KR101796002B1 - Vacuum pipe clamp - Google Patents
Vacuum pipe clamp Download PDFInfo
- Publication number
- KR101796002B1 KR101796002B1 KR1020160031501A KR20160031501A KR101796002B1 KR 101796002 B1 KR101796002 B1 KR 101796002B1 KR 1020160031501 A KR1020160031501 A KR 1020160031501A KR 20160031501 A KR20160031501 A KR 20160031501A KR 101796002 B1 KR101796002 B1 KR 101796002B1
- Authority
- KR
- South Korea
- Prior art keywords
- fastening
- clamp
- nut
- hole
- bolt
- Prior art date
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L23/00—Flanged joints
- F16L23/04—Flanged joints the flanges being connected by members tensioned in the radial plane
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L21/00—Joints with sleeve or socket
- F16L21/06—Joints with sleeve or socket with a divided sleeve or ring clamping around the pipe-ends
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L21/00—Joints with sleeve or socket
- F16L21/08—Joints with sleeve or socket with additional locking means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L23/00—Flanged joints
- F16L23/04—Flanged joints the flanges being connected by members tensioned in the radial plane
- F16L23/08—Flanged joints the flanges being connected by members tensioned in the radial plane connection by tangentially arranged pin and nut
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Clamps And Clips (AREA)
Abstract
The present invention relates to a vacuum piping clamp, and more particularly, to a clamp for connecting vacuum piping used in a semiconductor manufacturing process or the like, a clamping state can be firmly maintained even by vibration or external impact of a vacuum pipe, Even if the fastening bolts are not correctly inserted in the process of fastening, the nut automatically changes into the angle of the fastening bolt, so that fastening of the fastening bolt can be made easier, so fast and accurate clamping is possible even in a tight space To a new type of clamp for a vacuum piping.
Description
The present invention relates to a vacuum piping clamp, and more particularly, to a clamp for connecting vacuum piping used in a semiconductor manufacturing process or the like, a clamping state can be firmly maintained even by vibration or external impact of a vacuum pipe, Even if the fastening bolts are not correctly inserted in the process of fastening, the nut automatically changes into the angle of the fastening bolt, so that fastening of the fastening bolt can be made easier, so fast and accurate clamping is possible even in a tight space To a new type of clamp for a vacuum piping.
Generally, a process of depositing a thin film on a wafer or etching a thin film deposited on a wafer in a semiconductor manufacturing process or the like is a process in which a noxious gas such as silane, arsine, boron chloride, And a large amount of reaction by-product gas containing various kinds of ignitable gases, corrosive foreign substances and toxic components is generated in the process chamber during the process.
Most toxic chemical gases are supplied from chemical gas supply systems to semiconductor manufacturing equipment via piping that is resistant to corrosion and chemical resistance. In this case, it is ideal to connect the piping for connection between the gas supply system and the semiconductor manufacturing apparatus with one piping having no joints. However, in realistic aspects such as the piping transportation, installation, and maintenance, In practice, the pipes are connected to each other and used as an exhaust line.
Here, the exhaust line is formed by connecting the pipe and the pipe to each other, and a flange extending outward is formed at one end of the pipe which is in contact with each other. Therefore, in forming the exhaust line by connecting these two pipes, it is important that the respective flanges are connected and fixed so that the exhaust gas does not leak.
Therefore, a pipe connection clamp is used to tightly couple the flanges, which are the joint portions of the pipe, with each other.
However, since the piping of the exhaust line is connected to the vacuum pump which makes the chamber vacuum, the vacuum state of the pipe is maintained by the operation of the vacuum pump. The vibration due to the operation of the vacuum pump is transmitted to the pipe, .
As the vibration of the pipe continues, the fastening state of the clamping nut of the clamp is gradually released and the clamp is loosened, so that there is a problem that the hermetic connection state of the vacuum pipe is not achieved.
A clamp used for vacuum piping of a semiconductor manufacturing facility as described above is disclosed in Japanese Patent Application Laid-Open No. 10-1398314 (registered May 15, 2014)
The
As another conventional technique, a clamping device for connecting pipes is disclosed in Patent Publication No. 0-1200719 (registered on Nov. 05, 2012)
In constructing the clamping device used in semiconductor manufacturing equipment,
A first rotary member having one side connected to the upper side of the connecting member and the first hinge pin and the other side formed with a fitting groove into the front side and having both side surfaces communicating with each other;
A second rotary member having one side connected to the lower side of the connecting member and the second hinge pin and the other side having a fixing hole on both sides;
A fastening bolt which is hinged to a fastening hole of the second rotary member by a fastening pin and has a spiral portion at an upper portion thereof and is fitted into a fitting groove of the first rotary member;
A nut fastened to the threaded portion of the fastening bolt and having a plurality of loosening preventing grooves formed on the outer periphery thereof;
A fitting hole is formed on one side of the first rotating member so as to be rotatably fixed to a fixing member penetrating from the upper surface of the first rotating member to the long hole vertically from the upper surface of the first rotating member, And a locking projection is formed on the rear surface of the movable member so that the locking projection is selectively engaged with the locking preventing groove of the nut inserted in the fitting groove.
