KR101030120B1 - Apparatus of coating a material on a substrate - Google Patents

Abstract

The present invention loads the substrate is loaded; A printing unit receiving the substrate from the loading unit and printing a predetermined layer on the substrate; An unloading unit receiving the substrate from the printing unit and unloading the substrate; And a transfer device for transferring the substrate, wherein the printing unit is provided with a first floating device for floating the substrate to print a predetermined layer in a state where the substrate is injured. As for the device,

According to the present invention, the printing process is performed in a state where the substrate is injured by providing the floating unit in the printing unit, even if the lower surface of the substrate is foreign matter does not protrude a predetermined portion of the substrate that is foreign matter during the printing process Accurate printing pattern can be formed and there is no problem of collision between substrate and printing nozzle.

Printing, wound

Description

Substrate printing apparatus {Apparatus of coating a material on a substrate}

The present invention relates to a substrate printing apparatus for printing a predetermined substance on a substrate, and more particularly to a substrate printing apparatus for printing a predetermined substance in a state where a substrate is floating.

The conventional substrate printing apparatus includes an electrostatic chuck and a printing nozzle, which is configured to seat a substrate on the electrostatic chuck and discharge a predetermined material from the printing nozzle, thereby printing the predetermined material on the substrate in a predetermined pattern. have.

However, such a conventional substrate printing apparatus has the following problems.

Foreign matter may be deposited on the lower surface of the substrate while the process is in progress. If the substrate is seated on the electrostatic chuck while the foreign material is on the lower surface of the substrate, a predetermined portion of the substrate on which the foreign matter is attached may protrude.

As such, when the printing process is performed while the predetermined portion of the substrate is protruded, an accurate printing pattern cannot be formed on the substrate, and the protruding portion of the substrate and the printing nozzle collide with each other, causing damage to the substrate and the printing nozzle. A problem arises.

The present invention has been devised to solve the conventional problems as described above, the present invention by printing a predetermined material in the state in which the substrate is floating, even if the foreign material on the lower surface of the substrate, even if the foreign matter in the printing process of the substrate It is an object of the present invention to provide a substrate printing apparatus in which a predetermined portion does not protrude so that accurate printing patterns can be formed and a problem in which a substrate and a printing nozzle collide with each other does not occur.

In order to achieve the above object, the present invention is a loading unit is loaded substrate; A printing unit receiving the substrate from the loading unit and printing a predetermined layer on the substrate; An unloading unit receiving the substrate from the printing unit and unloading the substrate; And a transfer device for transferring the substrate, wherein the printing unit is provided with a first floating device for floating the substrate to print a predetermined layer in a state where the substrate is injured. Provide a device.

The printing unit includes a printing nozzle for discharging a predetermined substance on a substrate, wherein the printing nozzle discharges the predetermined substance in a fixed state, and the substrate is connected to the printing unit in the loading unit by the transfer device. It may be configured to continuously move to the unloading portion via.

The first injury apparatus may include a pad having a first air discharge port for discharging air toward the substrate and a first air suction port for suctioning air from the substrate side, wherein the pad is the first air. It may be connected to a first body having a first pipe communicating with the inlet and a first buffer space communicating with the first air outlet.

The loading unit may include a second floating device for lifting a substrate and a first lift pin that moves up and down in contact with the substrate. In this case, the second injury apparatus has a first air outlet for releasing air toward the substrate, a second air inlet for sucking air from the substrate side, and a first guide groove for guiding air flow. It may include a plate, the first plate may be connected to a second body having a second pipe communicating with the second air inlet and a second buffer space communicating with the second air outlet.

The unloading part may include a third floating device for lifting a substrate and a second lift pin that moves up and down in contact with the substrate. In this case, the third injury device is provided with a third air outlet for releasing air toward the substrate, a third air inlet for sucking air from the substrate side, and a second guide groove for guiding the air flow. It may include a plate, and the second plate may be connected to a third body having a third pipe communicating with the third air inlet and a third buffer space communicating with the third air outlet.

The apparatus may further include a temperature controller for controlling the temperature of the air discharged from the first air outlet, the second air outlet, or the third air outlet.

The transfer device includes a holding part for fixing one side of the substrate, a driving part for allowing the holding part to move between the loading part, the printing part and the unloading part, and a connection part connecting the holding part and the driving part, In this case, the holding part may be provided with an adsorption hole for adsorbing and fixing one side of the substrate.

According to the present invention as described above has the following effects.

First, the floating unit is provided in the printing unit so that the printing process is performed in a state where the substrate is floating. Therefore, even if foreign substances are on the lower surface of the substrate, a predetermined portion of the substrate on which the foreign substances are buried is not protruded during the printing process, so that accurate printing patterns can be formed and the substrate and the printing nozzles do not occur.

