KR100855068B1 - Apparatus for forming multilayer film - Google Patents

Abstract

An apparatus for forming a multilayer film is provided to form a multilayer comprising one or more of thin films such as metal/nonmetal compounds and/or metal/nonmetal oxides on a metal or nonmetal matrix in a freely and selective manner, and to increase cooling area of the matrix and adjust the number of sputters by adjusting a contact area of the matrix with cooling rollers. An apparatus for forming a multilayer film comprises: a vacuum chamber(100); first and second rollers(110,112) installed at both sides of an upper part within the vacuum chamber and rotated in both directions; third and fourth rollers(120,122) installed at both sides of a lower part within the vacuum chamber and rotated in both directions; at least one DC sputter(160) installed along a first part of an outer peripheral surface of the third roller and spaced apart from the first part; at least one RF sputter(170) installed along a second part of an outer peripheral surface of the fourth roller and spaced apart from the second part; two pairs of rollers(140,142,150,152) installed between the first roller and the third roller and installed between the second roller and the fourth roller; and a pair of front protection film feeding/coiling rollers(180,182) which are respectively installed between the third roller and a pair of rollers among the two pairs of rollers, which are installed between the first roller and the third roller, and between the fourth roller and a pair of rollers among the two pairs of rollers, which are installed between the second roller and the fourth roller, to unwind and feed a protection film onto a front face of a matrix(102) transferred between the first roller and the third roller or between the second roller and the fourth roller, or pull and coil the protection film from the front face of the matrix.

Description

Vertical Multilayer Film Forming Equipment {Apparatus for Forming Multilayer Film}

The present invention relates to a vertical multilayer film forming apparatus. More particularly, the present invention relates to an apparatus that enables the formation of one or more thin films of metal / nonmetallic compounds and / or metal / nonmetal oxides in multiple layers on a metal or nonmetal matrix.

In general, a sputtering method is used to form a thin film on a base metal or nonmetal.

The sputtering method is a method of injecting a sputtering gas into a chamber made of a vacuum atmosphere to collide with a target material to be formed to generate a plasma, and then coating it on a substrate as a base material.

Generally used sputtering gas uses Ar which is an inert gas. The system of the sputter apparatus has a target side as a cathode and a substrate side as an anode. When the power is applied, the injected sputtering gas Ar collides with the electrons emitted from the cathode and is excited to become Ar +, and the excited gas is attracted to the target, which is the cathode, to collide with the target.

At this time, each excited gas has the energy of hv and the energy is transferred to the target during collision, and the plasma is released when the bonding force of the elements forming the target and the work function of the electrons can be overcome. . The generated plasma rises as much as the free stroke of electrons and the plasma is formed when the distance between the target and the substrate is less than or equal to the free stroke.

Therefore, the distance between the substrate and the target during sputtering becomes an important factor. Here, the case where the applied power is direct current (DC) is called a DC sputtering method, which is performed by a DC sputtering device (hereinafter, referred to as 'DC sputtering'), and is generally used for sputtering of a conductor such as a metal. Used.

Insulators such as non-metallic insulators produce thin films using an alternating current power source by a high frequency sputtering apparatus (hereinafter referred to as "RF sputtering"). The AC power source has a frequency of 13.56 ㎒ and is called a radio frequency (RF). The sputtering method using such an AC power source as an applied power source is called an AC sputtering method using an RF sputtering method.

However, all the products produced to date according to the existing apparatus and method described above have a base material introduced into a sputtering device in the form of sheets of sheets for each sheet to form a multilayer film. Since DC sputter or RF sputter must be selectively used depending on the type, not only the productivity is lowered but also the production cost is relatively high and the process is complicated.

In order to solve the above problems, the present invention provides a device that can be freely selected and formed in multiple layers of a metal / non-metal compound and / or metal / non-metal oxide on a base metal or non-metal base material Its main purpose.

The present invention to achieve the above object, a vacuum chamber; First and second rollers installed at both sides of an upper portion of the vacuum chamber; Third and fourth rollers installed at both sides of the lower part of the vacuum chamber; At least one DC sputter installed along a first portion of an outer circumferential surface of the third roller, the at least one DC sputter being provided a predetermined distance away from the first portion; And at least one RF sputter provided along the second portion of the outer circumferential surface of the fourth roller and spaced apart from the second portion by a predetermined distance.

