탄성력을 부여할 필요가 있으므로 중앙이 원을 그리며 말려있고 그 양단이 아래쪽으로 벌어져 각각 탄성력을 가지는 탄성부재(600)를 구비한 후 이를 장공(110)내부에 설치하되 가동부재(500)의 저면에 위치되도록 하여 가동부재(500)를 고정시키주는 고정부재(120)가 탄성부재(600)의 중앙을 관통하게 하므로서 고정부재(120)와 탄성부재(600)가 고정부재(120)에 의해 함께 고정되도록 한 것이다.At this time, since the fixing member 120 needs to give an elastic force when it is rotated, the center is rolled up in a circle, and both ends thereof are spread downward to have an elastic member 600 having elastic force. The fixing member 120 and the elastic member 600 are installed on the bottom surface of the movable member 500 so that the fixing member 120 penetrating the center of the elastic member 600 is fixed to the movable member 500. ) Is to be fixed together by the fixing member (120).

따라서 탄성부재(600)의 한쪽은 장공(110)의 한쪽 내면에 고정되는 것이며, 탄성부재(600)의 다른 한쪽은 가동부재(500)의 걸림턱(540)에 걸리게 됨에 따라 탄성부재(600)에 의해 가동부재(500)의 걸림돌기(530)가 위치한 부분이 전방쪽으로 탄성력을 가지면서 밀리게 되는 것이다.Therefore, one side of the elastic member 600 is fixed to one inner surface of the long hole 110, the other side of the elastic member 600 is caught by the locking jaw 540 of the movable member 500, the elastic member 600 By this, the portion in which the locking protrusion 530 of the movable member 500 is pushed is pushed forward with an elastic force.

이와 같이 가동부재(500)의 걸림돌기(530)가 탄성부재(600)에 의해 탄성력을 받으면서 전방쪽으로 밀려있게 되면 제1회전부재(100)의 끼움홈(130)에 끼워져 있는 너트(800)의 풀림방지홈(810)에 걸림돌기(530)가 끼워져 걸림게 됨에 따라 너트(800)가 배관의 진동 또는 그 밖의 외부적인 충격에 의해 쉽게 풀리는 현상을 방지할 수 있는 것이다.As such, when the locking protrusion 530 of the movable member 500 is pushed forward while receiving the elastic force by the elastic member 600, the nut 800 of the nut 800 inserted into the fitting groove 130 of the first rotating member 100 is removed. As the locking protrusion 530 is inserted into the release preventing groove 810, the nut 800 may be easily prevented from being released by vibration or other external impact of the pipe.

한편, 너트(800)의 회전이 가동부재(500)에 의해 방지될 필요도 있지만 필요에 따라 체결볼트(700)에 결합된 너트(800)를 풀어줄 필요도 있는 것이다.On the other hand, the rotation of the nut 800 may need to be prevented by the movable member 500, but it is also necessary to loosen the nut 800 coupled to the fastening bolt 700 as necessary.

즉, 배관의 연결부위에 클램프 장치를 설치하거나 배관의 연결부위에 설치된 클램프 장치를 분리시킬 필요가 있는 경우에는 제2회전부재(200)의 체결볼트(700)로부터 너트(800)를 분리시켜 서로 결합되어 있던 제2회전부재(200)와 제1회전부재(100)의 한쪽 부위를 서로 분리시킬 수 있는 것이다.That is, when it is necessary to install the clamp device on the connection portion of the pipe or to separate the clamp device installed on the connection portion of the pipe to separate the nut 800 from the fastening bolt 700 of the second rotating member 200 to each other One portion of the second rotating member 200 and the first rotating member 100 which are combined may be separated from each other.

이때 체결볼트(700)와 결합된 너트(800)의 경우 너트(800)의 외측둘레에 형성되어 있는 풀림방지홈(810)에 가동부재(500)의 걸림돌기(530)가 끼워져 있으므로 걸림돌기(530)를 풀림방지홈(810)으로부터 이격시킬 수 있는 수단이 필요하게 되는 것이다.In this case, in the case of the nut 800 coupled with the fastening bolt 700, the locking protrusion 530 of the movable member 500 is inserted into the anti-loosening groove 810 formed at the outer circumference of the nut 800. Means for separating the 530 from the anti-loosening groove 810 is required.