Secondly, the flotation device has an air inlet for sucking air together with an air inlet for discharging air. Therefore, even when the air is discharged through the air inlet to injure the substrate, even if a relatively large flotation force is received at a specific portion of the substrate, the air is sucked by the air inlet at that portion to uniform the entire substrate. You can let them float.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a perspective view of a substrate printing apparatus according to an embodiment of the present invention, FIG. 2 is a plan view of a substrate printing apparatus according to an embodiment of the present invention, and FIG. 3 is a substrate printing apparatus according to an embodiment of the present invention. 4 is a side view of a substrate printing apparatus according to an embodiment of the present invention, FIG. 5 is a cross-sectional view of a first injury unit according to an embodiment of the present invention, and FIG. 6 is an embodiment of the present invention. A cross-sectional view of the second injury unit according to.

As can be seen in Figures 1 to 4, the substrate printing apparatus 1 according to an embodiment of the present invention, the loading unit 10, the printing unit 20, the unloading unit 30, the transfer device 40 It is made to include.

The loading unit 10 is where the substrate S carried by the robot arm is loaded onto the substrate printing apparatus 1, and the printing unit 20 transfers the substrate S from the loading unit 10. It is a place for printing a predetermined layer on the substrate (S), the unloading unit 30 receives the substrate (S), the printing process is completed from the printing unit 20 after receiving the substrate by the robot arm ( This is where S) is unloaded.

The printing unit 20 is provided with a first injury device 210, the loading unit 10 is provided with a second injury device 110, and the unloading unit 30 has a third injury device. 310 is provided. Therefore, the substrate S is loaded in the state of being injured by the second injuring apparatus 110 in the loading unit 10 and injured by the first injuring apparatus 210 in the printing unit 20. The printing process is performed in a state, and the unloading unit 30 is performed in an unloaded state by the third floating unit 310.

The first injury device 210 is formed by arranging a plurality of first injury units 210a including a plurality of pads 212 and a first body 214 connected to the plurality of pads 212. In the drawing, six first floating units 210a are formed, and the pads 212 constituting the first floating unit 210a are arranged in a 2 × 7 matrix, but the plurality of pads 212 are shown. Matrix array and the number of the first floating unit (210a) may be variously changed.

As shown in FIG. 5, the pad 212 includes a plurality of first air outlets 2122 for releasing air toward the substrate and a first air inlet 2124 for sucking air from the substrate side. The pad 212 including the plurality of first air discharge openings 2122 and the first air suction openings 2124 can be obtained by forming the first air suction openings 2124 in the porous pad. That is, when the pad is manufactured by compressing the fine carbon graphite particles, fine pores are formed between the carbon graphite particles to form a plurality of first air outlets 2122 due to such pores, and the predetermined pad of the pad is formed. The second air intake opening 2124 is formed by forming a hole in the region.

As shown in FIG. 5, the first body 214 includes a first buffer space 2142 and a first pipe 2144. The first buffer space 2142 includes the pad 212. In communication with the first air outlet 2122 of the first pipe 2144 is in communication with the first air inlet 2124 of the pad (212). In addition, the first buffer space 2142 of the first body 214 is connected to an air injection device (not shown), and the first pipe 2144 of the first body 214 is an air suction device (not shown). ).

Therefore, when the air injection device is operated, air is discharged through the first air outlet 2122 of the pad 212 via the first buffer space 2142 of the first body 214, and the air suction When the device is operated, the air sucked through the first air inlet 2124 of the pad 212 is sucked into the air suction device through the first pipe 2144 of the first body 214.

As the air is discharged through the first air outlet 2122, the substrate on the first floater 210 is floated. In addition, in some cases, when a device or the like is not uniformly distributed on the substrate, a relatively large floating force may be received at a specific portion of the substrate. In such a case, air is sucked through the first air suction opening 2124. It is to keep the flotation uniform.

On the other hand, the temperature control device for adjusting the temperature of the air discharged from the first air outlet 2122 of the pad 212 may be further configured, such a temperature control device of the first body 214 It may be configured in the first buffer space 2142, or may be configured in the air injection device.

The second injury device 110 is formed by arranging a plurality of second injury units 110a including a first plate 112 and a second body 114 connected to the first plate 112. In the drawing, three second injured units 110a are formed. However, the number of second injured units 110a may be variously changed.

As shown in FIG. 6, the first plate 112 includes a plurality of second air discharge ports 1122 for releasing air toward the substrate, a second air suction port 1124 for sucking air from the substrate side, and A first guide groove 1126 is provided to guide the air flow. The first plate 112 having the plurality of second air outlets 1122, the second air intakes 1124, and the first guide holes 1126 is formed on the porous plate by the second air intakes 1124 and the first. This can be obtained by forming the guide hole 1126. The first guide groove 1126 may be formed in a diagonal pattern on the upper surface of the first plate 112 (see FIGS. 1 and 2), but is not necessarily limited thereto.

