KR101008678B1 - Unit for collecting liquid and apparatus for treating substrate with the same - Google Patents

Abstract

The present invention discloses a recovery unit and a substrate processing apparatus having the same, in which the treatment liquid and the airflow flow into only one recovery container used for the process progress among the recovery containers to improve the exhaust efficiency, and the conventional multi-stage recovery. Compared with the cylinders, it is possible to provide a recovery unit and a substrate processing apparatus having the same, which are capable of improving the recovery capability of the treatment liquid scattered by raising the lift position of the recovery containers.

Cleaning, Recovery Bin, Acid Alkali Separation, Cam

Description

Recovery unit and substrate processing apparatus having the same {UNIT FOR COLLECTING LIQUID AND APPARATUS FOR TREATING SUBSTRATE WITH THE SAME}

The present invention relates to an apparatus for processing a substrate, and more particularly, to an apparatus for cleaning, rinsing, and drying a semiconductor substrate in a sheet type.

In semiconductor device manufacture, microfabrication is performed on the premise that the entire surface of the substrate (semiconductor substrate, LCD substrate, etc.) is in a cleaned state. Therefore, a cleaning process is essentially accompanied by removing contaminants present on the substrate surface prior to or between each processing.

The apparatus for performing the cleaning process is divided into a batch type cleaning apparatus for simultaneously cleaning a plurality of substrates, and a sheet type cleaning apparatus for cleaning substrates in sheets. Among them, the single wafer cleaning apparatus includes a nozzle member having a support member for supporting a sheet of substrate and a nozzle for supplying processing fluids to a substrate processing surface. When the process of the single wafer cleaning apparatus is started, the substrate is seated on the support member, and the nozzle portion is sequentially sprayed with the cleaning liquid, the rinse liquid and the drying gas to clean, rinse and dry the substrate.

The present invention aims to provide a recovery unit capable of improving the exhaust efficiency and separating and exhausting the acidic / alkaline airflow, and a substrate processing apparatus having the same.

The objects of the present invention are not limited thereto, and other objects not mentioned can be clearly understood by those skilled in the art from the following description.

In order to achieve the above object, a recovery unit according to the present invention comprises: a recovery unit for recovering a processing liquid used for substrate processing, comprising: a plurality of recovery containers provided in annular ring shapes having the same center; And a recovery bin lifting unit for lifting up and down the recovery bins, wherein the recovery bin lifting unit is provided in ring shapes having the same center as the centers of the recovery bins, and projections protruding from the recovery bins are inserted. Lifting plates having cams formed thereon; And a drive member for rotating the lifting plates so that the protrusion moves along the cam.

In the recovery unit according to the present invention having the configuration as described above, each of the cams is a first curved portion extending horizontally along the circumferential direction of the elevating plate, the inclined extending obliquely from the end of the first curved portion And a second curved portion extending horizontally from the end of the inclined portion, the cams may have a phase difference along the circumferential direction of the elevating plates.

The first curved portions may be provided at the same height on the lifting plates, the second curved portions may be provided at the same height on the lifting plates, and the inclined portions may be provided at the same slopes on the lifting plates. .

A drain member disposed under the collection vessels and configured to drain the treatment liquid recovered to the collection vessels, wherein the drain member comprises: a toric shaped first lower wall; Inner and outer walls extending upward from inner and outer edges of the first lower wall; A plurality of protrusions protruding from an upper surface of the lower wall to form a concave shaped space corresponding to the inner space of the recovery containers; And drain pipes connected to the lower wall to communicate with the concave-shaped space.

An exhaust separation member for switching a flow direction of the airflow discharged through the exhaust holes formed in the inner wall; And a rotation driving member for rotating the exhaust separating member, wherein the exhaust separating member is provided in a ring shape facing the inner wall of the drain member and has a plurality of first holes formed therein; A second lower wall extending toward a center from a lower end of the side wall and having second holes formed at positions corresponding to the first hole of any one of the neighboring first holes; And an induction wall extending upward from a boundary of the second holes on the lower wall to guide the airflow flowing through the first holes to the second holes.

The exhaust separation member further includes an upper wall extending from an upper end of the side wall toward the center and having a serrated first tooth formed on an inner circumferential surface thereof, wherein the rotation driving member comprises: a drive motor; It may include a rotary plate connected to the rotary shaft of the drive motor, the second plate is formed on the circumferential surface to engage the first tooth.

A first exhaust pipe disposed under the exhaust separation member and provided to allow the airflow guided by the guide wall of the exhaust separation member to flow in; And a second exhaust pipe provided to allow the airflow flowing through the first holes of the sidewall to which the guide wall is not provided.

A first cleaning liquid nozzle installed in the first exhaust cylinder and injecting a cleaning liquid into the first exhaust cylinder; And a second cleaning liquid nozzle installed in the second exhaust cylinder and injecting a cleaning liquid into the second exhaust cylinder.

In order to achieve the above object, a substrate processing apparatus according to the present invention includes a substrate support member on which a substrate is placed; A processing fluid supply member for supplying a processing fluid to the substrate placed on the substrate support member; Recovery containers provided in annular ring shapes surrounding the substrate support member and recovering the processing fluid supplied from the processing fluid supply member to the substrate; And a recovery bin lifting unit for lifting up and down the recovery bins, wherein the recovery bin lifting unit is provided in ring shapes having the same center as the centers of the recovery bins, and projections protruding from the recovery bins are inserted. Lifting plates having cams formed thereon; And a drive member for rotating the lifting plates so that the protrusion moves along the cam.

In the substrate processing apparatus according to the present invention having the configuration as described above, each of the cams extends horizontally along the circumferential direction of the elevating plate and obliquely extending from the end of the first curved portion. The inclined portion and the second curved portion extending horizontally from the end of the inclined portion, the cams may have a phase difference along the circumferential direction of the lifting plate.

