KR100967034B1 - 실투가 조절된 용융 석영 제품 - Google Patents
실투가 조절된 용융 석영 제품 Download PDFInfo
- Publication number
- KR100967034B1 KR100967034B1 KR1020047018171A KR20047018171A KR100967034B1 KR 100967034 B1 KR100967034 B1 KR 100967034B1 KR 1020047018171 A KR1020047018171 A KR 1020047018171A KR 20047018171 A KR20047018171 A KR 20047018171A KR 100967034 B1 KR100967034 B1 KR 100967034B1
- Authority
- KR
- South Korea
- Prior art keywords
- coating
- silica slurry
- exposed surface
- doped
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 229
- 239000005350 fused silica glass Substances 0.000 title claims abstract description 73
- 150000001768 cations Chemical class 0.000 claims abstract description 109
- 238000000576 coating method Methods 0.000 claims abstract description 98
- 239000011248 coating agent Substances 0.000 claims abstract description 96
- 229910052751 metal Inorganic materials 0.000 claims abstract description 77
- 239000002184 metal Substances 0.000 claims abstract description 77
- 239000010453 quartz Substances 0.000 claims abstract description 71
- 238000000034 method Methods 0.000 claims abstract description 65
- 229910052906 cristobalite Inorganic materials 0.000 claims abstract description 25
- 239000013078 crystal Substances 0.000 claims abstract description 18
- 229910052788 barium Inorganic materials 0.000 claims abstract description 12
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000011575 calcium Substances 0.000 claims abstract description 10
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 claims abstract description 9
- 229910052791 calcium Inorganic materials 0.000 claims abstract description 9
- 229910052712 strontium Inorganic materials 0.000 claims abstract description 9
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 claims abstract description 9
- 229910052784 alkaline earth metal Inorganic materials 0.000 claims description 16
- 150000001342 alkaline earth metals Chemical class 0.000 claims description 15
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 14
- 150000002910 rare earth metals Chemical class 0.000 claims description 14
- 229910052783 alkali metal Inorganic materials 0.000 claims description 11
- 150000001340 alkali metals Chemical class 0.000 claims description 11
- 238000001035 drying Methods 0.000 claims description 10
- 230000007704 transition Effects 0.000 claims description 10
- 230000008018 melting Effects 0.000 claims description 5
- 238000002844 melting Methods 0.000 claims description 5
- 238000005507 spraying Methods 0.000 claims description 5
- 239000002253 acid Substances 0.000 claims description 4
- 239000007789 gas Substances 0.000 claims description 4
- 150000004820 halides Chemical class 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000010422 painting Methods 0.000 claims description 4
- 150000007513 acids Chemical class 0.000 claims description 3
- 239000003513 alkali Substances 0.000 claims description 3
- 229910001422 barium ion Inorganic materials 0.000 claims 4
- BHPQYMZQTOCNFJ-UHFFFAOYSA-N Calcium cation Chemical compound [Ca+2] BHPQYMZQTOCNFJ-UHFFFAOYSA-N 0.000 claims 2
- 229910001424 calcium ion Inorganic materials 0.000 claims 2
- 150000001457 metallic cations Chemical class 0.000 claims 2
- 229910001427 strontium ion Inorganic materials 0.000 claims 2
- 238000005498 polishing Methods 0.000 claims 1
- 239000002002 slurry Substances 0.000 abstract description 23
- 239000008119 colloidal silica Substances 0.000 abstract description 9
- 238000004031 devitrification Methods 0.000 abstract description 9
- 230000006911 nucleation Effects 0.000 abstract description 4
- 238000010899 nucleation Methods 0.000 abstract description 4
- 239000002019 doping agent Substances 0.000 description 11
- IWOUKMZUPDVPGQ-UHFFFAOYSA-N barium nitrate Chemical compound [Ba+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O IWOUKMZUPDVPGQ-UHFFFAOYSA-N 0.000 description 8
- 238000001354 calcination Methods 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 238000007524 flame polishing Methods 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 4
- 239000000835 fiber Substances 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 239000000725 suspension Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 150000001553 barium compounds Chemical class 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 150000002484 inorganic compounds Chemical class 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 229940118888 barium cation Drugs 0.000 description 1
