JP4238669B2 - Expanding method and expanding apparatus - Google Patents

Description

  TECHNICAL FIELD The present invention relates to an adhesive sheet expanding method and an expanding apparatus, and in particular, an adhesive sheet is expanded after dicing processing on a plate-like material mounted on a ring-shaped frame via an adhesive sheet and diced into individual chips. Thus, the present invention relates to an expanding method and an expanding apparatus for expanding the interval between individual chips.

  In semiconductor manufacturing processes, etc., wafers that are plate-like products with semiconductor devices or electronic parts formed on their surfaces are subjected to electrical tests in the probing process, and then in the dicing process, individual chips (also referred to as dies or pellets). The individual chips are then die bonded to the component base in a die bonding process. After die bonding, resin molding is performed to complete a finished product such as a semiconductor device or an electronic component.

  After the probing process, as shown in FIG. 10, the back surface of the wafer is adhered to an adhesive sheet S (also called a dicing sheet or dicing tape) S having a thickness of about 100 μm and having an adhesive layer formed on one side, and a rigid ring. Is mounted on a frame F. In this state, the wafer W is conveyed in the dicing process, between the dicing process and the die bonding process, and in the die bonding process.

  In the dicing process, a dicing apparatus that cuts the wafer by inserting grinding grooves into the wafer W with a thin grindstone called a dicing blade is used. The dicing blade is obtained by electrodepositing fine diamond abrasive grains with Ni, and an extremely thin one having a thickness of about 10 μm to 30 μm is used.

  The dicing blade is rotated at a high speed of 30,000 to 60,000 rpm and cut into the wafer W to completely cut the wafer W (full cut). At this time, since the adhesive sheet S stuck on the back surface of the wafer W is cut only about 10 μm from the front surface, the wafer W is cut into individual chips T, but the individual chips T are separated. In other words, since the arrangement of the chips T is not collapsed, the wafer state is maintained as a whole.

  Further, without using a dicing blade, a laser beam having a focused point is irradiated inside the wafer W to form a modified region due to a multiphoton absorption phenomenon inside the wafer, and the wafer W is started from this modified region. Laser dicing has been proposed to cleave. Also in this laser dicing process, since the wafer W is diced in the state as shown in FIG. 10, the arrangement of the chips T does not collapse and the wafer state is maintained as a whole.

  Here, even after dicing and dividing into individual chips T in this way, an assembly of the chips T in which the arrangement of the chips T is not broken is also referred to as a wafer W for convenience.

  Thereafter, the wafer W is sent to a die bonding process. A die bonder is used in the die bonding process. In the die bonder, the wafer W is first placed on the expansion stage, and then the adhesive sheet S is expanded, so that the interval between the chips T is widened so that the chips T can be easily picked up.

  Next, the chip T is pushed up with a pusher from below, and the chip T is picked up with a collet from above, and the chip T is bonded to a predetermined position of the base.

As described above, it has been conventionally performed to incorporate an expanding apparatus that spreads the adhesive sheet S into the die bonder and widens the distance between the chips T. Various improved inventions of this expanding apparatus have also been made (see, for example, Patent Document 1 and Patent Document 2).
JP 7-23003 A JP 7-321070 A

  In the above-described conventional technology, the wafer W mounted on the frame F through the adhesive sheet S is cut into individual chips T by a dicing blade, and then conveyed in the dicing apparatus as it is to be cleaned. Then, it was transported to the die bonder, and the inside of the die bonder was transported as it was.

  However, in recent years, in a semiconductor device such as an IC, in order to increase the number of chips formed per wafer W, the width of a processing region (also called a street) for dicing processing has become extremely narrow. Therefore, an extremely thin dicing blade having a thickness of about 10 μm to 15 μm has been used in the dicing process.

  In the wafer W diced by such an extremely thin dicing blade and the wafer W diced by the above-mentioned laser dicing, the interval between the chips T is extremely narrow. When transported in a mounted state, the edges of adjacent chips T come into contact with each other due to vibration during transportation, and the edge portion is chipped or microcracked. The problem of compromising the product's reliability occurred.

  For this reason, it has been required to expand immediately after dicing in a dicing apparatus and to convey the chips T with a wider interval. However, even when the conventional expanding method and the expanding method described in Patent Document 1 and Patent Document 2 described above were performed in the dicing apparatus, the expansion was performed when the application of tension to the pressure-sensitive adhesive sheet S was canceled. Since the pressure-sensitive adhesive sheet S contracted again, the wafer W could not be transferred together with the frame F.