A drain member disposed under the collection vessels and configured to drain the treatment liquid recovered to the collection vessels, wherein the drain member comprises: a toric shaped first lower wall; Inner and outer walls extending upward from inner and outer edges of the first lower wall; A plurality of protrusions protruding from an upper surface of the lower wall to form a concave shaped space corresponding to the inner space of the recovery containers; And drain pipes connected to the lower wall to communicate with the concave-shaped space.

An exhaust separation member for switching a flow direction of the airflow discharged through the exhaust holes formed in the inner wall; And a rotation driving member for rotating the exhaust separating member, wherein the exhaust separating member is provided in a ring shape facing the inner wall of the drain member and has a plurality of first holes formed therein; A second lower wall extending toward a center from a lower end of the side wall and having second holes formed at positions corresponding to the first hole of any one of the neighboring first holes; And an induction wall extending upward from a boundary of the second holes on the lower wall to guide the airflow flowing through the first holes to the second holes.

The exhaust separation member further includes an upper wall extending from an upper end of the side wall toward the center and having a serrated first tooth formed on an inner circumferential surface thereof, wherein the rotation driving member comprises: a drive motor; It may include a rotary plate connected to the rotary shaft of the drive motor, the second plate is formed on the circumferential surface to engage the first tooth.

A first exhaust pipe disposed under the exhaust separation member and provided to allow the airflow guided by the guide wall of the exhaust separation member to flow in; And a second exhaust cylinder through which air flows flowing through the first holes of the side wall, into which the induction wall is not provided, is introduced and provided.

A first cleaning liquid nozzle installed in the first exhaust cylinder and injecting a cleaning liquid into the first exhaust cylinder; And a second cleaning liquid nozzle installed in the second exhaust cylinder and injecting a cleaning liquid into the second exhaust cylinder.

According to the present invention, since the treatment liquid and the airflow flow into only one recovery container used in the process, it is possible to improve the exhaust efficiency.

According to the present invention, the acidic air stream and the alkaline air stream can be separated and exhausted.

In addition, according to the present invention, it is possible to increase the lifting position of the recovery bins as compared with the conventional multi-stage recovery bins, thereby improving the recovery capacity of the treatment liquid scattered.

In addition, according to the present invention, even if salts are generated by the acid / alkali reaction in the exhaust cylinder, the exhaust cylinder can be cleaned using the cleaning liquid nozzle.

In addition, according to the present invention, it is possible to improve the space utilization in the process chamber.

Hereinafter, a recovery unit and a substrate processing apparatus having the same according to a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings. First, in adding reference numerals to the components of each drawing, it should be noted that the same reference numerals are assigned to the same components as much as possible, even if shown on different drawings. In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear.

(Example)

1 is a view showing the configuration of a single wafer cleaning equipment according to the present invention.

Referring to FIG. 1, the sheet type substrate cleaning apparatus according to the present invention is for cleaning the back surface of a substrate, and includes a loading / unloading unit 1, a carrier transfer unit 2, a carrier table 3, and a substrate transfer unit ( 4) and the cleaning processing unit 5.

The loading / unloading portion 1 has an in / out port 1-1 on which a carrier C on which substrates are accommodated is placed. The carrier transfer part 2 is arranged adjacent to the loading / unloading part 1, and the substrate transfer part 4 is arranged at the center of the other side of the carrier transfer part 2. The substrate transfer part 4 has a passage 4-1 for moving the transfer robot 4-3 formed in the direction perpendicular to the carrier transfer part 2. Inside the passage 4-1, a transfer guide 4-2 is provided along the longitudinal direction of the passage 4-1, and the transfer robot 4-3 is guided by the transfer guide 4-2. It moves along the longitudinal direction of the passage 4-1. The carrier table 3 and the washing | cleaning process part 5 are arrange | positioned at the both sides of the passage 4-1, respectively. The cleaning processor 5 has a plurality of process chambers 5a, 5b, 5c, and 5d arranged side by side on both sides of the passage 410 of the substrate transfer part 4. The substrate transfer unit 4, the carrier table 3, and the cleaning processing unit 5 may be arranged in a multilayer structure of an upper layer and a lower layer, and the carrier transfer unit 2 may also have a multilayer structure so as to correspond to the carrier table 3 having a multilayer structure. Can have In addition, a fan filter unit (not shown) for supplying clean air may be provided on the carrier transfer part 2, the carrier table 3, the substrate transfer part 4, and the cleaning processor 5, respectively. have.

The carrier C placed in the in / out port 1-1 of the loading / unloading portion 1 is transferred to the carrier table 3 by the carrier transfer portion 2. The transfer robot 4-3 of the substrate transfer part 4 transfers the substrate to be cleaned from the carrier C placed on the carrier table 3 to the process chambers 5a, 5b, 5c, 5d of the cleaning process part 5. In the process chambers 5a, 5b, 5c, and 5d, the substrate is cleaned. The substrate cleaned by the cleaning processor 5 is transferred to the carrier C on the carrier table 3 by the transfer robot 4-3, and the carrier C containing the cleaned substrates is a carrier carrier 2. ) Into the in / out port 1-1 of the loading / unloading section 1.

FIG. 2 is a view illustrating an internal configuration of the process chamber of FIG. 1.

Referring to FIG. 2, a substrate supporting member 10, a container 20, and substrate cleaning means 30, 40, and 50 are provided inside the process chamber. The substrate support member 10 supports the substrate W during the cleaning process of the substrate and may be rotated while the process is in progress. The substrate support member 10 is accommodated in the vessel 20. The first processing fluid supply member 30, the second processing fluid supply member 40, and the ultrasonic cleaning member 50 are disposed around the vessel 20.

The first processing fluid supply member 30 linearly reciprocates in a scan manner and supplies the processing liquid onto the substrate. As the treatment liquid, an acid treatment liquid and an alkaline treatment liquid can be used.

The second processing fluid supply member 40 rotates in a boom swing manner and supplies rinse liquid or dry gas onto the substrate. Ultra rinse water (DIW) may be used as the rinse liquid. Isopropyl alcohol gas (IPA) may be used as the drying gas.