- XDFCIPNJCBUZJN-UHFFFAOYSA-N barium(2+) Chemical compound [Ba+2] XDFCIPNJCBUZJN-UHFFFAOYSA-N 0.000 description 1
- -1 but not limited to Chemical class 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000003584 silencer Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/06—Surface treatment of glass, not in the form of fibres or filaments, by coating with metals
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
- C30B35/002—Crucibles or containers
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B32/00—Thermal after-treatment of glass products not provided for in groups C03B19/00, C03B25/00 - C03B31/00 or C03B37/00, e.g. crystallisation, eliminating gas inclusions or other impurities; Hot-pressing vitrified, non-porous, shaped glass products
- C03B32/02—Thermal crystallisation, e.g. for crystallising glass bodies into glass-ceramic articles
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C10/00—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C10/00—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition
- C03C10/0009—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition containing silica as main constituent
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/213—SiO2
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/24—Doped oxides
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Ceramic Engineering (AREA)
- Dispersion Chemistry (AREA)
- Metallurgy (AREA)
- Thermal Sciences (AREA)
- Physics & Mathematics (AREA)
- Glass Melting And Manufacturing (AREA)
- Glass Compositions (AREA)
- Surface Treatment Of Glass (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/063,754 | 2002-05-10 | ||
| US10/063,754 US6875515B2 (en) | 2002-05-10 | 2002-05-10 | Fused quartz article having controlled devitrification |
| PCT/US2003/012599 WO2003095384A1 (en) | 2002-05-10 | 2003-04-24 | Fused quartz article having controlled devitrification |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20050004851A KR20050004851A (ko) | 2005-01-12 |
| KR100967034B1 true KR100967034B1 (ko) | 2010-06-30 |
Family
ID=29399072
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020047018171A Expired - Lifetime KR100967034B1 (ko) | 2002-05-10 | 2003-04-24 | 실투가 조절된 용융 석영 제품 |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US6875515B2 (enExample) |
| EP (1) | EP1506142B1 (enExample) |
| JP (1) | JP4700340B2 (enExample) |
| KR (1) | KR100967034B1 (enExample) |
| CN (1) | CN1313407C (enExample) |
| AU (1) | AU2003231062A1 (enExample) |
| TW (1) | TW200400924A (enExample) |
| WO (1) | WO2003095384A1 (enExample) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7118789B2 (en) | 2001-07-16 | 2006-10-10 | Heraeus Shin-Etsu America | Silica glass crucible |
| US6641663B2 (en) * | 2001-12-12 | 2003-11-04 | Heracus Shin-Estu America | Silica crucible with inner layer crystallizer and method |
| JP3970692B2 (ja) * | 2002-05-31 | 2007-09-05 | 信越化学工業株式会社 | プリフォーム製造方法 |
| JP5050363B2 (ja) * | 2005-08-12 | 2012-10-17 | 株式会社Sumco | 半導体シリコン基板用熱処理治具およびその製作方法 |
| US20070151504A1 (en) * | 2005-10-19 | 2007-07-05 | General Electric Company | Quartz glass crucible and method for treating surface of quartz glass crucible |
| US9139932B2 (en) | 2006-10-18 | 2015-09-22 | Richard Lee Hansen | Quartz glass crucible and method for treating surface of quartz glass crucible |
| DE102007036407B4 (de) | 2007-02-28 | 2010-01-28 | Schott Ag | Verfahren zur Herstellung einer beschichteten dreidimensional verformten Scheibe aus Glaskeramik |
| JP5146402B2 (ja) * | 2009-05-19 | 2013-02-20 | トヨタ自動車株式会社 | 炭素粒子含有被膜の成膜方法、伝熱部材、パワーモジュール、及び車両用インバータ |
| US20110129784A1 (en) * | 2009-11-30 | 2011-06-02 | James Crawford Bange | Low thermal expansion doped fused silica crucibles |
| JP5610570B2 (ja) * | 2010-07-20 | 2014-10-22 | 株式会社Sumco | シリカガラスルツボ、シリコンインゴットの製造方法 |
| CN102453956B (zh) * | 2010-10-27 | 2016-03-23 | 杭州先进石英材料有限公司 | 一种石英玻璃坩埚及其制备方法 |
| KR101697027B1 (ko) * | 2012-06-25 | 2017-01-16 | 실리코르 머티리얼즈 인코포레이티드 | 실리콘 용융물의 정제용 내화 도가니의 표면용 라이닝 및 용융 및 추가적인 방향성 고체화를 위하여 상기 도가니(들)를 이용하는 실리콘 용융물의 정제 방법 |
| CN105382673B (zh) * | 2015-11-09 | 2018-01-09 | 盐城工学院 | 利用复合粉末介质火抛水钻珠坯的方法 |
| EP3428132B1 (de) | 2017-07-10 | 2023-08-30 | Heraeus Quarzglas GmbH & Co. KG | Quarzglasbauteil mit hoher thermischer stabilität, halbzeug dafür und verfahren zur herstellung desselben |
| CN107793021B (zh) * | 2017-10-31 | 2021-07-30 | 江苏亨通光导新材料有限公司 | 适于光纤预制棒烧结炉的微晶化炉芯管及快速微晶化方法 |