이에 따라 제1회전부재(100)의 장공(110)을 관통하여 설치되는 연결부(420)와, 그 연결부(420) 양끝에 고정되는 회전노브(410)로 이루어진 작동부재(400)를 구성하되, 회전노브(410)를 벗어나지 않는 연결부(420)의 한쪽 끝부분에 타원형의 캠부(421)를 형성함에 따라 그 캠부(421)가 장공(110)의 내부에 위치하게 되면서 장공(110)내부에 함께 설치되는 가동부재(500)의 돌출부(520)와 상응하여 서로 접면되는 것이다.Accordingly, the operating member 400 includes a connecting part 420 installed through the long hole 110 of the first rotating member 100 and a rotating knob 410 fixed to both ends of the connecting part 420. As the cam portion 421 is formed at one end of the connecting portion 420 that does not leave the rotary knob 410, the cam portion 421 is positioned inside the long hole 110, and together with the inside of the long hole 110. Corresponding to the protrusion 520 of the movable member 500 to be installed is to be in contact with each other.

한편, 회전노브(410)를 설치함에 있어서, 장공(110)주변에 일정한 깊이로 함몰되는 설치홈(140)을 형성하고, 그 설치홈(140)에 회전노브(410)의 저면 일부가 끼워질 수 있도록 구성하므로서, 회전노브(410)의 불필요한 유동을 방지할 수 있도록 한 것이며, 이때 설치홈(140)의 직경은 회전노브(410)의 저면 직경보다는 크게 형성하여 회전노브(410)가 회전될 때 설치홈(140)에 의해 간섭되지 않도록 한 것이다.On the other hand, in installing the rotary knob 410, to form a mounting groove 140 is recessed to a predetermined depth around the long hole 110, the bottom portion of the rotary knob 410 is fitted to the mounting groove 140 It is configured to be able to prevent unnecessary flow of the rotary knob 410, the diameter of the installation groove 140 is formed larger than the diameter of the bottom surface of the rotary knob 410 to rotate the rotary knob 410 When not to be interfered by the installation groove 140.

따라서 회전노브(410)가 회전되지 않은 상태에서는 연결부(420)에 구성된 캠부(421)의 얇은부분이 가동부재(500)의 돌출부(520)와 접면되지만 돌출부(520)를 밀어주지는 못함에 따라 가동부재(500)는 탄성부재(600)의 탄성력에 의해 가동부재(500)의 걸림돌기(530)가 너트(800)의 풀림방지홈(810) 중 어느 하나에 끼워진 상태가 되어 너트(800)가 체결볼트(700)로부터 풀리지 않게 된다.Therefore, in the state in which the rotary knob 410 is not rotated, a thin portion of the cam portion 421 formed at the connecting portion 420 is in contact with the protrusion 520 of the movable member 500, but the protrusion 520 is not pushed. The movable member 500 is in a state in which the locking protrusion 530 of the movable member 500 is fitted into any one of the anti-loosening grooves 810 of the nut 800 by the elastic force of the elastic member 600, and thus the nut 800. Is not released from the fastening bolt 700.

그리고 필요에 따라 너트(800)를 체결볼트(700)로부터 분리시킬 필요가 있는 경우 회전노브(410)를 90도 회전시켜 주면 회전노브(410)의 연결부(420)가 함께 회전되고, 이에 따라 연결부(420)의 캠부(421) 또한 함께 회전되면서 캠부(421)의 두꺼운부분이 가동부재(500)의 돌출부(520)를 밀어주게 되는 것이며, 캠부(421)의 두꺼운부분에 의해 돌출부(520)가 밀리게 되면 가동부재(500)의 끼움공(510)을 회전중심으로 돌출부(520)는 바깥쪽 방향으로 회전되고, 걸림돌기(530)는 안쪽방향으로 회전되는 것이며, 이때 탄성부재(600)는 한쪽이 걸림턱(540)과 함께 회전됨에 따라 탄성력을 가지게 되는 것이다.And when necessary to separate the nut 800 from the fastening bolt 700, if the rotary knob 410 is rotated 90 degrees, the connection portion 420 of the rotary knob 410 is rotated together, accordingly Cam portion 421 of 420 is also rotated together, the thick portion of the cam portion 421 will push the protrusion 520 of the movable member 500, the protrusion 520 by the thick portion of the cam portion 421 When pushed to the center of rotation of the fitting hole 510 of the movable member 500, the protrusion 520 is rotated in the outward direction, the locking projection 530 is rotated in the inward direction, the elastic member 600 is One side will have an elastic force as it is rotated with the locking step (540).