The ultrasonic cleaning member 50 applies ultrasonic vibration to the processing liquid supplied on the substrate W. As shown in FIG. Ultrasonic vibration applied to the treatment liquid promotes the chemical reaction of the treatment liquid and the contaminants on the substrate W to improve the removal efficiency of the contaminants on the substrate W.

3 is a perspective view of a longitudinally cut container showing the interior of the processing container of FIG. 2, and FIG. 4 is a cross-sectional view of a longitudinally cut container showing the interior of the processing container of FIG. 2.

3 and 4, the substrate support member 10 is housed in a vessel 20. The substrate support member 10 includes a spin head 12, a rotation shaft 14, and a rotation driver 16. The spin head 12 has a disk shape, and its upper surface faces the substrate W. As shown in FIG. The spin head 12 is provided with a plurality of fin members 13a and 13b spaced apart from and supported by the upper surface of the spin head 12. The support pin 13a supports the lower surface of the substrate W, and the chucking pin 13b supports the side surface of the substrate. The rotating shaft 14 is coupled to the lower surface of the spin head 12. The axis of rotation 14 projects out of the vessel 20 through an opening formed in the bottom surface of the vessel 20. The rotary shaft 14 is coupled to the rotary drive unit 16 and rotates about the magnetic center axis by the rotational force of the rotary drive unit 16. The rotational force of the rotating shaft 14 is transmitted to the spin head 12 to rotate the spin head 12, thereby rotating the substrate W fixed to the spin head 12.

The vessel 20 has a structure capable of separating and recovering the treatment liquids used in the process. This makes it possible to reuse the treatment liquids. The vessel 20 has a plurality of recovery containers 220, 240, 260, an inner wall 210 and an outer wall 270. Each recovery container 220, 240, and 260 separates and recovers different types of treatment liquids, that is, acid treatment liquids and alkaline treatment liquids, from among the treatment liquids used in the process. In this embodiment, the vessel 20 has three recovery bins. Each recovery container is referred to as an internal recovery container 220, an intermediate recovery container 240, and an external recovery container 260.

The inner wall 210 is provided in an annular ring shape surrounding the spin head 12. The inner recovery container 220 is provided in an annular ring shape surrounding the inner wall 210, and the intermediate recovery container 240 is provided in an annular ring shape surrounding the inner recovery container 220, and the outer recovery container 260 is provided. Is provided in an annular ring shape surrounding the intermediate recovery container 240. The outer wall 270 is provided in an annular ring shape surrounding the outer recovery container 260.

As shown in FIG. 5, the inner recovery container 220 has an outer wall 222, a bottom wall 224, an inner wall 226, and a guide wall 228. Each of the outer wall 222, the bottom wall 224, the inner wall 226, and the guide wall 228 has a ring shape. The outer wall 222 has an inclined wall 222a inclined downward in a direction away from the spin head 40 and a vertical wall 222b extending vertically downward from its lower end.

The inner wall 210 has an inclined wall 212 and a vertical wall 214. Each of the inclined wall 212 and the vertical wall 214 has a ring shape. The inclined wall 212 is inclined downward in a direction away from the spin head 12. The top of the inclined wall 212 extends to a position adjacent to the side of the spin head 12. The vertical wall 214 extends vertically downward from the bottom of the inclined wall 212.

The internal recovery container 220 has an inclined wall 222 and a vertical wall 224. The inclined wall 222 and the vertical wall 224 of the inner recovery container 220 have a shape that is generally similar to the inclined wall 212 and the vertical wall 214 of the inner wall 210, but the inner recovery container 220 has an inner wall. It has a larger size than the inner wall 210 to surround 210. A space 221 is formed between the inner recovery container 220 and the inner wall 210 in which the processing liquid recovered to the internal recovery container 220 flows. The upper end of the inclined wall 222 of the inner recovery container 220 is positioned above the inclined wall 212 of the inner wall 210, and the inclined wall of the inclined wall 222 of the inner recovery container 220 and the inner wall 210. The top surfaces of the walls 212 may contact each other.

The intermediate recovery container 240 has an inclined wall 242 and a vertical wall 244. The inclined wall 242 and the vertical wall 244 of the intermediate recovery container 240 have a shape that is generally similar to the inclined wall 222 and the vertical wall 224 of the internal recovery container 220, but the intermediate recovery container 240 is used. It has a larger size than the internal recovery container 220 to surround the internal recovery container 220. Between the intermediate recovery container 240 and the internal recovery container 220, a space 241 through which the processing liquid recovered to the intermediate recovery container 240 flows is formed. An upper end of the inclined wall 242 of the intermediate recovery container 240 is positioned above the upper end of the inclined wall 222 of the internal recovery container 220, and a lower surface of the inclined wall 242 of the intermediate recovery container 240 and the internal recovery container ( The top surfaces of the inclined walls 222 of 220 may contact each other.

The outer recovery container 260 has an inclined wall 262 and a vertical wall 264. The inclined wall 262 and the vertical wall 264 of the outer recovery container 260 have a shape substantially similar to the inclined wall 242 and the vertical wall 244 of the intermediate recovery container 240, but the outer recovery container 260 It has a larger size than the intermediate recovery container 240 so as to surround the intermediate recovery container 240. A space 261 is formed between the external recovery container 260 and the intermediate recovery container 240 through which the processing liquid recovered to the external recovery container 260 flows. The upper end of the inclined wall 262 of the outer recovery container 260 is located above the top of the inclined wall 242 of the intermediate recovery container 240, and the lower surface of the inclined wall 262 of the outer recovery container 260 and the intermediate recovery container ( Top surfaces of the inclined wall 242 of the 240 may contact each other.

The outer wall 270 may be provided as a ring-shaped vertical wall surrounding the outer recovery container 260. The outer wall 270 has a larger size than the outer container 260 to surround the outer container 260.

