JP3236453U - Polishing pad packaging and polishing pad packaging - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a packaging body for a polishing pad and a packaging body for a polishing pad which prevent the polishing pad from being displaced in an antistatic bag and prevent distortion and damage of the polishing pad during transportation. SOLUTION: A polishing pad packing body 1 accommodates a square antistatic bag 5 accommodating and sealing a polishing pad 4 and 10 antistatic bags 5 accommodating the polishing pad 4 in a laminated state. A sealed antistatic bag 6, an air cap 3 for packaging the entire antistatic bag 6, and four locations formed by folding the air cap 3 after packaging and the four corners of the antistatic bags 5 and 6 in an overlapping state. It includes a folding portion 3A'and a packing box 2 in which misalignment preventing members 8 are arranged in advance at the four corners and accommodates 10 polishing pads 4 (packaging body 10) packaged with an air cap 3. Since the polishing pad 4 can be prevented from being displaced in the antistatic bag 5 when the polishing pad package 1 is transported, it is possible to prevent the polishing pad 4 from being distorted and the polishing surface from being damaged due to the transportation. [Selection diagram] Fig. 1

Description

The present invention relates to a packaging body for a polishing pad and a polishing pad packaging body, and more particularly to a packaging body for a polishing pad and a polishing pad packaging body suitable for packaging and transporting a thin and soft polishing pad. ..

Conventionally, packaged items and transportation cases for packing and transporting disc-shaped articles and polishing pads that are easily damaged have been proposed (for example, Patent Document 1 and Patent Document 2).
Conventionally, polishing pads for polishing electronic parts such as semiconductor wafers have been known. Among them, when transporting a soft and thin polishing pad used in the finish polishing process, the following procedure is used. I try to pack the polishing pad. That is, first, a thin disk-shaped polishing pad is housed in a square antistatic bag, the antistatic bag is sealed, and then the entire antistatic bag containing the polishing pad is called an air cap. Wrap it in the cushioning material to be used, wrap it, and then tape it so that it has a substantially square shape. Next, the polishing pad thus wrapped with the cushioning material is housed in a packing box made of cardboard, and a fixing tape is attached and fixed over the outer surface of the cushioning material and the inner surface of the packing box, and then fixed. After covering the packing box with the top lid, the top lid and the entire packing box are fixed in a grid shape with a fixing band and packed. In the past, the polishing pads packed in this way were loaded onto a transport truck for transportation.

Japanese Unexamined Patent Publication No. 2015-168479 Jikkensho 57-52010 Gazette

By the way, conventionally, the polishing pad is packed and transported by truck as described above, but when the packing is unpacked after transportation, the outer peripheral portion of the polishing pad or a portion close to the outer peripheral portion is distorted or is close to the outer peripheral portion. The problem that the surface (polished surface) was damaged was discovered.
When the inventor of the present application investigated and considered the cause, it was found that the cause of the above problem was as follows. That is, conventionally, a disk-shaped polishing pad is housed in a square antistatic bag, wrapped with a cushioning material, and then fixed with tape in a packing box. Here, the polishing pad is a polishing pad used in the finishing process, which is made of a soft, easily scratched, and easily crushed material, and cannot be fixed so as to apply stress to the polishing layer, so it is used as a cushioning material and for packaging. The box is fixed. However, since the antistatic bag is a square bag and the polishing pad has a thin disk shape, there is play between the outer peripheral portion of the polishing pad and the four sides and four corners of the antistatic bag. (Gap) has occurred. Therefore, the entire package is tilted when the polishing pad after packing is loaded onto the truck, and the entire package is vibrated or tilted when it is subsequently transported by truck or unloaded, resulting in the above-mentioned play (gap). It is considered that the polishing pad is displaced by the amount inside the antistatic bag, and the stress is concentrated, so that the outer peripheral portion of the polishing pad and its surroundings are distorted and the surface is damaged. Since the surface state of the polishing pad can be transferred to the surface of the object to be polished, smoothing of the surface of the polishing pad is indispensable for further improving the accuracy of the surface of the object to be polished in the finish polishing process. In particular, in order to realize a substrate surface with reduced minute waviness, it is important to make the surface of the polishing pad smoother, and even a slight distortion of the polishing pad affects the polishing accuracy.
Therefore, an object of the present invention is for a polishing pad capable of preventing the polishing pad from being displaced inside the antistatic bag and preventing the polishing pad from being distorted or damaged due to inclination or vibration during transportation. Is to provide a packaging body and a polishing pad packaging body.

