JP2004071782A - Lighting device and exposure apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To constantly satisfy optimum cooling conditions in a lighting device with its condenser mirror focal position and lamp bright position adjustable to be coincident with each other irrespective of the presence of lamp manufacturing error or a lamp kind change. <P>SOLUTION: The lighting device has a cooling means provided with a flow rate controlling means for controlling the flow rate of a refrigerant and with a nozzle for discharging the refrigerant. The refrigerant with its flow rate controlled by the flow rate controlling means is blown out of the nozzle onto a light source for the forced cooling of the light source, and the light source is arranged on a movable first stage. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention generally relates to an illumination device for supplying illumination light to an exposure optical system, and more particularly to an illumination device using a heat-generating discharge lamp such as a mercury lamp or a xenon lamp as a light source. The present invention is suitable, for example, for an illumination device for an exposure apparatus that exposes a single crystal substrate for a semiconductor wafer by a step-and-scan projection method in a photolithography process. However, the application of the illumination device of the present invention is not limited to an exposure device, and can be widely applied to optical equipment such as photolithography, projection inspection, a projector, and a projector.
[0002]
[Prior art]
Various devices such as an image reading device, a measuring device, an inspection device, and an exposure device generally use a lamp filled with a high-pressure gas as a light source, and emit light emitted from the lamp using a spheroid or a rotating paraboloid. After being reflected and condensed in a certain direction by a reflecting mirror having a reflecting surface having a shape, the shape of the illumination light is shaped into a desired shape, and the object is illuminated.
[0003]
There are various types of high-pressure lamps used as light sources, such as xenon lamps, mercury lamps, and halogen lamps, depending on the type of gas filled or added, and they are used differently depending on the wavelength and output of the emission line required for the light source. However, any of the lamps has a structure in which a plurality of gases are sealed in a transparent bulb made of glass or quartz.
[0004]
FIG. 8 is a schematic configuration diagram showing a conventional lighting device 1000. Referring to FIG. 8, a lamp 1100 has a high-pressure gas sealed in a bulb made of transparent glass, and is formed by applying a voltage between an anode and a cathode, which are arranged opposite to each other in the bulb. A bright spot is generated between the electrodes, and illumination light emitted radially from the bright spot is applied to the condenser mirror 1200.
[0005]
The reflection surface of the condenser mirror 1200 has a surface shape obtained by cutting off a part of the spheroid, and the illumination light reflected by the condenser mirror 1200 is collected at a focal point (not shown). The lamp moving stage 1300 enables relative driving with respect to the condensing mirror 1200. By adjusting the position so that the bright spot position of the lamp 1100 coincides with the first focal point of the condensing mirror 1200, The illumination mirror 1200 has a structure in which the illumination light is correctly focused on the focusing mirror 1200 at the second focal position.
[0006]
At this time, for example, in the case of an illumination device used for an exposure device or the like, a high-pressure mercury lamp having an output of several kW is used as the lamp 1100, and the temperature of the bulb surface and the outside of the electrode unit reaches several hundred degrees Celsius, If used as it is, the valve may be damaged due to thermal expansion. Therefore, the structure is used while cooling by blowing compressed air at room temperature onto the valve and the bases 1400a and 1400b. .
[0007]
In particular, the lighting device 1000 has a structure in which the cooling condition can be changed in accordance with the change in the supply power applied to the lamp 1100, so that the proper cooling condition can always be maintained regardless of the power of the lamp 1100. Is configured.
[0008]
[Problems to be solved by the invention]
However, in the case of the lighting device 1000, there is a problem that it is not possible to cope with a change in the outer dimensions of the lamp 1100.