As described above, according to the present invention, one or more of thin films such as metal / nonmetallic compounds and / or metal / nonmetal oxides can be formed in multiple layers on a metal or nonmetal base material.

In addition, by rotating in both directions, the order of forming a thin film of a metal / nonmetal compound and / or a metal / nonmetal oxide can be freely selected and sputtered.

In addition, the area between the base material and the cooling roller can be adjusted, so that the cooling area of the base material can be widened and the number of sputters can be adjusted.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. First of all, in adding reference numerals to the components of each drawing, it should be noted that the same reference numerals are designated as much as possible even if displayed on different drawings. In addition, in describing the present invention, when it is determined that the detailed description of the related well-known configuration or function may obscure the gist of the present invention, the detailed description thereof will be omitted.

1 is a schematic cross-sectional view of a multilayer film forming apparatus according to an embodiment of the present invention.

As shown in FIG. 1, the multilayer film forming apparatus according to the present invention includes a vacuum chamber 100; First roller 110 and second roller 112; The third roller 120 and the fourth roller 122; At least one DC sputter 160; And at least one RF sputter 170.

The vacuum chamber 100 is a chamber having one space therein and may be maintained in a vacuum state.

Each of the first roller 110 and the second roller 112 is a winding roller that unwinds and supplies the base material 102 or winds up the base material 102 by rotating in both directions. The first roller 110 is provided on one side (left side in FIG. 1) of both sides of the upper part in the vacuum chamber 100, and the second roller 112 is on the other side of both sides of the upper part in the vacuum chamber 100 (in FIG. 1). On the right).

The third roller 120 and the fourth roller 122 each help to transfer the base material 102 by rotating in both directions, and are cooling rollers for cooling the base material 102. The third roller 120 is installed on one side (left side in FIG. 1) of both sides of the lower part in the vacuum chamber 100, and the fourth roller 122 is on the other side of both sides of the lower part in the vacuum chamber 100 (in FIG. 1). On the right). Here, the first roller 110 and the third roller 120 are located on the same side in the vacuum chamber 100, and the second roller 112 and the fourth roller 122 are on the same side in the vacuum chamber 100. Located.

The DC sputter 160 is a sputter for sputtering a conductor such as a metal by using DC sputtering, and a specific portion (hereinafter referred to as 'first portion') of the outer circumferential surface of the third roller 120 is referred to. It is installed along, but away from the first portion by a predetermined distance.

Here, as described above, the first portion is a specific portion of the outer circumferential surface of the third roller 120, and the base material 102 transferred from the first roller 110 to the third roller 120 includes the third roller 120. ).

That is, the DC sputter 160 is installed so as to sputter a conductor such as a metal in a portion where the third roller 120 and the base material 102 are in contact with each other. Could be. When the plurality of DC sputters 160 are installed, the third rollers 120 and the base material 102 may be evenly disposed along the first portion in contact with each other.

The RF sputter 170 is a sputter for sputtering nonconductors such as non-metallic insulators by using an AC sputtering method. The RF sputter 170 is a part of the outer circumferential surface of the fourth roller 122 (hereinafter referred to as 'second portion'). It is installed, but a predetermined distance away from the second portion.

That is, the RF sputter 170 is installed so as to sputter non-insulators such as non-metal insulators at the portions where the fourth roller 122 and the base material 102 are in contact with each other. Can be installed as a dog. When the plurality of RF sputters 167 are installed, the fourth roller 122 and the base material 102 may be evenly disposed along the contact portion.

The number of DC sputters 160 and RF sputters 170 installed around each of the third roller 120 and the fourth roller 122 is the base material (the third roller 120 and the fourth roller 122, respectively). 102) will be determined according to the area in contact with. That is, when the area where the third roller 120 and the fourth roller 122 each contact the base material 102 is large, the number of the DC sputter 160 and the RF sputter 170 will be determined to be large, and the third roller 120 If the area of each of the fourth roller 122 and the base material 102 is small, the number of the DC sputter 160 and the RF sputter 170 will be small.