In view of the above circumstances, the present invention according to claim 1 covers the entire front and back surfaces of the substantially rectangular antistatic bag accommodating the disc-shaped polishing pad and the antistatic bag accommodating the polishing pad. It is characterized by having a cushioning material for covering, and having a folded portion formed by folding the four points of the cushioning material together with the four corners of the antistatic bag to a position close to the outer peripheral portion of the polishing pad. It is intended to provide a package for a polishing pad.
Further, the present invention according to claim 2 is a polishing pad packing body for accommodating the packaging body according to claim 1, and includes a substantially rectangular packing box for accommodating the packaging body for the polishing pad. , With misalignment prevention members arranged at the four corners of the packing box,
The packaging is characterized in that the packaging is housed in the packaging box in a state where the four folding portions in the packaging for the polishing pad are in contact with the front engaging portions of the misalignment prevention member in the packaging box. Is to be.
Further, the present invention according to claim 3 is the polishing pad packing body for accommodating the packaging body according to claim 1, and includes a substantially rectangular packing box for accommodating the packaging body for the polishing pad.
The packaging is characterized in that the packaging is housed in the packaging so that the four folding portions in the packaging for the polishing pad abut on the inner wall surfaces of the four in the packaging box. ..

According to such a configuration, since the package has four folding portions, it is possible to effectively prevent the polishing pad from being displaced in the antistatic bag during transportation of the package. Can be done. Therefore, it is possible to provide a polishing pad package and a polishing pad package that can prevent the polishing pad from being distorted or damaged due to transportation or the like.

It is a top view which shows one Embodiment of this invention, and is the top view which shows the polishing pad packing body just before covering the packing box with an upper lid. It is a figure which shows the work process of accommodating and packing the polishing pad in the polishing pad packing body of this invention, FIG. The process of accommodating the 10 polishing pads contained in the antistatic bag in a larger antistatic bag and sealing it, FIG. 2 (c) shows the entire antistatic bag containing the 10 polishing pads with an air cap ( The process of wrapping with cushioning material) and tape-fastening, Fig. 2 (d) shows the air cap and the four corners of the antistatic bag inside the air cap, which are wrapped around the center side to form a folded part and taped to the package. 2 (e) shows a process of accommodating a polishing pad (packaging body) packaged with an air cap in a packaging box in which misalignment prevention members are arranged at four corners. The plan view which shows the other embodiment about the misalignment prevention member of this invention. The plan view which shows the other embodiment about the misalignment prevention member of this invention. The plan view which shows another embodiment about the misalignment prevention member of this invention.

Hereinafter, the present invention will be described with respect to the illustrated embodiment. In FIG. 1, reference numeral 1 denotes a polishing pad packing body, and the polishing pad packing body 1 is provided with a packing box 2 made of corrugated cardboard and having an open upper surface, and the inside thereof. It accommodates 10 laminated polishing pads 4 (packaging 10) wrapped in an air cap 3 (cushioning material).
Although omitted in FIG. 1, the polishing pad packing body 1 is provided with an upper lid (not shown) to be put on the packing box 2, and the upper lid is put on the packing box 2 shown in FIG. 1 and closed, and then the upper lid is closed. A vertical and horizontal girder-shaped fixing band is hung around the four sides of the packing box 2 to fix it, and the polishing pad packing body 1 in that state is loaded onto a transport truck and transported.
The polishing pad 4 as an object to be contained in the packing box 2 has a disk shape having a diameter of about 760 mm and a thickness of 1 to 2 mm, and the polishing layer is made of a soft material. The polishing pad 4 is mounted on a polishing surface plate of a polishing device and is used for polishing a semiconductor wafer or the like, and the upper surface of the polishing pad 4 is a polishing surface. The material, manufacturing method, and the like of the polishing pad 4 itself are known, for example, in Japanese Patent No. 5421635, Japanese Patent No. 5844189, and the like.
In this embodiment, after the polishing pads 4 are housed in individual antistatic bags 5, 10 of them are laminated, and then the 10 antistatic bags 5 in the laminated state are placed in a larger antistatic bag 6. The whole is packaged in an air cap 3 to form a package 10, and then the package 10 is housed in the packing box 2. However, the polishing pad 4 does not shift in the antistatic bag 5. As a result, the polishing pad 4 is not distorted or damaged during the transportation of the polishing pad packing body 1.

