KR101141025B1 - Lift pin drive device - Google Patents

Abstract

According to an aspect of the present invention, there is provided an apparatus for vertically driving a plurality of lift pins penetrating a substrate stabilizer, the apparatus comprising: a drive shaft positioned below the substrate stabilizer and moving up and down; A driving force generation source for providing a driving force to the driving shaft; A lift pin support member coupled to an upper end of the drive shaft; A plurality of guide members spaced apart from each other in a vertical direction at a lower portion of the substrate stabilizer and coupled to the driving shaft to guide vertical movement of the driving shaft; It is fixed to the lower portion of the substrate support, and relates to a lift pin drive device including a drive device support connected to the plurality of guide members.

According to the present invention, since the up and down linear motion of the driving shaft for driving the lift pin is made stable, the lifting motion of the lift pin is stabilized as a result, thereby reducing damage to the back surface of the substrate. It also reduces the time it takes to remove or combine the substrate stabilizer for equipment maintenance.

Lift pin, bracket

Description

Lift pin drive device

1 is a block diagram of a conventional substrate processing apparatus

2 is a block diagram of a substrate processing apparatus according to a first embodiment of the present invention;

3 is a view showing a state in which the ball screw guides the drive shaft

4 is a view showing a bracket according to an embodiment of the present invention.

5 is a configuration diagram of a substrate processing apparatus according to a second embodiment of the present invention.

6 is a configuration diagram of a substrate processing apparatus according to a third embodiment of the present invention.

* Description of the symbols for the main parts of the drawings *

100: substrate processing apparatus 101: chamber

102: substrate support 103: focus ring

104: gas distribution plate 105: insulating plate

106: RF antenna 107: matcher

108: RF power source 109: exhaust pipe

110: turbo molecular pump 111: pendulum valve

112: exhaust plate 113: exhaust hole

114: lift pin 115: bracket

116: pin support 117: pin bellows

118: drive shaft 119: bellows

120: drive device support 121: first guide member support

122: second guide member support 124: second linear guide

131: first guide member 132: second guide member

140: drive motor 142: first linear guide

144: drive motor support

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for manufacturing a semiconductor device, and more particularly, to a lift pin driving device for elevating and lifting a lift pin of a substrate set.

In general, a semiconductor device is manufactured through a process of depositing a predetermined thin film on a substrate and etching the same to form a pattern. Such a thin film deposition and etching process is performed in a substrate processing apparatus designed for an optimal environment for a corresponding process. do.

As a method of depositing a thin film on a substrate, there are methods such as physical vapor deposition (PVD), chemical vapor deposition (CVD), plasma enhanced CVD (PECVD), atomic layer deposition (ALD), and the like. As a method of etching the thin film, there are methods such as wet etching using an etchant and dry etching using plasma.

1 illustrates a general configuration of a substrate processing apparatus 10 that performs a thin film deposition or etching process using plasma, and deposits a thin film according to the type of raw material, process pressure, type of RF power source, presence or absence of bias power source, and the like. It can be used as a device or as an etching device.

Looking at the substrate processing apparatus 10, the substrate stabilizer 2 is installed inside the chamber 1 forming the reaction space, and the focus ring 3 is coupled to the periphery of the substrate stabilizer 2. The gas distribution plate 4 for injecting the raw material is provided on the substrate support 2.

An RF antenna 6 connected to the RF power source 8 is installed above the chamber 1, and a matcher 7 for impedance matching is installed between the RF antenna 6 and the RF power source 8.

The body of the chamber 1 is usually made of aluminum, but the upper surface of the chamber is composed of an insulating plate 5 of ceramic material so that the RF magnetic field generated by the RF antenna 6 can be efficiently transferred into the chamber. If the gas distribution plate 4 is installed below the insulating plate 5, the gas distribution plate 4 should also be made of an insulating material.

The focus ring 3 is usually made of a ceramic material, and extends the plasma region to the outside of the substrate s so that the entire surface of the substrate s is included in the uniform plasma region.