[0009]
That is, according to the lighting apparatus 1000, when changing the power applied to the lamp 1100, the flow rate of the cooling air can be changed so as to obtain an appropriate cooling effect. This is limited to the case where cooling is performed on the lamp 1100 having the same shape. For example, the thickness of the bulb is changed according to the input power, or the shape of the electrode is obtained in order to obtain efficient illumination light. When the external dimensions of the lamp 1100 itself are changed by changing the above, it is necessary to change the blowing position of the cooling air in accordance with the external dimensions of the lamp 1100. However, as shown in FIG. The cooling nozzles 1500a and 1500b fixed to the apparatus 1000 cannot cope with a change in position.
[0010]
Further, even if the lamp 1100 is only one type and is a lighting device exclusively used with the same outer dimensions, there is a manufacturing error that occurs when the lamp 1100 itself is manufactured. The mounting position of the condenser 1100 and the focal position of the condenser mirror 1200 need to be constantly adjusted with the replacement of the lamp 1100, and especially when the position of the lamp 1100 is changed, the cooling nozzles 1500a and 1500b are changed. Adjustment of the position is necessary.
[0011]
Further, the lamp 1100 applies a voltage to a positive electrode and a negative electrode which are arranged inside the bulb so as to be in a discharge state, thereby creating a light emission state. However, when the lamp 1100 is used for the life time and the discharge state continues, the surface of the positive electrode or the negative electrode is worn due to deposition of a metal element constituting the electrode, and the external dimensions are changed. Therefore, naturally, the position of the light-emitting point between the electrodes is also shifted between the early life and the last life of the lamp 1100, so that the illumination light emitted from the lamp 1100 can be used efficiently. In the meantime, the position adjustment between the lamp 1100 and the condenser mirror 1200 is an essential condition, and when the position is adjusted, the adjustment of the cooling position is also a necessary condition.
[0012]
Further, assuming that the positions of the cooling nozzles 1500a and 1500b cannot be adjusted in accordance with the positional deviation of the lamp 1100, the distance between the lamp 1100 and the cooling nozzles 1500a and 1500b is increased in consideration of the positional deviation of the lamp 1100. Since it has to be disposed at the position where the cooling air is taken out, unless the flow velocity and the flow rate of the refrigerant such as the cooling air blown out from the cooling nozzles 1500a and 1500b are set to large values, there is also a disadvantage that a desired cooling effect cannot be obtained. .
[0013]
Therefore, the present invention provides an illuminating device that can be adjusted so that the focal position of the condensing mirror and the luminous point position of the lamp coincide with each other irrespective of the manufacturing error and the type of lamp. For illustrative purposes.
[0014]
[Means for Solving the Problems]
In order to achieve the above object, an illuminating device according to one aspect of the present invention has a flow rate adjusting means for controlling a flow rate of a refrigerant and a cooling means having a nozzle for ejecting the refrigerant, An illuminating device for forcibly cooling the light source means by spraying the refrigerant controlled by the means from the nozzle to the light source means, wherein the light source means is disposed on a movable first stage. Features. According to such an illuminating device, even if the position of the luminescent spot is shifted due to a manufacturing error or a change in the type of the light source means, the light source means can be relatively moved, and the position can be adjusted freely. . A pipe member having flexibility is provided in at least a part of the pipes constituting the nozzle. It is characterized in that at least a tip portion of a pipe constituting the nozzle has a component made of an insulating material. The cooling unit is disposed on the first stage, and a relative position between the cooling unit and the light source unit is constant. The cooling unit is disposed on a second stage disposed on the first stage, and can be adjusted in position relative to the position of the light source unit. The cooling means is arranged on a third stage arranged in a place other than on the first stage, and the cooling means and the light source means can be independently adjusted in position. And The cooling means is constituted by a plurality of ejection ports arranged on a plurality of stages, and the plurality of ejection ports can be independently adjusted in position.
[0015]
An exposure apparatus according to another aspect of the present invention includes the illumination device described above.
[0016]
Other objects and further features of the present invention will be clarified by preferred embodiments described below with reference to the accompanying drawings.
