KR100782051B1 - APPARATUS FOR POISONOUS GAS PURIFICATION USING ULTRA HIGH TEMPERATURE AND QUICK HEATING MoSi2 HEATING ELEMENT - Google Patents

Abstract

The present invention is used for the purification of harmful gases using ultra-high temperature heated molybdenum disulfide heating elements that can improve the purification efficiency of harmful gases present in the gaseous state remaining in the process of manufacturing incinerators, semiconductors, liquid crystal display devices (LCDs) and other parts. Relates to a device.

To this end, the noxious gas purification apparatus using the ultra-high temperature rapid heating molybdenum disulfide heating element of the present invention is provided in the noxious gas purification apparatus for purifying the noxious gas by high temperature heat treatment, and is provided with a reaction furnace capable of opening and closing the reactor and the space inside the reactor. A reaction chamber for purifying the fluid passing therein and a heating element for heating the fluid passing through the reaction chamber, wherein the heating element includes a non-heating unit and a heat generating unit made of molybdenum disulfide material.

Heating element, molybdenum disulfide, high temperature, harmful gas

Description

{APPARATUS FOR POISONOUS GAS PURIFICATION USING ULTRA HIGH TEMPERATURE AND QUICK HEATING MoSi2 HEATING ELEMENT}

1 is a front perspective view of a harmful gas purification apparatus according to an embodiment of the present invention.

2 is a cross-sectional view of FIG.

3A to 3G illustrate various embodiments of the heating element illustrated in FIG. 1.

4 is a cross-sectional view of another embodiment of the reaction chamber of FIG.

5 is a front perspective view of a harmful gas purification apparatus according to another embodiment of the present invention.

6 is a perspective view of the reaction chamber of FIG.

7 is a front perspective view of a harmful gas purification apparatus according to another embodiment of the present invention.

8 and 9 are perspective views showing various embodiments of the heating element installed in the harmful gas purification device shown in FIG.

<Description of the symbols for the main parts of the drawings>

1: reactor

11: heating element, 111: heating part, 112: non-heating part

12: upper cover, 13: lower cover

2: reaction chamber,

21,25: inlet pipe

22: burning tube,

23,27: catalyst tube,

231, 271: catalyst

24: discharge pipe

26: the first chamber

28: second chamber

The present invention relates to an apparatus for purifying harmful gases using ultra-high temperature heated molybdenum disulfide heating elements, and in particular, to improve the purification efficiency of the harmful gases present in the gaseous state remaining in incinerators, semiconductors, and liquid crystal display (LCD) manufacturing processes. It relates to a harmful gas purification apparatus using ultra-high temperature rapid heating molybdenum disulfide heating element.

In general, exhaust gas containing dioxin Co 2 generated in incinerators and released into the atmosphere is one of the causes of global warming and air pollution.

In addition, harmful gases such as silane (SiH4) and arsine (AsH3) and process gases such as hydrogen are used for deposition, diffusion, and etching processes in the manufacturing process of semiconductors and liquid crystal display devices. Toxic, the spent gas has to be purged and released to the atmosphere.

Therefore, a noxious gas purification apparatus is installed in an incinerator or a semiconductor processing line.

The hazardous gas purification apparatus installed in the semiconductor manufacturing process line includes a sub scrubber for supplying and purifying process gas, a duct to which each sub scrubber is connected, and a main installed on the building roof and connected to the duct. It consists of a scrubber (main scrubber).

Accordingly, the used process gas is firstly purified in the subscrubber, the firstly purified process gas is supplied to the main scrubber through the duct, and is secondly purified in the main scrubber and then discharged to the atmosphere.

As such, the subscrubber for primary purification of the process gas is generally classified into a wet scrubber and a dry scrubber depending on the treatment method.

The wet scrubber removes the exhaust gas by the adsorption method by passing the process gas through ultrapure water (H 2 O) or gas adsorbent liquid chemical or by spraying it in a mist state, and is easy to manufacture because it has a relatively simple configuration. Has the advantage of large capacity.