An exhaust pipe 9 for discharging residual material is connected to the lower portion of the chamber 1, and the turbo molecular pump 11 and a pendulum valve 12 for opening and closing the exhaust pipe 9 are installed. In addition, an exhaust plate 23 having an exhaust hole 24 is provided at the periphery of the focus ring 3 to prevent the exhaust pressure inside the chamber from being biased toward the turbomolecular pump 11.

Since the inside of the chamber 1 is usually maintained in a vacuum state, and the substrate support 2 may be moved up and down with the substrate s placed therebetween, the lower part of the substrate support 2 and the bottom of the chamber 1 The bellows 21 for the vacuum seal is installed.

On the other hand, the substrate treatment process proceeds in a state where the substrate s is in close contact with the substrate stabilizer 2, but in the substrate exchange process, the substrate s must be separated from the substrate stabilizer 2. A lift pin 13 protruding to the upper portion of the substrate support 2 is installed so that the robot arm can lower or pick up the substrate s.

Since the lift pin 13 must be moved up and down with respect to the substrate support 2 during the substrate exchange process, a separate driving means for driving the lift pin 13 is required.

In more detail, a driving cylinder 18 is installed below the substrate support 2, and a lower end of the driving shaft 17 for transmitting driving force is connected to the driving cylinder 18.

A bracket 16 having a plurality of branches is coupled to the upper end of the drive shaft 17, and a pin support 14 is coupled to the end of each branch of the bracket 16. The pin support 14 supports the lower end of the lift pin 13, where the pin support 14 is not fixed to each branch end of the bracket 16 and is typically capable of some degree of left and right flow. Combine with).

When the driving cylinder 18 raises the driving shaft 17, the pin support 14 is raised by the bracket 16 coupled to the upper end of the driving shaft 17 to move the lift pin 13 upward.

A lower portion of the substrate support 2 is coupled with a drive support 19 that surrounds a part of the bracket 16, the pin support 14, and the drive shaft 17, and on the bottom of the drive support 19. The drive shaft 17 is inserted and the bushing 20 is installed.

On the other hand, since the interior of the drive support 19 is usually at atmospheric pressure and the interior of the chamber 1 is in a vacuum state, a vacuum seal should be applied to the engaging portion of the lift pin 13 that moves up and down.

To this end, a pin bellows 22 is formed to surround the coupling portion of the pin support 14 and the lift pin 13, and the upper end of the pin bellows 22 is connected to the bottom of the substrate support 2, and the lower end of the pin To the support 14.

Looking at the operation of the substrate processing apparatus 10 having such a configuration as follows.

First, when the substrate support 2 is lowered to finish the process on the substrate and to carry out the substrate, the driving cylinder 18 operates to drive the driving shaft 17 upward.

Accordingly, the bracket 16 and the pin support part 14 connected to the upper end of the drive shaft 17 are raised to push the lift pin 13 upward, and the upper end of the lift pin 13 is the upper part of the substrate support 2. The substrate s is separated from the substrate support 2 while protruding to.

Subsequently, when the robot arm enters through the substrate entrance, not shown, and the processed substrate s is taken out and the new substrate is lowered on the lift pin 13, the driving cylinder 18 is operated to lower the driving shaft 17. Let's do it.

When the driving shaft 17 is lowered, the lift pin 13 is also lowered, so that the substrate s mounted on the lift pin 13 is seated on the substrate support 2.

In order to process the new substrate s, the substrate stabilizer 2 is raised to the process position, and then the raw material is supplied through the gas distribution plate 4 and the RF power source 8 is applied to the inside of the chamber 1. Form an induced electric field induced by the RF antenna 6.

When the electrons accelerated by the induced electric field collide with the neutral gas, a plasma, which is a mixture of ions and active species, is generated, and the ions and active species thus generated are incident on the substrate s to proceed with deposition or etching.

However, in such a substrate processing apparatus 10, the vertical movement of the driving shaft 17 may not be completely made in the vertical direction, so that a slight inclination in the horizontal direction often occurs, as well as the substrate stabilizer 2 for maintenance of equipment. In case of lifting the upper portion, the drive shaft 17 has a long length, which causes inconvenience in handling.