The recovery container lifting unit 300 moves the recovery containers 220, 240, and 260 in the vertical direction as the processing process proceeds. The recovery container lifting unit 300 includes a first lifting plate 320, a second lifting plate 340, a third lifting plate 360, a driving plate 370, and a driving member 380.

The first lifting plate 320 is provided as a ring-shaped vertical wall surrounding the inner recovery container 220, the second lifting plate 340 is provided as a ring-shaped vertical wall surrounding the intermediate recovery container 240, The third lifting plate 360 is provided as a ring-shaped vertical wall surrounding the outer recovery container 260. Lower ends of the first to third lifting plates 320, 340, and 360 are connected to the driving plate 370.

The driving plate 370 is provided in a ring shape having a cross-section of the letter 'c'. The drive plate 370 has an upper wall 372, a side wall 374, and a lower wall 376. The upper wall 372 is provided in the horizontal direction, and lower ends of the first to third lifting plates 320, 340, and 360 are connected to the upper wall 372. An opening 372a is formed in the upper wall 372 between the first elevating plate 320 and the second elevating plate 340, and an upper wall between the second elevating plate 340 and the third elevating plate 360. An opening 372b is formed in 372. Sidewall 374 extends downwardly vertically from the edge of top wall 372. The lower wall 376 extends from the lower end of the side wall 374 toward the spin head 12, and a sawtooth tooth 378 is formed at an end (inner peripheral surface) of the lower wall 376.

The driving member 380 rotates the driving plate 370, and the first to third lifting plates 320, 340, and 360 rotate by the rotation of the driving plate 370. The drive member 380 has a drive motor 382, a rotating shaft 384, and a rotating plate 386. One end of the rotating shaft 384 is connected to the drive motor 382, and the other end of the rotating shaft 384 is connected to the rotating plate 386. The rotating plate 386 is provided in a horizontal direction parallel to the lower wall 376 of the driving plate 370, and the toothed tooth 386a is formed on the circumferential surface of the rotating plate 386. Teeth 386a of turntable 386 engage teeth 378 of lower wall 376 of drive plate 370.

Low friction guide members 272a, 272b, and 272c may be installed between the side wall 374 of the driving plate 370 and the lower wall 376 and the outer wall 270. The low friction guide members 272a, 272b and 272c have a structure similar to a kind of bearing. Semicircular grooves (not shown) are formed in the driving plate 370 and the outer wall 270, and ball-shaped low friction guide members 272a, 272b, and 272c are inserted into the grooves (not shown). The low friction guide members 272a, 272b, and 272c reduce friction between the driving plate 370 and the outer wall 270 when the driving plate 370 rotates.

As shown in FIGS. 6 and 7, a first cam 322 is formed on the first lifting plate 320, a second cam 342 is formed on the second lifting plate 340, and a third lifting The third cam 362 is formed on the steel plate 36. The cams 322, 342 and 362 may be formed in the form of long holes. Each lifting plate 320, 340, 360 may be formed with one or more cams 322, 342, 362.

The first cam 322 has a first curved portion 322a, an inclined portion 322b, and a second curved portion 322c. The first curved portion 322a is elongated in the horizontal direction at a position adjacent to the lower end of the first elevating plate 320. The inclined portion 322b extends upwardly inclined from the end of the first curved portion 322a to a position adjacent to the upper end of the first elevating plate 320. The second curved portion 322c extends in the horizontal direction from the end of the inclined portion 322b.

The second cam 342 is formed on the second lifting plate 340. The second cam 3420 has a first curved portion 342a, an inclined portion 342b, and a second curved portion 342c. The first curved portion 342a and the inclined portion 342b of the second cam 342. And the second curved portion 342c have a shape similar to the first curved portion 322a, the inclined portion 322b, and the second curved portion 322c of the first cam 322. However, the second cam portion 342c has a shape similar to that of the second cam portion 322c. The first curved portion 342a of 342 is formed to have a length shorter than the first curved portion 322a of the first cam 322, and the second curved portion 342c of the second cam 342 is It is formed to have a longer length than the second curved portion 322c of the first cam 322.

The third cam 362 is formed on the third elevating plate 360. The third cam 362 has a first curved portion 362a, an inclined portion 362b, and a second curved portion 362c. The first curved portion 362a, the inclined portion 362b, and the second curved portion 362c of the third cam 362 are the first curved portion 342a and the inclined portion 342b of the second cam 342. And, it has a shape similar to the second curved portion 342c. However, the first curved portion 362a of the third cam 362 is formed to have a length shorter than the first curved portion 342a of the second cam 342, and the second curved portion of the third cam 362 is provided. 362c is formed to have a length longer than the second curved portion 342c of the second cam 342.

The first curved portions 322a, 342a, 362a of the first to third cams 322, 342, 362 are provided at the same height on the first to third lifting plates 320, 340, 360. The starting positions of the first curved portions 322a, 342a and 362a are located on imaginary extension lines facing outward from the centers of the first to third lifting plates 320, 340 and 360. The second curved portions 322c, 342c and 362c are provided at the same height on the first to third lifting plates 320, 340 and 360, and the end positions of the second curved portions 322c, 342c and 362c are first to third raised. Located on the imaginary extension line facing outward from the center of the steel plate (320, 340, 360).

Referring back to FIG. 5, the first protrusion 226 protrudes from the lower end of the vertical wall 224 of the inner recovery container 220. The first protrusion 226 protrudes at a height corresponding to the first curved portion 322a of the first cam 322 formed on the first lifting plate 320. The first protrusion 226 is inserted into the first curved portion 322a of the first cam 322, and in the initial state, the first protrusion 226 is located at the start position of the first curved portion 322a.

The second protrusion 246 protrudes from the lower end of the vertical wall 244 of the intermediate recovery container 240. The second protrusion 246 protrudes at a height corresponding to the first curved portion 342a of the second cam 342 formed on the second lifting plate 340. The second protrusion 246 is inserted into the first curved portion 342a of the second cam 342, and in the initial state, the second protrusion 246 is positioned at the start position of the first curved portion 342a.