[0017]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, exemplary illumination devices and exposure devices of the present invention will be described with reference to the accompanying drawings. In each of the drawings, the same members are denoted by the same reference numerals, and redundant description will be omitted. FIG. 6 is a schematic configuration diagram of an exposure apparatus 200 having the illumination device 1 according to the present invention.
[0018]
Referring to FIG. 6, illumination light (exposure light) diffused radially from the short arc type mercury lamp 2 is applied to the condenser mirror 4, but the surface without the condenser mirror 4 has a parabolic elliptical surface. Has a characteristic that light emitted radially from the first focal point of the condenser mirror 4 is condensed at the second focal point when reflected on the inner surface of the ellipse. Therefore, when the bright spot of the lamp 2 as the light source is arranged so as to coincide with the first focal point of the condenser mirror 4, the illumination light radially diffused from the lamp 2 is collected at the second focal point.
[0019]
The reflecting surface of the condenser mirror 4 is coated with a heat ray transmitting film, and among the illumination light diffused from the lamp 2, the heat ray component is transmitted through the condenser mirror 4 and only the other wavelength components are reflected. In addition, the wavelength selection filter 25 further eliminates wavelength components unnecessary for exposure, and collects the illumination light toward the second focal point.
[0020]
Note that the lamp 2 is fixed on the lamp stage 5 and can move relatively to the focusing mirror 4. However, depending on the type of the lamp 2, the main control system 13 The power supplied from the lamp power supply (not shown) to the lamp 2 is adjusted.
[0021]
FIG. 1 is a schematic configuration diagram best showing the features of a lighting device 1 according to the present invention. Referring to FIG. 1, 1 is a lighting device, 2 is a lamp as a light source, 3a is a base for the anode side electrode part of the lamp 2, 3b is a base for the cathode side electrode part of the lamp 2, and 4 is a radial form from the lamp 2. A condensing mirror for converging the illuminating light (exposure light) to be diffused at a focal point, 5 is a moving stage for adjusting the position of the lamp 2, 6 a is a nozzle for cooling the positive electrode base of the lamp 2, and 6 b is a lamp 2. Nozzle for cooling the negative electrode base portion, 7 is a manifold connecting the cooling nozzles 6a and 6b, 8a is a flexible tube (anode side) connecting between the lighting device 1 and the manifold 7, 8b is a space between the lighting device 1 and the manifold 7 9a is a throttle valve for adjusting the flow rate of the refrigerant for cooling the positive electrode base of the lamp 2, and 9b is a flow control of the refrigerant for cooling the negative electrode base of the lamp 2. It is the use throttle valve.
[0022]
In the above-described configuration, the outlets of the cooling nozzles 6a and 6b are set so as to cool the bases 3a and 3b, which are electrode portions of the lamp 2.
[0023]
In the lighting device 1 according to the present embodiment, a 1.5 kW output short arc type mercury lamp is used, and the sealed pressure at room temperature in the bulb 49 shown in FIG. A small amount of halogen rare gas and a small amount of mercury are enclosed. Details of the type of the rare halogen gas and mercury therein are disclosed in Japanese Patent Application Laid-Open Nos. 2-148561 and 10-112289. However, when the lamp is turned on, the internal temperature increases, and the pressure reaches 15 MPa or more. Under such a pressure, a discharge occurs between the positive electrode 47 and the negative electrode 48 to generate a luminescent spot. At the same time as the internal temperature rises, the temperature of the surface of the bulb 49 naturally rises. The temperatures of the bases 3a and 3b connected to the electrodes also increase.
[0024]
In the above-described mercury lamp, even if the temperature of the bulb 49 is too low, the mercury vapor pressure inside the bulb 49 is not stable, and desired emission characteristics cannot be obtained. Therefore, the surface temperature of the bulb is 500 ° C. or more and 700 ° C. or less. Although the temperature is set, the temperature of the bases 3a and 3b must be suppressed to 150 ° C. or less due to the structure. Therefore, forced cooling is performed by blowing cooling air at room temperature from the nozzles 6a and 6b.