On the other hand, as shown, the multilayer film forming apparatus according to an embodiment of the present invention may further include two pairs of rollers (140, 142, 150, 152).

Among the two pairs of rollers 140, 142, 150, and 152, one pair of rollers 140 and 142 is installed between the first roller 110 and the third roller 120, so that the first roller 110 and the third roller are installed. It serves as a support roller for supporting the base material 102 transferred between the rollers (120). In addition, among the two pairs of rollers 140, 142, 150, and 152, the other pair of rollers 150 and 152 may be installed between the second roller 112 and the fourth roller 122 to be connected to the second roller 112. It serves as a support roller for supporting the base material 102 conveyed between the fourth roller (122).

Here, the pair of rollers (140, 142) is the central direction of the vacuum chamber 100 from the imaginary line connecting between the central axis of the first roller 110 and the central axis of the third roller (120) (Fig. In 1, they are installed at a predetermined distance apart from each other on the right side of the virtual line connecting the central axes.

Therefore, the base material 102 conveyed between the first roller 110 and the third roller 120 is supported by the pair of rollers 140 and 142, whereby the first roller 110 and the third roller 120 are supported. The liver is transported by bending it toward the center of the vacuum chamber 100 without being transported in a straight line. As such, by using the pair of rollers 140 and 142 to move the base material 102 by bending it toward the center in the vacuum chamber 100, the base material 102 can be prevented from sagging or shaking. The area where the base material 102 and the third roller 120 contact each other may be increased, thereby increasing the cooling area of the base material 102 and increasing the number of DC sputters 160.

In addition, the other pair of rollers (150, 152) is the central direction of the vacuum chamber 100 from the imaginary line connecting between the central axis of the second roller 112 and the central axis of the fourth roller 122 (Fig. 1 In the left direction with respect to the imaginary line connecting the central axis is installed apart by a predetermined distance.

Therefore, the base material 102 conveyed between the second roller 112 and the fourth roller 122 is supported by the other pair of rollers 150 and 152, whereby the second roller 112 and the fourth roller 122 are supported. The liver is transported by bending it toward the center of the vacuum chamber 100 without being transported in a straight line. As such, by using the different pairs of rollers 150 and 152 to move the base material 102 by bending it toward the center in the vacuum chamber 100, the base material 102 can be prevented from sagging or shaking. The area where the base material 102 and the fourth roller 122 contact each other can be increased, thereby increasing the cooling area of the base material 102 and increasing the number of RF sputters 170.

In addition, the two pairs of rollers 140, 142, 150 and 152, that is, the pair of rollers 140 and 142 and the other pair of rollers 150 and 152, as described above, serve not only as a supporting roller but also as a support roller. It may also serve as a pressure roller (Press Roller) for pressing the protective film on at least one of the front and rear of the 102.

In addition, as shown, the multilayer film forming apparatus according to an embodiment of the present invention may further include two cylinders (144, 154).

Here, the two cylinders 144 and 154 may be implemented as a hydraulic cylinder, a pneumatic cylinder, or the like as a cylinder that linearly moves using energy of hydraulic pressure or pneumatic pressure.

One of the two cylinders 144, 154 has a fixed roller 140 of a pair of rollers 140, 142 installed between the first roller 110 and the third roller 120. It is combined with other non-fixed roller 142, and adjusts the pressing force between the other roller 142 and the fixed roller 140 by adjusting the pressure applied to the other roller 142. In addition, the other cylinder 154 is another non-fixed roller (not the fixed roller 150 of the other pair of rollers 150, 152 installed between the second roller 112 and the fourth roller 122 ( It is coupled to the 152, by adjusting the pressure applied to the other roller 152 to adjust the compressive force between the other roller 152 and the fixed roller 150.

In addition, as shown, the multilayer film forming apparatus according to an embodiment of the present invention may further include two front protective film supply / winding rollers (180, 182).

