KR101182101B1 - Testing apparatus of cooling line - Google Patents
Testing apparatus of cooling line Download PDFInfo
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- KR101182101B1 KR101182101B1 KR1020120023016A KR20120023016A KR101182101B1 KR 101182101 B1 KR101182101 B1 KR 101182101B1 KR 1020120023016 A KR1020120023016 A KR 1020120023016A KR 20120023016 A KR20120023016 A KR 20120023016A KR 101182101 B1 KR101182101 B1 KR 101182101B1
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- South Korea
- Prior art keywords
- cooling
- test solution
- test
- unit
- cooling device
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
Abstract
The present invention relates to a cooling test apparatus, which can selectively test leakage or clogging of a cooling line using cooling water or air in various types of cooling devices including a cooling line, and is convenient for mobility and portability. It relates to a cooling test device that can easily test the leakage or clogging of the cooling line of the cooling device in the place where is installed.
Description
The present invention relates to a cooling test apparatus, which can test leakage or clogging of a cooling line by using cooling water or air selectively in various kinds of cooling devices having a cooling line, and is convenient in portability and portability. It relates to a cooling test device that can easily test the leakage or clogging of the cooling line of the cooling device in the place where is installed.
Apparatuses having cooling lines are used in various fields. In particular, semiconductor manufacturing facilities, and more particularly semiconductor manufacturing equipment including a reaction chamber is provided with a cooling line for optimizing the process conditions by maintaining the temperature in the reaction chamber to a certain range of temperatures. In general, the cooling line is made of a material with high thermal conductivity, for example, copper. Copper has a low strength, so holes or cracks are generated even at a low impact. If the cooling line is used for a long time, the cooling line and the inside of the cooling line are Some sections of the cooling line are often blocked due to chemical reactions of the flowing coolant or contamination of the coolant.
In semiconductor manufacturing facilities, cooling lines are an important means of controlling optimum process conditions.The yield of semiconductors produced is low when the cooling water leaks from the cooling line or when some sections of the cooling line are blocked and the cooling water does not flow smoothly along the cooling line. Problems arise that can result in a failure or failure of the semiconductor manufacturing equipment.
In order to overcome this problem, the internal temperature of the semiconductor manufacturing equipment is not controlled to an appropriate temperature by periodically cleaning the cooling line of the cooling apparatus, periodically replenishing or replacing the cooling water, or monitoring the internal temperature of the semiconductor manufacturing equipment in real time. In case of failure, various cooling line management methods are used, such as replacing the cooling line.
However, the conventional management method of the cooling line wastes time and money to periodically replenish or replace the cooling water or to clean the cooling line regardless of whether the cooling water is insufficient in the actual cooling line. There is a great deal of waste in replacement. In addition, there is a problem that the operation delay occurs due to the cooling water replenishment or replacement, cooling line cleaning, cooling line replacement.
The present invention is to solve the problems of the above-mentioned conventional cooling line management method, the object of the present invention is to carry and move easily to prevent the cooling line leakage or clogging of the cooling device in the place where the cooling device is installed. It is to provide a cooling test apparatus that can be tested.
Another object of the present invention is to provide a cooling test apparatus that can test the cooling line of the cooling device using a variety of cooling media by selecting the coolant or air as the test medium to test the leakage or clogging of the cooling line of the cooling device. It is.
Another object of the present invention is to select the cooling water or air as a test medium through various combinations of the opening and closing valves, and the cooling test apparatus that can selectively test the leakage or clogging of the cooling line through the various combinations of the opening and closing valves To provide.
In order to achieve the object of the present invention, the cooling test apparatus according to the present invention is discharged from the cooling device through a discharge port for discharging the cooled test solution to the cooling device to be tested with a constant hydraulic pressure, and the cooling line of the cooling device A main unit having an inlet through which a solution is introduced and a measuring unit measuring a flow rate of a test solution flowing into the inlet;
A conduit connecting an exhaust pipe connecting the cooling device in series with the outlet of the main body unit, an air injector for injecting test air into the test cooling device in parallel with the main body unit at one end of the discharge pipe, and a cooling device from the air injection device. And an auxiliary unit having a manometer for measuring the pressure of air injected into the furnace.
