KR100918078B1 - Protection member for packing - Google Patents

Abstract

The present invention provides a packaging protective member according to an aspect of the present invention for achieving the above object, the belt is formed in a belt shape toward the center of the belt and the belt is mounted on the side wall of the belt and both ends are fastened The present invention provides a packaging protective member including a plurality of holders having a holding groove open to open the packaging groove, and a packaging method using the same.

As described above, according to the present invention, since the outer edge portion of the package is packaged in the package member in a state protected by the belt and the holder of the package protective member, the surface of the package is minimized from being in close contact with the package member. Therefore, since the surface of the package can be minimized from being contaminated or damaged in contact with the packaging member, it is easy to maintain cleanliness.

Silicone ring, silicon electrode, protection member, moisture proof member, packing pack, high clean

Description

PROTECTION MEMBER FOR PACKING

The present invention relates to a packaging protective member and a packaging method using the same, and more particularly, to a packaging protective member suitable for maintaining high clean quality, such as a silicon edge ring and a silicon electrode used in the plasma processing apparatus and a packaging method using the same. .

In general, a semiconductor device forms a semiconducting thin film, a conductive thin film, or an insulating thin film on a semiconductor substrate (that is, a silicon wafer), and is manufactured by etching a part of them. In recent years, plasma efficiency has been increased in forming and etching processes of thin films to increase process efficiency. In the etching process, for example, a reaction gas is supplied to a plasma etching chamber, and a high frequency power is applied to the chamber to bring the reaction gas into an excited plasma state. As described above, the reaction gas may be plasma-formed to increase reactivity with the thin films on the wafer, and the thin film may be removed by physical collision of the plasma-formed reaction gas, thereby improving the removal performance of the thin film.

The plasma processing apparatus includes a lower electrode on which a wafer is placed, an edge ring provided at an edge region of the wafer, and an upper electrode provided on the lower electrode and having a showerhead function. Here, the edge ring and the upper electrode is manufactured using silicon (silicone). In other words, the silicon ingot is cut to produce a circular silicon plate. Subsequently, in the case of the silicon edge ring, a center hole is formed in the center of the circular silicon plate, and the surface of the silicon plate is ground and polished using a rotary grinding machine or the like. At this time, a part of the silicon plate cut to form the center hole is discarded. In the case of a silicon electrode, a plurality of through holes are uniformly formed on a circular silicon plate, and the silicon plate is ground and polished with a grinding machine or the like.

The silicon edge ring and the silicon electrode are generally stored in a sealed package in a plastic pack. However, such a packaging method has a problem in that the silicon edge ring and the silicon electrode are in direct contact with the plastic pack, and thus are vulnerable to contamination, and the surface is easily damaged by scratches, and thus it is difficult to maintain cleanliness. In addition, the plastic pack does not completely block the moisture, there is a problem that is not suitable for long-term storage.

The present invention is derived to solve the above problems, it is possible to hold the outer edge of the package to prevent flow in the packaging member, the outer surface of the package to surround the outside of the package It is an object of the present invention to provide a packaging protective member suitable for maintaining a high clean quality which can be prevented from contacting the packaging member to be contaminated or damaged.

In addition, the present invention is the first packaging the packaged body accommodated in the packaging protection member, and then packaged the first packaged package and the moisture-proof member to the second package, thereby preventing damage to the package due to moisture for a long time It is another object of the present invention to provide a packaging method that is capable of storing the product and is suitable for maintaining high clean quality.

Packaging protection member according to an aspect of the present invention for achieving the above object is formed in a belt shape is opened so as to face toward the center of the belt to provide a side wall and the belt is mounted on the side wall of the belt and both ends are fastened And a plurality of holders having holding grooves.

At least one fastening hole is formed at each end of each side of the belt, and both sides of the belt are inserted with protrusions formed in any one of the holders in the fastening holes at both sides of which both ends of the belt are inscribed and overlapped. It is preferred that the ends are fastened. Alternatively, at least one fastening hole is provided at one end of the belt, and at least one fastening protrusion is formed at the other end thereof, so that the fastening protrusion is inserted into the fastening hole so that both ends of the belt are fastened.

At least one protrusion may be formed in each of the plurality of holders, and at least one mounting hole in which the protrusion is inserted and formed may be formed in the belt, or each holder may be opened in a direction perpendicular to an opening direction of a holding groove. It may have a mounting groove formed to be inserted into the side wall of the belt.