An elastic member which is located on the bottom surface of the operation member and fixed by the fixing member, one of which is caught by the engagement protrusion of the operation member and the other of which is supported by the inner surface of the fitting groove of the first rotation member;
A rotary knob is provided at both ends of a connection portion penetrating the slot of the first rotating member and an operating member having a cam portion for operating a protrusion of the movable member is formed around one of the outer sides of the connection portion.
However, in the clamp having the above-described structure, since the bolts and nuts which are threaded for fastening the clamps are always aligned in the same line in the fastening process, the fastening of the screws is smooth so that it is difficult to fasten the clamps in the narrow space. The connection and sealing of the connection portion of the vacuum pipe can not be guaranteed.
In addition, the exhaust line fixing clamp device disclosed in Japanese Unexamined Patent Application Publication No. 10-2005-0078037 (published on Aug. 04, 2005), Patent Document 10-2009-0020126 (Release date: February 26, 2009) (Registered on October 11, 2013), a vacuum piping clamp, and the like.
In these devices, bolts and nuts for fastening the clamps must be aligned in the same line before tightening, so that it is difficult to install the clamps in a narrow and complicated installation site and the fastening process is not performed frequently There is a problem.
SUMMARY OF THE INVENTION It is an object of the present invention to provide a clamp for connecting vacuum pipes used in semiconductor manufacturing processes, , Even if the fastening bolt is not correctly inserted in the process of fastening the clamp, the nut automatically changes to the inflow angle of the fastening bolt so that the screw fastening of the fastening bolt can be made easier so that even in a narrow space where clamping is difficult, And to provide a new type of clamp for a vacuum piping which can secure clamping of the clamp.
It is an object of the present invention to provide a clamp for a vacuum piping in which the outer circumferential surface of each flange of a vacuum piping connected to each other is fixed in a wrapping manner,
And a
The
A pair of through
A
The threaded
The
And a pair of
The
As described above, in the clamp for vacuum piping according to the present invention, the fastening bolt coupled to the first clamp body and the nut coupled to the second clamp body are fastened to each other by a plurality of fastening bolts formed on the outer side of the fastening bolt, So that the fastening bolt is prevented from rotating in the reverse direction by the vibration generated in the vacuum pipe, and thus the fastening force of the clamp can be firmly maintained.
In addition, the nut to be assembled to the second clamp body is formed to be able to rotate within a partial range in a state where the nut is assembled to the second clamp body, so that even if the fastening bolt fastened to the nut is not perpendicular to the female screw fastener of the nut, The fastening bolt can be screwed to the nut easily by rotating the nut to fit the angle of the inlet, so that the clamp can be easily fastened even in a complicated and narrow space.
1 is a perspective view of a vacuum piping clamp according to the present invention;
Fig. 2 is an exploded perspective view of a vacuum piping clamp according to the present invention. Fig.
FIG. 3 is a partial cross-sectional view illustrating a state in which the lower housing and the clamping nut are engaged with each other among the clamps for vacuum piping according to the present invention
4 is a cross-sectional view of the vacuum piping clamp according to the present invention
5 is a cross-sectional view of the vacuum piping clamp according to the present invention in a closed state
Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are intended to provide further explanation of the invention as claimed. It does not mean anything.
In addition, the sizes and shapes of the components shown in the drawings may be exaggerated for clarity and convenience of explanation, and the terms defined specifically in consideration of the configuration and operation of the present invention may vary depending on the intention or custom of the user, operator It should be noted that the definitions of these terms should be made on the basis of the contents throughout this specification.
1 is a perspective view of a clamp for a vacuum piping according to the present invention, Fig. 2 is an exploded perspective view of a clamp for a vacuum piping according to the present invention, Fig. 3 is a perspective view of a clamp for a vacuum piping according to the present invention, Sectional view showing the engagement state of the fastening nut with the fastening nut.
As shown in the figure, the
The first and
In the inner circumferential surfaces of the first and
Each of the first and
A
The
On the other hand, fastening means (40) for controlling the rotation of the first and second clamp bodies (10, 20) are formed at the positions where the connection links (30) are formed.
The fastening means 40 includes a
The fastening
The end of the clamping
The
3, the
Hereinafter, the operation of the vacuum piping clamp according to the present invention will be described in detail with reference to FIGS. 4 to 5. FIG.
FIG. 4 is a cross-sectional view of a vacuum piping clamp according to the present invention in an open state, and FIG. 5 is a cross-sectional view of a vacuum piping clamp according to the present invention in a closed state.
The
The
A pair of flanges (not shown) connected to the pipe are connected to the inside of the
At this time, in the process of inserting the
The
The
Although the present invention has been described in connection with the above-mentioned preferred embodiments, it will be apparent to those skilled in the art that various modifications and variations can be made without departing from the spirit and scope of the invention, It is obvious that the claims fall within the scope of the claims.