However, wet scrubbers are inadequate for the treatment of gases containing highly ignitable hydrogen groups, and in the case of using liquid chemicals as the main agents of the reaction, they generate secondary pollutants and thus require continuous maintenance.

In addition, the dry scrubber forms a high temperature chamber by using a heating element, and passes the process gas into the chamber to incinerate the gas through a thermal reaction, and is mainly used because it is relatively safe and easy to control temperature.

By the way, according to the conventional method of incineration of the harmful gas using a high-temperature chamber to purify, in general, when using a hydrocarbon-based heating element hydrocarbon-based heating element is mainly used in 1400 ~ 1500 ℃ temperature and inert atmosphere, In the case of treating a high flow rate and a high flow rate, the efficiency is low because the high energy is required.

In addition, the atmospheric atmosphere is undesirable when operating due to chemical changes in the heater in the atmosphere.

In addition, in the case of using a metal heating element, the metal heating element has a commercial atmosphere temperature of 1000 ° C., not only excessive electricity consumption but also ineffective in purifying harmful gases.

In addition, since the purification efficiency can be increased only by increasing the temperature of the heating element, there is a problem that the heating element can be damaged if a higher temperature is applied.

An object of the present invention for solving the problems according to the prior art, by using a molybdenum disulfide heating element which is a high temperature heating element to improve the fluid heating efficiency and to prevent damage to the heating element when inflow of gas with high flow rate and high flow rate An object of the present invention is to provide a noxious gas purification apparatus using an ultra-high temperature heated molybdenum disulfide heating element.

In order to solve the above technical problem, the noxious gas purifying apparatus using the ultra-high temperature rapid heating molybdenum silicide-generated heating element of the present invention is a noxious gas purifying apparatus which incinerates and purifies the noxious gas. It includes a reaction chamber for purifying the fluid passing through the inside and the heating element for heating the fluid passing through the reaction chamber, wherein the heating element comprises a non-heating portion and a heat generating portion made of molybdenum disulfide material It features.

In one aspect of the harmful gas purification apparatus using the ultra-high-temperature rapid heating molybdenum silicide heating element of the present invention, the reaction chamber is a burning tube for heating and firstly purifying the fluid flowing through the inlet pipe, and the inlet from the burning tube And a discharge pipe for discharging the gas, which is purged from the catalyst pipe, and a catalyst pipe equipped with a catalyst for secondary purifying the harmful gas.

In another aspect of the noxious gas purification apparatus using the ultra-high temperature rapid heating molybdenum disulfide heating element of the present invention, the reaction chamber, the first chamber for heating the fluid flowing through the inlet pipe to annihilate and purify a predetermined substance; And a second chamber for discharging the temperature of the fluid heated from the first chamber after cooling to below a predetermined temperature, and between the first chamber and the second chamber, provided with a catalyst, and having a second chamber from the first chamber. It consists of a catalyst tube is formed with a hole for controlling the amount of fluid flowing into the.

In the various aspects of the present invention, the heating portion is vertically arranged on the inner wall of the reactor or the outer wall of the reaction chamber, and the non-heating portion is connected to both ends of the heating portion, and the other end of the connection portion is the upper cover or the lower cover, respectively. It penetrates through and protrudes outward.

As described above, according to various aspects of the present invention, a molybdenum silicide (MoSi2) material is used to generate a high temperature and a high heat resistance, and thus, a heating element may be used to improve the heat generation efficiency to quickly purify harmful gases and prevent damage to the heating element. It can be.

The invention will become more apparent through the preferred embodiments described below with reference to the accompanying drawings. Hereinafter will be described in detail to enable those skilled in the art to easily understand and reproduce through embodiments of the present invention.

1 is a front perspective view of a harmful gas purifying apparatus according to an embodiment of the present invention, Figure 2 is a cross-sectional view of Figure 1, the harmful gas purifying apparatus of the present invention remains incinerator or used in the manufacture of semiconductor and liquid crystal display device In the apparatus for purifying gas, a plurality of heating elements (11) are provided on the inside, and a reactor (1) having an upper cover (12) and a lower cover (13) so as to be opened and closed, and the reactor (1) A reaction chamber 2 provided in an inner space and heated by heat generated from the heat generator 11 to purify the fluid, wherein the heat generator 11 includes a non-heat generator 111 and a molybdenum silicide (MoSi 2) material. It consists of a heat generating portion (112).