The side wall height of the belt is preferably formed larger than the thickness of the package.

Both ends of the belt are preferably formed to be thinner than the sidewall thickness of the adjacent portion.

At least one of the belt and the plurality of holders is preferably formed of polypropylene or teflon.

The holding groove is formed to be convex in a direction facing the upper and lower side walls at the inlet side thereof to provide a guide portion for guiding the packaged body, and a holding portion for holding the packaged body is formed at the bottom side of the upper and lower stepped walls. It is preferable.

The holding groove is preferably formed to have the same inner width at the inlet side and the bottom side, or to have a narrower inner width from the inlet side toward the bottom side.

According to another aspect of the present invention, there is provided a packaging method, comprising: providing a protection member having a plurality of holders mounted along an inner circumference of a belt, and holding an outer edge portion of a package in the plurality of holders; And storing the packaged body in the protective member, packing the packaged body accommodated in the protective member in a first packaging member, and packing the packaged body in the first packaging member. And packing together in a second packaging member.

Preferably, the package is held by inserting at least a portion of its outer edge into a holding groove provided in each of the holders.

The height of the belt is preferably formed larger than the thickness of the package.

Preferably, the first packaging member and the second packaging member are sealed by at least one of a zipper lock method, a heat fusion method, and an adhesive method.

The first packaging member and the second packaging member are preferably vacuum packed.

Preferably, the first packaging member uses a plastic pack, and the second packaging member preferably uses an aluminum pack.

The present invention can adjust the length of the belt, can be freely changed the number of installation and the installation position of the holder can be used for the packaging operation of the package having a variety of shapes and specifications.

In addition, according to the present invention, the outer edge of the package is packaged in a packaging member in a state where the outer edge of the package is protected by a belt and a holder of the packaging protective member. Therefore, since the surface of the package can be minimized from being contaminated or damaged in contact with the packaging member, high clean quality can be maintained.

In addition, the present invention is because the first packaged the packaged body accommodated in the packaging protection member, and then packaged together with the primary packaged package and the moisture-proof member, the secondary packaging, effectively prevent the penetration of external moisture, the outside of the permeated Moisture is quickly removed. Therefore, even when the product is stored for a long time, it is possible to prevent damage to the package due to moisture and maintain high clean quality.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

However, the present invention is not limited to the embodiments disclosed below, but will be implemented in various forms, and only the embodiments are intended to complete the disclosure of the present invention, and to those skilled in the art the scope of the invention. It is provided for complete information. Like reference numerals in the drawings refer to like elements.

<First Embodiment>

1 is a plan view showing a packaging protection member according to a first embodiment of the present invention, Figure 2 is a perspective view showing both ends of the belt provided in the packaging protection member of FIG. 3 is a cross-sectional view illustrating a holder provided in the packaging protection member of FIG. 1, and FIGS. 4 to 5 are cross-sectional views illustrating various modifications of the holder provided in the packaging protection member of FIG. 1.

1 to 3, the packaging protection member 100 according to the present embodiment includes a belt 110 to which both side ends 110a and 110b are fastened and a plurality of holders 120 mounted to the belt 110. It includes. At this time, the package (not shown) is located in the inner space surrounded by the belt 110 in the state that the outer edge is held by the holder 120.

The belt 110 is formed in a substantially band shape to provide sidewalls, and a plurality of mounting holes 111 are formed along the circumferential direction of the sidewalls. The plurality of mounting holes 111 may be formed at approximately the middle height of the side wall, and are formed at regular intervals along the circumferential direction of the side wall. In addition, at least one fastening hole 112 for fastening is formed in each of both end portions 110a and 110b of the belt 110. In this embodiment, both ends 110a and 110b of the belt 110 are inscribed, and the projections 122 of the holder 120 are inserted through the overlapping fastening holes 112-1 of both sides of the belt 110. Fasten the ends (110a, 110b). At this time, the outer diameter of the protrusion 122 is slightly larger than the inner diameter of the fastening hole 112-1 so that the protrusions 122 are inserted into the fastening hole 112-1 in a force-fitting manner such that both end portions 111a and 111b are formed. It is desirable to fasten firmly. On the other hand, the belt 110 has a variety of specifications because the circumferential length can be adjusted according to the position of the fastening hole 112 is inserted into the protrusion 122 of the holder 120 for the fastening of both ends (110a, 110b) It can be used for the packaging body of.

