KR100986020B1 - An apparatus for laminating photosensitive resin changable the photosensitive resin automatically and a method of laminating using the same - Google Patents

Abstract

The present invention relates to a photosensitive resin laminating apparatus capable of automatically replacing the photosensitive resin and a laminating method using the same, a substrate transfer unit for transferring a substrate, and a photosensitive resin supply unit for automatically replacing and supplying a plurality of photosensitive resins, And an adsorber for absorbing the photosensitive resin supplied from the photosensitive resin supply unit and guiding the substrate, and a pressing roller for pressing the substrate and the photosensitive resin passing therebetween while rotating up and down. In addition, the time required for replacement can be shortened and the lead time of the entire process can be shortened by the automatic replacement and supply of the photosensitive resin.

Photosensitive resin, feed roller, feed lead-out, adsorber, cutting unit, compression roller

Description

Photosensitive resin laminating device that can replace the photosensitive resin automatically and laminating method using the same {AN APPARATUS FOR LAMINATING

The present invention relates to a photosensitive resin laminating apparatus capable of automatically replacing the photosensitive resin and a laminating method using the same, and more particularly, to automatically replace a plurality of photosensitive resins and to laminate the photosensitive resin on a substrate. It relates to a photosensitive resin laminating apparatus and a laminating method using the same.

Printed circuit boards used in semiconductor devices and flat panel display devices are manufactured through a photolithography process that proceeds with a series of processes such as resist coating, exposure, development and etching.

The coating method of the resist is a printing method and a photographic technique. The photographic technique has an exposure step, and is divided into an ink method using a liquid solution and a dry film method in which a photosensitive object is thinly coated on a surface of a material to be pressed (substrate prepared for pattern formation).

The ink method is much easier than the dry film method of keeping the thickness thin because the solution is completely applied even if the surface of the original film material is rough or grooves or scratches in the process of high density circuit.

However, since this method uses liquid solvent, it affects the health of the worker, and if there is an artificial through hole, it is impossible to use it. There is a disadvantage.

On the other hand, unlike the liquid-type photosensitive agent, the dry film method can be used without a drying step after coating, and can be uniformly applied to the thickness. In addition, lamination is possible even when there is a through hole. In this case, the laminating is mainly performed by a rolling operation in which a dry film is supplied by a feed roller which is manually replaced and pressed by applying heat to the roller in a state where it is applied to a substrate. The rolling operation is accomplished by placing the film on the substrate and then passing the film and the substrate between two rollers that are placed up and down and rotate. While passing between the film and the rotating roller, the roller is in direct contact with the film to adhere the film to the substrate while applying constant heat as well as even pressure across the entire surface of the film during rolling.

However, in the related art, since the operator manually replaces the dry film, it takes a long time to replace the dry film.

In addition, when another type of dry film is to be used, there was a problem that the worker must replace the dry film one by one.

The present invention has been made to solve the problems of the prior art as described above, an object of the present invention is to automatically replace a plurality of photosensitive resins and a photosensitive resin laminating apparatus capable of laminating the photosensitive resin on the substrate (same) It is to provide a laminating method used.

A photosensitive resin laminating apparatus according to a preferred embodiment of the present invention, a substrate transfer unit for transferring a substrate, a photosensitive resin supply unit for automatically replacing and supplying a plurality of photosensitive resins, the photosensitive resin supplied from the photosensitive resin supply unit It characterized in that it comprises an adsorber for guiding to the substrate by adsorbing, and a compaction roller for pressing the substrate and the photosensitive resin passing through between while adsorbing and rotating up and down.

The apparatus may further include a preheating unit configured to preheat the substrate before the photosensitive resin is applied to the substrate.

In addition, the photosensitive resin is characterized in that the dry film (dry film).

The photosensitive resin supply unit may include a plurality of supply rollers for supplying a plurality of photosensitive resins wound in a roll shape, and a plurality of supply guiding rollers for contacting the supply rollers to guide the photosensitive resin. It is done.

In addition, it is characterized in that the supply guiding roller is also replaced when the supply roller is replaced.

In addition, it characterized in that it comprises a supply lead-out for taking out one end of the photosensitive resin wound on the feed roller.

In addition, the lower end of the absorber is characterized in that the cutting portion for cutting the photosensitive resin according to the length of the substrate is installed.

In addition, the cutting portion is characterized in that the sensor portion for measuring the position of the photosensitive resin and the length of the photosensitive resin supplied to the substrate is mounted.

In addition, it characterized in that it further comprises a cover film peeling part for peeling off the cover film formed on top of the photosensitive resin.

