KR101044385B1 - Method for manufacturing semiconductor device - Google Patents
Method for manufacturing semiconductor device Download PDFInfo
- Publication number
- KR101044385B1 KR101044385B1 KR20040049354A KR20040049354A KR101044385B1 KR 101044385 B1 KR101044385 B1 KR 101044385B1 KR 20040049354 A KR20040049354 A KR 20040049354A KR 20040049354 A KR20040049354 A KR 20040049354A KR 101044385 B1 KR101044385 B1 KR 101044385B1
- Authority
- KR
- South Korea
- Prior art keywords
- oxide film
- substrate
- trench
- forming
- gate electrode
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 35
- 239000004065 semiconductor Substances 0.000 title abstract description 18
- 238000004519 manufacturing process Methods 0.000 title abstract description 15
- 239000000758 substrate Substances 0.000 claims abstract description 33
- 150000004767 nitrides Chemical class 0.000 claims abstract description 23
- 229910021332 silicide Inorganic materials 0.000 claims abstract description 16
- 238000002955 isolation Methods 0.000 claims abstract description 15
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims abstract description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 9
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 9
- 239000010703 silicon Substances 0.000 claims abstract description 9
- 238000010438 heat treatment Methods 0.000 claims abstract description 7
- 238000005530 etching Methods 0.000 claims abstract description 6
- 150000002500 ions Chemical class 0.000 claims abstract description 3
- 230000008021 deposition Effects 0.000 claims description 3
- 125000006850 spacer group Chemical group 0.000 description 5
- 238000005468 ion implantation Methods 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 241000293849 Cordylanthus Species 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 210000003323 beak Anatomy 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910021341 titanium silicide Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7842—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Abstract
The present invention discloses a method of manufacturing a semiconductor device capable of preventing the occurrence of sub-defects and reducing the sheet resistance of the source / drain regions. The disclosed method comprises the steps of providing a silicon substrate having active and field regions defined therein; Sequentially forming a pad oxide film and a pad nitride film exposing the field region on the silicon substrate; Etching a field region of the exposed substrate to form a trench; Filling the trench by sequentially forming first and second oxide films having opposite stresses on the entire surface of the resultant substrate; Performing a rapid heat treatment process on the resultant; Forming a device isolation layer by CMPing the second and first oxide layers until the pad nitride layer is exposed; Removing the pad nitride film; Simultaneously removing the pad oxide layer and partially removing the device isolation layer to expose the upper sidewall of the trench; Forming a gate electrode on the active region of the substrate; Forming a source / drain region by implanting high concentration ions into the active side of the substrate and the exposed sidewalls of the trench using the gate electrode as a mask; And selectively forming a silicide layer on surfaces of the gate electrode and the source / drain regions.
Description
1A to 1E are cross-sectional views of processes for describing a method of manufacturing a semiconductor device according to the related art.
2A through 2E are cross-sectional views of processes for describing a method of manufacturing a semiconductor device, according to an embodiment of the present invention.
Explanation of symbols on main parts of drawing
40: silicon substrate 41: pad oxide film
42:
42a: patterned pad nitride film 43: trench
44: first oxide film 45: second oxide film
44a: remaining
46
48
50: LDD region 51: spacer
52 source /
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a semiconductor device having a class of 0.13 μm or less. The present invention relates to a method of manufacturing a semiconductor device for improving the characteristics of the device by reducing the sheet resistance of the source / drain regions by increasing the surface area of the silicide layer selectively formed on the surface of the source / drain regions.
As is well known, recent semiconductor devices use an STI process to form device isolation films for electrical separation between devices. This has the disadvantage of reducing the device formation area in connection with the conventional LOCOS device isolation film having a bird's-beak of the beak shape at the edge thereof, while the device by the STI process This is because the separator can be formed in a small width.
As the semiconductor device is highly integrated, the junction depth of the source / drain regions may be reduced in order to prevent short channel effects due to a decrease in the gate length of the transistor and to secure a margin for punch through. It is necessary to form a shallow junction depth while at the same time reducing the parasitic resistance of the source / drain regions, such as sheet resistance.
For this purpose, a salicide process for selectively forming a metal silicide layer on the surfaces of the gate and the source / drain regions becomes essential, and the silicide layer includes titanium-silicide, cobalt-silicide and tantalum-silicide. Etc. are available.
Hereinafter, a method of manufacturing a 0.13 μm or less semiconductor device using a conventional STI process and a salicide process will be described.
1A to 1E are cross-sectional views illustrating processes for manufacturing a semiconductor device according to the related art.
In the method of manufacturing a semiconductor device according to the related art, as shown in FIG. 1A, a
Subsequently, as illustrated in FIG. 1B, the pad nitride film and the pad oxide film are patterned to expose the field region of the
Subsequently, as shown in FIG. 1C, a high density plasma (HDP)
Then, as shown in FIG. 1D, the HDP oxide film is chemically mechanically polished (CMP) until the pad nitride film is exposed to form an
Subsequently, the
Next, as shown in FIG. 1E,
Thereafter, a salicide process is performed to reduce the sheet resistance of the
However, according to the conventional method of forming a device isolation layer using the STI process, the edge of the active region has a sharp shape after the trench formation. In such a structure, the etching stress and the trench generated during the trench etching are formed. The mechanical stress and the like in the deposition of HDP oxides for embedding are concentrated in the trench bottom corners, so that sub-defects such as dislocations occur at these sites. Sub-defects lead to deterioration of device characteristics, such as leakage current characteristics, as well as lower yields.