  The present invention has been made in view of such circumstances, and even when a wafer having an extremely narrow distance between chips after dicing is used, the edges of adjacent chips are brought into contact with each other due to vibration during conveyance. An object of the present invention is to provide an adhesive sheet expanding method and an expanding device that can be transported frame by frame without occurrence of chipping, microcracks, or the like in the edge portion.

  In order to achieve the above-mentioned object, the invention according to claim 1 is a board that is attached to an adhesive sheet, mounted on a ring-shaped frame through the adhesive sheet, and diced into individual chips. In an expanding method in which the pressure-sensitive adhesive sheet is expanded after dicing to expand the interval between the individual chips, the plate-like object is not removed from the chuck stage after dicing the plate-like object. Each chuck stage is transported to another area in the same apparatus, the adhesive sheet is expanded in another area in the same apparatus, the expanded state of the adhesive sheet on the expanded chuck stage is maintained, and the outside of the chuck stage Form a slack in the adhesive sheet of the part, and pinch the base of the slack part of the adhesive sheet to fix It allows also to remove the said plate-like material from the chuck stage expanded state of the pressure-sensitive adhesive sheet is characterized in that it is held.

  According to the first aspect of the present invention, since the expanded state of the adhesive sheet is maintained while the diced plate is mounted on the frame, the plate is removed from the frame while maintaining the distance between the chips. Can be transported together. Therefore, even if the distance between chips is extremely narrow, the edges of adjacent chips do not come into contact with each other due to vibration during conveyance, and the edge portion will not be chipped or microcracked. . Moreover, since the expanding step and the expanding holding step are performed in an area different from the dicing area of the dicing apparatus, it is possible to prevent a reduction in the operating rate of the dicing apparatus.

  The invention according to claim 2 is characterized in that, in the invention according to claim 1, the base portion of the loosened portion of the pressure-sensitive adhesive sheet is fixed by welding or adhesion.

  According to the invention of claim 2, since the expanded portion is maintained by welding or bonding the base portion of the loosened portion where the pressure-sensitive adhesive sheet is picked, the plate-like object can be handled together with the frame.

  According to a third aspect of the present invention, after the dicing process is performed on the plate-like material that is attached to the pressure-sensitive adhesive sheet and mounted on the ring-shaped frame via the pressure-sensitive adhesive sheet and diced into individual chips, the pressure-sensitive adhesive sheet An expanding apparatus that expands a sheet and expands an interval between the individual chips, and in the expanding apparatus provided in the dicing apparatus, after the plate-shaped object is diced, the plate-shaped object is removed from the chuck stage. Conveying means for conveying the plate-like object together with the chuck stage from the dicing area to another area in the dicing apparatus without removing, an expanding means for expanding the adhesive sheet in another area in the dicing apparatus, and on the chuck stage A sheet holding means for holding the expanded state of the adhesive sheet; and the adhesive sheet A sheet slack portion fixing means for pinching and fixing a base portion of a slack portion generated in a portion where the expanded state of the adhesive sheet is not held, and even if the sheet holding by the sheet holding means is released, the expansion of the adhesive sheet The state is maintained, and the plate-like object can be conveyed along with the frame while maintaining the enlarged chip interval.

  According to the third aspect of the present invention, the plate-like object after dicing is not removed from the chuck stage, but is transported from the dicing area together with the chuck stage to another area in the dicing apparatus, expanded, and further maintained in an expanded state. Even in the conveyance in the dicing apparatus, the edges of the adjacent chips are not brought into contact with each other due to vibration during conveyance, and the edge portion is not chipped or microcracked. Moreover, it can prevent that the operation rate of a dicing apparatus falls because of expansion.

  According to a fourth aspect of the present invention, in the third aspect of the present invention, an ultrasonic welding tool is used as the sheet slack portion fixing means.

  According to invention of Claim 4, since the base of the slack part which generate | occur | produces in an adhesive sheet is welded with an ultrasonic wave, local welding can be performed easily.

  As described above, according to the expanding method and the expanding device of the present invention, the expanded state of the pressure-sensitive adhesive sheet is maintained in a state where the diced plate is mounted on the frame. The plate-like object can be conveyed together with the frame while maintaining the interval. Therefore, even if the distance between chips is extremely narrow, the edges of adjacent chips do not come into contact with each other due to vibration during conveyance, and the edge portion will not be chipped or microcracked. .