The present invention is to solve this problem, it is an object to make the vertical movement of the drive shaft for driving the lift pin more stable and to simplify the maintenance of the equipment.

In order to achieve the above object, the present invention provides a device for driving a plurality of lift pins penetrating the substrate stabilizer up and down, the drive shaft located in the lower portion of the substrate stabilizer; A driving force generation source for providing a driving force to the driving shaft; A lift pin support member coupled to an upper end of the drive shaft; A plurality of guide members spaced apart from each other in a vertical direction at a lower portion of the substrate stabilizer and coupled to the driving shaft to guide vertical movement of the driving shaft; It is fixed to the lower portion of the substrate stabilizer, and provides a lift pin drive device including a drive device support connected to the plurality of guide members.

The driving device support may include a plurality of guide member supports on which the guide members are installed, and at least one of the plurality of guide member supports may be elevated relative to the driving device support.

A linear guide for guiding the lifting movement of the guide member support may be installed in the driving device support.

The guide member may be a bushing through which the drive shaft passes.

On the other hand, the driving force source is a drive motor coupled to the lower end of the drive shaft, the drive motor is coupled to a linear guide fixed to the lower portion of the drive device support, the drive shaft and the guide member is screwed, the drive motor When the drive shaft is rotated by the drive motor can be moved up and down along the linear guide. At this time, the guide member is a ball screw (Ball Screw), the drive shaft is preferably a ball screw shaft passing through the ball screw.

The lift pin support member may include a bracket connected to an upper end of the drive shaft and having a plurality of branches; It is fixed to the end of each branch of the bracket may include a pin support for supporting the bottom of the lift pin, wherein the bracket is a plurality of symmetrically coupled to the cylindrical body and the periphery of the body of the lower opening It may include branches.

The drive shaft is coupled to the first sub-drive shaft of the upper and the second sub-drive shaft of the lower by the coupling means is preferably capable of separation and recombination.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

First embodiment

2 is a view showing the configuration of the substrate processing apparatus 100 according to the first embodiment of the present invention. The substrate processing apparatus 100, like the conventional substrate processing apparatus, forms a chamber 101 for forming a reaction space. The substrate stabilizer 102 is installed in the inside, the focus ring 103 is coupled to the periphery of the substrate stabilizer 102, and the gas distribution plate 104 is installed on the substrate stabilizer 102. .

In addition, an RF antenna 106 connected to the RF power source 108 is installed on the insulating plate 105 forming the chamber lid, and a matcher 107 for impedance matching between the RF antenna 106 and the RF power source 108. ) Is installed, and the turbo molecular pump 110 and the exhaust pipe 109 in which the pendulum valve 111 is installed are connected to the lower part of the chamber, and the exhaust plate 112 having a plurality of exhaust holes 113 to disperse the exhaust pressure. ) Is installed around the focus ring 103.

In addition, a bellows 119 for a vacuum seal is installed between the substrate stabilizer 102 and the bottom of the chamber 101 to maintain the inside of the chamber 101 in the vacuum despite the lifting movement of the substrate stabilizer 102. . In addition, the lower portion of the substrate stabilizer 102 is coupled to the driving unit support 120 surrounding the lift pin 114, the pin support 116 and the bracket 115, and the like.

Substrate processing apparatus 100 according to an embodiment of the present invention is characterized in that it uses a plurality of guide members for guiding the movement of the drive shaft 118 to raise and lower the lift pins.

That is, by installing the first and second guide members 131 and 132 spaced in a vertical direction on the driving device support 120 fixed to the lower portion of the substrate support 102, the drive shaft 118 is not inclined in the horizontal direction. Ensure stable support.

The first and second guide members 131 and 132 preferably use a bushing having a through hole into which the drive shaft 118 is inserted.

At this time, the drive supporter 120 is provided with first and second guide member supports 121 and 122 spaced apart by a predetermined distance in the vertical direction to install the first and second guide members 131 and 132.