In addition, the pressing roller is characterized in that consisting of the upper pressing roller and the lower pressing roller having a heater therein to thermally press the substrate and the photosensitive resin.

In addition, the pressing roller is provided in contact with the pressing roller in a state in which an upper pressing roller and a lower pressing roller for pressing the substrate and the photosensitive resin, and a heater therein, are provided in contact with the pressing roller to supply heat to the pressing roller. It characterized in that it comprises a backup roller.

In the photosensitive resin laminating method according to a preferred embodiment of the present invention, (A) the supply lead-out portion at one end of the first photosensitive resin wound on the first supply roller of the plurality of supply rollers of the photosensitive resin supply unit for supplying a plurality of photosensitive resins Raising the supply lead-out portion so as to be arranged; (B) driving the first supply roller to draw out the first photosensitive resin; (C) the first photosensitive resin fed from the first supply roller by an adsorber; Guiding the substrate to the substrate transferred from the substrate transfer unit in a state of adsorbing and coating the first photosensitive resin on the substrate, and (D) the substrate and the first photosensitive resin by pressing rollers which rotate up and down. It characterized in that it comprises a step of pressing.

At this time, between the step (B) and (C), characterized in that it further comprises the step of lowering the supply lead-out.

Further, after the step (D), (E) recovering the supplied first photosensitive resin by rotating the first supply roller in reverse, and (F) the first supply roller to supply the second photosensitive resin. Is replaced with a second feed roller and the second photosensitive resin is supplied to automatically replace the photosensitive resin.

In addition, the substrate is preheated by the preheating unit before the photosensitive resin is applied to the substrate.

In addition, the photosensitive resin is characterized in that the dry film (dry film).

In addition, the photosensitive resin supply unit is characterized in that it comprises a plurality of supply guiding rollers for guiding the photosensitive resin in contact with a plurality of supply rollers for supplying a plurality of photosensitive resins wound in a roll form.

In addition, when the supply roller is replaced, the supply guiding roller is also characterized in that it is replaced together.

In addition, in the step (C), the first photosensitive resin to be guided to the substrate is supplied in a state cut to match the length of the substrate by a cutting unit installed on the lower end of the absorber.

In addition, the cutting portion is characterized in that the sensor portion for measuring the position of the photosensitive resin and the length of the photosensitive resin supplied to the substrate is mounted.

In addition, in the step (C), the first photosensitive resin is applied to the substrate in a state in which the cover film formed on top of the first photosensitive resin by the cover film peeling unit is peeled off.

In addition, the pressing roller is characterized in that consisting of the upper pressing roller and the lower pressing roller having a heater therein to thermally press the substrate and the photosensitive resin.

In addition, the pressing roller is provided in contact with the pressing roller in a state in which an upper pressing roller and a lower pressing roller for pressing the substrate and the photosensitive resin, and a heater therein, are provided to contact the pressing roller to supply heat to the pressing roller. It characterized in that it comprises a backup roller.

The features and advantages of the present invention will become more apparent from the following detailed description based on the accompanying drawings.

Prior to this, the terms or words used in this specification and claims should not be interpreted in their ordinary and dictionary meanings, and the inventors will be required to properly define the concepts of terms in order to best describe their own invention. On the basis of the principle that it can be interpreted as meaning and concept corresponding to the technical idea of the present invention.

According to the present invention, by automatically replacing and supplying the photosensitive resin, it is possible not only to reduce the time required for replacement but also to shorten the lead time of the entire process.

In addition, by automatically supplying various types of photosensitive resin, workers need to replace the photosensitive resin one by one, thereby reducing labor costs.

The objects, specific advantages and novel features of the present invention will become more apparent from the following detailed description and the preferred embodiments associated with the accompanying drawings. In this specification, the terms "first", "second", and the like are not used to indicate any quantity, order, or importance, but are used to distinguish the components from each other. However, it should be noted that the same components are provided with the same number as much as possible even though they are shown in different drawings. In addition, in describing the present invention, if it is determined that the detailed description of the related known technology may unnecessarily obscure the subject matter of the present invention, the detailed description thereof will be omitted.

 Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Photosensitive Resin Laminating Device

1 is a perspective view showing a photosensitive resin laminating apparatus according to a preferred embodiment of the present invention. Hereinafter, the photosensitive resin laminating apparatus 100 according to the present exemplary embodiment will be described with reference to FIG. 1.

The photosensitive resin laminating apparatus 100 according to the present embodiment includes a substrate transfer part 120, a photosensitive resin supply unit 130, an adsorber 150, and a compression roller 170.