The two front protection film supply / winding rollers 180 and 182 are winding rollers which rotate in both directions. Here, one front protective film supply / winding roller 180 is disposed between the pair of rollers 140 and 142 and the third roller 120 installed between the first roller 110 and the third roller 120. Installed, the protective film is supplied to the front surface of the base material 102 transferred between the first roller 110 and the third roller 120, or the protective film is wound around the front surface of the base material 102. The other front protective film supply / winding roller 182 is installed between the pair of rollers 150 and 152 and the fourth roller 122 installed between the second roller 112 and the fourth roller 122. The protective film is released to the front surface of the base material 102 transferred between the second roller 112 and the fourth roller 122, or the protective film is wound up from the front surface of the base material 102.

In addition, as shown, the multilayer film forming apparatus according to an embodiment of the present invention may further include two back protection film supply rollers (190, 192).

The two back protection film supply rollers 190 and 192 are winding rollers rotating in one direction. Here, one rear protective film supply roller 190 is installed between the pair of rollers (140, 142) and the first roller 110 is installed between the first roller 110 and the third roller (120). The protective film is released and supplied to the rear surface of the base material 102 transferred between the first roller 110 and the third roller 120. The remaining rear protective film supply roller 192 is installed between the second roller 112 and the second roller 112 and the pair of rollers 150 and 152 and the second roller 112 to be installed. The protective film is released and supplied to the rear surface of the base material 102 transferred between the 112 and the fourth roller 122.

In the present invention, the front surface refers to one surface sputtered using the DC sputter 160 or the RF sputter 170 on both sides of the base material 102, the back surface is the back surface of the above-described one surface, that is, sputtering during both surfaces of the base material 102 Say no side.

In addition, as shown, the multilayer film forming apparatus according to an embodiment of the present invention may further include a connection member 130.

When the third roller 120 and the fourth roller 122 may rotate at the same direction and the same speed as the rotation, for this purpose, the third roller 120 and the fourth roller 122 is connected to the connecting member 130 Can be connected to each other. The connecting member 130 may be a belt or a chain and the like, and the third roller 120 and the fourth roller 122 may be hooked to each central axis (or pulley) of the third roller 120 and the fourth roller 122. ) Rotate in conjunction.

Although not shown in FIG. 1, the multilayer film forming apparatus according to the exemplary embodiment of the present invention may include a gas supply chamber (not shown) for supplying a sputtering gas into the vacuum chamber 100, and a gas supply chamber (not shown). ) May be provided for the DC sputter 160 and the RF sputter 170, respectively.

In addition, although not shown in FIG. 1, the multilayer film forming apparatus according to the present invention has a front end of the DC sputter 160 (that is, the front of the first DC sputter 160 disposed closest to the first roller 110). And at least one of the tip of the RF sputter 170 (ie, the front of the first RF sputter 170 disposed at the position closest to the second roller 112), and configured as an ion gun. It may further comprise a scrubber (not shown).

2 is a flowchart of a method of forming a multilayer film according to an embodiment of the present invention.

A method of forming a multilayer film will be described in connection with an operation of the apparatus for forming a multilayer film according to an embodiment of the present invention illustrated in FIG. 1.

First, the base material 102 wound in a coil form is mounted on the first roller 110 in the vacuum chamber 100, and the first roller 110 is wound by rotating in a specific direction (counterclockwise in FIG. 1). The base material 102 is slowly released and supplied (S210).

At this time, when the multi-layer film forming apparatus according to an embodiment of the present invention includes a pair of rollers 140 and 142 and a rear protective film supply roller 190, a rear protective film supply roller optionally equipped with a protective film As the 190 rotates, the protective film may be released and supplied to the rear surface of the base material 102, and the pair of rollers 140 and 142 may pass the protective film transferred from the rear protective film supply roller 190 to the first roller 110. It can be crimped to the base material 102 to be transferred from.

In addition, when the multilayer film forming apparatus includes the front protection film supply / winding roller 180, the base material conveyed from the pair of rollers 140 and 142 by rotating the front protection film supply / winding roller 180 optionally. A protective film can be wound up and wound up from the front surface of (102).