That is, FIGS. 2 (a) to 2 (e) show an outline of a work process in which the polishing pad 4 which is an object to be contained is housed in the packing box 2 and the polishing pad packing body 1 is completed. be.
After the production of the thin disk-shaped polishing pad 4 is completed, first, as shown in FIG. 2A, a square antistatic bag 5 having a length and width of 780 mm is prepared. The antistatic bag 5 is a transparent plastic bag, which is in the shape of a thin paper in a natural state, and has an opening 5A on only one side. Then, in a state where the antistatic bag 5 is placed on a horizontal table (not shown), the operator inserts one polishing pad 4 into the antistatic bag 5 from the opening 5A and accommodates the antistatic bag 5, and then the opening 5A is inserted. The antistatic bag 5 is sealed by heat welding.
Similarly, a total of 10 polishing pads 4 are individually housed in the antistatic bag 5 and sealed. After that, the 10 antistatic bags 5 sealed by accommodating the polishing pads 4 are laminated, and the 10 antistatic bags 5 in the laminated state are accommodated in a larger antistatic bag 6 (FIG. 2). See (b)). The antistatic bag 6 is also a transparent vinyl bag having an opening 6A on one side, and is a square having a length and a width of 1100 mm each. Then, when 10 antistatic bags 5 are housed inside from the opening 6A, the opening 6A is heat-welded so that the antistatic bag 6 is also sealed.
That is, each of the individual polishing pads 4 is housed in the antistatic bag 5 and sealed, and the 10 polishing pads 4 housed in the antistatic bag 5 are housed in the antistatic bag 6 in a laminated state. It is sealed.

Next, the entire sealed antistatic bag 6 containing 10 polishing pads 4 is wrapped with an air cap 3 as a cushioning material from both the front and back sides and from all sides, and is not shown at a required location as a packaging end in the air cap 3. Attach the tape and wrap it (see FIG. 2 (c)). Looking at the state after the tape is fixed on a flat surface, the outer shell of the air cap 3 after packaging the polishing pad 4 is a substantially square shape. Then, in this state, a play (gap) is generated between the four corners 3A of the air cap 3 and the four corners of the antistatic bags 5 and 6 inside them and the outer peripheral portion 4A of the polishing pad 4. (See FIG. 2 (c)).
Therefore, in this embodiment, after that, the four corners 3A of the air cap 3 are directed toward the center side of the polishing pad 4 with the four corners of the antistatic bags 5 and 6 located inside the air cap 3 overlapped with each other. The outer peripheral portion 4A of 4 is wound up to a position close to the outer peripheral portion 4A and folded. As a result, the folded portion 3A'is formed by each of the four corners 3A, so that the tape 7 is attached and fixed over the outer surface of the air cap 3 at the adjacent inner position, and the folded portion 3A'is maintained so as not to collapse. (See FIG. 2 (d)). As a result, the packaging body 10 in which the folding portion 3A'is formed by packaging the 10 polishing pads 4 with the air cap 3 is completed. When the package 10 is viewed in a plane, the entire package 10 is substantially octagonal (see FIG. 2 (d)).
As described above, in this embodiment, the four corners 3A of the air cap 3 are wound toward the center to form the folded portion 3A', so that the individual polishing pads 4 are moved up and down by the antistatic bag 5 containing them. It is strongly pinched from the position, and the play between the outer peripheral portion of the polishing pad 4 and the four corners of the antistatic bag 5 is reduced.
The 10 polishing pads 4 in that state are strongly sandwiched from above and below by the antistatic bag 6 and the air cap 3. Therefore, in the state after the package 10 shown in FIG. 2D is completed, the polishing pad 4 is effectively prevented from being displaced in the lateral direction and the vertical direction in each antistatic bag 5. There is.
As described above, the state shown in FIG. 2 (d) is the packaging body 10 after packaging the 10 polishing pads 4 with the air cap 3, and then the packaging body 10 is a square packing box having an open upper surface. Contain in 2 (see FIG. 2 (e)).
At that time, in this embodiment, the misalignment prevention member 8 having a right triangle shape is installed at the four corners of the packing box 2. These four misalignment prevention members 8 are made of corrugated cardboard and have the same dimensions and the same shape, and their thickness (vertical dimension) is slightly shorter than the depth of the packing box 2. In these misalignment prevention members 8, the right-angled corners and the two adjacent wall portions are simply placed in contact with the positions of the four corners of the packing box 2 without any gaps, and these misalignment prevention members are placed. 8 is removable from the packing box 2.
When the misalignment prevention members 8 are arranged at the four corners of the packing box 2 in advance, as shown in FIG. 2 (e), in this state, the flat front engaging portions 8A of each misalignment prevention member 8 are exposed. An octagonal columnar storage space having a shallow depth as a whole is formed by the inner wall surface 2A of the packing box 2 in the state. Then, the 10 polishing pads 4 (packaging body 10) after packaging are accommodated in the accommodation space by the air cap 3. At that time, the package 10 is accommodated in the accommodation space from above so that the four folding portions 3A'face the front engaging portions 8A of the four misalignment prevention members 8 and come into contact with them. ..
Here, since the folded portion 3A'is formed in a bulky state by involving the four corners of the air cap 3 and the antistatic bags 5 and 6, it has elasticity in the horizontal direction and the vertical direction. Therefore, each folding portion 3A'will come into contact with the front engaging portion 8A of the misalignment prevention member 8 at the opposite position without a gap, and the ten polishing pads 4 in the packing box 2 will be in the lateral direction (radiation). The misalignment of the direction) is prevented.
Further, in the present embodiment, the outer shell of the air cap 3 is separated from the four inner wall surfaces 2A between the adjacent misalignment prevention members 8 without contacting the inner wall surface 2A. As a result, even if some kind of impact is applied to the packing box 2 from the outside, the impact is prevented from being directly transmitted from the inner wall surface 2A to the polishing pad 4, and the above four locations have elasticity. The impact is absorbed by the folding portion 3A'.
Then, as shown in FIG. 2 (e), in a state where the package 10 is housed in the packing box 2, the packing box 2 faces from above the air cap 3 (packaging 10) in which the polishing pad 4 is packaged. The tape 7 is attached in a cross shape over the two sides to fix the package 10 to the packing box 2 (see FIG. 1).
After that, the packing box 2 is covered with an upper lid (not shown) to close the opening, and then a fixing band is hung vertically and horizontally over the upper lid and the entire packing box 2 to fix the packing box 2. As a result, the polishing pad packing body 1 in which 10 polishing pads 4 are laminated and housed is completed.

