KR100895726B1 - Light source equipment - Google Patents

Abstract

To automatically determine whether the discharge lamp mounted on the light source device is a suitable discharge lamp and, if the discharge lamp is an accurate discharge lamp, to provide a light source device for managing the use state and history of use of the discharge lamp.

Clamp 1 made up of a large diameter cylindrical base portion 11 whose end face is sealed by a circular contact surface 12 and a small diameter projection 13 coaxially passing through the center of the circular contact surface. And a discharging lamp having a lamp data display section (2) displaying lamp data related to the discharging lamp on the clasp (1), and a clasp holder (3) which protects and energizes the clasp of this discharging lamp. In the light source device having the light source device, a lead device for reading data of the lamp data display unit 2 is provided in the clasp holder 3.

Clamp, Clamp Holder, Lamp Data Display, Lead Device

Description

Light source device {LIGHT SOURCE EQUIPMENT}

BRIEF DESCRIPTION OF THE DRAWINGS The figure which shows the clasp which has a lamp data display part in 1st Embodiment of this invention;

2 is a diagram showing a description example of lamp data according to the first embodiment of the present invention;

3 is a partial cross-sectional view showing a state in which a clasp having a lamp data display portion in a first embodiment of the present invention is protected by a clasp holder having a lead device.

4 is a flowchart showing a flow in which the light source device according to the first embodiment of the present invention determines whether or not the discharge lamp is turned on or not, and whether or not the light source device is set or updated;

Fig. 5 is a partial cross-sectional view showing a state in which a clasp having a lamp data display portion in a second embodiment of the present invention is protected by a clasp holder having a lead device.

Fig. 6 is a partial cross-sectional view showing a state in which a clasp having a lamp data display portion in a third embodiment of the present invention is protected by a clasp holder having a lead device.

FIG. 7 is a partial cross-sectional view showing a state in which a clasp having a lamp data display portion is protected by a clasp holder having a lead device in a fourth embodiment of the present invention; FIG.

8 is a diagram showing a clasp provided with a lamp data display section in a positioning section in a fifth embodiment of the present invention;

Fig. 9 is a partial sectional view showing a state in which a clasp having a lamp data display portion in a positioning portion according to a fifth embodiment of the present invention is protected by a clasp holder having a lead device.

FIG. 10 is a view showing a clasp having a lamp data display section in a positioning section in a sixth embodiment of the present invention; FIG.

Fig. 11 is a partial sectional view showing a state in which a clasp having a lamp data display portion in a positioning portion according to a sixth embodiment of the present invention is protected by a clasp holder having a lead device.

12 is a view showing a clasp having a lamp data display section in a positioning section in a seventh embodiment of the present invention;

Fig. 13 is a partial cross-sectional view showing a state in which a clasp having a lamp data display portion in a positioning portion in a seventh embodiment of the present invention is protected by a clasp holder having a lead device.

Fig. 14 shows a clasp having a lamp data display section in a positioning section in an eighth embodiment of the present invention;

Fig. 15 is a partial sectional view showing a state in which a clasp having a lamp data display portion in a positioning portion in an eighth embodiment of the present invention is protected by a clasp holder having a lead device.

Fig. 16 shows a clasp having a lamp data display section in a positioning section in a ninth embodiment of the present invention;

Fig. 17 is a partial sectional view showing a state in which a clasp having a lamp data display portion in a positioning portion according to a ninth embodiment of the invention is protected and held in a clasp holder having a lead device;

18 shows an example of a discharge lamp having a conventional clasp;

Fig. 19 is a longitudinal sectional view showing a state where a clasp of a conventional discharge lamp is protected and held in a clasp holder of a light source device.

<Description of Symbols for Major Parts of Drawings>

1: clasp

11: cylindrical base part

12: contact surface on disc

13: protrusions

2: lamp data display unit

3: clasp holder

[Patent Document 1] Japanese Unexamined Patent Publication No. 2004-6360

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a light source device having a discharge lamp which is used for exposure in a manufacturing process such as a semiconductor device (IC), a liquid crystal display panel (LCD), a printed wiring board (PCB), and generates ultraviolet rays. The present invention relates to a light source device configured to manage a use state and a history of a discharge lamp by providing a lamp data display unit for displaying the property and the setting specification of each discharge lamp and reading out the property and the setting specification.

