KR100991078B1 - Apparatus and method of expanding - Google Patents

Abstract

PURPOSE: An expanding apparatus and an expanding device are provided to prevent a chip from being broken due to vibration by transferring a wafer adhered to an adhesive tape and maintaining the expanding state. CONSTITUTION: A first maintaining member is detachably installed on the outer side of a support. A support unit(20) detachably supports a second maintaining unit of a ring shape. A driving unit(30) inserts the first maintaining member into the second maintaining member. A cutting unit(40) cuts the adhesive tape on the outer side of the second maintaining member. A support height controller(50) controls the height of the support.

Description

Expanding device and method {Apparatus and method of expanding}

The present invention relates to an expanding device and a method, and more particularly, to an expanding device for expanding an adhesive tape to which a substrate that has been subjected to a sawing process is adhered to the substrate to which the substrate is attached. It is about a method.

In order to assemble a semiconductor integrated circuit device, first, a plurality of semiconductor chips are formed on a wafer. In order to separate the semiconductor chips, the wafer is sawed using a blade in a sawing process. However, when sawing only the wafer, after the semiconductor chips are separated, they are dropped out and cannot be used. In order to prevent this, the semiconductor chips separated by sawing by adhering the adhesive tape to the back side of the wafer are kept as they are without being scattered to the outside. Therefore, in the die attach process, the separated semiconductor chips may be separated one by one and the packaging process may be performed.

Meanwhile, when the sawed wafer adhered to the adhesive tape is conveyed as it is, the sawed and divided chips may contact and be broken by vibration or the like during the conveying process. In order to prevent this, the expanding wafer may be subjected to an expansion process before conveying the sawn wafer. The expanding process refers to a process of expanding the adhesive tape by pulling the adhesive tape to which the sawn wafer is attached to the outside. As the adhesive tape expands, the distance between each chip adhered to the adhesive tape becomes wider. Accordingly, the sawed wafer may be transported in the expanded state of the adhesive tape to prevent contact between the chips.

In addition, a means for maintaining the expanded state of the adhesive tape is required. This is because when the tension applied to the pressure-sensitive adhesive tape is released, the expanded pressure-sensitive adhesive tape returns to its original shape by elasticity, and thus each chip that has been separated can also be contacted again. Therefore, each chip | tip adhered to the adhesive tape cannot be conveyed safely unless the expanded state of the adhesive tape is maintained.

Accordingly, the present invention expands and expands the adhesive tape to which the wafer is adhered in order to prevent the chips from coming into contact with each other by vibration during conveyance in a state where the spacing between the chips formed by sawing the wafer is very narrow. There is a need for an efficient apparatus and method for maintaining state.

An object of the present invention is to provide an expanding device and method for expanding the pressure-sensitive adhesive tape attached to the substrate through a sawing process in a state in which the substrate is attached.

Provided is an expanding device for expanding an adhesive tape to which a substrate that has been subjected to a sawing process is adhered to the substrate to which the substrate is attached. The apparatus includes a support portion on which the adhesive tape to which the substrate is attached is mounted, and a first holding member detachable from an outer side thereof is installed, and a removable second holding member positioned on an upper side of the support portion and having an inner diameter larger than that of the first holding member. The first holding member is extended to the inside of the second holding member so that the periphery of the pressure-sensitive adhesive tape is interposed between the supporting part on which the supporting part is supported and the supporting part is raised between the friction surface of the first holding member and the second holding member. And a cutting part positioned around the support part to cut the adhesive tape from the outside of the second holding member. The cutting portion is a blade for cutting the adhesive tape, a blade support portion for supporting the blade at the edge portion, the rotary drive portion connected to the blade support portion and the bearing and the belt (belt) to rotate the blade support portion, and the blade support portion It may be connected to and includes a vertical drive unit for moving the blade support portion up and down. The blade support may rotate 360 degrees, and the blade support may move up and down along a linear motion guide. The blade support portion and the vertical drive portion may be connected to an arm.

The apparatus may further include a support height adjustment part for adjusting the height of the support part, and may further include a locking part for maintaining a coupling state of the support part and the support part. The first retaining member may be a ring having a curved rectangular cross section at an outer side thereof, and the second retaining member may be a ring having a curved rectangular cross section at an inner side thereof. The first retaining member may form a recess along the periphery of the outer side, and the second retaining member may form a convex portion along the periphery of the inner side.