As described above, the polishing pad packaging body 1 of the present embodiment includes an antistatic bag 5 that houses and seals the individual polishing pads 4, and 10 polishing pads 4 that are housed in the antistatic bag 5. An antistatic bag 6 that is housed and sealed in a laminated state, an air cap 3 that wraps the entire antistatic bag 6 that contains 10 polishing pads 4, and the air cap 3 and the antistatic bags 5 and 6. The packaging body 10 having four folding portions 3A'formed by winding the four corners and maintained by the tape 7, the packing box 2 having an open top surface, and the positions arranged at the four corners of the packing box 2. It includes a slip prevention member 8, an upper lid (not shown) that covers the packing box 2 and closes the opening thereof, and a fixing band (not shown) that fixes the upper lid and the packing box 2.

In this embodiment, as shown in FIG. 2D, after packaging 10 polishing pads 4 with the air cap 3, the four corners 3A of the air cap 3 after packaging and the antistatic bags 5 and 6 inside the packaging are used. The four corners of the above are overlapped with each other to form a folded portion 3A'in close to the outer peripheral portion 4A of the polishing pad 4, and the package 10 is formed by fixing and maintaining them with the tape 7.
As a result, the play between the outer peripheral portion 4A of the polishing pad 4 and the corners and four sides of the antistatic bag 5 is reduced, and the polishing pad 4 is strongly sandwiched by the antistatic bag 5 from the upper and lower positions. Further, the 10 polishing pads 4 in that state are strongly sandwiched from above and below by the antistatic bag 6 and the air cap 3. As a result, it is possible to prevent the polishing pad 4 from being displaced in the lateral direction (radiation direction) and the vertical direction in each antistatic bag 5 in the package 10.
Further, since the four folding portions 3A'itself is formed bulky and has elasticity, even if vibration occurs during transportation of the polishing pad packing body 1, lateral vibration is incorporated. The portion 3A'is elastically deformed and can be absorbed. Further, since the inner wall surface 2A of the packing box 2 is separated from the outer surface of the air cap 3 (the outer peripheral portion 4A of the polishing pad 4) in which the polishing pad 4 is packaged, stress is concentrated after the packaging body 10 is transported. It is possible to effectively prevent the outer peripheral portion 4A of the polishing pad 4 from being distorted and the polishing surface near the outer peripheral portion 4A of the polishing pad 4 from being damaged.
Therefore, according to the present embodiment, it is possible to provide the packaging body 10 and the polishing pad packaging body 1 that can prevent the polishing pad 4 from being distorted or damaged during transportation or the like.