[0025]
Although the bases 3a and 3b of the lamp 2 are overheated by an applied voltage, radiation of illumination light, or the like, naturally, the overheating condition is changed between the upper base 3a and the lower base 3b. And the required conditions are also different. Therefore, the cooling nozzles 6a and 6b are provided with throttle valves 9a and 9b so that an arbitrary flow rate can be adjusted, so that the cooling conditions can be individually set. Further, the cooling nozzles 6a and 6b are connected to a manifold 7 arranged at a position where the cooling nozzles move in synchronization with the lamp fixing base on the lamp moving stage 5, so that even if the position of the lamp 2 is moved, the nozzles 6a and 6b And the relative positional relationship between the lamp 2 and the lamp 2 can be preserved, and the same position on the lamp 2 can be constantly cooled.
[0026]
Of course, since the illumination device 1 and the manifold 7 are connected by the flexible tubes 8a and 8b, even if the position of the lamp 2 is moved by driving the lamp moving stage 5, cooling discharged from the cooling nozzles 6a and 6b. The structure is such that the flow rate of air does not change or the movement of the moving stage 5 is not hindered by the tension of the piping components.
[0027]
FIG. 5 is a schematic diagram showing the structure of the lamp 2. Referring to FIG. 5, in a commonly used short arc type lamp, the positive electrode 47 and the negative electrode 48 are manufactured with an eccentricity error of ± 0.5 mm with respect to the mounting portion of the lamp 2. As described above, when the first focal point of the condenser mirror 4 and the luminescent spot of the lamp 2 coincide, the illumination light emitted from the lamp 2 is condensed at the second focal position of the condenser mirror 4. Therefore, every time the lamp 2 having a manufacturing error is replaced, the relative relationship between the first focal position of the condensing mirror 4 and the position of the luminescent spot of the lamp 2 is broken, and the efficiency is improved. Since illumination light cannot be obtained, the position of the lamp 2 needs to be adjusted.
[0028]
Therefore, in the lighting device 1 according to the present invention, even if the position adjustment accompanying the replacement work of the lamp 2 occurs by disposing the cooling nozzles 6a and 6b on the lamp moving stage 5, the cooling nozzles 6a and 6b Move synchronously with the lamp 2 so that the cooling position does not shift.
[0029]
Also, regarding the manufacturing error of the lamp 2, the manufacturing error of ± 2 mm also exists in the total length of the lamp, and even if the lamp 2 and the cooling nozzles 6a and 6b are moved synchronously as described above, the cooling target It is conceivable that the positions of the bases 3a and 3b are shifted with respect to the mounting position of the lamp 2.
[0030]
Therefore, as shown in FIG. 2, the cooling nozzles 6a and 6b are arranged on a nozzle moving stage 10 which can be further moved on the ramp moving stage 5, and the ramp moving stage 5 and the nozzle moving stage 10 are individually driven. Is possible. Therefore, even when the position of the base 3b is relatively shifted with respect to the fixed portion of the lamp 2 due to a manufacturing error of the lamp 2, the cooling nozzle is required to cope with such a shift amount. 6b can be adjusted, and stable cooling performance can be obtained.
[0031]
Of course, similarly to FIG. 1, the illumination device 1 and the manifold 7 are connected by the flexible tubes 8a and 8b, and the cooling unit is not subjected to an extra force due to the movement of the lamp moving stage 5 and the nozzle moving stage 10. It has a structure.
[0032]
As for the location of the nozzle moving stage 10, as shown in FIG. 2, an example in which the nozzle moving stage 10 is disposed on the ramp moving stage 5 has been described, but the relative positions of the cooling nozzles 6a and 6b and the lamp fixing portion are adjusted. Therefore, as shown in FIG. 3, there is no problem even if the nozzle moving stage 10 is attached directly to the inside of the illumination device 1 as shown in FIG.