As shown in FIG. 18, the discharge lamp used by the conventional light source device is opposed to the quartz bulb 5 which consists of the ball-shaped bulging part 51 and the two sealing tube parts 52, and the bulging part 51. The positive electrode 53 and the negative electrode 54, the internal lead rod 55 and the external lead rod 56 which support the positive electrode 53 and the negative electrode 54 and conduct electricity at the same time; It consists of the sealing pipe part 52 which connects 55 and the outer lead rod 56 with the molybdenum foil 57, and seals it airtight, Furthermore, the clasp 1 is being fixed to the sealing pipe part 52. As shown in FIG.

As shown in the longitudinal cross-sectional view of FIG. 19, the conventional clasp 1 has the center of the large diameter cylindrical base part 11 which sealed one end surface in the contact surface 12 of a disk, and the center of the contact surface 12 of a disk. It consists of the small diameter protrusions 13 penetrated and formed in the same shaft shape. The large diameter base portion 11 is bonded to the sealing tube portion 52 with an adhesive 58, and the external lead rod is attached to the small diameter protrusions 13. (56) is inserted and soldered with silver lead (59).

When attaching the discharge lamp to the light source device with the concave reflector, the projection 13 of the clasp 3 in the hole 32 of the metal clasp holder 3 having the flat contact surface 31 of the light source device. Is inserted to protect the discharge lamp and is energized through the clasp holder 3.

In the light source device, if the light point position of the discharge lamp is changed on the front face of the concave reflector, the prescribed optical performance cannot be obtained, and therefore, the light point must always be set to a constant position on the front face of the concave reflector. Therefore, if there is an imbalance in the bright spot positions for each discharge lamp, it is necessary to adjust the position of the bright spots on the concave reflecting mirror every time the discharge lamp is replaced, which is a cumbersome work requiring skill.

Therefore, in order to maintain the reproducibility of the bright spot position even when the discharge lamp is replaced, in the conventional light source device, the protrusion 13 of the clasp 1 of the discharge lamp is inserted into the hole 32 of the clasp holder 3, The contact surface 12 on the disc of the clasp 1 is brought into contact with the clasp holder 3 to secure the reproducibility of the bright point position.

However, the conventional light source device does not manage the inherent attributes for each discharge lamp, such as date of manufacture, manufacturer name, place of manufacture, production line, lamp type, variety number, lot number, and identification number.

In addition, if the wrong type of discharge lamp is not used because it is not suitable for the light source device, or if the discharge lamp other than the genuine discharge lamp is turned on, in particular, an illegal discharge lamp which disregards the setting specification permitted by the light source device is lit, In addition to shortening the cable and causing a failure, the discharge lamp may rupture and cause serious damage to the light source device.

In the short arc type discharge lamp of DC lighting, polarities (cathode and anode) connected to the light source device are determined. If you connect the wrong polarity, the negative electrode will be consumed significantly and the life will be significantly shortened. Therefore, the polarity of the discharge lamp should be clearly displayed on the clasp of the discharge lamp to prompt the attention of the direction of installation of the discharge lamp or to prevent the connection of the opposite polarity. The shapes are different from cathode to anode.

In addition, history management for each discharge lamp, for example, history management for each discharge lamp, such as an unused discharge lamp, a discharge lamp used halfway, an old discharge lamp, a discharge lamp of the latest specification, I had to rely on the record.

In this manner, not only the user of the discharge lamp recognizes the attribute and setting specification for each discharge lamp, but also the light source device needs to recognize the attribute and setting specification of the discharge lamp and manage its history. Particularly, the lighting of the discharge lamp exceeding the usage limit lighting time and the usage limit flashing time or the usage lighting time by resetting the usage lighting time, and the lighting of the discharge lamp in which the usage lighting time is not properly managed are caused by partial abnormal heat generation. There was a case of rupture.

In the discharge lamp, setting specifications such as the rated lamp current, the rated lamp voltage, the cooling conditions, the installation direction to the apparatus, the usage limit lighting time, and the usage flashing frequency are determined for each type of discharge lamp. Care of the lamp was forced to rely on the lamp user.

Patent Literature 1 proposes to provide a lamp data carrying section showing a type of discharge lamp and a usage time in a lamp unit and to manage the lamp unit by reading the lamp data.