As shown in FIG. 6, the second body 114 includes a second buffer space 1142 and a second pipe 1144. The second buffer space 1142 is formed by the first plate ( The second air outlet 1122 of 112 is in communication with the second pipe 1144 and the second air inlet 1124 of the first plate 112. In addition, the second buffer space 1142 of the second body 114 is connected to an air injection device (not shown), and the second pipe 1144 of the second body 114 is an air suction device (not shown). ).

Therefore, when the air injection device is operated, air is discharged through the second air outlet 1122 of the first plate 112 via the second buffer space 1142 of the second body 114, and When the air suction device is operated, the air sucked through the second air suction hole 1124 of the first plate 112 is sucked into the air suction device through the second pipe 1144 of the second body 114.

On the other hand, the temperature control device for adjusting the temperature of the air discharged from the second air discharge port 1122 of the first plate 112 may be further configured, such a temperature control device is the second body 114 It may be configured in the second buffer space (1142) of, or may be configured in the air injection device.

The third injury device 310 is formed by arranging a plurality of third injury units 310a including a second plate 312 and a third body 314 connected to the second plate 312.

The configuration of the third injury device 310 is the same as the configuration of the second injury device 210 described above. That is, the second plate 312 may include a plurality of third air outlets for discharging air toward the substrate, a third air inlet 3124 for sucking air from the substrate side, and a second guide groove for guiding air flow ( 3126, wherein the third air outlet is the same as the second air outlet 1122 described above, and the third air inlet 3124 is the same as the second air inlet 1124 described above, The guide groove 3126 is the same as the first guide groove 1126 described above. In addition, the third body 314 includes a third buffer space and a third pipe, wherein the third buffer space is the same as the second buffer space 1142 described above, and the third pipe is described above. It is the same as the 2nd piping 1144.

As shown in FIG. 4, the loading unit 10 further includes a first lift pin 120 formed between the first floating device 110. The first lift pin 120 is raised to the transport position of the substrate S carried by the robot arm to support the substrate S in contact with the bottom surface of the substrate S, and then the substrate S When the first lift pin 120 is lowered to some extent, the substrate is loaded in a floating state by the second injury device 110, and then the first lift pin ( 120 moves to a position lower than the floating position of the substrate S to release contact with the bottom surface of the substrate S. FIG.

As shown in FIG. 2, the unloading unit 30 further includes a second lift pin 320 formed between the third floating unit 310. The second lift pin 320 ascends to the position where the substrate S is lifted to come into contact with the bottom surface of the substrate S, and continues to ascend to the position where the substrate S can be carried by the robot arm. Raises it so that the substrate S can be unloaded by the robot arm.

As shown in FIG. 3, the printing unit 20 includes a printing nozzle 220 for discharging a predetermined material onto the substrate S. The printing nozzle 220 discharges a predetermined material in a fixed state. In the printing process of the printing unit 20, the substrate S is continuously moved from the loading unit 10 to the unloading unit 30 via the printing unit 20 by the transfer device 40. In this case, by discharging a predetermined amount of material from the printing nozzle 220 of the printing unit 20, the printing is performed in a predetermined pattern on the moving substrate (S).

The transfer device 40 serves to transfer the substrate S from the loading unit 10 to the printing unit 20 and from the printing unit 20 to the unloading unit 30.

The transfer device 40 includes a holding part 410, a driving part 420, and a connection part 430. The holding part 410 serves to fix one side of the substrate S. In particular, the holding part 410 may be provided with an adsorption hole to fix and fix one side of the substrate S. The driving unit 420 may move between the loading unit 10, the printing unit 20, and the unloading unit 30 while the holding unit 410 holds the substrate S. It may be made of a driving device such as a motor. The connecting part 430 connects the holding part 410 and the driving part 420, and the connecting part 430 includes an LM block 432 so that the LM guide 434 is operated by the operation of the driving part 420. You can move along.

Referring to the operation of the substrate printing apparatus 1 according to the present invention as follows.

First, the substrate S carried by the robot arm is loaded into the loading unit 10.

The loading process of the substrate S will be described in detail. When the robot arm enters the loading unit 10 while holding the substrate S, the first lift pin 120 is raised to lower the surface of the substrate S. In contact with the robot arm, the robot arm releases the holding of the substrate S and moves out of the loading unit 10, and then the first lift pin 120 descends while supporting the substrate S. At this time, when the first lift pin 120 is lowered to some extent, the substrate S is floated by the second floating device 110, and the substrate S is held by the holding unit 410 of the transfer device 40. do. After that, the first lift pin 120 is continuously lowered to release the contact with the lower surface of the substrate S.