The third protrusion 266 protrudes from the lower end of the vertical wall 264 of the outer recovery container 260. The third protrusion 266 protrudes at a height corresponding to the first curved portion 362a of the third cam 362 formed on the third lifting plate 360. The third protrusion 266 is inserted into the first curved portion 362a of the third cam 362, and in the initial state, the third protrusion 266 is positioned at the start position of the first curved portion 362a.

When the driving plate 370 is rotated by the driving member 380, the first to third lifting plates 320, 340, and 360 connected to the driving plate 370 rotate. As the first to third lifting plates 320, 340, 360 rotate, the first to third protrusions 226, 246, 266 move along the cams 322, 342, 362 of the first to third lifting plates 320, 340, 360, thereby recovering the containers. 220, 240, and 260 move in the vertical direction.

As shown in FIG. 7, when the protrusions 226, 246, and 266 are positioned at the initial positions of the first curved portions 322a, 342a, and 362a, when the first to third lifting plates 320, 340, and 360 rotate, the protrusions ( 226, 246, and 266 move along the first curved portions 322a, 342a, and 362a.

When the first to third lifting plates 320, 340, and 360 continue to rotate, the third protrusion 266 moves along the inclined portion 362b, and the first and second protrusions 226 and 246 move the first curved portions 322a and 342a. Move along When the third protrusion 266 moves upward along the inclined portion 362b, the external recovery container 260 on which the third protrusion 266 is formed moves up and down.

When the first to third lifting plates 320, 340, and 360 continue to rotate, the third protrusion 266 moves along the second curved portion 362c, and the second protrusion 246 moves along the inclined portion 342b. The first protrusion 226 moves along the first curved portion 322a. When the second protrusion 246 moves upward along the inclined portion 342b, the intermediate recovery container 240 in which the second protrusion 266 is formed is lifted. At this time, since the third protrusion 266 moves along the second curved portion 362c, the external recovery container 260 maintains the elevated position, and the first protrusion 226 is along the first curved portion 322a. Since the inner recovery container 220 maintains a position that is not elevated.

If the first to third lifting plates 320, 340, and 360 continue to rotate, the second and third protrusions 246 and 266 move along the second curved portions 342c and 362c, and the first protrusions 226 are inclined portions 322b. Move along When the first protrusion 226 moves upward along the inclined portion 322b, the inner recovery container 220 in which the first protrusion 226 is formed moves up and down. In this case, since the second and third protrusions 246 and 266 move along the second curved portions 342c and 362c, the external recovery container 260 and the intermediate recovery container 240 maintain their elevated positions.

When the first to third lifting plates 320, 340, and 360 rotate in the opposite directions to the above directions, the inner recovery container 220, the intermediate recovery container 240, and the external recovery container 260 are moved to the lowered positions sequentially. do.

Referring to FIG. 8, a drain member 280 is provided below the upper wall 372 of the driving plate 370. The drain member 280 has a structure in which the upper portion is open. The drain member 280 includes a lower wall 282 and sidewalls 284 and 286 extending vertically upwardly from the inner and outer ends of the lower wall 282. Side walls 284 and 286 have an annular ring shape.

First and second protrusions 282a and 282b protrude from the upper surface of the lower wall 282. The first protrusion 282a is formed at a position corresponding to the internal recovery container 220 and the first lifting plate 320, and the second protrusion 282b is the intermediate recovery container 240 and the second lifting plate 340. Is formed at a position corresponding to the.

A first space 283a is formed between the inner wall 284 and the first protrusion 282a, and the first space 283a is formed between the inner wall 210 of the container 20 and the inner recovery container 220. Corresponds to the space. A first drain pipe (No. 290a in FIG. 3) is connected to the lower wall 282 so as to communicate with the first space 283a.

A second space 283b is formed between the first protrusion 282a and the second protrusion 282b, and the second space 283b includes an internal recovery container 220 and an intermediate recovery container 240 of the container 20. Corresponds to the space between). A second drain pipe (No. 290b in FIG. 3) is connected to the lower wall 282 so as to communicate with the second space 283b.

A third space 283c is formed between the second protrusion 282b and the outer wall 286, and the third space 283c is formed between the intermediate recovery container 240 and the external recovery container 260 of the container 20. Corresponds to the space. A third drain pipe (No. 290c in FIG. 3) is connected to the lower wall 282 so as to communicate with the third space 283c. An exhaust space 285 communicating with the first to third spaces 283a, 283b, and 283c is formed on the first and second protrusions 282a and 282b.

An exhaust hole 284a is formed in the inner wall 284 of the drain member 280. The exhaust hole 284a is formed to correspond to the holes 415a and 415b formed in the exhaust separation member 410 of the exhaust unit 400 which will be described later.

The exhaust unit 400 includes an exhaust separation member 410, a driving member 420, a first exhaust cylinder 430, and a second exhaust cylinder 440. The exhaust separating member 410 is provided in a ring shape of the letter 'C' cross section having an upper wall 412, a side wall 414 and a lower wall 416, as shown in FIGS. 9 and 10. The upper wall 412 is provided in the horizontal direction, and a toothed tooth 412a is formed on the inner circumferential surface of the upper wall 412. Sidewall 414 extends downward from the outer edge of top wall 412, and bottom wall 416 extends horizontally from the bottom of sidewall 414 toward the inner center.

A plurality of holes 415a and 415b are formed through the sidewall 414 along the circumference thereof. A hole 416a is penetrated at a position on the lower wall 416, corresponding to one of the neighboring holes 415a and 415b. On the lower wall 416, the position where the hole 416a is formed is provided with an induction wall 418 that directs airflow flowing through the hole 415b into the hole 416a. Guide wall 418 has a 'U' shape when viewed from the top of bottom wall 416. The induction wall 418 is provided such that the opened portion faces the outside of the lower wall 416. The airflow flowing through the holes 415a of the sidewall 414, where no induction wall 418 is provided, flows in the direction toward the center of the exhaust separating member 410.