The lamp data bearing portion proposed in the Patent Document 1 arranges a plurality of fuses, and partially carries out the plurality of fuses to carry the lamp data, so as to classify the discharge lamps at the time of shipment. Particular melting is performed to read the type of discharge lamp when attached to the light source device.

Then, in the light source device, the life time is judged from the type of discharge lamp read out, and whenever the use time elapses, the fuse of the lamp data bearing part is blown one after another, and the presence or absence of the fuse is electrically detected. Thus, the remaining life time is supported on the lamp-data carrying section.

Since the lamp data bearing portion is attached to a lamp unit that protects and holds the discharge lamp, the data of the discharge lamp is not continuous when the discharge lamp is removed from the lamp unit and replaced with another discharge lamp.

According to such a lamp data carrying means, it can be applied only to a discharge lamp of a specification registered in advance in the light source device, but a discharge lamp of a newly developed specification cannot be applied. In addition, since it is impossible to update the setting of the light source device, there is a problem that the discharge lamp that can be used is limited.

Therefore, an object of the present invention is to automatically determine whether or not a discharge lamp attached to a light source device is a suitable discharge lamp, and to manage the use state and usage history of the discharge lamp if it is a correct discharge lamp.

The light source device of the present invention comprises a large diameter cylindrical base portion whose cross section is sealed at a contact surface on a disc, and a clasp and a discharging lamp on the clasp consisting of a small diameter protrusion coaxially penetrating through the center of the contact surface on the disc. A discharge lamp having a lamp data display section displaying lamp data associated with the lamp data; A light source device having a clasp holder that protects and holds the clasp of the discharge lamp to conduct electricity, and is provided with a lead device that reads data of the lamp data display portion in the clasp holder.

EMBODIMENT OF THE INVENTION Embodiment of this invention is described in detail, referring FIGS. 1-15.

Moreover, the same part is represented by the same code | symbol through each embodiment, and the overlapping description is abbreviate | omitted.

[First Embodiment]

According to the first embodiment of the present invention, the lamp data (discharge) displayed on the lamp data display unit 2 by providing the lamp data display unit 2 on the side of the cylindrical base portion 11 of the clasp 1 of the discharge lamp. The properties and specifications of the lamp) are read by the optical lead device, and the properties and setting specifications of the mounted discharge lamp are put into the light source device.

As shown in FIG. 1, the lamp-data display part 2 which displayed the attribute and setting specification of a discharge lamp is formed in the side surface of the large diameter cylindrical base part 11 of the clasp 1. As shown in FIG. And as shown in FIG. 3, the small diameter protrusion 13 of the clasp 1 is inserted in the hole 32 which perforated in the contact surface 31 of the clasp holder 3 of a light source device, and a discharge lamp is attached. It is comprised so that it may oppose the lead apparatus 4 at one time.

Lamp data related to the discharge lamp to be displayed can be classified into attributes for each discharge lamp and setting specifications of the discharge lamp. The attributes for each discharge lamp are the date of manufacture, the manufacturer name of the discharge lamp, the place of manufacture, the production line, the type of the discharge lamp, the type number, the lot number, the identification number, and the like. The setting specification of the discharge lamp is a condition for using the discharge lamp in a light source device such as rated lamp current, rated lamp voltage, cooling condition, installation direction for the device, etc., and consists of one or a plurality of them.

The display contents of the lamp data display section 2 of the discharge lamp are displayed by any of letters, symbols, signs, figures, shapes, and the like, or a combination thereof. In addition to the barcode and two-dimensional code shown in FIG.

The lamp data is displayed by the combination of the reflectance difference of the light, the specular reflection portion and the diffuse reflection portion. In addition to cutting, engraving, engraving, and etching, the data display unit 2 can be formed by irradiation of a laser beam or the like. In addition, as shown in the cross-sectional view of FIG. 3, a recessed portion may be formed in advance on the side surface of the cylindrical base portion 11, and a plate on which lamp data is displayed may be fitted to the recessed portion.

By forming the lamp data display portion 2 in the clasp in this manner, since the external discharge lamp has the same appearance as a conventional discharge lamp, it can be attached to a light source device having no lead device 4 and turned on.