따라서 위에서와 같이 걸림돌기(530)가 안쪽방향으로 회전되면 너트(800)의 풀림방지홈(810)에 끼워져 있던 걸림돌기(530)가 풀림방지홈(810)으로부터 벗어나게 되므로 체결볼트(700)로부터 너트(800)를 쉽게 풀어줄 수 있는 것이며, 이때 90도 회전된 회전노브(410)는 탄성부재(600)의 탄성력을 계속받고 있게 됨에 따라 너트(800)를 체결볼트(700)로부터 분리시키는 동안에는 90도 회전된 상태를 그대로 유지시켜야 할 필요가 있는 것이다.Therefore, as shown in the above, when the locking projection 530 is rotated inward, the locking projection 530 that is inserted into the loosening prevention groove 810 of the nut 800 is released from the loosening prevention groove 810, and thus, from the fastening bolt 700. The nut 800 can be easily loosened, and the rotating knob 410 rotated 90 degrees receives 90 of the elastic force of the elastic member 600, thereby removing the nut 800 from the fastening bolt 700. It is also necessary to maintain the rotated state as it is.

이에 따라 회전노브(410)가 90도 회전된 상태를 유지되도록 하기 위하여 장공(110)을 포함하는 제1회전부재(100)의 양측면에 일정한 깊이를 가지는 설치공(141)을 형성하고, 그 설치공(141)에 스프링(150)과 볼(160)을 순차적으로 설치하여 스프링(150)의 탄성력을 받으면서 볼(160)의 일부분이 설치공(141) 외부에 돌출될 수 있도록 한 것이다.Accordingly, in order to maintain the rotary knob 410 is rotated 90 degrees to form a mounting hole 141 having a constant depth on both sides of the first rotating member 100 including the long hole 110, the installation The spring 150 and the ball 160 are sequentially installed in the ball 141 so that a part of the ball 160 may protrude outside the installation hole 141 while receiving the elastic force of the spring 150.

그리고 회전노브(410)의 안쪽면에는 설치공(141)에 설치된 볼(160)의 일부분이 끼워져 걸릴수 있도록 걸림홈(411)을 형성함에 따라 회전노브(410)가 90도 회전되면 회전노브(410)의 걸림홈(411)에 볼(160)의 일부분이 끼워져 고정되므로 회전되었던 회전노브(410)가 회전된 상태를 그대로 유지하게 되는 것이다.In addition, when the rotating knob 410 is rotated 90 degrees, the rotating knob 410 is formed on the inner surface of the rotary knob 410 so that a part of the ball 160 installed in the installation hole 141 can be inserted into the locking groove 411. A portion of the ball 160 is fitted into the locking groove 411 of the) so that the rotating knob 410 that has been rotated is maintained as it is.

이후 필요에 의해 체결볼트(700)와 너트(800)를 다시 체결할 경우 90도 회전되어 있던 회전노브(410)를 한쪽방향으로 힘을 주어 회전시키게 되면 그 힘에 의해 볼(160)로부터 회전노브(410)의 걸림홈(411)이 벗어나게 되고, 이때 탄성부재(600)에 의해 탄성력을 받고 있던 가동부재(500)가 원상태로 회전되면서 가동부재(500)의 걸림돌기(530)가 다시 너트(800)의 풀림방지홈(810)에 걸리게 되어 너트(800)의 회전이 다시 방지될 수 있는 것이다.If necessary, when the fastening bolt 700 and the nut 800 are re-fastened, the rotary knob 410, which has been rotated by 90 degrees, is rotated by applying a force in one direction to the rotary knob from the ball 160 by the force. The locking groove 411 of the 410 is released, and at this time, the movable member 500, which has been subjected to the elastic force by the elastic member 600, is rotated to its original state, so that the locking protrusion 530 of the movable member 500 again becomes a nut ( The anti-loosening groove 810 of the 800 is caught so that the rotation of the nut 800 can be prevented again.