Referring back to FIG. 8, the driving member 420 rotates the exhaust separating member 410. The drive member 420 has a drive motor 422, a rotating shaft 424, and a rotating plate 426. One end of the rotating shaft 424 is connected to the drive motor 422, and the other end of the rotating shaft 424 is connected to the rotating plate 426. The rotating plate 426 is provided in a horizontal direction parallel to the upper wall 412 of the exhaust separating member 410, and a toothed tooth 426a is formed on the circumferential surface of the rotating plate 426. Teeth 426a of turntable 426 engage teeth 412a formed on upper wall 412 of exhaust separating member 410.

First and second exhaust cylinders 430 and 440 are provided under the exhaust separation member 410. The first exhaust pipe 430 is provided to allow the airflow guided by the guide wall 418 of the exhaust separation member 410 to flow in. In addition, the first exhaust pipe 430 is connected to the first exhaust pipe (No. 470 of FIG. 4). The first cleaning liquid nozzle 450 is provided inside the first exhaust cylinder 430, and the first cleaning liquid nozzle 450 cleans the first exhaust cylinder 430 by spraying cleaning into the first exhaust cylinder 430.

The second exhaust pipe 440 is provided to allow the airflow flowing through the holes 415a of the side wall 414 to which the guide wall 418 of the exhaust separation member 410 is not provided. The second exhaust pipe 440 is connected to the second exhaust pipe (No. 480 of FIG. 4). The second cleaning liquid nozzle 460 may be provided in the second exhaust cylinder 440. The second cleaning liquid nozzle 460 cleans the second exhaust cylinder 440 by spraying the cleaning liquid into the second exhaust cylinder 440.

The treatment liquid supplied to the substrate from the first treatment fluid supply member (see FIG. 1 of FIG. 1) may be an acid treatment liquid or an alkaline treatment liquid. Then, the rinse liquid (deionized water) supplied to the substrate from the second processing fluid supply member (see FIG. 1 in FIG. 1) after the rinsing process proceeds has an acidic or alkaline property depending on the treating liquid used in the step before the rinsing process. Have

When the treatment liquid or the rinse liquid flowing into the drain member 280 is acidic, the airflow flowing through the exhaust space 285 of the drain member 280 has an acidic property. In this case, the driving member 420 rotates the exhaust separating member 410 so that the exhaust hole 415b of FIG. 10 is formed in the inner wall 284 of the drain member 280. It communicates with the hole 284a. Then, the air flow in the exhaust space 285 is led to the hole (number 416a in FIG. 10) by the guide wall (number 418 in FIG. 10), and flows into the first exhaust cylinder 430. The airflow introduced into the first exhaust pipe 430 is exhausted to the outside through the first exhaust pipe (No. 470 of FIG. 4).

When the treatment liquid or the rinse liquid flowing into the drain member 280 is alkaline, the airflow flowing through the exhaust space 285 of the drain member 280 has an alkaline property. In this case, the drive member 420 rotates the exhaust separating member 410 so that the exhaust hole 415a of FIG. 10 is formed in the inner wall 284 of the drain member 280. It communicates with the hole 284a. Then, the airflow in the exhaust space 285 flows into the second exhaust cylinder 440 through the hole (No. 415a in FIG. 10) and the internal space of the exhaust separation bonsai 410. The airflow introduced into the second exhaust pipe 440 is exhausted to the outside through the second exhaust pipe (No. 480 of FIG. 4).

11A-11F illustrate a cleaning process performed in a process chamber of a substrate cleaning apparatus according to the present invention.

11A to 11F, the recovery bins 220, 240, and 260 maintain their initial positions in the lowered state, and the spin head 12 is loaded with the substrate W. As shown in FIG. The lower surface of the loaded substrate W is supported by the support pins 13a, and the side surface of the substrate W is supported by the chucking pins 13b (FIG. 11A).

When the substrate W is fixed on the spin head 12, the driving member 380 rotates the first to third lifting plates 320, 340, and 360 to raise and lower the external recovery container 260 to a process position. The spin head 12 is rotated by the rotation driver 16, and the substrate W is rotated by the rotation of the spin head 12.

The first processing fluid supply member (not shown) supplies an acidic treatment liquid to the substrate W to treat the substrate. The acid treatment liquid supplied to the substrate is scattered by the centrifugal force of the rotating substrate, and flows into the external recovery container 260 through a space formed between the intermediate recovery container 240 and the external recovery container 260. The acid treatment liquid introduced into the external recovery container 260 falls into the third space 283c of the drain member 280 and is drained through the third drain pipe 290c connected to the third space 283c.

When an acidic treatment liquid is used, the airflow flowing through the exhaust space 285 of the drain member 280 has an acidic nature. In this case, the driving member 420 rotates the exhaust separating member 410 so that the exhaust hole 415b of FIG. 10 is formed in the inner wall 284 of the drain member 280. It communicates with the hole 284a. Then, the air flow in the exhaust space 285 is led to the hole (number 416a in FIG. 10) by the guide wall (number 418 in FIG. 10), and flows into the first exhaust cylinder 430. The airflow flowing into the first exhaust pipe 430 is exhausted to the outside through the first exhaust pipe (No. 470 of FIG. 4) (FIG. 11B).

When the substrate treatment using the acid treatment liquid is completed, the driving member 380 rotates the first to third lifting plates 320, 340, and 360 to elevate the inner recovery container 220 and the intermediate recovery container 240 to the process position.

The second processing fluid supply member (not shown) supplies the rinse liquid (deionized water) to the substrate W. FIG. The rinse liquid (deionized water) supplied to the substrate is scattered by the centrifugal force of the rotating substrate, and passes through the space formed between the inner recovery container 220 and the inner wall 210 of the container 20 to the internal recovery container 220. Inflow. The rinse liquid (deionized water) introduced into the internal recovery container 220 falls into the first space 283a of the drain member 280 and is drained through the first drain pipe 290a connected to the first space 283a. .