As shown in the longitudinal cross-sectional view A and the cross-sectional view B of FIG. 3, when the discharge lamp which provided the lamp data display part 2 in the clasp was attached to the light source device, the optical lead device 4 of the light source device. Is opposed to the lamp data display section 2. The lead device 4 is provided with a light source such as an LED arranged to block external light such as light emitted from the discharge lamp and an image recognition means such as a CCD, so as to optically read the display contents of the lamp data display unit 2. It is stored in the lamp data storage device of the device. By configuring the lead device to block external light, the optical noise can be prevented, so that the lead device can accurately recognize the lamp data. In addition, the deterioration of the lead apparatus due to the strong ultraviolet rays of the discharge lamp can be prevented.

Next, according to the flowchart of FIG. 4, it is determined whether or not the mounted discharge lamp is suitable for the light source device, and the process of determining whether to turn on or not the lamp data set in the light source device is updated. Explain.

In the lamp data storage device A of the light source device, lamp data (properties and setting specifications) of a discharge lamp (including a compatible lamp) suitable for the light source device is stored in advance, and the usage history of the discharge lamp currently in use is further improved. It is stored.

When the operator attaches the discharge lamp to the light source device (B) or when the power source of the light source device is turned on and the discharge lamp is turned on, the lead device 4 is operated to operate the lamp device of the lamp data display unit 2. Data is read optically (C) and input to the information processing unit (D).

In the information processing unit (D), a combination of the attribute and setting specification of the discharge lamp read out and the attribute and setting specification of the suitable discharge lamp stored in the light source device in advance is performed, and whether or not the mounted discharge lamp is turned on or not. To judge. In addition, it is determined whether or not a suitable discharge lamp exceeds the usage limit lighting time and the usage limit flashing number by referring to the usage history. When the discharge lamp after use is removed, the discharge lamp is recorded in the lamp data storage device as a discharge lamp that cannot be used together with the attribute.

When setting the lamp data of the newly developed discharge lamp, it is suitable for the lamp data storage device of the light source device on the basis of the lamp data display section 2 of the new discharge lamp when the new discharge lamp is attached to the light source device. Register additionally or update the lamp data as a discharge lamp. Registration of a new discharge lamp preferably uses a previously known password in order to prevent a mistake.

When it is determined (E) that the discharge lamp attached to the light source device is appropriately lit, the light source device is in a state of allowing the discharge lamp to be lit.

However, when the discharge lamp mounted on the light source device is judged to be inadequate to allow lighting, or when the usage limit lighting time and usage limit flashing number are reached from the usage history, the lighting is not allowed to be forced. Raise an alarm.

By configuring as described above, the setting specification (rated current, rated voltage, cooling condition, installation direction of the device, etc.) of the mounted discharge lamp can be automatically and accurately recognized by the light source device, thereby preventing mounting error. . Moreover, also in a light source device, it can prevent to light the discharge lamp of wrong specification.

Since the specification history of the discharge lamp is managed, when the usage limit lighting time and the usage limit flashing time have been reached, the user can recognize the usage limit lighting time and the usage limit flashing time of the discharge lamp, and the discharge lamp has reached the end of its life. Lighting can be prevented.

Since the attribute of the discharge lamp can be automatically recognized by the light source device, the user can recognize the source of the discharge lamp and recognize that the light source device is a suitable discharge lamp (pure article).

Second Embodiment

According to the second embodiment of the light source device of the present invention, as shown in the longitudinal cross-sectional view of FIG. 5, the lamp data display unit 2 is provided below the cylindrical base portion 11 of the clasp of the discharge lamp. The lead apparatus 4 which reads the data of the data display part 2 is provided in the side of the contact surface 31 of the clasp holder 3. As shown in FIG.

By integrating the lead device 4 with the clasp holder 3 in this manner, the structure of the light source device can be simplified.

Third Embodiment

According to the third embodiment of the light source device of the present invention, as shown in the longitudinal cross-sectional view of FIG. 6, the lamp data display portion 2 is provided on the contact surface 12 on the disc of the clasp of the discharge lamp, and the tap of the light source device is provided. The lead device 4 which reads the data of the lamp data display part 2 of a discharge lamp is provided in the recessed part 33 formed in the contact surface 31 of the metal holder 3 through the light shielding space.

In such a configuration, the size of the clasp holder 3 does not change, and the device can be miniaturized.