  In addition, after the dicing process in the dicing machine, the plate-like object is not removed from the chuck stage, but the chuck stage is transported to a different area from the dicing area to hold the expanded and expanded state. A space | interval can be extended and the operating rate fall of a dicing apparatus can be prevented.

  Hereinafter, preferred embodiments of the expanding method and the expanding apparatus according to the present invention will be described in detail with reference to the accompanying drawings. In each figure, the same number or symbol is attached to the same member.

  FIG. 1 is a front view showing a state in which a conveying device which is a part of an expanding device is positioned in a dicing area of the dicing device. FIG. 2 is a plan view thereof.

  As shown in FIGS. 1 and 2, the expanding device 10 is provided in the conveying means 30, the frame suction means 33 attached to the conveying means 30, the sheet pressing means 34, and the later expanded area (another area). The expanding means 10A, the sheet slack portion fixing means 10B, and the like are included.

  The conveyance means 30 conveys the wafer W, which is a plate-like object mounted on the frame F via the adhesive sheet S, together with the chuck stage 6 of the dicing apparatus from the dicing area to an expanded area (another area), and is not shown. The rotating means 31 is rotated about the shaft 31B by the driving means, and the two supporting beams 31A and 31A and the supporting beams 31A and 31A are moved up and down. .. Which are horizontally moved to grip the chuck stage 6, a frame suction means 33, a sheet pressing means 34, and the like.

  The frame suction means 33 attached to the transport means 30 includes four pushers 33A, 33A,... That are expanded and contracted by an air cylinder (not shown), and suction pads 33B attached to the tips of the pushers 33A.

  A vacuum path is formed between the pusher 33A and the suction pad 33B, and is connected to a decompression device (not shown) to suck the frame F. Further, the suction pad 33B is made of a thin rubber material so that the frame F can be reliably sucked.

  Similarly, the sheet pressing unit 34 attached to the conveying unit 30 supports the sheet pressing ring 34A for clamping the adhesive sheet on the chuck stage 6 and the sheet pressing ring 34A, and is expanded and contracted up and down by an air cylinder (not shown). It consists of support bars 34B and 34B.

  The sheet pressing ring 34 </ b> A presses the adhesive sheet S against the chuck stage 6 and clamps it.

  The chuck stage 6 of the dicing apparatus is placed on the upper surface of the Zθ stage 4 incorporated in the XY table 2 arranged in the dicing area, and is vacuum-sucked to the Zθ stage 4 by friending with the wafer W on the chuck stage 6. It is like that.

  A porous member 6A is embedded in the upper surface of the chuck stage 6 so that the wafer W is uniformly adsorbed via the adhesive sheet S. Further, a groove 6B is formed in the lower part of the side surface of the chuck stage 6, and the fork 32 of the transport device 30 is inserted into the groove 6B.

  FIG. 3 is a front sectional view showing the expanding means 10A and the sheet slack portion fixing means 10B arranged in an expanded area different from the dicing area of the dicing apparatus.

  The expanding means 10A expands the pressure-sensitive adhesive sheet S to which the wafer W is attached, and enlarges the distance between each diced chip. The wafer W is placed together with the chuck stage 6 and is moved up and down by a driving means (not shown). It comprises an elevator 11A, a frame chuck 13 for adsorbing and fixing the frame F, and a decompression means 20.

  The decompression means 20 includes electromagnetic valves 21A, 21B, 21C, regulators 22A, 22B, 22C, and a decompression pump 23. As the expanding means 10A, the decompression pump 23, the solenoid valve 21B, and the regulator 22B are used.

  A porous member 13A is embedded in the upper surface of the frame chuck 13 and is connected to the decompression pump 23 via the electromagnetic valve 21B and the regulator 22B so as to adsorb the frame F.

  Further, the upper surface of the chuck stage 6 is also embedded with a porous member 6A, and is connected to the decompression pump 23 via the lifting platform 11A, the electromagnetic valve 21C, and the regulator 22C, and adsorbs the wafer W, which is a plate, together with the adhesive sheet S. It is supposed to be. Due to this suction, the chuck stage 6 is also attracted by the lift platform 11A.

  The pressure-sensitive adhesive sheet S is expanded by raising the lifting platform 11 </ b> A in a state where the suction of the wafer W by the chuck stage 6 for each pressure-sensitive adhesive sheet S is released and the frame F is chucked by the frame chuck 13.

