KR101121196B1 - Glass substrate carrier - Google Patents

Abstract

The present invention relates to a substrate transfer apparatus, and more particularly, to a substrate transfer apparatus in which a structure for changing a transfer direction of a substrate can be simplified and a process time can be reduced.

The substrate transfer apparatus according to the embodiment of the present invention includes a first transfer unit for transferring in a direction, and a second transfer unit for transferring the substrate in which the transfer in the first direction is completed in a second direction, and the second transfer. The part includes a plurality of roller members provided between the plurality of shafts.

Board, Feed, Shaft, Roller

Description

Substrate transport device {Glass substrate carrier}

The present invention relates to a substrate transfer apparatus, and more particularly, to a substrate transfer apparatus in which a structure for changing a transfer direction of a substrate can be simplified and a process time can be reduced.

Recently, information processing devices have been rapidly developed to have various types of functions and faster information processing speeds. This information processing apparatus has a display device for displaying the operated information.

Until now, a cathode ray tube monitor has been mainly used as a display device, but in recent years, with the rapid development of semiconductor technology, the use of a flat display device that is light and occupies a small space is rapidly increasing. There are various types of flat panel displays. Among them, liquid crystal displays, which are small in power consumption and small in volume, and low voltage driven, are widely used.

In order to produce such a liquid crystal display, various processes such as etching, cleaning or drying must be performed on the substrate for formation of a pattern. Most of these processes are performed in a process chamber for performing the corresponding process, and a substrate transfer device for moving a substrate to each process chamber is installed.

The substrate transfer apparatus includes a drive member that provides a rotational force, and a plurality of shafts, each of which is rotated by the drive member and in which a plurality of rollers for feeding the substrate are provided along the axial direction. At this time, in order to change the transfer direction of the substrate, a plurality of shafts are installed in multiple stages along the transfer direction.

1 is a schematic view showing a substrate transfer apparatus according to the prior art.

As shown, the substrate transfer apparatus 10 according to the prior art transfers the plurality of shafts 11 and the plurality of rollers 12 and the substrate in the second direction for the transfer of the substrate in the first direction. A plurality of shafts 13 and a plurality of rollers 14 are provided in multiple stages. The substrate transfer apparatus 10 of FIG. 1 is an example of changing the transfer direction of the substrate when the exit direction is perpendicular to the entry direction of the substrate.

At this time, the plurality of rollers 14 installed on the plurality of shafts 13 for conveying in the second direction are relatively larger than the plurality of rollers 12 installed on the plurality of shafts 11 for conveying in the first direction. It can be seen that the size is large, this is the height of the plurality of shafts 11 for the transfer in the first direction in order to transfer the substrate to the plurality of shafts 11 for the transfer in the first direction in the second direction. Is to be lowered, the substrate is supported by a plurality of rollers 14 provided on the plurality of shafts 13 for the transfer in the second direction.

As such, when the transfer direction of the substrate is changed, a multi-stage shaft structure is used. The multi-stage shaft structure causes a complicated structure, and the required number of shafts increases, thereby increasing maintenance costs.

In addition, there is a problem in that the use of the shaft and the process failure due to the occurrence of the shaft eccentricity is increased during long time use, the long stroke (up) / down (down) caused the wear of the guide bearing, the grinding, etc. has a problem of shortening the life.

The present invention is designed to improve the above problems, the technical problem to be achieved by the present invention is to reduce the number of shafts required to change the transfer direction of the substrate substrate transfer apparatus to simplify the structure and at the same time reduce the cost To provide.

In addition, it is to provide a substrate transfer apparatus that minimizes the occurrence of eccentricity of the shaft during long time due to the reduction in the number of shafts required for substrate transfer.

The technical problem of the present invention is not limited to those mentioned above, and another technical problem which is not mentioned can be clearly understood by those skilled in the art from the following description.

In order to achieve the above object, a substrate transfer apparatus according to an embodiment of the present invention, the first transfer portion for transferring the substrate in a first direction by a plurality of shafts and rollers provided on the shaft, and in the first direction And a second transfer part for transferring the substrate, in which transfer is completed, in a second direction, wherein the second transfer part includes a plurality of roller members provided between the plurality of shafts.