The substrate transfer part 120 is for transporting the substrate 110. The substrate transfer part 120 contacts the dummy region of the substrate 110 by a plurality of rollers driven by a roller driving means (not shown) and moves the substrate by contact friction. Transfer.

In this case, the substrate 110 transferred by the substrate transfer unit 120 is preferably heated to an appropriate temperature level in order to improve the adhesive force with the photosensitive resin (R) before the photosensitive resin (R) is laminated. Therefore, as shown in FIG. 1, it is preferable that a preheater 125 is provided to preheat the substrate 110 before the photosensitive resin R is laminated on the substrate 110 by the adsorber 150. . The preheater 125 is provided with a drying unit (not shown) that emits hot air to heat the substrate 110.

The photosensitive resin supply unit 130 is for supplying the photosensitive resin R laminated to the substrate 110. In the present embodiment, the photosensitive resin supply unit 130 is configured to automatically replace and supply a plurality of photosensitive resins as necessary. do. Here, the photosensitive resin supply unit 130 is preferably provided symmetrically up / down so as to apply the photosensitive resin (R) on one side and / or both sides of the substrate (110). In this case, the photosensitive resin R used is, for example, a dry film (DF).

The photosensitive resin supply unit 130 is in contact with the supply roller 132 for supplying the photosensitive resin R and the supply roller 132 in a state in which the photosensitive resin R is wound in the form of a roll to contact the photosensitive resin R. It is composed of a guiding feed guiding roller 134.

Here, the feed roller 132 is provided with a plurality in order to supply a plurality of photosensitive resin (R). For example, as shown in FIG. 1, the supply roller 132 includes a first supply roller 132a on which the first photosensitive resin Ra is wound and a second supply roller on which the second photosensitive resin Rb is wound. 132b, and a third supply roller 132c in which the third photosensitive resin Rc is wound. However, this is merely an example for convenience of description and illustration, and the number of the supply rollers 132 may be changed as necessary.

At this time, the first to third supply rollers 132 are automatically replaceable to supply the desired photosensitive resin. For example, in the case of supplying the first photosensitive resin Ra, the first supply roller 132a may be replaced by moving toward the side where the supply lead-out part 136 described later is disposed.

Next, the supply guiding roller 134 is provided in the same number as the supply roller 132, for example, as shown in Figure 1, the first to third supply guiding rollers (134a, 134b, 134c) It can be configured as. At this time, the first to third supply guiding rollers (134a, 134b, 134c) are installed to be replaced together in accordance with the replacement of the supply roller 132.

The photosensitive resin supply unit 130 is preferably disposed at one end of the photosensitive resin (R) wound on the supply roller 132 is provided with a supply lead-out portion 136 for taking out the photosensitive resin (R).

Here, the supply lead-out portion 136 is in contact with one end of the photosensitive resin (R) rotated by the rotation of the supply roller 132 to guide the photosensitive resin (R) to the substrate, if necessary feed roller It is installed to be movable up and down to be in contact with 132, and serves to guide the first photosensitive resin (R) supplied to the guide roller 140.

On the other hand, the guide roller 140 serves to guide the photosensitive resin (R) transmitted from the photosensitive resin supply unit 130, the photosensitive resin (R) is finally maintained while maintaining a constant tension (tension) It is placed in an appropriate position so that it can be guided to.

The adsorber 150 is for guiding the substrate 110 in a state in which the photosensitive resin R transmitted from the guide roller 140 is adsorbed. Here, the adsorber 150 helps to apply the photosensitive resin (R) on the substrate 110 passing through the lower portion in the state in which the photosensitive resin (R) is adsorbed.

The lower end of the adsorber 150 is provided with a cutting unit 152 for cutting the photosensitive resin (R) in accordance with the length of the substrate (110). Here, the cutting unit 152 is operated in the cutting mode and the preparation mode. That is, the photosensitive resin R is in the preparation mode when the photosensitive resin R is applied to the substrate 110 and then switched to the cutting mode when the photosensitive resin R is applied according to the length of the substrate 110. ) Will be cut.

To this end, the cutting unit 152 is preferably provided with a sensor unit (not shown) for measuring the position of the photosensitive resin (R) and the length supplied. That is, the sensor unit controls the cutting unit 152 by measuring whether the photosensitive resin is applied to the substrate 110 or the length of the photosensitive resin R applied to the substrate 110. In addition, the sensor unit detects whether the photosensitive resin R is supplied to the cutting unit 152 and performs a function of controlling the photosensitive resin supply unit 130.