Next, the substrate S is transferred from the loading unit 10 to the printing unit 20 by the transfer device 40, and the printing unit 20 performs a printing process on the substrate S in a predetermined pattern. do.

In the process of transferring the substrate S from the loading unit 10 to the printing unit 20, the holding unit 410 is operated by the driving unit 420 while the holding unit 410 holds the substrate S. 410 is moved to the printing unit 20, in which the second floating unit 110 is operated in the loading unit 10 to injure the substrate S, and in the printing unit 20, The 1 floating device 210 is operated to float the substrate (S).

In the process of printing a predetermined pattern on the substrate S, a predetermined material is discharged from the printing nozzle 220, and the driving unit 420 of the driving unit 420 is held by the holding unit 410 holding the substrate S. By operation, the holding unit 410 is moved in the printing unit 20. At this time, the substrate (S) is moved in the printing unit 20 in a state of being injured by the first injury device (210).

Next, the substrate S, from which the printing process is completed, is transferred from the printing unit 20 to the unloading unit 30 and then unloaded.

The process of transferring the substrate S from the printing unit 20 to the unloading unit 30 may be performed by the operation of the driving unit 420 while the holding unit 410 holds the substrate S. The part 410 is moved to the unloading part 30. In this case, in the printing part 20, the second floating device 110 is operated to raise the substrate S, and the unloading part 30 is performed. In FIG. 3, the third injury device 310 is operated to raise the substrate S.

In the process of unloading the substrate S, the holding part 410 releases the holding state of the substrate S, and then the second lift pin 320 is raised to contact the bottom surface of the substrate S. In this state, the substrate S is raised to the transport position by the robot arm, and then the robot arm holds the substrate S and then transports the substrate S out of the unloading part 30.

1 is a perspective view of a substrate printing apparatus according to an embodiment of the present invention.

2 is a plan view of a substrate printing apparatus according to an embodiment of the present invention.

3 is a front view of a substrate printing apparatus according to an embodiment of the present invention.

4 is a side view of the substrate printing apparatus according to the embodiment of the present invention.

5 is a cross-sectional view of the first injury unit according to an embodiment of the present invention.

6 is a cross-sectional view of the second injury unit according to an embodiment of the present invention.

DESCRIPTION OF THE REFERENCE NUMERALS OF THE DRAWINGS FIG.

10: loading unit 20: printing unit

30: unloading part 40: transfer part

110: second floating device 120: first lift pin

210: first injury device 310: third injury device

320: second lift pin

Claims (12)

A loading unit in which a substrate is loaded; A printing unit receiving the substrate from the loading unit and printing a predetermined layer on the substrate; An unloading unit receiving the substrate from the printing unit and unloading the substrate; And It includes a transfer device for transporting the substrate, At this time, the printing unit is provided with a first floating device for floating the substrate to print a predetermined layer in the state where the substrate is floating, The loading unit includes a second lifting device for lifting the substrate and a first lift pin for lifting in contact with the substrate, The second floatation apparatus includes a first plate having a second air outlet for releasing air toward the substrate, a second air inlet for sucking air from the substrate side, and a first guide groove for guiding air flow. Substrate printing apparatus, characterized in that made. The method of claim 1, The printing unit includes a printing nozzle, wherein the printing nozzle is fixed, and the substrate is configured to continuously move from the loading unit to the unloading unit via the printing unit by the transfer device. Board printing apparatus. The method of claim 1, And the first injury device comprises a pad having a first air outlet for discharging air toward the substrate and a first air inlet for sucking air from the substrate side. The method of claim 3, And the pad is connected to a first body having a first pipe communicating with the first air inlet and a first buffer space communicating with the first air outlet. delete delete The method of claim 1, And the first plate is connected to a second body having a second pipe communicating with the second air inlet and a second buffer space communicating with the second air outlet. The method of claim 1, And the unloading part comprises a third floating device for lifting the substrate and a second lift pin that moves up and down in contact with the substrate. The method of claim 8, The third flotation apparatus includes a second plate having a third air outlet for releasing air toward the substrate, a third air inlet for sucking air from the substrate, and a second guide groove for guiding air flow. Substrate printing apparatus comprising a. 10. The method of claim 9, And the second plate is connected to a third body having a third pipe communicating with the third air inlet and a third buffer space communicating with the third air outlet. The method of claim 1, And a temperature controller for controlling the temperature of the air discharged from the second air discharge port. The method of claim 1, The transfer device includes a holding part for fixing one side of the substrate, a driving part for allowing the holding part to move between the loading part, the printing part and the unloading part, and a connection part connecting the holding part and the driving part, In this case, the holding unit is a substrate printing apparatus, characterized in that provided with a suction hole that can be fixed to the suction side of the substrate.

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