KR100927896B1 - 유체제어밸브 - Google Patents
유체제어밸브 Download PDFInfo
- Publication number
- KR100927896B1 KR100927896B1 KR1020070095018A KR20070095018A KR100927896B1 KR 100927896 B1 KR100927896 B1 KR 100927896B1 KR 1020070095018 A KR1020070095018 A KR 1020070095018A KR 20070095018 A KR20070095018 A KR 20070095018A KR 100927896 B1 KR100927896 B1 KR 100927896B1
- Authority
- KR
- South Korea
- Prior art keywords
- control valve
- fluid control
- coupling
- automatic
- diaphragm
- Prior art date
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K17/00—Safety valves; Equalising valves, e.g. pressure relief valves
- F16K17/02—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side
- F16K17/04—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side spring-loaded
- F16K17/10—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side spring-loaded with auxiliary valve for fluid operation of the main valve
- F16K17/105—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side spring-loaded with auxiliary valve for fluid operation of the main valve using choking or throttling means to control the fluid operation of the main valve
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
- F16K31/0644—One-way valve
- F16K31/0672—One-way valve the valve member being a diaphragm
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Valve Housings (AREA)
- Fluid-Driven Valves (AREA)
Abstract
Description
Claims (3)
- 반도체 산업에서의 화학약액 라인에 사용되는 수동유체제어밸브(10) 및 자동유체제어밸브(20)에 있어서,상기 자동유체제어밸브(20)는상부 네모서리에 나사홀(29)이 형성되고, 좌우 일측면에 직사각형 모양의 결합돌기(23)가 각각 형성된 결합부(24)가 하부쪽으로 돌출 형성된 상부케이스(10); 및상기 상부케이스(10) 하부에 형성된 결합부(24)와 동일한 직경을 갖는 결합부 홀(25)이 내부 상부에 형성되고 상기 나사홀(29)과 부합되는 상부 네모서리 위치에 4개의 나사홀(30)이 형성되며, 상기 결합부 홀(25) 좌우 일측면에 상기 결합부(24)의 결합돌기(23)와 부합되는 위치에 형성된 결합 가이드 홈(26)이 각각 형성된 하부케이스(22)로 구성된 것을 특징으로 하는 유체제어밸브.
- 삭제
- 삭제
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020070095018A KR100927896B1 (ko) | 2007-09-19 | 2007-09-19 | 유체제어밸브 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020070095018A KR100927896B1 (ko) | 2007-09-19 | 2007-09-19 | 유체제어밸브 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20090029869A KR20090029869A (ko) | 2009-03-24 |
KR100927896B1 true KR100927896B1 (ko) | 2009-11-25 |
Family
ID=40696355
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020070095018A KR100927896B1 (ko) | 2007-09-19 | 2007-09-19 | 유체제어밸브 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR100927896B1 (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102154962B1 (ko) | 2020-05-29 | 2020-09-10 | 김신호 | 반도체 세정 공정용 정량 공급을 위한 미소유량 컨트롤밸브 구조 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20000057204A (ko) * | 1996-12-01 | 2000-09-15 | 오가와 슈우헤이 | 유체제어밸브 및 유체공급·배기시스템 |
KR20040060988A (ko) * | 2001-11-27 | 2004-07-06 | 엔테그리스, 아이엔씨. | 유체 제어 장치용 기능성 폴리머 필름 인서트 성형 |
KR20050033825A (ko) * | 2003-10-08 | 2005-04-13 | 다이헤이요고교 가부시키가이샤 | 압력제어밸브 |
-
2007
- 2007-09-19 KR KR1020070095018A patent/KR100927896B1/ko active IP Right Grant
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20000057204A (ko) * | 1996-12-01 | 2000-09-15 | 오가와 슈우헤이 | 유체제어밸브 및 유체공급·배기시스템 |
KR20040060988A (ko) * | 2001-11-27 | 2004-07-06 | 엔테그리스, 아이엔씨. | 유체 제어 장치용 기능성 폴리머 필름 인서트 성형 |
KR20050033825A (ko) * | 2003-10-08 | 2005-04-13 | 다이헤이요고교 가부시키가이샤 | 압력제어밸브 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102154962B1 (ko) | 2020-05-29 | 2020-09-10 | 김신호 | 반도체 세정 공정용 정량 공급을 위한 미소유량 컨트롤밸브 구조 |
Also Published As
Publication number | Publication date |
---|---|
KR20090029869A (ko) | 2009-03-24 |
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