Since two guide members 131 and 132 are not necessarily installed, three or more guide members may be installed.

Meanwhile, in the embodiment of the present invention, the lower end of the drive shaft 118 is not connected to the driving cylinder for expanding and contracting movement, but is connected to the driving motor 140, and the driving motor 140 is connected to the driving device support 120. It was configured to be elevated along the linear guide 142 installed at the bottom.

That is, the driving motor 140 is coupled to the linear guide 142 installed under the driving unit support 120 using the driving motor support 144.

To this end, a screw thread is formed on the outer circumference of the drive shaft 118, and a screw thread corresponding to the inner circumferential surface of the first and second guide members 131 and 132 into which the drive shaft 118 is inserted is formed.

Since the first and second guide members 131 and 132 are fixed to the driving device supporter 120, when the driving shaft 118 is rotated by the driving motor 140, the first and second guide members 131 and 132 are coupled to the lower ends of the driving shaft 118 and the driving shaft 118. Drive motor 140 is to move up and down together.

However, in the case of a general screw thread, since the friction force is large and the lifting movement is not smoothly performed, the inner circumferential surface of the first and second guide members 131 and 132 is formed of a ball screw as shown in FIG. ) Also uses a ball screw shaft with a smooth curved thread or threaded groove corresponding to the ball screw.

The linear guide 142 fixed to the lower portion of the driving device support 120 serves to guide the vertical movement stably when the driving motor 140 moves up and down.

In addition, in the substrate processing apparatus 100 of the present invention, the bracket 115 coupled to the upper end of the drive shaft 118 and fixed to the pin support 116 to each branch 115b is improved to have a more rigid form.

That is, as shown in FIG. 1, the bracket 16 according to the related art has a plurality of branches having a rod shape symmetrically arranged with one end coupled to each other, and the bracket according to the embodiment of the present invention. 115 is composed of a cylindrical body 115a having a lower opening as shown in FIGS. 2 and 4 and a plurality of branches 115b symmetrically coupled to the periphery of the body 115a, each branch The engaging portion of the 115b and the body 115a is made of a curved surface.

Body 115a is made of a thin plate, the upper end of the drive shaft 118 is coupled to the bottom surface through the opening of the body 115a.

When the lift pin 114 is raised to separate the substrate s from the substrate stabilizer 102, a significant load is applied to the lift pin 114 due to the electrostatic force between the substrate stabilizer 102 and the substrate s. All. Therefore, the bracket 16 having the same structure as the embodiment of the present invention is advantageous in enduring such a load as compared to a simple rod shape because its elasticity is strengthened than before.

The pin support 116 and the branch of the bracket may be joined using a joint as in the prior art. However, when the first and second guide members 131 and 132 are used as in the embodiment of the present invention, since the vertical movement of the drive shaft 118 is made stable, there is a possibility that the pin support part 116 flows from side to side due to the joint. Therefore, the pin support 116 and the bracket branch 115b may be integrally manufactured or fixed using a bolt or the like.

Since the upper portion of the substrate stabilizer 102 is in a vacuum state and the inside of the driver supporter 120 is in an atmospheric pressure state, a vacuum seal should also be formed around the lift pin 114 passing through the substrate stabilizer 102. Accordingly, as in the related art, a pin bellows 117 surrounds a coupling portion of the lift pin 114 and the pin support portion 116, one end of which is coupled to the bottom surface of the substrate support 102 and the other end of which is coupled to the pin support 116. Install it.

Second embodiment

Since the use of the two guide members 131 and 132 in the first embodiment of the present invention is to stabilize the lifting motion of the drive shaft 118, the two guide members 131 and 132 must be fixedly installed to the driving unit support 120. You don't have to.

That is, as shown in FIG. 5, the second linear guide 124 is installed on the driving unit support 120 and the first guide member support 121 can be moved with respect to the driving unit support 120. It may be coupled to the linear guide 124.

As such, when the first guide member support 121 is able to move up and down along the second linear guide 124, the driving shaft 118 may move up and down more stably.