아울러 상기 업급된 바람직한 실시예는 본 발명의 권리범위를 한정하는 것이 아니라 본 발명의 청구범위에 제시된 구성요소의 예시적인 사항에 불과하며, 본 발명의 명세서 전반에 걸친 기술사상에 포함되고 청구범위 구성요소에서 균등물로 치환 가능한 구성요소를 포함하는 실시예는 본 발명의 권리범위에 포함될 수 있다.
In addition, the above-described preferred embodiments are not intended to limit the scope of the present invention, but merely illustrative of the components set forth in the claims of the present invention, which are included in the technical idea throughout the specification of the present invention and claims Embodiments that include components substitutable for equivalents in the elements may be included in the scope of the present invention.

100 ; 회전부재 110 ; 장공
120 : 고정부재 130 : 끼움홈
140 : 설치홈 141 : 설치공
150 : 스프링 160 : 볼
200 : 제2회전부재 210 : 고정공
220 : 고정핀 300 : 연결부재
400 : 작동부재 410 : 회전노브
411 : 걸림홈 420 : 연결부
421 : 캠부 500 : 가동부재
510 : 끼움공 520 : 돌출부
530 : 걸림돌기 540 : 걸림턱
600 : 탄성부재 700 : 체결볼트
710 : 나선부 800 : 너트
810 : 풀림방지홈100; Rotating member 110; Long hole
120: fixing member 130: fitting groove
140: installation groove 141: installation hole
150: spring 160: ball
200: second rotating member 210: fixing hole
220: fixing pin 300: connecting member
400: operating member 410: rotary knob
411: locking groove 420: connecting portion
421: cam portion 500: movable member
510: fitting hole 520: protrusion
530: jamming projection 540: jamming jaw
600: elastic member 700: fastening bolt
710: spiral 800: nut
810: loosening groove

Claims (3)