In another aspect, there is provided a grip ring that maintains the expanded state when expanding a pressure-sensitive adhesive tape to which a substrate that has been subjected to a sawing process has been adhered to the substrate. . The grip ring has a rectangular cross section, characterized in that all of the edges of the outer surface of the cross section is curved. A recess may be formed along the circumference of the outer surface.

In another aspect, there is provided a grip ring that maintains the expanded state when expanding a pressure-sensitive adhesive tape to which a substrate that has been subjected to a sawing process has been adhered to the substrate. . The grip ring has a rectangular cross section, characterized in that all of the corners of the inner surface of the cross section is curved. Convex portions may be formed along the circumference of the inner surface.

In another aspect, there is provided an expansion method for expanding a pressure-sensitive adhesive tape having a substrate subjected to a sawing process to a state in which the substrate is adhered. The method includes installing a first holding member and a second holding member, respectively, on the supporting part and the supporting part, placing the adhesive tape on the supporting part, expanding the supporting part to expand the adhesive tape, and Maintaining the expanding state of the adhesive tape by engaging the first holding member and the second holding member with the adhesive tape interposed therebetween, and cutting the adhesive tape from the outside of the second holding member. It includes. The method further includes adjusting the height of the support, wherein the height of the support may be determined according to the degree of elevation of the support. The first retaining member may be a ring having a curved rectangular cross section at an outer side thereof, and the second retaining member may be a ring having a curved rectangular cross section at an inner side thereof. The first retaining member may form a recess along the periphery of the outer side, and the second retaining member may form a convex portion along the periphery of the inner side.

By conveying the wafer adhering to the adhesive tape while maintaining the expanding state, the chips can be prevented from coming into contact with each other due to vibration during conveyance. In addition, it is possible to expand more efficiently by maintaining the expansion state by using a non-directional grip ring.

1 shows a perspective view of an example of the proposed expanding device.

FIG. 2 shows an internal structure diagram of an example of the expanding device of FIG. 1.

Hereinafter, the proposed expanding device will be described with reference to FIG. 2.

1 and 2, the expanding device 1 includes a support 10, a support 20, a drive 30, a cut 40, a support height adjuster 50, and a lock 60. And a meter unit 70.

An adhesive tape on which the substrate is attached is seated on the support part 10, and a first holding member detachable from the support part 10 is provided. The support 10 may be raised or lowered by the driving unit 30 to be described later. The portion in which the first holding member is installed may form a groove so that the first holding member can be inserted, or may constitute a jaw so that the first holding member can be placed on the support 10. have.

The support part 20 is positioned above the support part 10 and is supported by a detachable second holding member having an inner diameter larger than that of the first holding member.

Various means can be used as the removable first retaining member and the second retaining member. The first retaining member and the second retaining member may be grip rings. In this case, the first retaining member may be a ring having a curved rectangular cross section on an outer side surface, and the second retaining member may be a ring having a curved rectangular cross section on an inner side surface. This is to prevent the adhesive tape from being broken under tension by the sharp edges. In addition, the first holding member may form a recess along the circumference of the outer side, and the second holding member may form a convex portion along the circumference of the inner side. This is for the first holding member and the second holding member to be firmly coupled to each other. The grip ring will be described later in more detail. Hereinafter, it is assumed that the first holding member and the second holding member are grip rings.

The first holding member is configured to raise the support part 10 so that the first holding member is extended so that the peripheral portion of the adhesive tape is interposed between the friction surfaces of the first holding member and the second holding member. It is to be inserted into the holding member. As the supporting part 10 rises, the first holding member and the second holding member respectively installed on the supporting part 10 and the supporting part 20 may be engaged with each other. The first holding member and the second holding member hold the expanded adhesive tape at the edge of the adhesive tape to maintain the expanded state.

The cut portion 40 is positioned around the support portion to cut the adhesive tape from the outside of the second holding member. The cutting part 40 is raised in the state in which the supporting part 10 is raised and the expansion is maintained to cut the adhesive tape.