  When the adhesive sheet S is fixed to the chuck stage 6 by the sheet holding means after the expansion, and the lifting platform 11A is lowered in this state, a slack is formed in the outer part of the chuck stage 6 of the adhesive sheet S.

  The sheet holding means 8 is an adsorbing means for the adhesive sheet S composed of the chuck stage 6, the elevator 11 </ b> A, the electromagnetic valve 21 </ b> C, the regulator 22 </ b> C, and the decompression pump 23, and the expanded adhesive sheet portion is placed on the chuck stage 6. The expanded state is maintained by adsorbing and fixing.

  The sheet slack portion fixing means 10B is for picking and fixing the base portion of the slack SA portion formed on the adhesive sheet S of the frame F on which the wafer W transported by the transport means 30 is mounted.

  The sheet slack portion fixing means 10B includes a θ table 11, a lifting platform 11A (shared with the expanding means 10A), a frame chuck 13 (shared with the expanding means 10A), a push-up member 14, a housing 15, and an ultrasonic welding tool 16 as a welding tool. The pressure reducing unit 20 includes a pressure reducing pump 23, electromagnetic valves 21A and 21C, regulators 22A and 22C, and the like.

  The θ table 11 is rotated θ in the θ direction in the figure by a driving device (not shown). The θ table 11 is provided with a lifting table 11A for mounting the chuck stage 6 and a frame chuck 13 for mounting the frame F.

  Above the portion of the adhesive sheet S where the frame F and the wafer W are not attached, a ring-shaped housing 15 having an annular groove 15A is disposed. The inner surface of the annular groove 15A is formed of a porous member 15B, and is connected to a decompression pump 23 via an electromagnetic valve 21A and a regulator 22A so as to decompress the inside of the groove 15A. The housing 15 is moved up and down by driving means (not shown) and clamped at the lower end.

  A ring-shaped push-up member 14 is provided to face the housing 15 with the adhesive sheet S interposed therebetween. The push-up member 14 is moved up and down by a driving means (not shown), and is positioned so as to be raised and inserted into the groove 15A of the housing 15. The upper end edge of the push-up member 14 is smoothly chamfered. The pushing member 14 pushes up the slack SA portion of the adhesive sheet S into the groove 15 </ b> A of the housing 15.

  On the outside of the housing 15, an ultrasonic welding tool 16 as a welding tool is disposed obliquely with the tip thereof facing the inlet of the groove 15 </ b> A of the housing 15. The ultrasonic welding tool 16 is moved in the axial direction thereof by a driving means (not shown), and presses the object with the tip while oscillating ultrasonic waves to weld the object.

  Next, an expanding method by the expanding apparatus 10 configured as described above will be described. 4 and 5 are flowcharts showing an embodiment of the expanding method of the present invention. The wafer W mounted on the frame F through the adhesive sheet S is sucked and mounted on the chuck stage 6 in the dicing area of the dicing apparatus, and laser dicing is performed by a laser dicing unit (not shown).

  When the laser dicing is completed, the rotary arm of the transfer means 30 is rotated and positioned above the wafer W (step S11). Here, the frame adsorbing means 33, 33,... Of the conveying means 30 descend and adsorb the upper surface of the frame F by the respective adsorbing pads 33B. Next, the forks 32, 32,... Of the conveying means 30 are inserted into the grooves 6B of the chuck stage 6 to grip the chuck stage 6, and the sheet pressing means 34 is lowered to remove the adhesive sheet S by the sheet pressing ring 34A. (Step S13).

  Next, the suction on the side of the adhesive sheet S of the frame F adsorbed at the time of dicing is released, and the adsorption of the wafer W is also released, and the chuck stage 6 that is adsorbed and fixed to the Zθ stage 4 by being pulled together with the wafer W. Is also fixed to the Zθ stage 4.

  When the fixing of the chuck stage 6 to the Zθ stage 4 is released, the arm 31 of the transfer means 30 is lifted (FIG. 1 shows this state), and then rotated about the shaft 31B, so that the wafer W Then, the adhesive sheet S and the frame are transported together with the chuck stage 6 from the dicing area to the expanded area (step S15).