On the other hand, the photosensitive resin (R) is to be supplied with a cover film attached to the upper portion, it is preferable to be applied to the substrate with the cover film removed, the photosensitive resin (R) guided from the absorber 150 The cover film peeling mechanism 160 is preferably provided to be applied to the substrate 110 in a state where the cover film is removed. Cover film peeling mechanism 160 may be composed of a plurality of rollers disposed on the side of the adsorber (150).

The pressing roller 170 is for pressing the photosensitive resin (R) applied to the substrate 110, and comprises an upper pressing roller 170a and a lower pressing roller 170b which rotate by being engaged up and down.

Here, it is preferable that the upper compression roller 170a and the lower compression roller 170b have a heater therein in order to use thermal compression for improving the compression performance.

On the other hand, the pressing roller 170 is the upper pressing roller (170a) and the lower pressing roller (170b) for pressing, and the upper backup roller having a heater therein to supply heat to the pressing roller 170 (not shown) C) and a lower backup roller (not shown).

Photosensitive Resin Laminating Method

2 to 6 are views for explaining a method of laminating a photosensitive resin according to a preferred embodiment of the present invention. Hereinafter, the photosensitive resin laminating method according to the present embodiment will be described with reference to FIGS. 2 to 6.

The photosensitive resin laminating method according to the present embodiment is characterized in that the required photosensitive resin is automatically replaced and supplied.

First, as shown in FIGS. 2A to 2B, the first coil wound on the first feed roller 132a in a state in which the first feed roller 132a is disposed at the withdrawal position to supply the first photosensitive resin Ra The supply lead-out part 136 is placed upstream so that the supply lead-out part 136 is arranged at one end of the photosensitive resin Ra. FIG. 2B illustrates a state in which the supply lead-out portion 136 is disposed at one end of the first photosensitive resin Ra to assist withdrawal of the photosensitive resin.

Next, as shown in FIG. 3, the 1st photosensitive resin Ra is taken out by driving the 1st supply roller 132a. In this case, the guide roller 140 guides the first photosensitive resin Ra supplied from the first supply roller 132a to the adsorber 150. At this time, the supply lead-out unit 136 is lowered again.

Next, as shown in FIG. 4, the adsorber 150 guides and applies the first photosensitive resin Ra to the substrate 110 transferred from the substrate transfer part 120, and then rotates the upper and lower surfaces by interlocking the upper and lower surfaces. The substrate 110 and the first photosensitive resin Ra are compressed by the roller 170 to coat the first photosensitive resin Ra on the substrate 110.

In this case, although not shown in detail in FIG. 4, the sensor unit senses whether the first photosensitive resin Ra is applied according to the length of the substrate 110, and controls the cutting unit 152 to adjust the photosensitive resin R to an appropriate length. Will cut.

In addition, the cover film peeling mechanism 160 removes the cover film of the first photosensitive resin Ra so that the first photosensitive resin Ra having the cover film removed is applied to the substrate 110.

5 and 6 illustrate a process in which the laminating apparatus 100 automatically replaces the photosensitive resin when the supply of the first photosensitive resin Ra is stopped and the second photosensitive resin Rb is supplied.

First, as shown in FIG. 5, the 1st photosensitive resin Ra which was supplied by rotating the 1st supply roller 132a reversely is collect | recovered.

Next, as shown in FIG. 6, in order to supply the second photosensitive resin Rb, the feed roller 132 is rotated to replace the feed roller so that the second feed roller 132b is positioned at the extraction position. In order to supply the photosensitive resin Rb, the supply lead-out portion 136 is placed up at one end of the second photosensitive resin Rb. Next, as shown in FIGS. 3 to 4, the second photosensitive resin Rb is supplied.

Although the present invention has been described in detail with reference to specific examples, this is for explaining the present invention in detail, and the photosensitive resin laminating apparatus and the laminating method using the same which can automatically replace the photosensitive resin according to the present invention are not limited thereto. It will be apparent that modifications and improvements are possible by those skilled in the art within the technical idea of the present invention.

All simple modifications and variations of the present invention fall within the scope of the present invention, and the specific scope of protection of the present invention will be apparent from the appended claims.

1 is a perspective view showing a photosensitive resin laminating apparatus according to a preferred embodiment of the present invention; And

2 to 6 are views for explaining a method for laminating the photosensitive resin according to a preferred embodiment of the present invention.