The cutting portion 40 is connected to the blade 41 for cutting the adhesive tape, the blade support portion 42 for supporting the blade at the edge portion, the blade support portion and the bearing and belt (belt) to rotate the blade support portion It may include a rotary drive unit 43, the vertical drive unit 44 is connected to the blade support portion to move the blade support portion up and down. The cutting part 40 may be supported by the support part 10 by a linear motion guide, and may move up and down along the linear motion guide. In addition, the blade support 42 and the vertical drive 44 may be connected to the arm (arm). When the cutting part 40 is raised, the arm rotates to lift the cutting part 40. In addition, the rotation drive unit 43 rotates the blade support portion 42 by 360 degrees, so that the adhesive tape can be cut in a circular shape.

The support part height adjusting part 50 adjusts the height of the support part 20. The support part height adjusting part 50 may adjust the height of the support part 20 according to the extent to which the support part 10 is raised. When the degree of lifting of the supporting part 10 is different, the height of the supporting part 20 is increased so that the first holding member and the second holding member are divided into the supporting part 10 and the upper part 20, respectively. It needs to be adjusted. Accordingly, the height of the support portion 20 should be adjusted higher as the support portion 10 rises in height to increase the extent of expansion of the adhesive tape 2. The support height adjuster 60 may adjust the height of the support 20 by using various means. For example, the height of the support 20 can be adjusted by coupling the screw onto the support 20.

The locking part 60 maintains a coupling state of the support part 10 and the support part 20. The locking unit 60 may maintain the engaged state through various means. For example, when the clasp is attached to the support part 20 and the support part 10 and the support part 20 are coupled, the clasp attached to the support part 20 is caught in the groove formed in the support part 10. It can stay in a bonded state.

The meter unit 70 is provided with a power switch, an emergency switch, and the like of the proposed expanding device 1.

3 shows a state in which a grip ring is installed in the proposed expanding device.

Referring to FIG. 3, the adhesive tape 2 is placed on the support 10. The wafer on the adhesive tape is sawed and not yet expanded. Grip rings 11 and 21 are respectively installed on the support 10 and the support 20.

4 shows a state in which the proposed expanding device expands and maintains the adhesive tape.

Referring to FIG. 4, it can be seen that the support 10 has risen compared to FIG. 3. As the supporting part 10 rises, the adhesive tape 2 is expanded, and thus, the wafer adhered to the adhesive tape 2 may be separated into respective chips. When the support 10 is raised by a predetermined height, the grip rings 11 and 21 are coupled to each other with the adhesive tape 2 therebetween to maintain the expansion state. Since the edges of the grip rings 11 and 21 are curved, the adhesive tape 2 may not be broken when the adhesive tape 2 is fitted between the grip rings 11 and 21.

5 shows a state in which the proposed expanding device cuts the adhesive tape.

Referring to FIG. 5, the cut part 40 is raised in a state in which the adhesive tape 2 is expanded. The cutting part 40 may be raised by the vertical driving part 44 included in the cutting part 40. The vertical driving unit 44 may raise the cutting unit 40 by an arm. When the cut part 40 is raised, the blade 41 of the cut part 40 meets the adhesive tape 2 on the outside of the grip ring 21 installed on the support part 20, and the adhesive tape ( 2) cut.

6 shows an example in which a cutting unit used in the expanding device is coupled to a support unit.

Referring to FIG. 6, the cutting part 40 is connected to the blade 41 for cutting an adhesive tape, a blade support part 42 supporting the blade at an edge portion, the blade support part and a bearing and a belt, and the blade. Rotation drive unit 43 for rotating the support portion, and is connected to the blade support portion includes a vertical drive unit 44 for moving the blade support portion up and down. The rotation driving unit may be a motor, and the vertical driving unit 44 is not shown.

7 shows a state when the cut portion of FIG. 6 rises.

Referring to FIG. 7, it can be seen that the cut part 40 is raised by the vertical driving part 44 which is not shown. The cut portion 40 rises along the linear movement guide and rises to a position where the adhesive tape can be cut.

Hereinafter, a grip ring, which is one of the detachable members installed in the supporting portion and the supporting portion of the proposed expanding device, will be described.

8 shows an example of the proposed grip ring.

Referring to FIG. 8, the grip ring 50 is composed of two rings. The two rings consist of an inner ring 51 with a smaller radius and an outer ring 55 with a larger radius than the inner ring. The inner ring 51 and the outer ring 55 may be coupled to each other. An adhesive tape is inserted between the inner ring 51 and the outer ring 55, and the inner ring 51 and the outer ring 55 are coupled to each other while the adhesive tape is expanded. Is maintained.