| CN113430479B (zh) * | 2021-06-25 | 2022-05-20 | 常州大学 | 钛及钛合金表面碳纳米材料改性的Ti-Al-Si-C镀层及其制备方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63236722A (ja) * | 1987-03-26 | 1988-10-03 | Shinetsu Sekiei Kk | 石英ガラス製品及びその製造方法 |
| US20040102666A1 (en) * | 2002-11-08 | 2004-05-27 | Catalytic Distillation Technologies | Process for the selective hydrogenation of alkynes |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4102666A (en) | 1968-02-22 | 1978-07-25 | Heraeus-Schott Quarzschmelze Gmbh | Method of surface crystallizing quartz |
| US3972704A (en) * | 1971-04-19 | 1976-08-03 | Sherwood Refractories, Inc. | Apparatus for making vitreous silica receptacles |
| DE2340546A1 (de) * | 1973-08-10 | 1975-02-27 | Pfaudler Werke Ag | Metallisches implantat und verfahren zu seiner herstellung |
| US4169168A (en) * | 1978-08-24 | 1979-09-25 | Zenith Radio Corporation | Process for manufacturing microporous cathode coatings |
| US5389582A (en) | 1985-11-06 | 1995-02-14 | Loxley; Ted A. | Cristobalite reinforcement of quartz glass |
| US5053359A (en) | 1989-03-24 | 1991-10-01 | Pyromatics, Inc. | Cristobalite reinforcement of high silica glass |
| JPH068181B2 (ja) | 1987-03-26 | 1994-02-02 | 信越石英株式会社 | 半導体工業用石英ガラス製品 |
| JPH01126238A (ja) * | 1987-11-09 | 1989-05-18 | Shinetsu Sekiei Kk | 石英ガラス炉芯管 |
| US5316854A (en) * | 1991-12-06 | 1994-05-31 | Ppg Industries, Inc. | Glass or quartz articles having high temperature UV absorbing coatings containing ceria |
| US5674792A (en) * | 1993-11-12 | 1997-10-07 | Heraeus Quarzglas Gmbh | Shaped body having a high silicon dioxide content and a process for producing such shaped bodies |
| US5976247A (en) | 1995-06-14 | 1999-11-02 | Memc Electronic Materials, Inc. | Surface-treated crucibles for improved zero dislocation performance |
| US5980629A (en) | 1995-06-14 | 1999-11-09 | Memc Electronic Materials, Inc. | Methods for improving zero dislocation yield of single crystals |
| EP0911429A1 (en) * | 1997-09-30 | 1999-04-28 | Heraeus Quarzglas GmbH | Quartz glass crucible for producing silicon single crystal and method for producing the crucible |
| JP3583604B2 (ja) * | 1998-01-12 | 2004-11-04 | 東芝セラミックス株式会社 | 石英ガラスルツボとその製造方法 |
| JP2002029890A (ja) | 2000-07-19 | 2002-01-29 | Wacker Nsce Corp | シリコン単結晶引き上げ用石英ガラスルツボ |
| DE10041582B4 (de) * | 2000-08-24 | 2007-01-18 | Heraeus Quarzglas Gmbh & Co. Kg | Quarzglastiegel sowie Verfahren zur Herstellung desselben |
| US6755049B2 (en) * | 2001-03-08 | 2004-06-29 | Heraeus Quarzglas Gmbh & Co. Kg | Method of producing a quartz glass crucible |
| US20040118156A1 (en) * | 2001-03-08 | 2004-06-24 | Gabriele Korus | Method of producing a quartz glass crucible |
| WO2002070414A1 (de) | 2001-03-08 | 2002-09-12 | Heraeus Quarzglas Gmbh & Co. Kg | Verfahren zur herstellung eines quarzglastiegels |
| JP4288646B2 (ja) * | 2001-10-16 | 2009-07-01 | ジャパンスーパークォーツ株式会社 | 石英ガラスルツボの表面改質方法と表面改質ルツボ |
-
2002
- 2002-05-10 US US10/063,754 patent/US6875515B2/en not_active Expired - Lifetime
-
2003
- 2003-04-24 EP EP03724186.6A patent/EP1506142B1/en not_active Expired - Lifetime
- 2003-04-24 CN CNB03816275XA patent/CN1313407C/zh not_active Expired - Lifetime
- 2003-04-24 AU AU2003231062A patent/AU2003231062A1/en not_active Abandoned
- 2003-04-24 JP JP2004503409A patent/JP4700340B2/ja not_active Expired - Lifetime
- 2003-04-24 WO PCT/US2003/012599 patent/WO2003095384A1/en not_active Ceased
- 2003-04-24 KR KR1020047018171A patent/KR100967034B1/ko not_active Expired - Lifetime
- 2003-05-09 TW TW092112720A patent/TW200400924A/zh unknown
-
2004
- 2004-12-08 US US11/007,765 patent/US20050081564A1/en not_active Abandoned
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63236722A (ja) * | 1987-03-26 | 1988-10-03 | Shinetsu Sekiei Kk | 石英ガラス製品及びその製造方法 |
| US20040102666A1 (en) * | 2002-11-08 | 2004-05-27 | Catalytic Distillation Technologies | Process for the selective hydrogenation of alkynes |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1313407C (zh) | 2007-05-02 |
| TW200400924A (en) | 2004-01-16 |
| WO2003095384A1 (en) | 2003-11-20 |
| JP2005525284A (ja) | 2005-08-25 |
| KR20050004851A (ko) | 2005-01-12 |
| US20050081564A1 (en) | 2005-04-21 |
| CN1665751A (zh) | 2005-09-07 |
| AU2003231062A1 (en) | 2003-11-11 |
| US6875515B2 (en) | 2005-04-05 |
| EP1506142A1 (en) | 2005-02-16 |
| US20030211335A1 (en) | 2003-11-13 |
| EP1506142B1 (en) | 2019-12-11 |
| JP4700340B2 (ja) | 2011-06-15 |
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