Holder 120 is coupled to the side wall of the belt 110, the holder 120 has a holding groove 123 having an opening is formed toward the center of the belt 110, the both ends (110a, 110b) is fastened Prepared. The body 121 of the holder 120 according to the present exemplary embodiment is provided with a protrusion 122 protruding in a direction opposite to the opening of the holding groove 123, and the protrusion 122 is mounted on the belt 110. Inserted into the hole 111 has a structure in which the holder 120 is mounted to the belt 110. Since the holding groove 123 serves to receive and hold the outer edge of the package, the inner structure is preferably formed to correspond to the outer circumference of the package. For example, as shown in Figure 3, the inlet side of the holding groove 123 is formed in the convex direction of the upper and lower side walls (123a-1, 123a-2) facing each other is provided with a guide portion for guiding the package, the bottom side The upper and lower stepped portions are formed on the upper and lower sidewalls 123b-1 and 123b-2 to provide holding portions holding the package. Since the inner structure of the holding groove 123 is relatively wider than the guide portion, the inside of the holding groove 123 can easily hold the package, and the contact area between the holding groove 123 and the package is minimized. Contamination and damage to the package can be minimized. Of course, as shown in FIG. 4, the inner width of the inlet side and the bottom side of the holding groove 123 may be formed to be the same, and as shown in FIG. 5, the inner width becomes narrower from the inlet side of the holding groove 123 toward the floor. It may be formed. On the other hand, the holder 120 is preferably mounted detachably to the side wall of the belt (110). Through this, the installation number and installation position of the holder 120 can be freely adjusted according to the shape and size of the package.

On the other hand, the packaging protection member 100 according to the present embodiment of the belt 110 is made of a circular shape to correspond to the package of the circular shape, the distribution of the belt 110 so that the load of the package can be distributed A total of six holders 120 are distributed and mounted at equal intervals on all side walls. However, the present invention is not limited thereto, and the shape of the belt 110 and the number of holders 120 may be changed according to the shape and size of a specific package. For example, in order to accommodate the rectangular shaped package, the belt 110 may be manufactured in a quadrangular shape, and a total of four holders 120 may be mounted on two sidewalls of the belt 110. In addition, the body 121 of the holder 120 is not limited to the cube shape, it can be variously changed.

In addition, the height of the side wall of the belt 110 can be adjusted in various ways, it is preferably formed larger than the thickness of the package. For this reason, the upper and lower parts of the package body are accommodated in a state spaced apart from the imaginary plane defined by the uppermost part or the lowermost part of the packaging protection member 100. Therefore, even if the packaged body packaged in the protective member 100 is put down on the floor or packed in a plastic pack, the surface of the packaged body can be prevented from being damaged or contaminated by contacting the floor or the plastic pack. . In addition, the belt 110 and the holder 120 is preferably made of an elastic material, for example, polypropylene (tpropylene) or teflon (teflon) to block the transmission of external vibration to the package.

Second Embodiment

Next, a packaging protective member according to a second embodiment of the present invention will be described. In this case, description overlapping with the above-described first embodiment will be omitted or briefly described.

6 is a plan view showing a packaging protection member according to a second embodiment of the present invention, Figure 7 is a perspective view showing both ends of the belt provided in the packaging protection member of Figure 6, Figure 8 is a packaging protection member of Figure 6 It is sectional drawing which showed the provided holder.

6 to 8, the packaging protection member 200 according to the second embodiment of the present invention includes a belt 210 to which both ends 210a and 210b are fastened and a plurality of holders mounted to the belt 210. 220. As in the first embodiment described above, the package (not shown) is positioned in the inner space surrounded by the belt 210 in a state where the outer edge thereof is held by the holder 220.

