JP6466179B2 - Packaging material for substrate storage container - Google Patents

Description

  The present invention relates to a package of a substrate storage container such as a semiconductor wafer or mask glass.

  The substrate storage container storing the semiconductor wafer is transported in a state of being packed in a packing body as described in Patent Documents 1 and 2. In recent years, the diameter of semiconductor wafers has been increased, and semiconductor wafers having a diameter of 300 mm have become mainstream, and the application of semiconductor wafers having a diameter of 450 mm is also being studied. As the diameter of the semiconductor wafer increases, the weight of the substrate storage container to be packed also increases. For example, the weight of the substrate storage container storing a semiconductor wafer having a diameter of 450 mm is about 25 kg.

  For the packaging body of the substrate storage container whose size is increased and the weight is increased, a packaging box having a box body having an opening on the upper surface and housing the substrate storage container and a lid body for closing the opening of the box body is used. It is done. In such a packing box, a method of fixing the lid to the box body with a hook-and-loop fastener instead of the adhesive tape is employed in order to increase the work efficiency of packing and unpacking. However, as the size of the packing box increases, the positioning of the lid is displaced during packing, which reduces work efficiency. In addition, the rotational force is repeatedly applied to the lid due to vibration during transportation, and the lid is fixed. There is a problem that the hook-and-loop fastener comes off.

JP 2007-137454 A JP 2014-5078 A

  Therefore, the present invention has been made in view of the above problems, and can attach the lid body to the box body that accommodates the substrate storage container with high positional accuracy, and can suppress rattling in the rotational direction of the lid body. An object of the present invention is to provide a package for a substrate storage container.

  In order to solve the above-mentioned problems, a packaging body for a substrate storage container according to the present invention has a box main body having an opening on the upper surface and accommodating the substrate storage container, and a lid for closing the opening, and the lid The body has a plate-like portion that covers the opening, and a side wall portion that is provided at an end of the plate-like portion and is fixed to the box body, and the plate-like portion includes the lid body and the box body. A position restricting portion for restricting the position is provided.

  The position restricting portion is in contact with the inner wall surface of the box body, and restricts the position of the lid body and the box body.

  The position restricting portion is in contact with a buffer member that holds the substrate storage container, and restricts the positions of the lid and the box body.

  The position restricting portion is provided at at least one corner of the plate-like portion.

  The box body and the side wall are fixed by a hook-and-loop fastener.

  One side of the opening part and one side of the plate-like part are joined, and the lid body rotates around the joined side as a rotation axis to close the opening part.

  The lid and the box body are separable.

  According to the present invention, it is possible to provide a packaging body for a substrate storage container that can attach the lid body to the box body that accommodates the substrate storage container with high positional accuracy, and that can suppress rattling in the rotation direction of the lid body. it can.

1 is a perspective view showing a first embodiment of the present invention. It is sectional drawing which shows the state in which a position control part controls the position of a cover body and a box main body in FIG. It is a perspective view which shows the state which the cover closed the opening part of the box main body. It is a perspective view which shows 2nd Embodiment of this invention. It is a figure which shows the cover body of 2nd Embodiment. It is a figure which shows the state in which the position control part of 2nd Embodiment was mounted in the box main body. It is a perspective view which shows 3rd Embodiment of this invention. It is a figure which shows the cover body of 3rd Embodiment.

  Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. 1 to 3 are views showing a first embodiment of the present invention. FIG. 1 shows the packaging body 1 before the substrate storage container 13 is accommodated, and FIG. 3 shows the packaging body 1 in a state where the substrate storage container 13 is accommodated and the lid 2 closes the opening 9 of the box body 3. Show. Although not shown in the figure, the substrate storage container 13 is placed in a packing bag such as an aluminum laminate bag in order to prevent moisture absorption, and is packed with the bag opening sealed.

  The box body 3 in which the substrate storage container is accommodated has a cylindrical shape having openings on the upper and lower surfaces, and the opening on the lower surface is closed by the bottom lid 12. The substrate storage container 13 is held by the buffer members 4 and 5 that reduce the impact, and is stored in the box body 3 from the opening 9. The buffer members 4 and 5 are prevented from moving the substrate storage container 13 in the package 1 by partly contacting the inner wall surface of the box body 3. The box body 3, the lid body 2, the bottom lid body 12, and the buffer members 4 and 5 can be formed of cardboard or resin, respectively.

