KR100949040B1 - 박막 트랜지스터 어레이 기판 및 그 제조방법 - Google Patents
박막 트랜지스터 어레이 기판 및 그 제조방법 Download PDFInfo
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- KR100949040B1 KR100949040B1 KR1020030040868A KR20030040868A KR100949040B1 KR 100949040 B1 KR100949040 B1 KR 100949040B1 KR 1020030040868 A KR1020030040868 A KR 1020030040868A KR 20030040868 A KR20030040868 A KR 20030040868A KR 100949040 B1 KR100949040 B1 KR 100949040B1
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136227—Through-hole connection of the pixel electrode to the active element through an insulation layer
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136286—Wiring, e.g. gate line, drain line
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1222—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/127—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement
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- Nonlinear Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
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- Crystallography & Structural Chemistry (AREA)
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- Optics & Photonics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
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- Thin Film Transistor (AREA)
Abstract
Description
Claims (5)
- 박막 트랜지스터의 게이트 전극과;상기 게이트 전극과 접속된 게이트 라인과;상기 게이트 라인과 게이트 절연막을 사이에 두고 교차하는 데이터 라인과;상기 데이터 라인과 접속된 소스전극;상기 소스전극과 마주하는 드레인 전극과;상기 드레인 전극과 중첩됨과 아울러 상기 드레이 전극의 측면을 가로지르는 적어도 둘이상의 돌출부가 형성된 반도체 패턴과;보호막의 컨택홀을 통해 상기 드레인 전극과 접속된 화소전극을 구비하는 것을 특징으로 하는 박막 트랜지스터 어레이 기판.
- 제 1 항에 있어서상기 돌출부는 화소전극의 측면과 인접한 드레인 전극의 측면부에 형성된 것을 특징으로 하는 박막 트랜지스터 어레이 기판.
- 기판 상에 박막 트랜지스터의 게이트 전극, 상기 게이트 전극이 접속되는 게이트 라인을 포함하는 게이트 패턴을 형성하는 단계와;상기 게이트 패턴이 형성된 기판 상에 게이트 절연막을 형성하고 상기 게이트 절연막 위에 적어도 둘이상의 돌출부를 갖는 반도체 패턴을 형성하는 단계와;상기 반도체 패턴이 형성된 기판 상에 데이터 라인 및 소스 전극과, 상기 돌출부와 중첩되는 측면부를 갖는 드레인 전극을 포함하는 소스/드레인 패턴을 형성하는 단계와;상기 소스/드레인 패턴이 형성된 기판 상에 컨택홀을 갖는 보호막을 형성하는 단계와;상기 보호막 상에 상기 컨택홀을 통해 상기 드레인 전극과 접속되는 화소전극을 형성하는 단계를 포함하는 것을 특징으로 하는 박막 트랜지스터 어레이 기판의 제조방법.
- 제 3 항에 있어서,상기 돌출부는 화소전극의 측면과 인접한 드레인 전극의 측면부에 형성되는 것을 특징으로 하는 박막 트랜지스터 어레이 기판의 제조방법.
- 제 3 항에 있어서,상기 돌출부는 상기 드레인 전극의 측면부를 가로지르도록 상기 반도체 패턴에서 신장되는 것을 특징으로 하는 박막 트랜지스터 어레이 기판의 제조방법.
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KR1020030040868A KR100949040B1 (ko) | 2003-06-23 | 2003-06-23 | 박막 트랜지스터 어레이 기판 및 그 제조방법 |
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KR1020030040868A KR100949040B1 (ko) | 2003-06-23 | 2003-06-23 | 박막 트랜지스터 어레이 기판 및 그 제조방법 |
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KR20050000257A KR20050000257A (ko) | 2005-01-03 |
KR100949040B1 true KR100949040B1 (ko) | 2010-03-24 |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20010058159A (ko) * | 1999-12-24 | 2001-07-05 | 박종섭 | 박막 트랜지스터-액정표시소자의 제조방법 |
JP2002250934A (ja) | 2001-02-26 | 2002-09-06 | Sharp Corp | 液晶用マトリクス基板の製造方法 |
KR20030044217A (ko) * | 2001-11-29 | 2003-06-09 | 삼성전자주식회사 | 배선의 접촉 구조와 이를 포함하는 박막 트랜지스터 기판 |
KR20030061586A (ko) * | 2002-01-15 | 2003-07-22 | 비오이 하이디스 테크놀로지 주식회사 | 박막 트랜지스터 및 그 제조 방법 |
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- 2003-06-23 KR KR1020030040868A patent/KR100949040B1/ko active IP Right Grant
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20010058159A (ko) * | 1999-12-24 | 2001-07-05 | 박종섭 | 박막 트랜지스터-액정표시소자의 제조방법 |
JP2002250934A (ja) | 2001-02-26 | 2002-09-06 | Sharp Corp | 液晶用マトリクス基板の製造方法 |
KR20030044217A (ko) * | 2001-11-29 | 2003-06-09 | 삼성전자주식회사 | 배선의 접촉 구조와 이를 포함하는 박막 트랜지스터 기판 |
KR20030061586A (ko) * | 2002-01-15 | 2003-07-22 | 비오이 하이디스 테크놀로지 주식회사 | 박막 트랜지스터 및 그 제조 방법 |
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