In this case, since the second guide member 132 and the second linear guide 124 guide the vertical movement of the drive shaft 118, the first guide member 131 may not be in the form of a ball screw as described above. .

Meanwhile, instead of the first guide member support 121, the second guide member support 122 may be installed to move up and down with respect to the driving device support 120, and both the first and second guide member supports 121 and 122 may be installed. It is possible to install so that it can move.

However, if the width of the first and second guide members 131 and 132 is too close, regardless of which of the first and second guide member supports 131 and 132 moves, the lifting motion of the drive shaft 118 cannot be stably supported, The lifting width of the first and second guide member supports 131 and 132 should be adjusted appropriately.

Third embodiment

The third embodiment of the present invention is characterized in that the drive shaft 118 is manufactured in a separate type to simplify the maintenance of the equipment.

That is, as shown in FIG. 6, the drive shaft 118 is separated into the first sub-drive shaft 118a and the second sub-drive shaft 118b in the upper portion and manufactured, and the coupling is performed using the coupling means 118c. do.

In this case, the coupling means 118c may be a female screw formed at an end of one of the first and second driving shafts 118a and 118b and a male screw corresponding thereto, and may be any one of the first and second driving shafts 118a and 118b. It may be a fixing bolt for fastening through the through-hole after the end is inserted into the opposite end, and other first and second drive shafts (118a, 118b) includes any form of means that can be connected to each other.

Therefore, when dismantling the equipment, the first and second sub-drive shafts 118a and 118b can be easily separated from the drive shaft 118 without separating the drive shaft 118 and the drive motor 140 as in the prior art. Easy reassembly even during assembly reduces equipment maintenance time.

In addition, there is an advantage that the operator's operation is simplified because only the first sub-drive shaft 118a is lifted up instead of the entire drive shaft 118 when the substrate stabilizer 102 is separated.

According to the present invention, since the up and down linear motion of the driving shaft for driving the lift pin is made stable, the lifting motion of the lift pin is stabilized as a result, thereby reducing damage to the back surface of the substrate. It also reduces the time it takes to remove or combine the substrate stabilizer for equipment maintenance.

Claims (9)

In the device for driving a plurality of lift pins penetrating up and down the substrate support, A drive shaft positioned below the substrate stabilizer and moving up and down; A driving force generation source for providing a driving force to the driving shaft; A lift pin support member coupled to an upper end of the drive shaft; A plurality of guide members spaced apart from each other in a vertical direction at a lower portion of the substrate stabilizer and coupled to the driving shaft to guide vertical movement of the driving shaft; A driving device support fixed to the lower portion of the substrate support and connected to the plurality of guide members; Lift pin drive including The method of claim 1, The driving device support includes a plurality of guide member support for each of the guide member is installed, at least one of the plurality of guide member support lift pin driving device that can be elevated relative to the drive support The method of claim 2, Lift pin drive device is provided with a linear guide for guiding the lifting movement of the guide member support on the drive device support The method of claim 1, The guide member is a lift pin driving device, characterized in that the bushing (bushing) through which the drive shaft passes. The method of claim 1, The drive force generation source is a drive motor coupled to the lower end of the drive shaft, The drive motor is coupled to a linear guide fixed to the lower portion of the drive support, The drive shaft and the guide member is screwed, Lift pin driving device that the drive motor is lifted along the linear guide when the drive shaft is rotated by the drive motor The method of claim 5, The guide member is a ball screw (Ball Screw), the drive shaft is a lift pin drive device which is a ball screw shaft passing through the ball screw The method of claim 1, The lift pin support member, A bracket connected to an upper end of the drive shaft and having a plurality of branches; A pin support part fixed to an end of each branch of the bracket to support a lower end of the lift pin; Lift pin drive including The method of claim 7, wherein The bracket includes a cylindrical body having a lower opening and a plurality of branch pins symmetrically coupled to a periphery of the body. The method of claim 1, The drive shaft is a lift pin driving device in which the first sub-drive shaft at the upper portion and the second sub-drive shaft at the lower portion are coupled by a coupling means, and are separated and recombined.

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