반도체 제조장비에 사용되는 클램프 장치를 구성함에 있어서,
한쪽은 연결부재의 상측과 제1힌지핀에 결합되고, 다른쪽은 전면으로 끼움홈이 형성되며, 양측면은 서로 통하는 장공이 형성된 제1회전부재;
한쪽은 연결부재의 하측과 제2힌지핀에 결합되고, 다른쪽은 양측면에 고정공이 형성된 제2회전부재;
하부는 고정핀에 의해 제2회전부재의 고정공과 힌지결합되고 상부는 나선부가 형성되어 제1회전부재의 끼움홈에 끼워져 설치되는 체결볼트;
체결볼트의 나선부에 체결되며, 외측둘레에는 다수개의 풀림방지홈이 형성된 너트;
제1회전부재의 장공 내부에 위치하여 제1회전부재의 상면으로부터 수직으로 장공까지 관통되는 고정부재에 회전가능하게 고정될 수 있도록 한쪽에 끼움공이 형성되고, 저면에는 걸림턱이 형성되며, 전면에는 돌출부가 형성되고, 후면에는 걸림돌기가 형성되어 그 걸림돌기가 끼움홈에 끼워지는 너트의 풀림방지홈에 선택적으로 끼워져 걸리게 되는 가동부재;
작동부재의 저면에 위치하여 고정부재에 의해 고정되며, 한쪽은 작동부재의 걸림턱에 걸리고, 다른 한쪽은 제1회전부재의 끼움홈 내면에 지지되는 탄성부재;
제1회전부재의 장공을 관통하는 연결부의 양단에는 회전노브가 설치되고, 연결부의 한쪽 외측둘레에는 가동부재의 돌출부를 작동시키는 캠부가 형성된 작동부재;를 포함하여 구성된 것을 특징으로 하는 배관 연결용 클램프 장치.
In constructing a clamp device used in semiconductor manufacturing equipment,
One side is coupled to the upper side of the connecting member and the first hinge pin, the other side is formed with a fitting groove to the front side, both sides are the first rotating member formed with a long hole through each other;
One side is coupled to the lower side and the second hinge pin of the connecting member, the other side of the second rotating member is formed with fixing holes on both sides;
A lower part is hinged to the fixing hole of the second rotating member by a fixing pin, and an upper part of the fastening bolt is inserted into the fitting groove of the first rotating member by forming a spiral portion;
It is fastened to the spiral portion of the fastening bolt, the outer periphery nut formed with a plurality of loosening prevention grooves;
A fitting hole is formed at one side so as to be rotatably fixed to a fixing member which is located inside the long hole of the first rotating member and vertically penetrates from the upper surface of the first rotating member to the long hole. A protruding portion is formed and a rear surface is provided with a locking protrusion, the movable member being selectively caught in the anti-loosening groove of the nut, the locking protrusion being fitted into the fitting groove;
An elastic member positioned on a bottom surface of the operating member and fixed by a fixing member, one of which is caught by a locking jaw of the operating member, and the other of which is supported by an inner surface of the fitting groove of the first rotating member;
Rotating knobs are provided at both ends of the connecting portion penetrating the long hole of the first rotating member, and an operating member having a cam portion for activating the projection of the movable member is formed at one outer circumference of the connecting portion. Device.
제 1 항에 있어서,
제1회전부재의 장공이 포함되는 양측면에 회전노브의 저면 일부가 끼워질 수 있도록 설치홈을 형성하여 된 것을 특징으로 하는 배관 연결용 클램프 장치.
The method of claim 1,
Clamping device for pipe connection, characterized in that the installation grooves are formed so that a portion of the bottom surface of the rotary knob can be fitted to both side surfaces including the long hole of the first rotating member.
제 2 항에 있어서,
회전노브의 저면에는 걸림홈을 형성하고, 제1회전부재의 설치홈에는 설치공을 형성한 후 그 설치공에는 스프링과 볼을 순차적으로 끼워넣어 회전노브의 회전에 따라 볼이 탄성력을 가지면서 걸림홈에 선택적으로 걸려 고정될 수 있도록 한 것을 특징으로 하는 배관 연결용 클램프 장치.The method of claim 2,
A locking groove is formed on the bottom of the rotary knob, and an installation hole is formed in the installation groove of the first rotating member, and then the spring and the ball are sequentially inserted into the installation hole, and the ball has an elastic force according to the rotation of the rotary knob. Clamping device for pipe connection, characterized in that it is selectively caught in the groove can be fixed.
KR1020120054841A 2012-05-23 2012-05-23 Clamping device for connecting pipes KR101200719B1 (en)

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Cited By (21)