The non-heating part 111 is connected to both ends of the heat generating part 112, and the other end of the connection part protrudes outwardly through the upper cover 12 or the lower cover 13, and protrudes outward. When a predetermined voltage is applied through the portion, the heat generating unit 112 generates heat at a high temperature.

The heating unit 112 is arranged vertically on the inner wall of the reactor (1) In the embodiment of the present invention, the heating unit 112 is shown to be arranged vertically on the inner wall of the reactor (1), but another embodiment It may be arranged perpendicular to the outer surface of the reaction chamber (2), it may be provided in the reaction chamber (2) to move the fluid in some cases.

3A to 3G are views illustrating various embodiments of the heating element illustrated in FIG. 1, wherein the heating element 11 is a straight rod, a U type, a vent type, a W type, a screw type, and a panoramic type, as shown in the drawing. And any one selected from among planar forms or various selected forms thereof.

On the other hand, the reaction chamber 2 is a burning tube 22 for heating and firstly purifying the fluid flowing through the inlet pipe 21, and a catalyst 231 for secondary purification of the fluid flowing from the burning tube 22. It is configured to include a catalyst pipe 23 is provided with, and a discharge pipe 24 for discharging the gas is purged from the catalyst pipe 23.

Accordingly, it is preferable that a plurality of through holes are formed in the upper cover 12 and the lower cover 13 so that both ends of the non-heat generating portion 111 and the reaction chamber 2 protrude outward.

In this case, the gas flowing through the inlet pipe 21 may be any gas used in manufacturing a general incinerator or a semiconductor and a liquid crystal display device.

For example, Cl2, HBr, BCl3, CF4, C2F6, CHF3, SF6, etc. used in the etching process, SiH4, PH3, DCS, NH3, N2, ClF3, etc. used in the diffusion process, thin film N2O, HCl, O2, H2, He, TEOS, TMP, TMB, BF3, C2F6, NF3, WF6, CF4 and the like used in the process may be used.

When using a gas containing F or Cl, a conventional hydrocarbon-based heating element is not excellent in oxidation resistance, and the heating element is damaged due to surface oxidation, so that it has to be frequently replaced, but the present invention uses molybdenum disulfide (MoSi 2) material. The heating element is excellent in oxidation resistance, and even if the surface injury has a natural healing function solves the problem of damage to the heating element.

On the other hand, the fluid introduced into the burning tube 22 through the inlet pipe 21, that is, harmful gas is heated by the high temperature generated in the heat generating portion 112 of the heat generating element 11 is first purified.

At this time, since the heat generating part 112 is made of molybdenum disulfide (MoSi 2) material that generates heat at 1700 to 1800 ° C., incineration of harmful gases is rapidly performed through high temperature heat.

Therefore, in the case of using a hydrocarbon-based heating element of the prior art, it is difficult to heat a fluid having a large flow rate and a high flow rate, so that a load is generated on the heating element, and thus the heating element is not damaged or the fluid heating is not efficiently performed. Since a heating element made of (MoSi 2) material generates high temperature, even if a fluid flows in a large amount and at a high speed, the harmful gas can be incinerated quickly to efficiently purify the harmful gas.

Therefore, even if the fluid is introduced at a large amount and at a high speed, damage to the heating element does not occur.

In addition, the fluid passing through the burning pipe 22 is first purified and then introduced into the catalyst pipe 23 having the catalyst 231, and after being secondly purified by the catalyst, is discharged to the outside through the discharge pipe 24. It is discharged.

Chromium component may be used as the catalyst 231.

FIG. 4 is a cross-sectional view of another embodiment of the reaction chamber of FIG. 1, wherein the reaction chamber 2 is configured to heat a fluid flowing through an inlet pipe 25 to destroy and purify a predetermined material. ), Between the second chamber 28 and the first chamber 26 and the second chamber 28 for discharging the temperature of the fluid heated from the first chamber 26 after cooling below a predetermined temperature. It is provided with a catalyst 271 is composed of a catalyst tube 272 for controlling the amount of fluid flowing from the first chamber 26 to the second chamber 28.