[0033]
As described above, the lighting device using a single type of lamp as a light source has been described.For example, when considering a lighting device in which lamps of a plurality of manufacturers can be used as compatible lamps, even if the lamps have the same output, The shape of the part varies from company to company, and the lamp is not strictly standardized. Therefore, the characteristics may be slightly different depending on the type. The difference in characteristics referred to here means differences in optimum cooling conditions, allowable power range, minute arc shape (shape of light emitting point of discharge lamp), and the like. When the difference occurs, the cooling condition must be adjusted according to the type of lamp.
[0034]
Further, when the short arc type mercury lamp is replaced with a lamp of a different size, the situation becomes more severe, for example, a lamp length of 300 mm for an output of 1.5 kW and a lamp length of 280 mm for a lamp of 1.2 kW. As shown in FIG. 1, FIG. 2, and FIG. 3, when the distance between the nozzles 6a and 6b is constant, the position of the nozzles 6a and 6b cannot be adjusted. The relative positional relationship between the bases 3a and 3b and the nozzles 6a and 6b shifts, and stable cooling performance cannot be obtained.
[0035]
Therefore, in FIG. 4, the cooling nozzles 6a and 6b are provided on the independent nozzle moving stages 10a and 10b, respectively, and are arranged in the illumination device 1, so that the lamp moving stage 5 and the nozzle moving stages 10a and 10b are independently driven. Therefore, even if the lamp 2 is replaced with a lamp 2 having a different size, the structure can be adjusted with high accuracy, and the relative positional relationship between the bases 3a and 3b and the nozzles 6a and 6b can be maintained, and stable cooling performance can be obtained. Obtainable.
[0036]
Of course, as in FIGS. 1, 2 and 3, the lighting device 1 and the manifold 7 are connected by flexible tubes 8a and 8b, and extra space is provided for the cooling means by moving the lamp moving stage 5 and the nozzle moving stages 10a and 10b. The structure is such that no strong force is applied.
[0037]
Here, FIG. 5 is a schematic diagram for explaining the structure around the lamp 2 in more detail. In the lighting device 1 according to the present invention, the lamp in FIG. 5 is fixed on the lamp fixing portion 34 as described above, and the identification type plate on which the lamp type code is displayed on the fixed side base portion of the lamp. 11 is attached. The above-mentioned product code is displayed by symbolizing the height of the bright spot position of the lamp and the output of the lamp, and information read by the reading device 12 mounted on the fixed base 34 is transmitted to the main control unit 13. Transferred and used to adjust the power applied to the lamp in accordance with the output of the lamp, to change the cooling conditions for the lamp, and in general, to attach electrodes that cause errors in lamp manufacturing. Even if the lamp moving stage 5 is moved based on the position information of the luminescent spot that changes for each lamp type and the lamp, and the lamp is replaced, the luminescent spot of the lamp always coincides with the focal point of the condenser mirror 4. It has a configuration that allows automatic adjustment.
[0038]
The procedure for replacing the lamp 2 will be described in more detail. First, the short arc type mercury lamp that can be used in the lighting device 1 can be switched between a 1.5 kW output lamp and a 1.2 kW output mercury lamp. The 1.5kW lamp has a total lamp length of 300mm and the height from the lamp fixing part to the bright point is 150mm, while the 1.2kW lamp has a total length of 280mm and the height from the lamp fixing part to the bright point is 145mm. ing.
[0039]
As described above, even when the shape of the lamp 2 is different, according to the lighting device 1 of the present invention, the lamp 2 is recognized only by mounting the lamp 2 on the fixing portion 34, and according to the recognition. It is possible to set optimal use conditions. If automatic recognition is not possible, the operator can flexibly cope with different types of lamps 2 by inputting a type or newly registering the type.
[0040]
As the type recognition sensor of the lamp 2, for example, an optical, magnetic, or mechanical sensor may be used. In this case, the lamp 2 is provided with a characteristic portion (mark or shape) that can be identified by these sensors. For example, a characteristic three-dimensional shape or planar shape, or a characteristic mark using a pattern, color, reflectance, sound, or the like can be considered.