  As shown in FIG. 1, the lid body 2 includes a plate-like portion 21 that covers the opening 9 and a side wall portion 22 provided at an end of the plate-like portion 21. After the plate-like portion 21 is placed on the opening 9 of the box body, the side wall portion 22 of the lid 2 overlaps the side wall 31 of the box body 3. And the fixing | fixed part 10 provided in the side wall part 22 and the fixing | fixed part 11 provided in the side wall 31 of the box main body 3 overlap and engage, and the cover body 2 is fixed to the box main body 3. FIG. By using a hook-and-loop fastener for the fixing portions 10 and 11, the lid body 2 can be easily attached and detached. Further, the fixing bands 7 and 8 are tightened to reinforce the fixing of the lid, and the packaging is completed as shown in FIG.

  In the first embodiment, one side of the plate-like portion 21 is joined to one side of the opening 9 and is continuous. For this reason, the lid body 2 rotates with the joined sides as the rotation axis, and closes the opening 9 of the box body 3. In the first embodiment, as shown in FIG. 1, the position restricting portions 6 that are substantially L-shaped convex portions are provided at two corners on the inner surface side of the plate-like portion 21.

  The position restricting portion 6 is disposed apart from the end of the plate-like portion 21 by a gap S, and a gap S is formed between the side wall portion 22 and the position restricting portion 6 as shown in FIG. The The substantially L-shaped position restricting portion 6 is disposed such that the two linear side surfaces 61 and 62 face different side wall portions 22. When the lid 2 closes the opening 9, the three side walls 31 of the box body 3 that are joined to the plate-like part 21 and are not continuous as shown in FIG. Is fitted in the gap S. When the lid body 2 tries to move on the opening 9, the side surfaces 61 and 62 of the position restricting portion 6 come into contact with the inner wall surface of the side wall 31 of the box body 3 and the movement of the lid body 2 is restricted. The positions of the body 2 and the box body 3 are restricted.

  Since the position restricting portion 6 restricts the positions of the lid 2 and the box body 3 in a state where the plate-like portion 21 is placed on the opening 9, the lid 2 and the box body 3 are fixed by the fixing portions 10 and 11. Even if it is not fixed, the positional deviation of the lid 2 can be prevented. Further, when the plate-like portion 21 is placed on the opening 9, the position restricting portion 6 guides the plate-like portion 21 so that the side surfaces 61 and 62 are accommodated in the opening 9 of the box body 3, so that the lid 2 Even if the opening 9 of the box body 3 is distorted, the lid 2 and the box body 3 can be accurately aligned. In particular, the positioning of the lid 2 and the box body 3 is facilitated by disposing the position restricting portion 6 so as to face the corner portion where the opening 9 of the box body 3 is unlikely to be deformed. For this reason, even if the package 1 becomes large, it is easy to place the lid 2 in the opening 9 of the box body 3 without misalignment, and the packaging work can be made more efficient.

  In addition, while the substrate storage container 13 is being transported by the packing body 1, the position restricting portion 6 abuts against the inner wall surface of the box body 3 even if a force for moving to the lid body 2 due to vibrations is repeatedly applied. For this reason, a large force is applied to the side wall portion 22 to disengage the fixing portion 10 and the fixing portion 11 so that outside air and contaminants enter, and the inside of the package 1 and the packaging bag of the substrate storage container 13 are contaminated. Can be prevented. Furthermore, since the lid body 2 whose movement is regulated by the position regulating section 6 is fixed by the fixing section 10 and the fixing section 11, damage to the lid body 2 and the box body 3 can be prevented, and the packaging body 1 can be used repeatedly for a long time. It becomes possible.

  4 to 6 are views showing a second embodiment of the present invention. In 2nd Embodiment, the cover body 2 and the box main body 3 which close the opening part 9 are separable. FIG. 4 shows the package 1 before the substrate storage container 13 is stored. The box body 3 has a cylindrical shape having openings on the upper and lower surfaces, and the opening on the lower surface is closed by the bottom lid 12. The substrate storage container 13 held by the buffer members 4 and 5 is received in the box body 3 from the opening 9 on the upper surface and fixed in the package 1.