When the base material 102 is transferred from the first roller 110 to the third roller 120, it is cooled by the third roller 120, and the front surface of the base material 102 is disposed around the third roller 120. At least one conductor film is formed by the DC sputter 160 according to the type of the base material 102 and the type of thin film to be formed on the base material 102.

In addition, after the conductor film is formed on the base material 102 by the DC sputter 160, when the base material 102 is transferred from the third roller 120 to the fourth roller 122, the base material 102 is the fourth roller. In addition to being cooled by 122 again, the front surface of the base material 102 is intended to be formed on the base material 102 and the type of the base material 102 by the RF sputter 170 disposed around the fourth roller 122. At least one non-conductive film is formed according to the type of thin film (S220).

Here, although the front surface of the base material 102 has been described as both the conductive film and the non-conductive film are formed by the DC sputter 160 and the RF sputter 170, the conductive film and the non-conductive film may be selectively formed.

After the film is formed on the front surface of the base material 102, the base material 102 is transferred from the fourth roller 122 to the second roller 112, and the second roller 112 is in a specific direction (counterclockwise in FIG. 1). The base material 102 is wound up and wound up by rotation in step S230.

At this time, when the multilayer film forming apparatus according to an embodiment of the present invention includes another pair of rollers 150 and 152 and the front protective film supply / winding roller 182, the second roller 112 is optionally a base material. Before winding the 102, the front protective film supply / winding roller 182 is rotated so that the protective film can be released and supplied to the front surface of the base material 102 conveyed from the fourth roller 122, and another pair of rollers ( 150 and 152 may compress the protective film transferred from the front protective film supply / rewind roller 182 to the base material 102 transferred from the fourth roller 122.

On the other hand, the multilayer film forming apparatus according to an embodiment of the present invention can be reverse rotation as well as forward rotation. That is, as described above in steps S210 to S230, after forming the film on the front surface of the base material 102 by rotating the first roller 110 to the fourth roller 122 in a specific direction, the first roller 110 By rotating the to fourth roller 122 in a direction opposite to a specific direction, that is, in the reverse direction, a film may be formed on the entire surface of the base material 102 again.

That is, after winding the base material 102 by winding the second roller 112 in step S230, the base material 102 wound by rotating the second roller 112 again in a specific direction (clockwise in FIG. 1). Loosen and supply (S240).

At this time, when the multi-layer film forming apparatus according to an embodiment of the present invention includes a pair of rollers (150, 152) and the rear protective film supply roller 192, optionally, the rear protective film supply roller equipped with a protective film As the 192 rotates, the protective film may be released and supplied to the rear surface of the base material 102. The other pair of rollers 150 and 152 may transfer the protective film transferred from the rear protective film supply roller 192 to the second roller 112. It can be crimped to the base material 102 to be transferred from.

In addition, when the multilayer film forming apparatus according to an embodiment of the present invention includes the front protective film supply / winding roller 182, optionally, the front protective film supply / winding roller 182 is rotated so that another pair of rollers ( The protective film may be wound up and wound up from the front surface of the base material 102 transferred from 150 and 152.

When the base material 102 is transferred from the second roller 112 to the fourth roller 122, it is cooled by the fourth roller 122, and the front surface of the base material 102 is disposed around the fourth roller 122. At least one non-conductive film is formed by the RF sputter 170 according to the type of the base material 102 and the type of thin film to be formed on the base material 102.

In addition, after the non-conductive film is formed on the base material 102 by the RF sputter 170, when the base material 102 is transferred from the fourth roller 122 to the third roller 120, the base material 102 is the third roller. In addition to being cooled by the 120 again, the front of the base material 102 is formed on the front surface of the base material 102 by the DC sputter 160 disposed around the third roller 120 and the type of the base material 102. At least one conductor film is formed according to the type of the thin film (S250).

Here, although the front surface of the base material 102 has been described as both the conductive film and the non-conductive film are formed by the DC sputter 160 and the RF sputter 170, the conductive film and the non-conductive film may be selectively formed.

After the film is formed on the front surface of the base material 102, the base material 102 is transferred from the third roller 120 to the first roller 110, and the first roller 110 is reversed in a specific direction (clockwise in FIG. 1). ), The base material 102 is wound up and wound up (S260).