[0041]
As a specific configuration example, a fiber sensor that can be used under high temperature conditions is used as a sensor, and a groove or a hole is provided on the lamp 2 side at a location detected by the above-described fiber sensor, or a reflection at that location is provided. A method such as changing the rate can be used.
[0042]
When a sensor is used for recognizing the type of the lamp 2, the sensing accuracy may be adversely affected due to the high heat generated when the lamp 2 is turned on. There is no problem if the sensing is performed close to and then separated from the lamp 2.
[0043]
Regarding the method of identifying the type of the lamp 2, besides the method implemented by reading the identification label as described above, for example, another method is proposed in Japanese Patent Laid-Open No. 11-283998, and FIG. As shown in FIG. 7, a groove 71 different for each product type is formed in a projection for fixing the base 3b of the lamp 2 to the lamp fixing stand 34, and at the same time, the groove 71 for identifying the groove 71 is formed on the fixing stand 34. By forming the air flow paths 72a and 72b, the type of the lamp 2 can be automatically identified.
[0044]
The gist of the present invention is to change the position of the cooling nozzle 6 in accordance with the type of the lamp 2 and adjust the cooling condition after the lamp 2 is identified, and it does not limit the identification method. As described above, the identification may be performed by a method like the conventional example.
[0045]
As described above, according to the lighting device 1 of the present invention, even if the cooling location changes due to replacement of the lamp 2 or the like, the positions of the cooling nozzles 6a and 6b are changed to the position of the lamp 2. However, in the lighting device 1 shown in FIG. 1, the material of the distal end portions of the cooling nozzles 6a and 6b is further changed. ing.
[0046]
As described above, the surface temperature of the bulb 49 of the lamp 2 reaches 500 ° C. or higher, and the cooling temperature of the cooling nozzles 6a and 6b arranged near the bulb 49 and the bases 3a and 3b increases due to the transfer of heat. In some cases, the surface temperature may reach several hundred degrees Celsius because it is further heated by the radiation of the illumination light emitted from the lamp 2.
[0047]
Of course, since the compressed air for cooling always flows inside the nozzles 6a and 6b, the nozzles 6a and 6b themselves are also air-cooled, and the rise in temperature is suppressed, but in order to secure heat resistance. In addition, metal pipes such as aluminum, stainless steel, and brass are generally used.
[0048]
In particular, in the case of an illuminating device using a mercury lamp used as a light source of an exposure device, the illuminating light emitted from the lamp 2 includes ultraviolet rays, and when a resin material is used, material deterioration occurs, Generally, a metal material is selected because the nozzle may be damaged.
[0049]
However, in a high-power lamp in which the output power of the lamp 2 is 1 to 5 kW, a high voltage is also applied to the bases 3a and 3b of the lamp 2, and there is a risk of discharge in the nozzles 6a and 6n made of a metal material. For this reason, it is impossible to arrange them in close proximity.
[0050]
On the other hand, considering the temperature control of the lamp 2, it is necessary to maintain the temperature near the bulb 49 at a constant high temperature while keeping the bases 3a and 3b at a low temperature. It is desirable to perform cooling, and in the lighting device 1 shown in FIG. 1, two different cooling areas are set by the cooling nozzles 6a and 6b. However, if more precise cooling is to be performed, the number of cooling areas is reduced. It is better to increase the number and to blow cooling air from a position closer to the lamp 2. Therefore, in the lighting device 1 according to the present invention, it is possible to use the ceramics, which is an insulating material, at the tips of the cooling nozzles 6a and 6b to make the air gap between the bases 3a and 3b as the cooling area close to 10 mm or less. .