<Description of main parts of drawing>

110: substrate 120: substrate transfer unit

125: preheating unit 130: photosensitive resin supply unit

132: supply roller 134: supply guiding roller

136: supply lead portion 140: guide roller

150: adsorber 152: cutting unit

160: cover film peeling mechanism 170: pressing roller

Claims (23)

A substrate transfer unit transferring a substrate; A photosensitive resin supply unit for automatically replacing and supplying a plurality of photosensitive resins; An adsorber for adsorbing the photosensitive resin supplied from the photosensitive resin supply unit and guiding the photosensitive resin; And Compression rollers for crimping the substrate and the photosensitive resin which are passed through them while being rotated up and down. Photosensitive resin laminating apparatus comprising a. The method according to claim 1, And a preheating unit for preheating the substrate before the photosensitive resin is applied to the substrate. The method according to claim 1, The photosensitive resin laminating apparatus, characterized in that the dry film (dry film). The method according to claim 1, The photosensitive resin supply unit, A plurality of supply rollers for supplying a plurality of the photosensitive resins wound in rolls; And A plurality of supply guiding rollers for contacting the feed rollers to guide the photosensitive resin Photosensitive resin laminating apparatus comprising a. The method according to claim 4, The photosensitive resin laminating apparatus, wherein the supply guiding roller is also replaced when the supply roller is replaced. The method according to claim 4, A photosensitive resin laminating apparatus comprising a supply lead-out unit for extracting one end of the photosensitive resin wound on the feed roller. The method according to claim 1, A photosensitive resin laminating device, characterized in that the lower end of the absorber is provided with a cutting unit for cutting the photosensitive resin in accordance with the length of the substrate. The method of claim 7, The cutting part is equipped with a sensor unit for measuring the position of the photosensitive resin and the length of the photosensitive resin supplied to the substrate is mounted. The method according to claim 1, The photosensitive resin laminating apparatus further comprises a cover film peeling part for peeling off the cover film formed on the photosensitive resin. The method according to claim 1, The pressing roller, A photosensitive resin laminating apparatus, comprising: an upper pressing roller and a lower pressing roller having a heater therein to thermally compress the substrate and the photosensitive resin. The method according to claim 1, The pressing roller, An upper press roller and a lower press roller for pressing the substrate and the photosensitive resin; And The backup roller which is installed in contact with the pressing roller with a heater therein and supplies heat to the pressing roller. Photosensitive resin laminating apparatus comprising a. (A) raising the supply lead-out portion such that the supply lead-out portion is arranged at one end of the first photosensitive resin wound on the first supply roller of the plurality of supply rollers of the photosensitive resin supply unit for supplying the plurality of photosensitive resins; (B) driving the first feed roller to withdraw the first photosensitive resin; (C) guiding the first photosensitive resin to the substrate by guiding to the substrate transferred from the substrate transfer unit while the adsorber has absorbed the first photosensitive resin supplied from the first supply roller; And (D) pressing the substrate and the first photosensitive resin by a pressing roller rotating up and down Photosensitive resin laminating method comprising a. The method according to claim 12, Between step (B) and step (C), And lowering the supply lead-out portion. The method according to claim 12, After the step (D), (E) recovering the supplied first photosensitive resin by rotating the first supply roller in reverse; And (F) replacing the first supply roller with a second supply roller and supplying the second photosensitive resin to supply a second photosensitive resin The photosensitive resin laminating method according to claim 1, wherein the photosensitive resin is automatically replaced. The method according to claim 12, And the substrate is preheated by a preheating unit before the photosensitive resin is applied to the substrate. The method according to claim 12, The photosensitive resin laminating method, characterized in that the dry film (dry film). The method according to claim 12, The photosensitive resin supply unit, A plurality of supply guiding rollers for guiding the photosensitive resin in contact with a plurality of supply rollers for supplying a plurality of photosensitive resin wound in a roll form Photosensitive resin laminating method comprising a. The method according to claim 17, And the supply guiding roller is also replaced when the supply roller is replaced. The method according to claim 12, In the step (C), The first photosensitive resin to be guided to the substrate is supplied in a state in which it is cut in accordance with the length of the substrate by a cutting unit provided on the lower end of the absorber. The method of claim 19, And the sensor portion is mounted on the cutting portion to measure the position of the photosensitive resin and the length of the photosensitive resin supplied to the substrate. The method according to claim 12, In the step (C), And the first photosensitive resin is applied to the substrate in a state in which the cover film formed on the first photosensitive resin is peeled off by the cover film peeling part. The method according to claim 12, The pressing roller, A photosensitive resin laminating method, comprising: an upper pressing roller and a lower pressing roller having a heater therein to thermally compress the substrate and the photosensitive resin. The method according to claim 12, The pressing roller, An upper press roller and a lower press roller for pressing the substrate and the photosensitive resin; And The backup roller which is installed in contact with the pressing roller with a heater therein and supplies heat to the pressing roller. Photosensitive resin laminating method comprising a.

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