In addition, the first chamber 26, the catalyst tube 27 and the second chamber 28 are integrally formed, and the outlet of the first chamber 26 and the inlet of the second chamber 28 are the catalyst tubes. Both ends of (27) are formed to have a predetermined inclination angle, and the inclination angle is preferably 45 °, but may vary depending on the embodiment.

In another embodiment of the reaction chamber of the present invention, the blast furnace heat treatment time can be adjusted by variously modifying the shape of the reaction chamber 2 and the shape of the space portion of each of the chambers 26 and 28 and the catalyst tube 27 through which the fluid moves. have.

For example, when the inflow fluid is introduced at a volume of 100%, the moving passage inside the first chamber 26 is formed to have the same size as the catalyst tube 27. Therefore, the size of the moving passage and the catalyst tube 27 inside the first chamber 26 is smaller than the size of the inlet pipe of the inlet 25.

At this time, the proportional value of the size is determined by a difference of 20% between the internal pressure difference ΔP of the first chamber 26 relative to the inlet pressure, and the internal pressure difference of 20% slows the flow rate and the flow rate of the inlet fluid. By changing the size of the outlet pipe of the second chamber 28 and adjusting the discharge flow rate once again, it is possible to efficiently remove the harmful gas by increasing the stagnation time of the harmful gas inside each chamber 26 and 28 as a whole. Make sure

By forming the structures of the first chamber 26 and the second chamber 28 as described above, the backflow of the fluid due to the inclination angle of the first chamber 28 when the low-temperature fluid flows into the first chamber 26 (back-flow) is generated less, resulting in a smooth flow inside the chamber to maintain a constant load in the chamber, and to control the temperature of the heating element at regular intervals to extend the life of the heating element do.

When the fluid flows into the first chamber 26 from the inflow pipe 25 by this configuration, the introduced fluid is primarily purified by the high temperature heat generation of the heating element. At this time, since the heat generating portion of the heating element of the present invention is made of a molybdenum disulfide material that generates heat at 1700 ~ 1800 ℃, the fluid is heated quickly to be purified.

The first purified fluid is secondly purified by the catalyst 271 provided inside the catalyst tube while passing through the catalyst tube 27, and the second purified fluid flows into the second chamber 28 and then generates a heating element. It is 3rd purification | purified by high temperature heat_generation.

In the exemplary embodiment of the present invention, the reactor 1 and the reaction chamber 2 are installed vertically, and the fluid is moved from the top to the bottom, but as shown in FIG. 5, the fluid is from the top to the bottom. This may also apply when moving to. At this time, each component is the same as the embodiment of the present invention, so a detailed description thereof will be omitted.

The heat generating part 112 of the heat generating element 11 may be installed inside the reaction chamber 2 through which the fluid flows, and the non-heating part 111 may be provided outside the reaction chamber 2 as shown in FIG. 6. have.

On the other hand, the harmful gas purifying apparatus according to another embodiment of the present invention, even if the reaction furnace 1 and the reaction chamber 2 is installed horizontally as shown in Figure 7 the fluid moves from left to right Can be applied.

Accordingly, the harmful gas purification apparatus according to another embodiment of the present invention is provided with a plurality of heating elements 11 therein and a reaction furnace having a left cover 12 'and a right cover 13' to be opened and closed. (1) and a reaction chamber (2) provided in the inner space of the reactor (1) to be heated by heat generated by the heating element (11) to purify the fluid, wherein the heating element (11) is a non-heating unit And a heat generating portion 112 made of a molybdenum disulfide (MoSi 2) material.

8 and 9 are perspective views illustrating a heating element installation structure of the hazardous gas purification apparatus illustrated in FIG. 7. In FIG. 7, the heating element 11 is installed on the inner wall of the reactor 1, but as illustrated in FIG. 8. As described above, the heating element 11 is formed to surround the outer circumferential surface of the reaction chamber 2, or as shown in FIG. 9, the heating part 112 is provided inside the reaction chamber 2 through which the fluid flows, and the non-heating part ( 111 may be provided outside the reaction chamber 2.