9 shows a state in which the grip rings are coupled to each other when an adhesive tape is inserted between the proposed grip rings.

Referring to FIG. 9, the adhesive tape 2 is inserted between the inner ring 51 and the outer ring 55. The inner ring 51 and the outer ring 55 both have a rectangular cross section, but the outer edges 53 and 54 of the inner ring 51 on the side where the adhesive tape 2 is inserted, and the The inner side edges 57 and 58 of the outer ring 55 on the side where the adhesive tape 2 is inserted can be bent. In general, the edges of the inner ring and the outer ring (53 and 57, respectively), which are subjected to force as the adhesive tape 2 expands, do not break the adhesive tape 2 due to tension at the corners. You need to bend in order. Also, in general, the remaining edges (54, 58, respectively) of the inner ring and the outer ring are unforced and need not be bent. However, if only one corner is bent, when installing it on the supporting part and the support part of the proposed expansion device, there is an inefficiency that the operator must check and install the curved part of the grip ring one by one. This inefficiency can be prevented by making both the outer edges 53 and 54 of the inner ring 51 and the inner edges 57 and 58 of the outer ring 55 be curved.

The inner ring 51 may form a recess 52 along the perimeter. In addition, the outer ring 55 may form a convex part 56 along the periphery. When the inner ring 51 and the outer ring 55 are coupled, the recess 52 and the convex portion 56 may be engaged with each other along the circumference. Accordingly, when the adhesive tape 2 is inserted between the inner ring 51 and the outer ring 55, the inner ring 51 and the outer ring 55 may be firmly coupled to each other.

10 shows an embodiment of the proposed expansion method.

In step S100, the first holding member and the second holding member which are detachable are provided in the supporting part and the supporting part, respectively. Various means can be used for the first holding member and the second holding member. The first retaining member may have a rectangular cross section and an outer edge of the cross section may be a curved ring, and the second retaining member may have a rectangular cross section and an inner side edge of the cross section may be a curved ring. The length of the radius of the second holding member may be greater than the length of the radius of the first holding member.

In step S110, the adhesive tape is placed on the support part. The substrate which passed through the sawing process is stuck on the said adhesive tape.

In step S120, the supporting part is raised to expand the adhesive tape. The degree of expansion of the adhesive tape may be adjusted by adjusting the degree of raising the support part. That is, the more the support portion is raised, the greater the degree of expansion of the adhesive tape is.

In operation S130, the first holding member and the second holding member are engaged with each other with the adhesive tape interposed therebetween to maintain an expanding state of the adhesive tape. When the first retaining member and the second retaining member are rings capable of engaging with each other, the first retaining member forms a recess along a circumference, and the second retaining member has a convex portion along a circumference. ) Can be combined with each other.

In step S140, the adhesive tape is cut outside of the second holding member.

11 shows another embodiment of the proposed expansion method.

In step S200, the first holding member and the second holding member, which are detachable from the support unit and the support unit, are installed. Various means can be used for the first holding member and the second holding member. The first retaining member may have a rectangular cross section and an outer edge of the cross section may be a curved ring, and the second retaining member may have a rectangular cross section and an inner side edge of the cross section may be a curved ring. The length of the radius of the second holding member may be greater than the length of the radius of the first holding member.

In step S210, the adhesive tape is placed on the support part. The substrate which passed through the sawing process is stuck on the said adhesive tape.

In step S220, the height of the support is adjusted. The height of the support portion may be determined according to the degree of elevation of the support portion. That is, as the support portion rises more, the first holding member installed on the support portion also increases accordingly, so that the height of the support portion is adjusted so that the first holding member and the second holding member can be accurately coupled. Can be. Various means can be used to adjust the height of the support.

In step S230, the supporting part is raised to expand the adhesive tape. The degree of expansion of the adhesive tape may be adjusted by adjusting the degree of raising the support part. That is, the more the support portion is raised, the greater the degree of expansion of the adhesive tape is.

In step S240, the first holding member and the second holding member are engaged with each other with the adhesive tape interposed therebetween to maintain the expanding state of the adhesive tape. When the first retaining member and the second retaining member are rings capable of engaging with each other, the first retaining member forms a recess along a circumference, and the second retaining member has a convex portion along a circumference. ) Can be combined with each other.

In step S250, the adhesive tape is cut outside of the second holding member.