According to the substrate transfer apparatus of the present invention as described above has one or more of the following effects.

There is an effect that the structure can be simplified and the cost can be reduced by reducing the number of shafts required to change the transfer direction of the substrate.

In addition, due to the reduction in the number of shafts there is an effect that can minimize the occurrence of the eccentric shaft that may occur during long time use.

In addition, the implementation of the short stroke through the shaft and roller structure has the effect of reducing the process time.

The effects of the present invention are not limited to the above-mentioned effects, and other effects not mentioned will be clearly understood by those skilled in the art from the description of the claims.

Advantages and features of the present invention and methods for achieving them will be apparent with reference to the embodiments described below in detail with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but can be implemented in various different forms, and only the embodiments make the disclosure of the present invention complete, and the general knowledge in the art to which the present invention belongs. It is provided to fully inform the person having the scope of the invention, which is defined only by the scope of the claims. Like reference numerals refer to like elements throughout.

Thus, in some embodiments, well known process steps, well-known structures, and well-known techniques are not specifically described to avoid an undue interpretation of the present invention.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. In the present specification, the singular form includes plural forms unless otherwise specified in the specification. As used herein, including and / or comprising includes the presence or addition of one or more other components, steps, operations and / or elements other than the components, steps, operations and / or elements mentioned. Use in the sense that does not exclude. And "and / or" include each and any combination of one or more of the mentioned items.

In addition, the embodiments described herein will be described with reference to cross-sectional and / or schematic views, which are ideal illustrations of the invention. Accordingly, shapes of the exemplary views may be modified by manufacturing techniques and / or tolerances. Accordingly, the embodiments of the present invention are not limited to the specific forms shown, but also include variations in forms generated by the manufacturing process. In addition, each component in each drawing shown in the present invention may be shown to be somewhat enlarged or reduced in view of the convenience of description. Like reference numerals refer to like elements throughout.

Hereinafter, the present invention will be described with reference to the drawings for describing a vehicle lamp according to embodiments of the present invention.

2 is a plan view showing a substrate transfer apparatus 100 according to an embodiment of the present invention.

As shown, the substrate transfer apparatus 100 according to the embodiment of the present invention, the first transfer unit 110 for transferring the substrate (S) in the first direction, and the substrate (S) is completed transfer in the first direction It may include a second transfer unit 120 for transferring in the second direction. In this case, in the embodiment of the present invention, a case in which the first direction is the entrance direction into which the substrate S enters and the second direction is the exit direction from which the substrate S exits will be described.

The first transfer unit 110 may include a shaft 111, a pulley 112, a belt 113, a driving member 114, a roller 115, and a substrate position detecting unit 116.

The shaft 111 may be spaced apart from each other at a predetermined distance in the first direction so that the shaft 111 may be transferred in the first direction while supporting the substrate S. Pulleys 112 may be provided at both ends of the shaft 111.

The plurality of pulleys 112 are interconnected by a chain or belt 113, the driving member (for example, a motor, etc.) to provide a rotational force to at least one pulley 112 of the plurality of pulleys 112 ( 114 may be connected. In addition, a plurality of rollers 115 supporting the substrate S and transporting the shafts S may be installed along the axial direction of the shaft 111.

The substrate position detecting unit 116 may be installed between the two shafts 111 to detect the position of the substrate S. The substrate position sensing unit 115 may include a plurality of pendulum sensors to accurately detect the position of the substrate S. FIG. As described above, the sensing of the position of the substrate S by the substrate position detecting unit 116 detects whether the substrate S has been transferred in the first direction by the first transfer unit 110, and based on the detection result. Accordingly, the substrate S may be transferred in the second direction by the second transfer part 120.

The second transfer part 120 may be composed of a plurality of roller members installed between the plurality of shafts 111, and each of the second transfer parts 120 may include the vertical member 121 and the same as in FIGS. 3 and 4. It may include a roller 122 located at the top of the vertical member 121.

When the substrate S is transferred in the first direction by the first transfer part 110, the height of the shaft 111 is increased so that the substrate S is positioned above a certain distance from the upper portion of the roller 122 of the second transfer part 120. However, when the transfer of the substrate S in the first direction is completed, the height of the shaft 111 is lowered, so that the height of the substrate S is lower than that of each of the second transfer units 120. As a result, the substrate S is transferred to the second transfer unit. It is positioned above the roller 122 of the (120).