The belt 210 is formed in a substantially band shape to provide sidewalls, and a plurality of mounting holes 211 are formed along the circumferential direction of the sidewalls. In addition, fastening means are provided at both end portions 210a and 210b of the belt 210. For example, in the present embodiment, a fastening hole 212 is provided at one end 210a of the belt 210 and a fastening protrusion 213 is provided at the other end 210b. At both ends 210a and 210b of FIG. At this time, the fastening hole 212 is preferably provided with at least one or more (212-1, 212-2), is formed spaced apart at regular intervals along the circumferential direction of the belt (210). For this reason, since the circumferential length of the belt 210 can be freely adjusted by changing the position of the fastening hole 212 into which the fastening protrusion 213 is inserted, it can be used for a package of various standards. Of course, the fastening means provided at both end portions 210a and 210b of the belt 210 is not limited to the coupling structure formed by the fastening hole 212 and the fastening protrusion 213. For example, various fastening means can be used, such as hook means, buckle means, gluing means and the like. On the other hand, both end portions (210a, 210b) of the belt 210 is preferably formed thinner than the side wall thickness of the adjacent portion. For example, in the belt 210 of the present embodiment, both end portions 210a and 210b thereof are formed to be about 1/2 thinner than the thickness of the side wall of the adjacent portion, so that both end portions 210a and 210b of the belt 210 are inscribed. Even when fastening, the step and the step are hardly generated in the fastening area. That is, the belt 210 does not protrude inward or outward from the fastening area. Therefore, the package can be prevented from being damaged or contaminated by contacting the fastening region of the belt 210. In addition, since the fastening area of the belt 210 is not caught by the packaging member, for example, a plastic pack, etc., when the product is packaged using the packaging protective member, rapid operation is possible.

The holder 220 is coupled to the sidewall of the belt 210 and has a holding groove 223 having an opening formed to face the center of the belt 210 to which both end portions 210a and 210b are fastened. The body 221 of the holder 220 according to the present embodiment is provided with a mounting groove 222 which is open in a direction perpendicular to the opening of the holding groove 223, and the mounting groove 222 is a sidewall of the belt 210. The holder 220 is mounted to the belt 210 by being inserted into the belt 210. At this time, the inner width of the mounting groove 222 is formed to be slightly smaller than the side wall thickness of the belt 210 so that the mounting groove 222 is mounted on the side wall in a force-fit method, so that the holder 220 is firmly mounted to the belt 210. It is desirable to be. In addition, if necessary, the holder 220 may be more firmly mounted to the belt 210 by further applying an adhesive member to the contact surface between the mounting groove 222 and the belt 210.

On the other hand, the packaging protection member (100,200) according to the first and second embodiments described above can accommodate a package of various standards and shapes, it is possible to use a variety of product packaging. Hereinafter, a packaging method using the packaging protection members 100 and 200 will be described.

9 to 11 are a perspective view and a cross-sectional view showing a packaging method according to an embodiment of the present invention.

First, as shown in FIGS. 9A and 9B, the package 300, for example, a silicon ring or a silicon electrode, is accommodated in the packaging protection member 100. Subsequently, as shown in FIGS. 10A and 10B, the packaged object 300 accommodated in the packaging protection member 100 is packed in a first packaging member 500 such as a plastic pack to be sealed. In this case, it is preferable that the first packaging member 500 uses a transparent plastic pack so as to easily check contents after packaging. Subsequently, as shown in FIGS. 11A and 11B, the first packaging member 500 is packaged in a second packaging member 600 such as an aluminum pack and secondaryly packed to be sealed. At this time, it is preferable to pack the moisture proof member 600 together to remove moisture existing in the inside of the second packaging member 600 and moisture that may flow from the outside of the second packaging member 600. Meanwhile, the first and second packaging members 500 and 600 are provided with a predetermined accommodation space therein, and openings 510 and 610 connected to the accommodation space are formed on at least one side thereof. The opening and closing means such as a zipper rock may be provided at the 510 and 610. Of course, the both sides of the openings 510 and 610 of the first and second packaging members 500 and 600 may be internally welded to heat-bond the joint surface, or may be hermetically packed in various ways such as by applying an adhesive to the joint surface. . Meanwhile, in the above packaging method, even when the packaging protection members 100 and 200 surround and protect the outside of the package 300, the packaging members 500 and 600 are vacuum-packed in the high vacuum state. The contact with the surface of the contact is minimized. Therefore, when the packaging protection members 100 and 200 according to the first and second embodiments described above are used, product packaging which is advantageous for maintaining high clean quality is possible, and vacuum packaging which is advantageous for long-term storage than general packaging is possible.