If an acidic treatment liquid is used in the step before the rinsing process, the airflow flowing through the exhaust space 285 of the drain member 280 has an acidic nature. The air flow in the exhaust space 285 is led to the hole (number 416a in FIG. 10) by the guide wall (number 418 in FIG. 10) and flows into the first exhaust cylinder 430. The airflow flowing into the first exhaust pipe 430 is exhausted to the outside through the first exhaust pipe (No. 470 of FIG. 4) (FIG. 11C).

When the substrate processing using the rinse liquid (deionized water) is completed, the driving member 380 rotates the first to third lifting plates 320, 340, and 360 in the opposite direction as in FIG. 11C to move the internal recovery container 220 to an initial position. Descend to

The first processing fluid supply member (not shown) supplies an alkaline processing liquid to the substrate W to process the substrate. The alkaline treatment liquid supplied to the substrate is scattered by the centrifugal force of the rotating substrate, and flows into the intermediate recovery container 240 through a space formed between the internal recovery container 220 and the intermediate recovery container 240. The alkaline treatment liquid introduced into the intermediate recovery container 240 falls into the second space 283b of the drain member 280 and is drained through the second drain pipe 290b connected to the second space 283b.

When an alkaline treatment liquid is used, the airflow flowing through the exhaust space 285 of the drain member 280 has an alkaline property. In this case, the drive member 420 rotates the exhaust separating member 410 so that the exhaust hole 415a of FIG. 10 is formed in the inner wall 284 of the drain member 280. It communicates with the hole 284a. Then, the airflow in the exhaust space 285 flows into the second exhaust cylinder 440 through the hole (No. 415a in FIG. 10) and the internal space of the exhaust separation bonsai 410. The airflow flowing into the second exhaust pipe 440 is exhausted to the outside through the second exhaust pipe (No. 480 in FIG. 4) (FIG. 11D).

When the substrate processing using the alkaline treatment liquid is completed, the driving member 380 rotates the first to third lifting plates 320, 340, and 360 in the opposite direction as in FIG. 11D to raise and lower the inner recovery container 220 to a process position. .

The second processing fluid supply member (not shown) supplies the rinse liquid (deionized water) to the substrate W. FIG. The rinse liquid (deionized water) supplied to the substrate is scattered by the centrifugal force of the rotating substrate, and passes through the space formed between the inner recovery container 220 and the inner wall 210 of the container 20 to the internal recovery container 220. Inflow. The rinse liquid (deionized water) introduced into the internal recovery container 220 falls into the first space 283a of the drain member 280 and is drained through the first drain pipe 290a connected to the first space 283a. .

If an alkaline treatment liquid is used in the step before the rinsing process, the airflow flowing through the exhaust space 285 of the drain member 280 has an alkaline property. The airflow in the exhaust space 285 flows into the second exhaust cylinder 440 through the hole (No. 415a in FIG. 10) and the internal space of the exhaust separation bonsai 410. The airflow flowing into the second exhaust pipe 440 is exhausted to the outside through the second exhaust pipe (No. 480 of FIG. 4) (FIG. 11E).

When the rinse process is completed, the second processing fluid supply member (not shown) supplies a dry gas to the substrate W to dry the substrate. The drying gas used in the drying process is exhausted through the same path as in the case of FIG. 11E (FIG. 11F).

When the drying process is completed, the driving member 380 rotates the first to third lifting plates 320, 340, and 360 in the opposite directions as in FIG. 11E, and lowers the recovery containers 220, 240, and 260 to their initial positions. (FIG. 11G)

The foregoing description is merely illustrative of the technical idea of the present invention, and various changes and modifications may be made by those skilled in the art without departing from the essential characteristics of the present invention. Therefore, the embodiments disclosed in the present invention are not intended to limit the technical idea of the present invention but to describe the present invention, and the scope of the technical idea of the present invention is not limited by these embodiments. The protection scope of the present invention should be interpreted by the following claims, and all technical ideas within the equivalent scope should be interpreted as being included in the scope of the present invention.

The drawings described below are for illustrative purposes only and are not intended to limit the scope of the invention.

1 is a view showing the configuration of a single wafer cleaning equipment according to the present invention.

FIG. 2 is a view illustrating an internal configuration of the process chamber of FIG. 1.

3 is a perspective view of a longitudinally cut container showing the interior of the processing container of FIG. 2.

4 is a cross-sectional view of the longitudinally cut vessel showing the interior of the treatment vessel of FIG. 2.

5 is an enlarged view of the recovery bins and the recovery container lifting unit of FIG. 4.

6 is a perspective view of the lifting plates of FIG. 5.

FIG. 7 is a view illustrating a trajectory of a cam formed on the lifting plates of FIG. 6.

8 is an enlarged view of the drain member and the exhaust unit.

9 is a perspective view of the exhaust separating member of FIG. 8.

FIG. 10 is an enlarged view of a portion A of FIG. 9.

11A-11G illustrate a cleaning process performed in a process chamber of a substrate cleaning installation in accordance with the present invention.