Next, FIGS. 3 to 5 show another embodiment of the misalignment prevention member 8 of the present invention. That is, in the first embodiment shown in FIG. 1, a position shift preventing member 8 having a right triangle shape in a plan view is provided, and the front engaging portion 8A thereof is a flat surface. In the embodiment shown, the misalignment prevention member 8 having a substantially triangular shape is formed by denting the front engaging portion 8A in an arc shape. Others have the same configuration as the misalignment prevention member 8 shown in FIG. The misalignment prevention member 8 shown in FIG. 3 has a configuration in which the folded portion 3A'of the package 10 described above is brought into contact with the position of the arcuate front engaging portion 8A.
Next, in the embodiment shown in FIG. 4, each apex portion (corner portion) of the right triangle of the first embodiment is deleted, so that the whole is trapezoidal in a plan view. The misalignment prevention member 8 of this embodiment also has a configuration in which the folded portion 3A'of the package 10 is brought into contact with these front engaging portions 8A as in the case of the first embodiment.
Further, in the embodiment shown in FIG. 5, the misalignment prevention member 8 is configured by a quadrangular frame member having a large circular through hole formed on the center side. That is, in this misaligned member 8, the entire inner peripheral surface of the circular through hole becomes the front engaging portion 8A. In the misalignment prevention member 8 of this embodiment, the folded portion 3A'of the package 10 is brought into contact with the front engaging portion 8A which is arcuate at any position in the circumferential direction.
The misalignment prevention member 8 shown in FIGS. 3 to 5 can also obtain the same operation and effect as the misalignment prevention member 8 of the first embodiment shown in FIG.

It should be noted that the above-mentioned misalignment prevention member 8 is not always necessary, and it may be omitted. In that case, the package 10 having the fold-in portion 3A'shown in FIG. After the 3A'is housed in the packing box 2 so as not to come into contact with the inner wall surface 2A on the four sides of the packing box 2, the package 10 is fixed in the packing box 2 with tape.
Further, although the drawings are omitted, as an example in which the package 10 is housed in the packing box 2 in which the misalignment prevention member 8 is not arranged, the four folding portions 3A'of the package 10 are housed in the packing box 2. It may be accommodated in contact with each of the four inner wall surfaces 2A.
Further, in the above embodiment, the polishing pads 4 are housed in individual antistatic bags 5 and sealed, and 10 of them are laminated and housed in the antistatic bag 6. However, the antistatic bag 5 is used. After accommodating one polishing pad 4 in the air cap 3, the four corners thereof are folded as described above to form the folded portion 3A', and then fixed with the tape 7 to form the package 10. The package 10 may be housed in the packing box 2 as described above.
Further, although the antistatic bags 5 and 6 have a square shape in the above embodiment, they may be rectangular, and the shape of the packing box 2 may be abbreviated instead of a square shape.

1 ... Polishing pad packing body 2 ... Packing box 3 ... Air cap (cushioning material) 3A ... Four corners 3A'... Folded part 4 ... Polishing pad 5 ... Antistatic bag 6 ... Antistatic bag 7 ... Tape 8 ... Misalignment prevention member 10 ... Package

Claims (3)

It is provided with a substantially square antistatic bag accommodating a disk-shaped polishing pad and a cushioning material covering the entire front and back surfaces of the antistatic bag accommodating the polishing pad, and the four points of the cushioning material are charged. A package for a polishing pad, which has a folded portion formed by folding the prevention bag to a position close to the outer peripheral portion of the polishing pad in a state where the four corners of the prevention bag are overlapped with each other. It is provided with a substantially square packing box for accommodating the packaging body for the polishing pad, and is provided with misalignment prevention members arranged at the four corners of the packing box.
The packaging is characterized in that the packaging is housed in the packaging box in a state where the four folding portions in the packaging for the polishing pad are in contact with the front engaging portions of the misalignment prevention member in the packaging box. The polishing pad packaging body for accommodating the packaging body according to claim 1. Equipped with a substantially square packing box for accommodating the packaging body for the polishing pad,
Claim 1 is characterized in that the package is housed in the packaging box so that the four folding portions in the package for the polishing pad abut on the inner wall surfaces of the four locations in the packaging box. A polishing pad package that houses the package described in.

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