Fourth Embodiment

In the fourth embodiment of the light source device of the present invention, as shown in the longitudinal cross-sectional view of FIG. 7, the lamp data display unit 2 is provided on the tip end surface of the small-diameter projection 13 of the clasp of the discharge lamp. The lead device 4 which reads out the lamp data of the data display part 2 is provided in the bottom face of the hole 32 drilled in the clasp holder 3.

In this configuration, the size of the clasp holder 3 does not change, and the device can be miniaturized.

[Fifth Embodiment]

As shown in the side view (A) and bottom view (B) of FIG. 8, the 5th Embodiment of the light source device of this invention is a convex for positioning on the contact surface 12 on the disc of the clasp 1 of a discharge lamp. The part 121 is formed and the lamp data display part 2 is provided in the front end surface of this convex part 121. As shown in FIG.

As shown in the longitudinal cross-sectional view of FIG. 9, a recess portion 31l to which the convex portion 121 for positioning the discharge lamp is coupled is formed on the contact surface 31 of the clasp holder 3 of the light source device. The lead apparatus 4 which reads out lamp data is provided in the bottom face of 311. As shown in FIG.

In such a configuration, the discharge lamp can be positioned when the discharge lamp is mounted on the light source device, and the lamp data display portion 2 of the discharge lamp can be accurately opposed to the lead device 4 of the light source device.

[Sixth Embodiment]

As shown in the side view A and bottom view B of FIG. 10, the 6th Embodiment of the light source device of this invention is a convex for positioning in the contact surface 12 on the disc of the clasp 1 of a discharge lamp. The part 121 is formed, the recessed part 122 is formed in the front-end | tip of this convex part 121, and the lamp data display part 2 is provided in the bottom face of this recessed part 122. FIG.

As shown in the longitudinal cross-sectional view of FIG. 11, similarly to the fifth embodiment, the recessed portion 311 to which the convex portion 121 for positioning the discharge lamp is coupled to the contact surface 31 of the clasp holder 3 of the light source device. And a lead device 4 for reading lamp data from the bottom of the recess 311.

In such a configuration, the discharge lamp can be positioned when the discharge lamp is mounted on the light source device, and the lamp data display portion 2 of the discharge lamp can be accurately opposed to the lead device 4 of the light source device.

Furthermore, since the lamp data display part 2 is provided in the bottom of the recessed part 122, the lamp data display part 2 is protected and the display is not damaged even when contacted with the contact surface 31 or the like of the clasp holder 3. Do not.

[Seventh Embodiment]

In the seventh embodiment of the light source device of the present invention, as shown in the side view (A) and the bottom view (B) of FIG. 12, the main portion for positioning on the contact surface 12 on the disc of the clasp 1 of the discharge lamp 123 is formed, and the lamp data display part 2 is provided in the bottom face of this recessed part 123. As shown in FIG.

As shown in the longitudinal cross-sectional view of FIG. 13, a convex portion 312 is formed on the contact surface 31 of the clasp holder 3 of the light source device, which is coupled to the recessed portion 123 for positioning the discharge lamp. The recessed part 313 is formed in the part 312, and the lead apparatus 4 which reads lamp data is provided in the bottom face of the recessed part 313. As shown in FIG.

With this arrangement, as in the sixth embodiment, positioning can be performed when the discharge lamp is mounted on the light source device, and the lamp data display portion 2 of the discharge lamp can be accurately opposed to the lead device 4 of the light source device. have.

Moreover, since the lamp data display part 2 is provided in the bottom face of the recessed part 123, even if the lamp data display part 2 is protected and contact | connects the contact surface of a clasp holder, etc., display is not damaged.

[Eighth Embodiment]

In the eighth embodiment of the light source device of the present invention, as shown in the side view (A) and the bottom view (B) of FIG. 14, the lower portion of the side surface of the cylindrical base portion 11 of the clasp 1 of the discharge lamp is shown. The positioning flat surface 111 is formed beforehand, and the lamp data display part 2 is provided in this flat surface 111.

As shown in the longitudinal cross-sectional view A and bottom view B of FIG. 15, the block 34 which contacts the clasp holder 3 of a light source device to the flat surface 111 for positioning a discharge lamp is a clasp. The lead device 4 which integrally forms with the holder 3 and reads lamp data is provided in the recessed part 341 formed in this block 34. As shown in FIG.