* Cited by examiner, † Cited by third party
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KR101440123B1 (en) 2014-07-01 2014-09-12 신명하이텍 주식회사 Clamp device for pipe connection
KR20150130086A (en) 2014-05-13 2015-11-23 이제석 Fixing clamp for pipe joint
KR101578329B1 (en) 2015-09-02 2015-12-16 김형근 clamp
KR101590977B1 (en) * 2014-11-17 2016-02-03 (주) 엠엠티케이 Piping bundling clamp
KR20170001272U (en) 2016-05-04 2017-04-12 신명하이텍 주식회사 Anti-loosening clamp device
KR101744508B1 (en) * 2016-08-09 2017-06-08 최명석 Clamping device for connecting pipes
KR101755848B1 (en) 2015-09-22 2017-07-19 현대자동차주식회사 Hose clamp for vehecles
KR101796002B1 (en) 2016-03-16 2017-12-01 한효신 Vacuum pipe clamp
KR101796004B1 (en) 2016-03-16 2017-12-01 한효신 Vacuum pipe clamps with nut control means
KR101796003B1 (en) 2016-03-16 2017-12-01 한효신 Vacuum pipe clamp with a nut control means
KR101829143B1 (en) 2016-10-06 2018-02-14 김형근 clamp
KR20180046176A (en) * 2016-10-27 2018-05-08 임채갑 Pipe connecting apparatus and tightening apparatus therefor
KR20180079657A (en) * 2017-01-02 2018-07-11 이수용 Clamp for pipe
KR20180089021A (en) * 2017-01-31 2018-08-08 이동민 Pipe clamp
KR101915928B1 (en) 2018-01-24 2018-11-06 주식회사 엠아이 A Pipe Coupling Clamp
KR101974554B1 (en) 2018-07-18 2019-05-02 하정완 Anti-loosening clamp device
WO2019208841A1 (en) * 2018-04-23 2019-10-31 Lim Min Sub Pipe connection device and tightening device for same
KR102105792B1 (en) * 2019-06-05 2020-04-28 차보용 Size Inspection Apparatus for Connecting Member of Pipe Clamp
KR20200002581U (en) 2019-05-20 2020-11-30 신기산업 주식회사 Preventive structure clamp for vacuum pipe
KR102320669B1 (en) * 2021-05-17 2021-11-02 (주)엔씨테크 Chemical Lock Clamp A
KR102320686B1 (en) * 2021-05-17 2021-11-02 (주)엔씨테크 Chemical Lock Clamp B

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Cited By (23)

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Publication number Priority date Publication date Assignee Title
KR20150130086A (en) 2014-05-13 2015-11-23 이제석 Fixing clamp for pipe joint
KR101440123B1 (en) 2014-07-01 2014-09-12 신명하이텍 주식회사 Clamp device for pipe connection
KR101590977B1 (en) * 2014-11-17 2016-02-03 (주) 엠엠티케이 Piping bundling clamp
KR101578329B1 (en) 2015-09-02 2015-12-16 김형근 clamp
KR101755848B1 (en) 2015-09-22 2017-07-19 현대자동차주식회사 Hose clamp for vehecles
KR101796002B1 (en) 2016-03-16 2017-12-01 한효신 Vacuum pipe clamp
KR101796004B1 (en) 2016-03-16 2017-12-01 한효신 Vacuum pipe clamps with nut control means
KR101796003B1 (en) 2016-03-16 2017-12-01 한효신 Vacuum pipe clamp with a nut control means
KR20170001272U (en) 2016-05-04 2017-04-12 신명하이텍 주식회사 Anti-loosening clamp device
KR101744508B1 (en) * 2016-08-09 2017-06-08 최명석 Clamping device for connecting pipes
KR101829143B1 (en) 2016-10-06 2018-02-14 김형근 clamp
KR20180046176A (en) * 2016-10-27 2018-05-08 임채갑 Pipe connecting apparatus and tightening apparatus therefor
KR20180079657A (en) * 2017-01-02 2018-07-11 이수용 Clamp for pipe
KR101935125B1 (en) 2017-01-02 2019-01-03 이수용 Clamp for pipe
KR20180089021A (en) * 2017-01-31 2018-08-08 이동민 Pipe clamp
KR101955606B1 (en) * 2017-01-31 2019-03-07 이동민 Pipe clamp
KR101915928B1 (en) 2018-01-24 2018-11-06 주식회사 엠아이 A Pipe Coupling Clamp
WO2019208841A1 (en) * 2018-04-23 2019-10-31 Lim Min Sub Pipe connection device and tightening device for same
KR101974554B1 (en) 2018-07-18 2019-05-02 하정완 Anti-loosening clamp device
KR20200002581U (en) 2019-05-20 2020-11-30 신기산업 주식회사 Preventive structure clamp for vacuum pipe
KR102105792B1 (en) * 2019-06-05 2020-04-28 차보용 Size Inspection Apparatus for Connecting Member of Pipe Clamp
KR102320669B1 (en) * 2021-05-17 2021-11-02 (주)엔씨테크 Chemical Lock Clamp A
KR102320686B1 (en) * 2021-05-17 2021-11-02 (주)엔씨테크 Chemical Lock Clamp B

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