More specifically, the main body unit according to the present invention includes a housing having an outlet and an inlet at the outside, a test solution reservoir disposed at the bottom of the housing and storing the test solution, and disposed at the bottom of the housing and tested. A pump for discharging the test solution stored in the solution reservoir at a constant pressure, a cooling unit disposed on the bottom surface of the housing and cooling the test solution discharged from the pump and discharging the cooled test solution to the cooling device through the discharge port; And, passing through the cooling line of the cooling device, characterized in that it comprises a measuring unit for measuring the flow rate of the test solution flowing through the inlet from the cooling device.
Here, the main body unit according to the present invention has a test solution reservoir, a pump, a cooling part, and a measuring part disposed inside the housing, and a moving means for moving the main body unit on the lower surface of the housing.
Preferably, the inside of the housing of the main unit connects the lower end of the test solution reservoir to the pump and supplies a test solution of the test solution reservoir to the pump, and connects the pump and the cooling unit to supply the test solution from the pump to the cooling unit. A third water supply pipe connecting the second water supply pipe, the cooling unit and the discharge pipe and supplying the test solution from the cooling unit to the discharge pipe, and a fourth water supply pipe connecting the inlet and the test solution reservoir and supplying the test solution from the inlet to the test solution reservoir. It includes more.
The auxiliary unit further includes a first on / off valve for controlling opening and closing of the outlet, a second on / off valve for controlling the opening and closing of the inlet, and a third on / off valve for controlling the opening and closing of the connecting pipe.
In order to test the cooling line leakage of the cooling apparatus using the test solution in the cooling test apparatus according to the present invention, the first on-off valve is opened and the second on-off valve and the third on-off valve are controlled to be closed.
In order to test the cooling line leakage of the cooling apparatus using the test air in the cooling test apparatus according to the present invention, the third on-off valve is opened and the first on-off valve and the second on-off valve are controlled to be closed.
In order to test the blockage of the cooling line of the cooling device using the test solution in the cooling test device according to the present invention, the first on-off valve and the second on-off valve are opened and the third on-off valve is controlled to be closed.
The cooling test apparatus according to the present invention has various effects as follows.
First, the cooling test apparatus according to the present invention includes all the components for testing the cooling apparatus inside the housing of the main body unit, and is provided with a moving means such as wheels on the outer lower surface of the housing, thereby making it easy to carry and move. Cooling line leakage or clogging of the cooling unit can be tested where the unit is installed.
Second, the cooling test apparatus according to the present invention can test the cooling line of the cooling apparatus using various cooling media by selecting the cooling water or air to test the leakage or clogging of the cooling line of the cooling apparatus.
Third, the cooling test apparatus according to the present invention may select the coolant or air as a test medium through various combinations of the first to third on / off valves, and select an operation mode through various combinations of the first to third on / off valves. The leakage or blockage of the cooling line can be tested.
1 is a view for explaining an example of testing a cooling apparatus using a cooling test apparatus according to the present invention.
2 shows an external perspective view of a cold test apparatus according to the present invention.
3 shows an internal perspective view of a cold test apparatus according to the present invention.
4 is a view showing in detail the auxiliary unit.
Hereinafter, the cooling test apparatus according to the present invention will be described in more detail with reference to the accompanying drawings.
1 is a view for explaining an example of testing a cooling apparatus using a cooling test apparatus according to the present invention.
Referring to FIG. 1, the
The
Outside the housing of the
The
On the other hand, it is possible to selectively determine whether there is a leakage in the cooling line of the
2 shows an external perspective view of the cooling test apparatus according to the present invention, and FIG. 3 shows an internal perspective view of the cooling test apparatus according to the present invention.
Referring to the outside of the cooling test apparatus in more detail with reference to FIG. 2, the
First, the outside of the
On the other hand, the
On the other hand, referring to the inside of the cooling test apparatus in more detail with reference to Figure 3, the
Here, the first
Preferably, the first
In summary, when the flow of the test solution is examined while testing whether the leaked portion exists in the cooling line of the cooling apparatus using the test solution, the test solution stored in the
4 is a view showing in detail the auxiliary unit.