  The lid body 2 has a plate-like portion 21 and a side wall portion 22 provided at an end portion of the plate-like portion 21, and after the plate-like portion 21 is placed on the opening 9, the side wall portion 22 is attached to the box body 3. It overlaps with the side wall 31. And the fixing | fixed part 10 provided in the side wall part 22 and the fixing | fixed part 11 provided in the side wall 31 of the box main body 3 overlap and engage, and the cover body 2 is fixed to the box main body 3. FIG. A hook-and-loop fastener is used for the fixing portions 10 and 11, and the fixing bands 7 and 8 are tightened as necessary to reinforce the fixing of the lid 2.

  As shown in FIG. 5, the position restricting portion 6 is provided at a corner on the diagonal line of the plate-like portion 21. The position restricting portion 6 is a triangular convex portion, and a gap S is provided between the side surfaces 61 and 62 of the convex portion and the end portion of the plate-like portion 21. The lid 2 closes the opening 9 by fitting the side wall 31 of the box body 3 into the gap S. FIG. 6 is a view showing a state where the plate-like portion 21 is mounted on the box body 3 (the side wall portion 22 is not shown). Even if the lid 2 is about to move, the side surfaces 61 and 62 of the position restricting portion 6 provided on the plate-like portion 21 come into contact with the inner wall surface of the side wall 31 of the box body 3. The position is restricted.

  Also in the second embodiment, when the plate-like portion 21 is placed on the opening 9, the positions of the lid body 2 and the box body 3 are regulated by the position regulating section 6. Even if the box body 3 is not fixed, the positional deviation of the lid 2 can be prevented. Even when the lid 2 or the opening 9 is distorted, when the plate-like portion 21 is placed on the opening 9, the side surfaces 61, 62 of the position restricting portion 6 are in the opening 9 of the box body 3. Since the plate-like portion 21 is guided so as to be within the range, the lid body 2 and the box body 3 can be accurately aligned. For this reason, even if the packing box becomes large, it becomes easy to place the lid 2 in the opening 9 of the box body 3 without misalignment, and the packing work can be made more efficient.

  In addition, while the substrate storage container 13 is being transported by the packing body 1, the position restricting portion 6 restricts the movement of the lid body 2 even when a force that tries to move to the lid body 2 due to vibration repeatedly acts. Big power is not applied. For this reason, the fixing | fixed part 10 and the fixing | fixed part 11 do not remove | deviate during conveyance.

  7 and 8 are views showing a third embodiment of the present invention. 3rd Embodiment is a form which can isolate | separate the cover body 2 and the box main body 3 similarly to 2nd Embodiment. FIG. 7 shows the package 1 before the substrate storage container 13 is stored. The box body 3 has a cylindrical shape having openings on the upper and lower surfaces, and the opening on the lower surface is closed by the bottom lid 12. The substrate storage container 13 held by the buffer members 4 and 5 is received in the box body 3 from the opening 9 on the upper surface and fixed in the package 1.

  The lid body 2 has a plate-like portion 21 and a side wall portion 22 provided at an end portion of the plate-like portion 21, and after the plate-like portion 21 is placed on the opening 9, the side wall portion 22 is attached to the box body 3. It overlaps with the side wall 31. And the fixing | fixed part 10 provided in the side wall part 22 and the fixing | fixed part 11 provided in the side wall 31 of the box main body 3 overlap and engage, and the cover body 2 is fixed to the box main body 3. FIG. A hook-and-loop fastener is used for the fixing portions 10 and 11, and the fixing bands 7 and 8 are tightened as necessary to reinforce the fixing of the lid 2.

  In the third embodiment, the side surface 63 of the position restricting portion 6 provided in the plate-like portion 21 comes into contact with the side surface of the concave portion 51 provided in the buffer member 5 disposed on the upper surface of the substrate storage container 13, and the lid body 2. Regulate position. The positions of the buffer members 4 and 5 are fixed inside the box body 3 by partly contacting the inner wall surface of the box body 3, so that the position of the lid 2 is restricted by the recess 51 of the buffer member 5. By doing so, the positions of the lid 2 and the box body 3 are regulated.