The roller 122 of the second transfer part 120 may be a free roller that does not generate a separate driving force, or may be a roller that generates a separate driving force. For example, when there is an inclination during the transfer in the second direction, the substrate S may be transported in the second direction due to the inclination even if a separate driving force is not generated in the roller, and there is no inclination during the transfer in the second direction. In this case, a separate driving force is generated in the roller so that the substrate S may be transferred in the second direction. Therefore, when a driving force is generated in the roller 122 of the second conveying part 120, the second conveying part 120 may be connected to a driving member (not shown) in which the driving force is generated.

5 and 6 are cross-sectional views of the substrate transfer apparatus according to the embodiment of the present invention. 5 is an example when the substrate S is transferred in the first direction, and FIG. 6 is an example when the substrate S is transferred in the second direction.

Referring to FIG. 5, since the height of the shaft 111 included in the first conveying part 110 is relatively higher than that of the second conveying part 120, that is, the roller 122, the substrate S is installed on the shaft 111. It may be supported by a plurality of rollers (115). The shaft 111 is rotated by the driving member 114 so that the substrate S can be conveyed in the first direction, and the plurality of rollers 116 installed on the shaft 111 in accordance with the rotation of the shaft 111. The substrate S supported by the substrate S may be transferred in the first direction, that is, in the entry direction.

On the other hand, when the substrate position sensing unit 116 detects that the transfer of the substrate S in the first direction is completed, the rotation of the shaft 111 is stopped to stop the transfer of the substrate S, the shaft ( The height of 111 may be changed to be lower than that of the second transfer part 120.

As the height of the shaft 111 is lowered, the substrate S is changed to be supported by the roller 122 of the second transfer part 120, as shown in FIG. 6. At this time, when there is an inclination in the second direction, the substrate S may be transferred in the second direction due to the inclination in a state in which a separate driving force is not generated in the roller 122. In this case, a separate driving force may be generated to transfer the substrate S in the second direction.

As such, when the transfer direction of the substrate S is changed, for example, when the transfer direction is changed to a right angle direction, the shaft structure is used for one direction as compared to the change in the transfer direction using a double shaft structure. In addition, for the other direction, the number of shafts required by using the roller structure can be reduced, and the configuration thereof can be simplified.

In addition, it is possible to minimize the occurrence of eccentricity caused by using the shaft structure, thereby reducing the process time to improve the productivity by implementing a short stroke.

Meanwhile, in the embodiment of the present invention, a shaft structure is used for the case of feeding in the first direction, that is, an entry direction, and a roller structure is used for the case of feeding in the second direction, that is, the outlet direction. Although described, this is only an example to help understanding of the present invention, and a roller structure and a shaft structure may be used for the first direction and the second direction, but are not limited thereto.

Those skilled in the art will appreciate that the present invention can be embodied in other specific forms without changing the technical spirit or essential features of the present invention. It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive. The scope of the present invention is indicated by the scope of the following claims rather than the detailed description, and all changes or modifications derived from the meaning and scope of the claims and the equivalent concept are included in the scope of the present invention. Should be interpreted.

1 is a schematic view showing a substrate transfer apparatus according to the prior art.

2 is a schematic view showing a substrate transfer apparatus according to an embodiment of the present invention.

3 and 4 is a schematic view showing a second transfer unit of the present invention.

5 and 6 are schematic views showing the operation of the substrate transfer apparatus according to an embodiment of the present invention.

<Description of the symbols for the main parts of the drawings>

110: first transfer section 111: the shaft

112: pulley 113: belt

114: drive member 115: roller

116: substrate position detection unit 120: second transfer unit

Claims (3)

A first transfer part for transferring the substrate in a first direction by a plurality of shafts and rollers installed on the shafts; And And a second transfer part configured to transfer the substrate in which the transfer in the first direction is completed in the second direction, The second transfer unit, And a plurality of roller members having a vertical member provided between the plurality of shafts and a roller provided on an upper end of the vertical member. delete The method of claim 1, The second transfer unit, And a driving member for generating a driving force for transferring the substrate in a second direction.

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