At this time, when the multilayer film forming apparatus according to an embodiment of the present invention includes a pair of rollers 140 and 142 and the front protective film supply / winding roller 180, the first roller 110 is optionally formed of a base material. Before winding the 102, the front protective film supply / winding roller 180 is rotated so that the protective film can be released and supplied to the front surface of the base material 102 fed from the third roller 120, and a pair of rollers ( 140 and 142 may compress the protective film transferred from the front protective film supply / rewind roller 180 to the base material 102 transferred from the third roller 120.

On the other hand, before forming the multilayer film as in steps S220 and 250, optionally, each of the first and second rollers 110, ie, the first roller 110 and the third roller 120, which are transferred from the first roller 102 and the second roller 112, is formed. One or more surfaces of the base material 10 transferred to the four rollers 122 may be cleaned using a cleaner (not shown).

As described above, the multilayer film forming apparatus according to an embodiment of the present invention rotates the first roller 110 to the fourth roller 122 provided in the reverse direction, that is, in both directions, the DC sputter 160 ) And the RF sputter 170 may be selectively used to sputter conductors and non-conductors on the entire surface of the base material 102 to freely form a multilayer film to be formed on the base material 102.

In the above description, the bidirectional rotation is performed only once, but the present invention is not limited thereto, and the bidirectional rotation may be performed two or more times, and the type of the base material 102 and the type of film to be formed on the base material 102 According to the order, the rotation in a particular direction may be rotated twice in each direction, such as twice in a specific direction and once in a reverse direction.

3 is an exemplary view showing an example of a cross-sectional structure of a base material on which a multilayer film is formed according to an embodiment of the present invention.

As shown in FIG. 3, a TiN layer as a metal compound layer is formed on a stainless thin plate as the metal base material 102, a SiO ₂ layer as an oxide is formed on the TiN layer, and a polycarbonate as a polymer on the SiO ₂ layer. (Poly Carbonate: PC) layer can be formed. The TiN layer, which is a metal compound, may be formed by driving the DC sputter 160, and the SiO ₂ layer, which is an oxide, and the PC layer, which is a nonmetallic compound, may be formed by driving the RF sputter 170.

4 is an exemplary view showing another example of a cross-sectional structure of a base material on which a multilayer film is formed according to an embodiment of the present invention.

As shown in FIG. 4, an indium tin oxide (ITO) layer may be formed on a polycarbonate (PC) as the base metal substrate 102, and a TiO ₂ layer may be formed on the ITO layer. The ITO layer and the TiO ₂ layer may be formed by driving the RF sputter 170.

5 is an exemplary view showing still another example of the cross-sectional structure of the base material on which the multilayer film is formed according to an embodiment of the present invention.

As shown in FIG. 5, a ZrN layer may be formed on an aluminum plate as the metal base material 102, and a SiO ₂ layer may be formed on the ZrN layer.

6 is an exemplary view showing another example of a cross-sectional structure of a base material on which a multilayer film is formed according to an embodiment of the present invention.

As shown in FIG. 6, by rotating the first roller 110 to the fourth roller 122 in a specific direction (counterclockwise in FIG. 1), a metal compound layer is formed on the stainless steel sheet as the metal base material 102. A TiN layer as a layer, a SiO ₂ layer as an oxide on the TiN layer, and a polycarbonate (PC) layer as a polymer on the SiO ₂ layer, and the first rollers 110 to By rotating the fourth roller 122 in the reverse direction (clockwise in FIG. 1), the TiN layer, which is a metal compound, can be formed, and again, the first rollers 110 to the fourth roller 122 are moved in a specific direction (FIG. By rotating counterclockwise in 1), the SiO ₂ layer which is an oxide and the PC layer which is a nonmetallic compound can be formed.

The above description is merely illustrative of the technical idea of the present invention, and those skilled in the art to which the present invention pertains may make various modifications and changes without departing from the essential characteristics of the present invention. Therefore, the embodiments disclosed in the present invention are not intended to limit the technical idea of the present invention but to describe the present invention, and the scope of the technical idea of the present invention is not limited by these embodiments. The protection scope of the present invention should be interpreted by the following claims, and all technical ideas within the equivalent scope should be interpreted as being included in the scope of the present invention.