10: first clamp body 11: fitting groove
12: open groove 13: hole
14: bolt fastening hole 15:
20: second clamp body 21: fitting groove
22: open groove 23: hole
24: nut assembly 25: seat groove
30: connection link 31: through hole
32: connecting pin 40: fastening means
41: fastening bolt 411: bolt head
412: Retaining groove 413: Guide
414: Retaining groove 415:
416: conical part 42: nut
421: body 422:
423: Female thread ball 424:
425: hole 426: guide pin
43: washer 44: snap ring
45:
Claims (4)
And a bolt fastening hole 14 connected to the fitting hole 15 on the other side is formed in a semicircular shape in which a fitting groove 11 into which the flanges are fitted together is formed, A first clamp body 10,
The first clamp body 10 is symmetrical with the first clamp body 10 and has an insertion groove 21 into which the flanges are inserted. An opening groove 22 communicating with the hole 23 and a nut assembly 24 A second clamp body 20 having a semicircular shape formed integrally with the first clamp body 20,
A pair of through holes 31 inserted into the open grooves 12 and 22 and penetrating to the side are positioned on the same line as the holes 13 and 23 and fixed by the connecting pin 32, A connecting link 30 rotatably connecting the first clamp body 10 and the second clamp body 20,
A bolt head 411 and a plurality of engaging grooves 412, a guide 413, an engaging groove 414 and a threaded portion 415 are assembled to the bolt fastening hole 14 of the first clamp body 10, And a female screw hole 423 is formed at a central portion of the cylindrical body 421. The female screw hole 423 is formed in the center of the cylindrical body 421, And a fastening means 40 having a hole 425 to which the fastening portion 424 is coupled at one side and a nut 42 to which the guide pin 426 is assembled at the other side,
The threaded portion 415 of the fastening bolt 41 is inserted into the female screw hole 423 of the nut 42 in the process of screwing the fastening bolt 41 with the nut 42, The body 421 of the nut 42 automatically rotates within the range of the seat groove 25 when the engagement angle of the nut 42 is poor, (421) is rotated to induce accurate screw tightening.
The clamp for a vacuum piping according to claim 1, further comprising an extension part (422) extending obliquely outwardly of the female screw hole (423) at a front portion of the female screw hole (423) of the nut (42).
Wherein a pair of washers (43) having a latching protrusion (431) are inserted into the guide (413) of the fastening bolt (41).
Wherein the bolt head (411) of the fastening bolt (41) has a hexagonal shape.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020160031501A KR101796002B1 (en) | 2016-03-16 | 2016-03-16 | Vacuum pipe clamp |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020160031501A KR101796002B1 (en) | 2016-03-16 | 2016-03-16 | Vacuum pipe clamp |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20170107775A KR20170107775A (en) | 2017-09-26 |
KR101796002B1 true KR101796002B1 (en) | 2017-12-01 |
Family
ID=60036613
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020160031501A KR101796002B1 (en) | 2016-03-16 | 2016-03-16 | Vacuum pipe clamp |
Country Status (1)
Country | Link |
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KR (1) | KR101796002B1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20200093950A (en) * | 2019-01-29 | 2020-08-06 | 이영일 | A pipe clamp for torgue regulation |
KR20220001151A (en) * | 2020-06-29 | 2022-01-05 | 임재각 | Apparatus to prevent loosening of the valve |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100791644B1 (en) | 2007-09-18 | 2008-01-03 | 주식회사 우리 | Combination structure of exhaust gas reduction apparatus for vehicle with clamp |
KR101017961B1 (en) | 2010-07-27 | 2011-03-02 | 주식회사 엠아이 | Clamp for vacuum line |
KR101194642B1 (en) | 2010-04-28 | 2012-10-29 | 신경식 | Clamp for easy to assembling |
KR101200719B1 (en) | 2012-05-23 | 2012-11-12 | 김형동 | Clamping device for connecting pipes |
-
2016
- 2016-03-16 KR KR1020160031501A patent/KR101796002B1/en active IP Right Grant
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100791644B1 (en) | 2007-09-18 | 2008-01-03 | 주식회사 우리 | Combination structure of exhaust gas reduction apparatus for vehicle with clamp |
KR101194642B1 (en) | 2010-04-28 | 2012-10-29 | 신경식 | Clamp for easy to assembling |
KR101017961B1 (en) | 2010-07-27 | 2011-03-02 | 주식회사 엠아이 | Clamp for vacuum line |
KR101200719B1 (en) | 2012-05-23 | 2012-11-12 | 김형동 | Clamping device for connecting pipes |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20200093950A (en) * | 2019-01-29 | 2020-08-06 | 이영일 | A pipe clamp for torgue regulation |
KR102172670B1 (en) * | 2019-01-29 | 2020-11-02 | 이영일 | A pipe clamp for torgue regulation |
KR20220001151A (en) * | 2020-06-29 | 2022-01-05 | 임재각 | Apparatus to prevent loosening of the valve |
KR102411525B1 (en) * | 2020-06-29 | 2022-06-20 | 임재각 | Apparatus to prevent loosening of the valve |
Also Published As
Publication number | Publication date |
---|---|
KR20170107775A (en) | 2017-09-26 |
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