[0051]
If it is attempted to blow the cooling air from a position away from the cooling symmetry, it is difficult to reach the cooling target unless the flow rate or flow velocity at the nozzle outlet is increased, but as described above, the cooling nozzles 6a and 6b reach the close positions. Can be cooled with a smaller flow rate. In addition, as shown in FIG. 1, the cooling nozzles 6a and 6b are generally arranged in the optical path of the condenser mirror 4 in many cases. Thus, there is a disadvantage that the amount of illumination light is reduced. In the present invention, the pipes of the cooling nozzles 6a and 6b are also made thinner, so that not only the consumption of the flow rate and the flow rate of the refrigerant such as the cooling air can be saved, but also the efficient use of the illumination light is made possible. .
[0052]
Although the preferred embodiments of the present invention have been described above, the present invention is not limited thereto, and various modifications and changes can be made within the scope of the gist.
[0053]
【The invention's effect】
ADVANTAGE OF THE INVENTION According to the illuminating device of this invention, in the illuminating device which uses a lamp as a light source, it adjusts so that the focal position of a condensing mirror and the bright spot position of a lamp may be matched regardless of a manufacturing error of a lamp or a change of a kind. It has become possible. In addition, it is possible to always arrange the cooling nozzle at an optimum position with respect to the lamp regardless of the manufacturing error or the quality change of the lamp. Therefore, the cooling condition can be constantly maintained in a stable state, and the interval between the lamp and the nozzle can be set small, so that it is not necessary to increase the flow rate of the refrigerant such as the cooling air more than necessary. .
[0054]
Further, it is possible to realize a safe exposure device that constitutes such an illumination device.
[Brief description of the drawings]
FIG. 1 is a schematic configuration diagram of a lighting device according to the present invention.
FIG. 2 is a schematic configuration diagram of a lighting device according to the present invention.
FIG. 3 is a schematic configuration diagram of a lighting device according to the present invention.
FIG. 4 is a schematic configuration diagram of a lighting device according to the present invention.
FIG. 5 is a schematic diagram for explaining the structure around the lamp shown in FIG. 1 in further detail;
FIG. 6 is a schematic configuration diagram of an exposure apparatus having an illumination device according to the present invention.
FIG. 7 is a schematic sectional view showing identification means of the lamp shown in FIG. 1;
FIG. 8 is a schematic configuration diagram showing a conventional lighting device.
[Explanation of symbols]
1 lighting equipment
2 lamps
3a and 3b bases
4 Condensing mirror
5 Ramp moving stage
6a and 6b cooling nozzle
7 Manifold
8a and 8b flexible tubes
9a and 9b flow control valves
10 Nozzle moving stage
34 Lamp base
47 electrodes
48 electrodes
49 valve

Claims (8)

A cooling means having a flow rate adjusting means for controlling the flow rate of the refrigerant, and a nozzle for jetting the refrigerant, wherein the refrigerant controlled by the flow rate adjusting means is blown from the nozzle to light source means, A lighting device for forcibly cooling the means,
The lighting device according to claim 1, wherein the light source unit is disposed on a movable first stage. The lighting device according to claim 1, wherein at least a part of a pipe constituting the nozzle has a pipe member having flexibility. The lighting device according to claim 1, further comprising a component made of an insulating material at least at a tip portion of a pipe constituting the nozzle. 4. The illumination according to claim 1, wherein the cooling unit is disposed on the first stage, and a relative position between the cooling unit and the light source unit is constant. 5. apparatus. The said cooling means is arrange | positioned on the 2nd stage arrange | positioned on the said 1st stage, The position can be adjusted relatively with respect to the position of the said light source means. Item 5. The lighting device according to Item 4. The cooling means is arranged on a third stage arranged in a place other than on the first stage, and the cooling means and the light source means can be independently adjusted in position. The lighting device according to claim 4, wherein The said cooling means is comprised by several injection ports arrange | positioned on several stages, and each said several injection port can adjust position independently independently, The Claims 4 thru | or 4 characterized by the above-mentioned. The lighting device according to claim 6. An exposure apparatus comprising the illumination device according to any one of claims 1 to 7.

Images