  When the arm 31 of the transfer means 30 is rotated to the expanded area, the chuck stage 6 on which the wafer W is lowered and placed on the lifting platform 11A and the frame F are placed on the frame chuck 13 (step). S17). In this conveyance, since the adhesive sheet S on the chuck stage 6 is pressed against the upper surface of the chuck stage 6, the edges of the chips T do not come into contact with each other and the chips T are not damaged.

  Next, the electromagnetic valve 21 </ b> B is operated to attract and fix the frame F to the frame chuck 13. Next, the sheet pressing means 34 rises to disengage the sheet pressing ring 34A from the adhesive sheet S, and the suction of the upper surface side of the frame F of the frame suction means 33, 33,. It moves horizontally and is pulled out of the groove 6B of the chuck stage 6 to release the grip of the chuck stage 6.

  Here, the arm 31 is slightly raised and rotated to retract the conveying means 30 (step S19). FIG. 6 shows this state, in which the frame F is attracted and fixed on the frame chuck, the wafer W is not yet attracted to the chuck stage 6, and the distance between the diced individual chips is still enlarged. It has not been.

  Next, the lifting platform 11A rises. When the elevator 11A is raised, the frame F is attracted and fixed to the frame chuck 13, so that the adhesive sheet S on the chuck stage 6 and outside the chuck stage 6 is stretched and the individual chips T attached to the adhesive sheet S are stretched. The interval is increased (step S21). FIG. 7 shows this state.

  Next, the electromagnetic valve 21C is operated to attract and hold the adhesive sheet S on the chuck stage 6 to the chuck stage 6 (step S23).

  When the adhesive sheet S on the chuck stage 6 is sucked and held on the chuck stage 6, the lifting platform 11A is lowered to the base height. When the lifting platform 11A is lowered to the basic height, the adhesive sheet S on the chuck stage 6 is attracted and held on the chuck stage 6 and is held in an expanded state, so that the adhesive sheet S is loosened on the outer portion of the chuck stage 6. SA is formed (step S25).

  Here, a ring-shaped housing 15 having an annular groove 15 </ b> A is disposed above the wafer W, and an ultrasonic welding tool 16 as a welding tool is placed on the outer side of the housing 15 with its tip directed toward the inlet of the groove 15 </ b> A of the housing 15. Arranged diagonally. FIG. 3 shows this state.

  Next, the housing 15 is lowered, and the lower end is fixed at the same height as the upper surface of the adhesive sheet S. Next, the push-up member 14 is raised and brought into contact with the pressure-sensitive adhesive sheet S, and further raised, the slack SA portion of the pressure-sensitive adhesive sheet S is pushed up and pushed into the groove 15 </ b> A of the housing 15.

  Next, the electromagnetic valve 21A is operated, and the space in the groove 15A of the housing 15 is depressurized by a decompression pump, and the slack SA of the adhesive sheet S is adsorbed on the inner surface of the groove 15A. Since the inner surface of the groove 15A is formed of the porous member 15B, the slack SA can be uniformly adsorbed (step S27). FIG. 8 shows this state.

  Here, the push-up member 14 that has pushed the slack SA portion of the adhesive sheet S into the groove 15A is lowered. Even when the push-up member 14 is lowered, the slack SA portion of the adhesive sheet S is adsorbed on the inner surface of the groove 15A, so that the slack SA does not hang down.

  Next, the ultrasonic welding tool 16 is moved forward, the base portion that is the base portion of the slack SA of the adhesive sheet S is pressed at the tip portion, the base portions are brought into contact with each other, and pressed against the wall of the groove 15A of the housing 15. Next, the ultrasonic welding tool 16 oscillates ultrasonic waves to locally weld the base of the slack SA of the adhesive sheet S at the tip. Along with this, the θ table 11 is rotated once and welded over the entire circumference of the base of the annular slack SA (step S29).

  FIG. 9 shows this state. In the adhesive sheet S, the base SB of the slack SA is pressed by the tip of the ultrasonic welding tool 16 while the portion where the wafer W is adhered is expanded and the interval between the chips T is expanded, and the bases SB are Is pressed against the wall of the groove 15A and is locally welded by ultrasonic vibration.

  Here, the ultrasonic welding tool 16 is moved backward, the electromagnetic valve 21A is operated to release the pressure reduction in the groove 15A of the housing 15, and the housing 15 is raised. Next, the solenoid valve 21B and the solenoid valve 21C are operated to release the chucking force of the chuck stage 6 and the frame chuck 13. (Step S31).