Heating element in the harmful gas purifying apparatus according to another embodiment and another embodiment of the present invention, as in the embodiment of the present invention, as shown in Figures 3a to 3g, straight, U-shaped, vent Any one selected from the shape, W shape, screw type, panoramic type and planar type, or a combination of several types selected from these may be adopted.

As described above, according to the present invention, by using a heating element made of molybdenum disulfide (MoSi 2) material that generates heat of 1700 ° C. or more, the fluid can be quickly purged, thereby improving the purification efficiency.

In addition, in the present invention, by using a high temperature heating element excellent in oxidation resistance and natural healing properties, it is possible to purify the fluid flowing in a large amount and at a high speed without generating a load of the heating element, so that replacement work due to the damage of the heating element is unnecessary, thereby improving productivity. And cost reduction.

Although the present invention has been described with reference to the accompanying drawings, it will be apparent to those skilled in the art that many different and obvious modifications are possible without departing from the scope of the invention from this description. Therefore, the scope of the invention should be construed by the claims described to include many such variations.

Claims (7)

In the harmful gas purification device which incinerates and cleans harmful gases, Reactor (1) which can open and close, A reaction chamber (2) provided in the inner space of the reactor (1) to purify the fluid passing therein; It includes a heating element (11) for heating the fluid passing through the reaction chamber (2), The heating element 11 is configured to include a non-heating portion 111 and the heat generating portion 112 made of molybdenum disulfide material The reaction chamber (2); A burning tube 22 for firstly purifying the fluid flowing through the inlet tube 21, Catalyst tube 23 is provided with a catalyst 231 for secondary purification of the harmful gas flowing from the burning tube 22, and The apparatus for purifying harmful gases using ultra-high temperature heated molybdenum disulfide heating elements, characterized in that it comprises a discharge pipe (24) for discharging the gas introduced by purification in the catalyst pipe (23). In the harmful gas purification device which incinerates and cleans harmful gases, Reactor (1) which can open and close, A reaction chamber (2) provided in the inner space of the reactor (1) to purify the fluid passing therein; It includes a heating element (11) for heating the fluid passing through the reaction chamber (2), The heating element 11 is configured to include a non-heating portion 111 and the heat generating portion 112 made of molybdenum disulfide material The reaction chamber (2); A first chamber 26 for annihilating and purifying a predetermined substance by heating a fluid flowing through the inlet pipe 25, A second chamber 28 for discharging the fluid heated from the first chamber 26 after cooling to below a predetermined temperature, and An inner hole is provided between the first chamber 26 and the second chamber 28, provided with a catalyst, and controls an amount of fluid flowing from the first chamber 26 to the second chamber 28. An apparatus for purifying harmful gases using an ultra-high temperature heated molybdenum disulfide heating element, comprising a catalyst tube (27). The method according to claim 1 or 2, The fluid is an apparatus for purifying harmful gases using ultra-high temperature heated molybdenum disulfide heating elements, which is a gas containing F or Cl. The method according to claim 1 or 2, The heating element (11) is an apparatus for purifying harmful gases using an ultra-high temperature heated molybdenum disulfide heating element, characterized in that it is provided on the inner wall of the reactor (1) or the outer surface of the reaction chamber (2). The method according to claim 1 or 2, The heat generating part 112 is provided in the reaction chamber 2, One end of each of the non-heating unit 111 is connected to both ends of the heat generating unit 112, The other end of the non-heating unit 111 is a harmful gas purification apparatus using an ultra-high temperature heated molybdenum silicide dendritic heating element, characterized in that each protruding to the outside of the reaction chamber (2). The method of claim 5, The heating element 11 is a noxious gas using an ultra-high temperature heated molybdenum disulfide heating element, characterized in that formed in at least one form selected from a straight rod, U type, vent type, W type, screw type, panoramic type and planar type. Purification device. delete

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