The above-described embodiments include examples of various aspects. While it is not possible to describe every possible combination for expressing various aspects, one of ordinary skill in the art will recognize that other combinations are possible. Accordingly, it is intended that the invention include all alternatives, modifications and variations that fall within the scope of the following claims.

1 shows a perspective view of an example of the proposed expanding device.

FIG. 2 shows an internal structure diagram of an example of the expanding device of FIG. 1.

3 shows a state in which a grip ring is installed in the proposed expanding device.

4 shows a state in which the proposed expanding device expands and maintains the adhesive tape.

5 shows a state in which the proposed expanding device cuts the adhesive tape.

6 shows an example in which a cutting unit used in the expanding device is coupled to a support unit.

FIG. 7 shows a state when the cut portion of FIG. 6 rises. FIG.

8 shows an example of the proposed grip ring.

9 shows a state in which the grip rings are coupled to each other when an adhesive tape is inserted between the proposed grip rings.

10 shows an embodiment of the proposed expansion method.

11 shows another embodiment of the proposed expansion method.

Claims (17)

An expansion apparatus for expanding an adhesive tape to which a substrate subjected to a sawing process is adhered, in a state in which the substrate is adhered. A support portion on which the adhesive tape to which the substrate is adhered is mounted, and a ring-shaped first retaining member having a cross section of a curved square on an outer side thereof is detachably installed on an outer side thereof; A support part disposed above the support part and having a larger inner diameter than the first holding member, and having a ring-shaped second holding member having a curved cross section of an inner side thereof, being detachably supported; A driving part which raises the supporting part so that the first holding member is inserted into the second holding member so that the peripheral portion of the adhesive tape is interposed between the friction surface of the first holding member and the second holding member to be interposed therebetween; And And a cutting part positioned around the support part to cut the adhesive tape from the outside of the second holding member. The method of claim 1, The cutting unit blade for cutting the adhesive tape; Blade support portion for supporting the blade at the edge portion; A rotation drive unit connected to the blade support part with a bearing and a belt to rotate the blade support part; And And an up and down drive unit connected to the blade support part to move the blade support part up and down. The method of claim 2, Expanding device, characterized in that the blade support portion rotates 360 degrees. The method of claim 2, The blade support portion expands up and down according to the linear motion guide (linear motion guide). The method of claim 2, Expanding device, characterized in that the blade support portion and the vertical drive unit is connected to the arm (arm). The method of claim 1, Expanding device further comprises a support height adjustment for adjusting the height of the support. The method of claim 1, Expanding device further comprises a locking portion for maintaining the coupling state of the support and the support. delete The method of claim 1, And the first holding member forms a recess along the circumference of the outer side, and the second holding member forms a convex portion along the circumference of the inner side. In a grip ring that maintains the expanded state when expanding the pressure-sensitive adhesive tape to which the substrate is subjected to sawing process to the state that the substrate is adhered, Has a cross section of a square, Grip ring, characterized in that all of the corners of the outer surface of the cross section is curved. The method of claim 10, A grip ring, characterized in that a recess is formed along the periphery of the outer surface. In a grip ring that maintains the expanded state when expanding the pressure-sensitive adhesive tape to which the substrate is subjected to sawing process to the state that the substrate is adhered, Has a cross section of a square, Grip ring, characterized in that all of the corners of the inner surface of the cross section is curved. 13. The method of claim 12, A grip ring, characterized in that a convex portion is formed along the circumference of the inner surface. An expansion method for expanding an adhesive tape to which a substrate subjected to a sawing process is adhered, in a state in which the substrate is adhered. A ring-shaped first retaining member having a curved rectangular cross section and a ring-shaped second retaining member having a curved rectangular cross section are attached to the supporting portion and the supporting portion, respectively. Making; Placing the adhesive tape on the support portion; Expanding the supporting part to expand the adhesive tape; Maintaining the expanding state of the adhesive tape by engaging the first holding member and the second holding member with each other with the adhesive tape interposed therebetween; And And cutting the adhesive tape from the outside of the second holding member. The method of claim 14, Further comprising the step of adjusting the height of the support, Expanding method, characterized in that the height of the support portion is determined according to the rising degree of the support portion. delete The method of claim 14, And the first holding member forms a recess along the circumference of the outer side, and the second holding member forms a convex portion along the circumference of the inner side.

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