  Through the above steps, the space between the chips T of the wafer W adhered to the adhesive sheet S and diced into individual chips T is widened, and in this state, the adhesive sheet S is loosened near the outer periphery. Since the roots are picked and fixed, and the distance between the individual chips T is kept wide, the diced wafer W can be transported together with the frame.

  This expansion is preferably performed in the dicing apparatus immediately after the dicing process, and the wafer W is thus conveyed in the frame while the state in which the distance between the chips T is enlarged is maintained. Therefore, it is possible to prevent the edges of adjacent chips from coming into contact with each other, and the occurrence of chipping or microcracks in the edge portion.

  Moreover, since the expansion of the adhesive sheet S and the root (base) of the looseness of the adhesive sheet S are performed in an area different from the dicing area, the operation rate of the dicing apparatus does not decrease due to the expansion.

  In the embodiment described above, the chuck stage 6 is lifted upward, expanded, clamped, and lowered to form the slack SA on the adhesive sheet S. However, the present invention is not limited to this, and the frame F is pushed downward. The adhesive sheet S may be expanded and clamped, and then lifted upward to form a slack SA on the adhesive sheet S.

  Further, although the base SB of the slack SA of the pressure-sensitive adhesive sheet S is ultrasonically welded, it is not limited to ultrasonic welding, and may be locally welded by thermocompression bonding, and is not limited to welding, and may be bonded by an adhesive.

The front view showing the conveyance means of the expanding apparatus which concerns on embodiment of this invention The top view showing the conveyance means of the expanding apparatus which concerns on embodiment of this invention The front view showing the expansion means and sheet | seat slack part fixing means of the expanding apparatus which concerns on embodiment of this invention Flowchart 1 for explaining an expanding method according to an embodiment of the present invention Flowchart 2 for explaining the expanding method according to the embodiment of the present invention Front view explaining the state of the wafer carried into the expanded area Front view explaining the expansion operation Front view 1 explaining the sheet slack portion fixing operation Front view 2 explaining the sheet slack portion fixing operation Perspective view showing wafer mounted on frame

Explanation of symbols

  6 ... Chuck stage, 8 ... Sheet holding means, 10 ... Expanding device, 10A ... Expanding means, 10B ... Sheet slack fixing means, 16 ... Ultrasonic welding tool, 30 ... Conveying means, 33 ... Frame adsorbing means, 34 ... Sheet Holding means, F ... frame, S ... adhesive sheet, SA ... slack, SB ... base of slack portion, T ... chip, W ... wafer (plate)

Claims (4)

A plate-like material that is attached to a pressure-sensitive adhesive sheet and mounted on a ring-shaped frame via the pressure-sensitive adhesive sheet and diced into individual chips is expanded after dicing and then the individual chips. In the expanding method to enlarge the interval between
After dicing the plate-like object, the plate-like object is conveyed to another area in the same apparatus together with the chuck stage without removing the plate-like object
Expand the adhesive sheet in another area in the same device,
Maintain the expanded state of the adhesive sheet on the expanded chuck stage,
Form a slack in the adhesive sheet on the outer part of the chuck stage,
An expanding method characterized in that the expanded state of the pressure-sensitive adhesive sheet is maintained even when the plate-like object is detached from the chuck stage by pinching and fixing the base of the slack portion of the pressure-sensitive adhesive sheet.   The expanding method according to claim 1, wherein a base portion of the loosened portion of the pressure-sensitive adhesive sheet is fixed by welding or adhesion. A plate-like material that is attached to a pressure-sensitive adhesive sheet and mounted on a ring-shaped frame via the pressure-sensitive adhesive sheet and diced into individual chips is expanded after dicing and then the individual chips. An expanding device that expands the interval between the dicing devices, wherein the plate-like material is removed from the chuck stage after the plate-like material is diced. Transport means for transporting from the dicing area to another area in the dicing machine,
Expanding means for expanding the adhesive sheet in another area in the dicing apparatus;
Sheet holding means for holding the expanded state of the adhesive sheet on the chuck stage; and sheet slack portion fixing means for pinching and fixing the base of the slack portion generated in the portion where the expanded state of the adhesive sheet is not held. Have
The expanded state of the adhesive sheet is maintained even when the sheet holding by the sheet holding unit is released, and the plate-like object can be conveyed along with the frame while maintaining the enlarged chip interval. Expanding device.   The expanding apparatus according to claim 3, wherein an ultrasonic welding tool is used for the sheet slack portion fixing means.

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