As described above, in the packaging method using the packaging protection members 100 and 200 according to the present invention, the belts 110 and 210 surrounding the outside of the package 300 and the holders 120 and 220 holding the outer edges of the package 300. This results in the package 300. Therefore, it is possible to prevent the surface of the package 300 from contacting with an external object, for example, the packaging material 500, to be contaminated or damaged. In addition, the packaged body accommodated in the packaging protection members 100 and 200 may be placed in the first packaging member 100, and then the first packaging member may be put together with the moisture proof member 400 in the second packaging member 200 to be hermetically packed. In this case, the penetration of external moisture can be prevented, so it can be stored for a long time. Particularly, the belts 110 and 210 of the packaging protection member 100 and 200 according to the present invention are formed of an elastic member such as polypropylene or Teflon to be freely deformed, and a plurality of fastening holes 112 and 212 are formed at both ends thereof to adjust the length. In addition to being easy, the holders 120 and 220 of the packaging protection members 100 and 200 are detachable and can be freely changed in the number of installation and the installation position, and thus can be used in a package of various shapes and specifications.

As mentioned above, although this invention was demonstrated with reference to the above-mentioned Example and an accompanying drawing, this invention is not limited to this, It is limited by the following claims. Therefore, it will be apparent to those skilled in the art that the present invention may be variously modified and modified without departing from the technical spirit of the following claims.

1 is a plan view showing a protective member for packaging according to a first embodiment of the present invention.

Figure 2 is a perspective view showing both ends of the belt provided in the protective packaging member of Figure 1;

3 is a cross-sectional view showing a holder provided in the packaging protection member of FIG.

4 to 5 are cross-sectional views showing various modifications of the holder provided in the packaging protection member of FIG.

6 is a plan view showing a packaging protection member according to a second embodiment of the present invention.

Figure 7 is a perspective view showing both ends of the belt provided in the packaging protection member of FIG.

FIG. 8 is a cross-sectional view illustrating a holder provided in the packaging protection member of FIG. 6. FIG.

9 to 11 are a perspective view and a cross-sectional view showing a packaging method according to an embodiment of the present invention.

<Explanation of symbols for the main parts of the drawings>

110,210: Belt 111,211: Mounting hole

112,212: fastening hole 120,220: holder

122: protrusion 123,223: holding groove

213: fastening protrusion 222: mounting groove

300: package 400: moisture-proof member

500: first packaging member 600: second packaging member

Claims (18)

delete A belt formed in a belt shape to provide sidewalls and having both ends fastened; And A plurality of holders mounted on sidewalls of the belt and having holding grooves open toward the center of the belt; Including, At least one fastening hole is formed at each end of each side of the belt, Wrapping protection member for the both ends of the belt is inscribed in the overlapping fastening holes of the both sides is inserted into a projection formed in any one of the plurality of holders are fastened to both ends of the belt. A belt formed in a belt shape to provide sidewalls and having both ends fastened; And A plurality of holders mounted on sidewalls of the belt and having holding grooves open toward the center of the belt; Including, At least one fastening protrusion is formed at one end of the belt, and at least one fastening hole is formed at the other end thereof, and the fastening protrusion is inserted into the fastening hole so that both ends of the belt are fastened. The method according to claim 2 or 3, At least one protrusion is formed in each of the plurality of holders, and at least one mounting hole in which the protrusion is inserted and mounted is formed in the belt. The method according to claim 2 or 3, And each of the plurality of holders has a mounting groove which is open in a direction perpendicular to the opening direction of the holding groove and is inserted into the side wall of the belt. The method according to claim 2 or 3, And a sidewall height of the belt is greater than a thickness of a package. The method according to claim 2 or 3, Both end portions of the belt is formed to be thinner than the thickness of the side wall of the adjacent portion. The method according to claim 2 or 3, At least one of the belt and the plurality of holders is a protective packaging member formed of polypropylene or teflon. The method according to claim 2 or 3, The inlet side of the holding groove is formed to be convex in a direction facing the upper and lower sidewalls to guide the package, and the upper and lower sidewalls are formed on the upper and lower sidewalls to hold the packaged body. Wrapping member for packaging. The method according to claim 2 or 3, The holding groove is formed in the inner width of the inlet side and the bottom side is the same, or the inner side of the packaging protection member is formed narrower toward the bottom toward the bottom side. delete delete delete delete delete delete delete delete

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