Looking in more detail with respect to the
Hereinafter, the operation of the main body unit and the auxiliary unit in the leakage test mode and the clogging test mode of the cooling test apparatus according to the present invention will be described in detail.
Referring first to the leak test mode, the first on-off
In addition, the second open /
Meanwhile, referring to the clogging test mode, the first opening /
100: cooling test device 200: air injection device
300: cooling device 110: main body unit
120: auxiliary unit 111: housing
112: wheel 113: outlet
114: inlet 115: flow gauge
116: power switch 117: power line
121: discharge pipe 123: connector
124: pressure gauge 125: first opening and closing valve
126: second on-off valve 127: third on-off valve
130: test solution reservoir 140: pump
150: cooling unit
171: first water supply pipe 173: second water supply pipe
175: third water supply pipe 177: fourth water supply pipe
178: dispensing connector 179: auxiliary water pipe
Claims (7)
A discharge pipe connecting the cooling device in series with the discharge port of the main body unit, a connecting pipe connecting an air injecting device for injecting test air into the cooling device in parallel with the main body unit to one end of the discharge pipe, and the air And an auxiliary unit having a manometer for measuring the pressure of the air injected from the injection device into the cooling device.
A housing having an outlet and an inlet at the outside;
A test solution reservoir disposed on a bottom surface of the housing and storing a test solution;
A pump disposed on a bottom surface of the housing and discharging the test solution stored at the test solution reservoir at a predetermined pressure;
A cooling unit disposed on an inner bottom surface of the housing and cooling the test solution discharged from the pump and discharging the cooled test solution to the cooling device through the discharge port; And
And a measuring unit measuring a flow rate of the test solution flowing through the cooling line of the cooling device and flowing through the inlet from the cooling device.
A first water supply pipe connecting the lower end of the test solution reservoir to the pump and supplying the test solution of the test solution reservoir to the pump;
A second water supply pipe connecting the pump and the cooling unit and supplying the test solution from the pump to the cooling unit;
A third water supply pipe connecting the cooling unit and the discharge pipe and supplying the test solution from the cooling unit to the discharge pipe;
And a fourth water supply pipe connecting the inlet to the test solution reservoir and supplying the test solution from the inlet to the test solution reservoir.
A first opening / closing valve for controlling opening and closing of the outlet;
A second opening / closing valve for controlling opening and closing of the inlet; And
And a third open / close valve configured to control the opening and closing of the connecting pipe.
The first opening / closing valve is opened,
And the second on-off valve and the third on-off valve are controlled to be closed.
The third on-off valve is opened,
And the first on-off valve and the second on-off valve are controlled to be closed.
The first opening / closing valve and the second opening / closing valve are opened,
And the third on-off valve is closed controlled.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020120023016A KR101182101B1 (en) | 2012-03-06 | 2012-03-06 | Testing apparatus of cooling line |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020120023016A KR101182101B1 (en) | 2012-03-06 | 2012-03-06 | Testing apparatus of cooling line |
Publications (1)
Publication Number | Publication Date |
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KR101182101B1 true KR101182101B1 (en) | 2012-09-19 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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KR1020120023016A KR101182101B1 (en) | 2012-03-06 | 2012-03-06 | Testing apparatus of cooling line |
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KR (1) | KR101182101B1 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102147162B1 (en) | 2019-12-10 | 2020-08-24 | 비오티 주식회사 | Multi step gas leak test system for high pressure |
KR20210006728A (en) | 2019-07-09 | 2021-01-19 | 비오티 주식회사 | Gas leak test system for high pressure |
KR20210006729A (en) | 2019-07-09 | 2021-01-19 | 비오티 주식회사 | Gas leak test system with multi-test function |
-
2012
- 2012-03-06 KR KR1020120023016A patent/KR101182101B1/en active IP Right Grant
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20210006728A (en) | 2019-07-09 | 2021-01-19 | 비오티 주식회사 | Gas leak test system for high pressure |
KR20210006729A (en) | 2019-07-09 | 2021-01-19 | 비오티 주식회사 | Gas leak test system with multi-test function |
KR102147162B1 (en) | 2019-12-10 | 2020-08-24 | 비오티 주식회사 | Multi step gas leak test system for high pressure |
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