<Description of Symbols for Main Parts of Drawings>

20: container 220,240,260: recovery container

226,246,266: protrusion 280: drain member

300: recovery container lifting unit 320,340,360: lifting plate

322,342,362: Cam 400: exhaust unit

410: exhaust separation member 430, 440: exhaust cylinder

450,460: Cleaning Liquid Nozzle

Claims (15)

delete A recovery unit for recovering a processing liquid used for substrate processing, A plurality of recovery bins provided in annular ring shapes having the same center; And Including a recovery container lifting unit for lifting the recovery bins, The recovery container lifting unit includes: lifting plates provided in ring shapes having the same center as the centers of the recovery containers, and cams in which protrusions protruding from the recovery containers are inserted; And a drive member for rotating the lifting plates so that the protrusion moves along the cam, The cams each include a first curved portion extending horizontally along the circumferential direction of the lifting plates, an inclined portion extending obliquely from the end of the first curved portion, and a second curved portion extending horizontally from the end of the inclined portion. Has, And the cams have a phase difference along the circumferential direction of the elevating plates. The method of claim 2, The first curved portions are provided at the same height on the lifting plates, The second curved portions are provided at the same height on the lifting plates, And the inclined portions are provided at the same inclination on the lifting plates. A recovery unit for recovering a processing liquid used for substrate processing, A plurality of recovery bins provided in annular ring shapes having the same center; A recovery bin lifting unit for lifting up and down the recovery bins; And Is disposed below the collection bins, including a drain member for draining the treatment liquid recovered to the recovery bins, The recovery container lifting unit includes: lifting plates provided in ring shapes having the same center as the centers of the recovery containers, and cams in which protrusions protruding from the recovery containers are inserted; And a drive member for rotating the lifting plates so that the protrusion moves along the cam, The drain member includes: a toric first lower wall; Inner and outer walls extending upward from inner and outer edges of the first lower wall; A plurality of protrusions protruding from an upper surface of the lower wall to form a concave shaped space corresponding to the inner space of the recovery containers; And drain pipes connected to the lower wall to communicate with the concave shaped space. The method of claim 4, wherein An exhaust separation member for switching a flow direction of the airflow discharged through the exhaust holes formed in the inner wall; And Further comprising a rotation drive member for rotating the exhaust separation member, The exhaust separation member, A side wall provided in a ring shape facing the inner wall of the drain member and having a plurality of first holes formed therein; A second lower wall extending toward a center from a lower end of the side wall and having second holes formed at positions corresponding to the first hole of any one of the neighboring first holes; And And a guide wall extending upwardly from a boundary of the second holes on the bottom wall to guide the airflow flowing through the first holes to the second holes. The method of claim 5, The exhaust separation member further includes an upper wall extending from an upper end of the side wall toward the center and having a serrated first tooth formed on an inner circumferential surface thereof, The rotary drive member includes a drive motor; And a rotating plate connected to the rotary shaft of the drive motor, the rotating plate having a second tooth formed on the circumferential surface thereof to engage the first tooth. The method of claim 5, A first exhaust pipe disposed under the exhaust separation member and provided to allow the airflow guided by the guide wall of the exhaust separation member to flow in; And And a second exhaust cylinder provided to allow an airflow flowing through the first holes of the sidewall to which the guide wall is not provided. The method of claim 7, wherein A first cleaning liquid nozzle installed in the first exhaust cylinder and injecting a cleaning liquid into the first exhaust cylinder; And And a second cleaning liquid nozzle disposed in the second exhaust cylinder and injecting a cleaning liquid into the second exhaust cylinder. delete A substrate support member on which the substrate is placed; A processing fluid supply member for supplying a processing fluid to the substrate placed on the substrate support member; Recovery containers provided in annular ring shapes surrounding the substrate support member and recovering the processing fluid supplied from the processing fluid supply member to the substrate; And Including a recovery container lifting unit for lifting the recovery bins, The recovery container lifting unit includes: lifting plates provided in ring shapes having the same center as the centers of the recovery containers, and cams in which protrusions protruding from the recovery containers are inserted; And a drive member for rotating the lifting plates so that the protrusion moves along the cam, The cams each include a first curved portion extending horizontally along the circumferential direction of the lifting plate, an inclined portion extending obliquely from the end of the first curved portion, and a second curved portion extending horizontally from the end of the inclined portion. Has, And the cams have a phase difference along the circumferential direction of the lifting plates. A substrate support member on which the substrate is placed; A processing fluid supply member for supplying a processing fluid to the substrate placed on the substrate support member; Recovery containers provided in annular ring shapes surrounding the substrate support member and recovering the processing fluid supplied from the processing fluid supply member to the substrate; A recovery bin lifting unit for lifting up and down the recovery bins; And Is disposed below the collection bins, including a drain member for draining the treatment liquid recovered to the recovery bins, The recovery container lifting unit includes: lifting plates provided in ring shapes having the same center as the centers of the recovery containers, and cams in which protrusions protruding from the recovery containers are inserted; And a drive member for rotating the lifting plates so that the protrusion moves along the cam, The drain member includes: a toric first lower wall; Inner and outer walls extending upward from inner and outer edges of the first lower wall; A plurality of protrusions protruding from an upper surface of the lower wall to form a concave shaped space corresponding to the inner space of the recovery containers; And drain pipes connected to the lower wall to communicate with the concave-shaped space. The method of claim 11, An exhaust separation member for switching a flow direction of the airflow discharged through the exhaust holes formed in the inner wall; And Further comprising a rotation drive member for rotating the exhaust separation member, The exhaust separation member, A side wall provided in a ring shape facing the inner wall of the drain member and having a plurality of first holes formed therein; A second lower wall extending toward a center from a lower end of the side wall and having second holes formed at positions corresponding to the first hole of any one of the neighboring first holes; And And an induction wall extending upwardly from a boundary of the second holes on the lower wall to direct airflow flowing through the first holes into the second holes. 13. The method of claim 12, The exhaust separation member further includes an upper wall extending from an upper end of the side wall toward the center and having a serrated first tooth formed on an inner circumferential surface thereof, The rotary drive member includes a drive motor; And a rotating plate connected to the rotating shaft of the drive motor and having a second tooth formed on a circumferential surface thereof to engage the first tooth. 13. The method of claim 12, A first exhaust pipe disposed under the exhaust separation member and provided to allow the airflow guided by the guide wall of the exhaust separation member to flow in; And And a second exhaust cylinder, through which air flows flowing through the first holes of the side wall, into which the guide wall is not provided, is introduced and provided. The method of claim 14, A first cleaning liquid nozzle installed in the first exhaust cylinder and injecting a cleaning liquid into the first exhaust cylinder; And And a second cleaning liquid nozzle disposed in the second exhaust cylinder and injecting a cleaning liquid into the second exhaust cylinder.

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