[Ninth Embodiment]

As shown in the side view A and the bottom view B of FIG. 16, the ninth embodiment of the light source device of the present invention is for positioning on a part of the side surface of the protrusion 13 of the clasp 1 of the discharge lamp. The flat surface 131 is formed, and the lamp data display part 2 is provided in this flat surface 131.

As shown in the longitudinal cross-sectional view A and the cross-sectional view B of FIG. 17, the inner peripheral surface is expanded in the hole 32 of the clasp holder 3 of a light source device, and the positioning flat surface 321 is formed, The projections 13 of the discharge lamp clasps are coupled to the holes 32 for positioning.

In the flat surface 321 of the hole 32 of the clasp holder 3, the recessed part 322 is formed in the horizontal direction, The lead part 322 is provided with the lead apparatus 4 which reads lamp data, The lamp data display part 2 of the protrusion part 13 of the clasp 1 is made to oppose.

The characteristics of the discharge lamp (date of manufacture, date of manufacture, place of manufacture, line of manufacture, type of lamp, type number, lot number, identification number, etc.) and setting specifications (rated current, rated voltage, cooling) Display the lamp data of the conditions, the direction of installation to the device, and read the lamp data from the light source device at the time of installation or replacement of the discharge lamp. It can be confirmed that it is a discharge lamp suitable for the light source device.

Thus, at the time of installation or replacement of the discharge lamp, it is possible to confirm whether or not it is a genuine product suitable for the light source device, and it can be confirmed that the discharge lamp is mounted in the correct state without fail according to the setting specifications.

Even if a proper discharge lamp is installed, the lamp data cannot be read if the mounting state is not correct. Therefore, the lighting of the wrong state can be prevented.

In addition, in the storage device of the light source device, the usage limit lighting time and the usage limit flashing number for each type of discharge lamp are stored, and the usage lighting time is described with reference to the usage limit lighting time and the usage limit flashing number stored in the light source device. Can manage. Therefore, the lighting which exceeded the usage limit lighting time of a discharge lamp and the usage limit blinking frequency can be prevented.

In the light source device, the lead device for reading the lamp data is opposed to the lamp data display unit of the discharge lamp by shielding against external light, thereby preventing the intrusion of noise light and reading the lamp data accurately, and the ultraviolet rays emitted from the discharge lamp are incident. Since it cannot be done, it does not deteriorate an optical lead means.

By providing the lead device in the clasp holder of the light source device, the structure of the device does not need to be changed significantly compared with the conventional light source device, and there is no increase in size. Therefore, it is easy to install the lead apparatus by modifying an existing apparatus.

Claims (7)

Lamp data related to the discharge lamp in the clasp and the clasp which consists of a large diameter cylindrical base part which sealed the cross section at the contact surface of the disk, and the small diameter protrusion which coaxially penetrates through the center of the contact surface of the said disk, and the said clasp. A discharge lamp having a lamp data display unit displaying? A light source device having a clasp holder for protecting and energizing a clasp of said discharge lamp, The lead device which reads the data of the said lamp data display part was provided in the said clasp holder, The light source device characterized by the above-mentioned. The method of claim 1, A light source device comprising a lamp data display portion provided in a cylindrical base portion of the clasp. The method of claim 1, The light source device which provided the lamp data display part in the contact surface on the disc of a clasp. The method of claim 1, A light source device comprising a lamp data display portion provided at a protrusion of the clasp. The method according to any one of claims 1 to 4, The lead apparatus has a recess, and provides an optical lead means at the bottom of the recess to contact the clasp of the discharge lamp, and blocks the external light by the recess to read the lamp data. The method according to any one of claims 1 to 4, The lamp data related to the discharge lamp includes the characteristics of the discharge lamp such as the date of manufacture, manufacturer name, place of manufacture, production line, discharge lamp type, type number, lot number, and identification number, rated discharge current, rated voltage, and cooling conditions. And a setting specification such as an installation direction for the device, a usage limit lighting time, and a usage limit flashing frequency. The method of claim 5, The display of the lamp data associated with the discharge lamp is an optically leadable bar code, a two-dimensional code, a character, a symbol, a sign, a figure, a shape, or a combination thereof.

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