  Even if the lid 2 is about to move on the opening 9, the side 63 of the position restricting portion 6 abuts against the side of the recess 51 provided in the buffer member 5 to restrict the movement of the lid 2. At this time, since the position restricting portion 6 does not contact the inner wall surface of the box body 3 and applies force to the box body 3, the strength of the box body 3 can be freely set.

  In the first to third embodiments of the present invention, the box main body 3 has a cylindrical shape having openings on the upper and lower surfaces, and the opening on the lower surface is closed by the bottom lid body 12, but this is only an example. In the invention, as long as the box body 3 is provided with the opening 9 on the upper surface, the structure of the lower surface is not limited. Moreover, the position control part 6 should just be one or more places, and the shape is not restricted to L shape or a triangle. For example, a rectangular position restricting portion 6 can be provided at the center of one side of the plate-like portion 21, and a plurality of circular position restricting portions 6 can be provided at intervals. Furthermore, it can also be set as the frame-shaped position control part 6 along the perimeter of the plate-shaped part 21. FIG.

  As mentioned above, although this invention was demonstrated based on embodiment, this invention is not limited to embodiment, A various change is possible in the range which does not deviate from the summary.

DESCRIPTION OF SYMBOLS 1 Packing body 2 Cover body 21 Plate-shaped part 22 Side wall part 3 Box body 31 Side wall 4, 5 Buffer member 6 Position control part 9 Opening part 10, 11 Fixing part 12 Bottom cover body 13 Substrate storage container

Claims (9)

A box body having an opening on the upper surface and containing a substrate storage container; and a lid for closing the opening;
The lid body has a plate-like portion that covers the opening, and a side wall portion that is provided at an end of the plate-like portion and is fixed to the box body.
The plate-like portion includes a position restricting portion that restricts the position of the lid and the box body,
The position restricting portion is provided so as to be scattered in the plate-like portion, and a side surface abuts on a side surface of a concave portion provided in a buffer member holding the substrate storage container, and the lid body and the box body A package for a substrate storage container, wherein the position of the substrate storage container is regulated . The package of a substrate storage container according to claim 1 , wherein the position restricting portion is provided at at least one corner of the plate-like portion. The packaging body for a substrate storage container according to claim 2 , wherein the position restricting portion is provided at a corner portion on a diagonal line of the plate-like portion. A box body having an opening on the upper surface, a packaging body for chromatic and a lid for closing said opening,
The box body has four side walls, and the four side walls form one space for accommodating a substrate storage container,
The lid body has a plate-like portion that covers the opening, and a side wall portion that is provided at an end of the plate-like portion and is fixed to the box body.
The plate-like portion includes a position restricting portion that restricts the position of the lid and the box body,
The position restricting portions are provided at corners on a diagonal line of the plate-like portion so as to be scattered in the plate-like portion, and respectively contact the two side walls forming the corner portions of the box body. A package for a substrate storage container, comprising two side surfaces in contact with each other . Wherein one side of one side and the plate-like portion of the opening portion is joined, the lid body 4 from claim 1, characterized in that closing rotates the rotary shaft the joined sides the opening The package of the substrate storage container according to any one of the above. Package of substrate storage container according to claim 1, any one of 4, characterized in that said lid and said box body are separable. The lid body is formed by joining one side of the opening and one side of the plate-like part, rotating the joined side as a rotation axis, and closing the opening.
The package of a substrate storage container according to claim 2 , wherein the position restricting portion is provided at both corners of the sides facing the joined sides. A box body having an opening on the upper surface, a packaging body for chromatic and a lid for closing said opening,
The box body has four side walls, and the four side walls form one space for accommodating a substrate storage container,
The lid body has a plate-like portion that covers the opening, and a side wall portion that is provided at an end of the plate-like portion and is fixed to the box body.
The plate-like portion includes a position restricting portion that restricts the position of the lid and the box body,
The lid body is formed by joining one side of the opening and one side of the plate-like part, rotating the joined side as a rotation axis, and closing the opening.
The position restricting portion is provided at both corners of the side facing the joined side so as to be scattered in the plate-like portion, and on the two side walls forming the corners of the box body. A packaging body for a substrate storage container, which has two side surfaces that contact each other . The package body for a substrate storage container according to any one of claims 1 to 8 , wherein the box body and the side wall portion are fixed by a hook-and-loop fastener.

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