1 is a schematic cross-sectional view of a multilayer film forming apparatus according to an embodiment of the present invention;

2 is a flowchart of a method of forming a multilayer film according to an embodiment of the present invention;

3 is an exemplary view showing an example of a cross-sectional structure of a base material on which a multilayer film is formed according to an embodiment of the present invention;

4 is an exemplary view showing another example of a cross-sectional structure of a base material on which a multilayer film is formed according to an embodiment of the present invention;

5 is an exemplary view showing another example of a cross-sectional structure of a base material having a multilayer film formed according to an embodiment of the present invention;

6 is an exemplary view showing another example of a cross-sectional structure of a base material on which a multilayer film is formed according to an embodiment of the present invention.

<Description of Symbols for Main Parts of Drawings>

110: first roller 112: second roller

120: third roller 122: fourth roller

140, 142: pair of rollers 150, 152: another pair of rollers

160: DC sputter 170: RF sputter

180, 182: front protective film feed / winding rollers 190, 192: rear protective film feed rollers

Claims (14)

A vacuum chamber; First and second rollers installed at both sides of an upper portion of the vacuum chamber to rotate in both directions; Third and fourth rollers installed at both sides of the lower part of the vacuum chamber to rotate in both directions; At least one DC sputter installed along a first portion of an outer circumferential surface of the third roller, the at least one DC sputter being installed away from the first portion; At least one RF sputter installed along a second portion of an outer circumferential surface of the fourth roller, the RF sputter being installed away from the second portion; Two pairs of rollers respectively provided between the first roller and the third roller and between the second roller and the fourth roller; And One pair of rollers installed between the first roller and the third roller among the two pairs of rollers and the third roller, and between the second roller and the fourth roller among the two pairs of rollers. It is provided between the pair of rollers and the fourth roller, respectively, to release the protective film to the front surface of the base material transported between the first roller and the third roller, or different from the second roller and the fourth roller, or A pair of front protective film supply / winding rollers which wind and protect a protective film from the front surface Multilayer film forming apparatus comprising a. The method of claim 1, And the first roller and the second roller are winding rollers each of which unwinds and supplies the base material or winds up the base material. The method of claim 1, And the third roller and the fourth roller are cooling rollers, respectively. The method of claim 1, And said first portion and said second portion are portions in which said third roller and said fourth roller are in contact with a base material, respectively. delete The method of claim 1, And the two pairs of rollers are supporting rollers for supporting the base material transferred from the first roller to the third roller and the base material transferred from the second roller to the fourth roller, respectively. The method of claim 1, The two pairs of rollers each have a line connecting the center axis of the first roller and the center axis of the third roller and the line connecting the center axis of the second roller and the center axis of the fourth roller. Multilayer film forming apparatus, characterized in that provided in the center direction apart. The method of claim 1, The two pairs of rollers are a multi-layer film forming apparatus characterized in that the pressing roller for pressing the protective film on at least one of the front and rear of the base material. The method of claim 8, And the multilayer film forming apparatus further includes two cylinders coupled to each of the two pairs of rollers to adjust the pressing force of the two pairs of rollers. delete delete The method of claim 1, The multilayer film forming apparatus includes a protective film on a rear surface of a base material installed between the first roller and the third roller and a pair of rollers installed between the first roller and the first roller and transferred between the first roller and the third roller. A multilayer film forming apparatus, characterized in that it further comprises a rear protective film supply roller for supplying. The method of claim 1, The multilayer film forming apparatus may include a protective film on a rear surface of a base material installed between a pair of rollers provided between the second roller and the fourth roller and the second roller, and transferred between the second roller and the fourth roller. A multilayer film forming apparatus, characterized in that it further comprises a rear protective film supply roller for supplying. The method of claim 1, And the multi-layer film forming apparatus further comprises a connecting member connecting the third roller and the fourth roller so that the third roller and the fourth roller interlock with each other.

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