In addition, according to the related art, a silicide layer is selectively formed on the surface of the gate and the source / drain regions in order to reduce the resistance of the gate and the source / drain regions. There is a limit to the increase, which causes a problem of difficulty in reducing the resistance.
Accordingly, the present invention has been made to solve the above problems, by preventing the occurrence of sub-defects, it is possible to prevent the leakage current generation to improve the characteristics and yield of the device, the silicide of the surface of the source / drain region It is an object of the present invention to provide a method for manufacturing a semiconductor device capable of improving the characteristics of the device by reducing the sheet resistance of the source / drain regions by increasing the surface area of the layer.
According to an aspect of the present invention, there is provided a method of manufacturing a semiconductor device, the method including: providing a silicon substrate in which an active region and a field region are defined; Sequentially forming a pad oxide film and a pad nitride film exposing the field region on the silicon substrate; Etching a field region of the exposed substrate to form a trench; Filling the trench by sequentially forming first and second oxide films having opposite stresses on the entire surface of the resultant substrate; Performing a rapid heat treatment process on the resultant; Forming an isolation layer by CMPing the second and first oxide layers until the pad nitride layer is exposed; Removing the pad nitride film; Simultaneously removing the pad oxide layer and partially removing the device isolation layer to expose the upper sidewall of the trench; Forming a gate electrode on the active region of the substrate; Forming a source / drain region by implanting high concentration ions into the active side of the substrate and the exposed sidewalls of the trench using the gate electrode as a mask; And selectively forming a silicide layer on surfaces of the gate electrode and the source / drain regions.
Here, an HDP oxide film having a compressive stress is used as the first oxide film, and an HLD oxide film having a tensile stress is used as the second oxide film. The first oxide film is formed to a thickness of 3000 kPa, and the second oxide film is formed to a thickness of 3000 kPa. In addition, the rapid heat treatment process is carried out for 30 seconds using N2 at a temperature of 1000 ℃.
(Example)
Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.
2A through 2E are cross-sectional views of respective processes for describing a method of manufacturing a semiconductor device according to an embodiment of the present invention.
In the method of manufacturing a semiconductor device according to an embodiment of the present invention, as shown in FIG. 2A, a pad oxide film 41 is formed on a
Subsequently, as shown in FIG. 2B, the pad nitride film and the pad oxide film are patterned to expose the field region of the
Subsequently, as shown in FIG. 2C, the
On the other hand, when the
The resultant is then subjected to a rapid thermal process (RTP) process. At this time, the rapid heat treatment process is carried out for 30 seconds using N2 at a temperature of 1000 ℃. In this case, the rapid heat treatment process is performed to densify the
Then, as shown in FIG. 2D, the
Then, the pad nitride film is removed using a phosphoric acid solution. Subsequently, the pad oxide layer is removed using an HF solution, and the upper corner of the
Subsequently, a
Next, as shown in FIG. 2E, spacers 51 are formed on both side walls of the
Subsequently, a silicide process is performed to reduce the sheet resistance of the
As described above, the present invention double fills the trenches using the HDP oxide film having the compressive stress and the HLD oxide film having the tensile stress, thereby preventing the mechanical stress from being concentrated at the bottom corner of the trench, thereby reducing the sub- Defects can be prevented from occurring. Therefore, the present invention can improve the leakage current characteristic by the sub-defect to improve the characteristics and the yield of the device.
In addition, the present invention can partially increase the surface area of the silicide layer on the surface of the source / drain regions by removing part of the isolation layer so that the upper sidewall of the trench is exposed. Accordingly, the present invention can improve the characteristics of the device by reducing the sheet resistance of the source / drain region.
Claims (5)
Priority Applications (1)
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KR20040049354A KR101044385B1 (en) | 2004-06-29 | 2004-06-29 | Method for manufacturing semiconductor device |
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KR20040049354A KR101044385B1 (en) | 2004-06-29 | 2004-06-29 | Method for manufacturing semiconductor device |
Publications (2)
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KR20060000483A KR20060000483A (en) | 2006-01-06 |
KR101044385B1 true KR101044385B1 (en) | 2011-06-29 |
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Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007189110A (en) | 2006-01-13 | 2007-07-26 | Sharp Corp | Semiconductor device and manufacturing method therefor |
KR100827531B1 (en) * | 2006-07-24 | 2008-05-06 | 주식회사 하이닉스반도체 | Semiconductor device and method for fabricating the same |
JP2008028357A (en) | 2006-07-24 | 2008-02-07 | Hynix Semiconductor Inc | Semiconductor device and method for manufacturing the same |
CN113745110B (en) * | 2020-05-28 | 2024-01-23 | 北方集成电路技术创新中心(北京)有限公司 | Semiconductor structure and forming method thereof |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20010054167A (en) * | 1999-12-03 | 2001-07-02 | 박종섭 | method for manufacturing of semiconductor device |
KR20040037847A (en) * | 2002-10-30 | 2004-05-08 | 주식회사 하이닉스반도체 | Method for fabricating semiconductor device |
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- 2004-06-29 KR KR20040049354A patent/KR101044385B1/en active IP Right Grant
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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KR20010054167A (en) * | 1999-12-03 | 2001-07-02 | 박종섭 | method for manufacturing of semiconductor device |
KR20040037847A (en) * | 2002-10-30 | 2004-05-08 | 주식회사 하이닉스반도체 | Method for fabricating semiconductor device |
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