KR100778197B1 - 기체 검출 방법 및 기체 검출기 장치 - Google Patents

기체 검출 방법 및 기체 검출기 장치 Download PDF

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KR100778197B1
KR100778197B1 KR1020067004714A KR20067004714A KR100778197B1 KR 100778197 B1 KR100778197 B1 KR 100778197B1 KR 1020067004714 A KR1020067004714 A KR 1020067004714A KR 20067004714 A KR20067004714 A KR 20067004714A KR 100778197 B1 KR100778197 B1 KR 100778197B1
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South Korea
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signal
gas
detection
light
intensity
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KR1020067004714A
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English (en)
Korean (ko)
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KR20060061371A (ko
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베르트 빌링
마르쿠스 콜리
안드레아스 자이페르트
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아이알 마이크로시스템 에스.에이.
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Publication of KR20060061371A publication Critical patent/KR20060061371A/ko
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N2021/3129—Determining multicomponents by multiwavelength light
    • G01N2021/3133—Determining multicomponents by multiwavelength light with selection of wavelengths before the sample
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N2021/3185—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry typically monochromatic or band-limited
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • G01N2021/396—Type of laser source
    • G01N2021/399—Diode laser
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/069—Supply of sources
    • G01N2201/0691—Modulated (not pulsed supply)

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
KR1020067004714A 2003-09-12 2004-07-30 기체 검출 방법 및 기체 검출기 장치 KR100778197B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US50228203P 2003-09-12 2003-09-12
US60/502,282 2003-09-12

Publications (2)

Publication Number Publication Date
KR20060061371A KR20060061371A (ko) 2006-06-07
KR100778197B1 true KR100778197B1 (ko) 2007-11-22

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Family Applications (1)

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KR1020067004714A KR100778197B1 (ko) 2003-09-12 2004-07-30 기체 검출 방법 및 기체 검출기 장치

Country Status (12)

Country Link
US (1) US7180595B2 (de)
EP (1) EP1549932B1 (de)
JP (1) JP2007504449A (de)
KR (1) KR100778197B1 (de)
CN (1) CN100559160C (de)
AT (1) ATE317115T1 (de)
CA (1) CA2538554A1 (de)
DE (1) DE602004000374T2 (de)
DK (1) DK1549932T3 (de)
ES (1) ES2256834T3 (de)
PL (1) PL1549932T3 (de)
WO (1) WO2005026705A1 (de)

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US7969576B1 (en) * 2007-03-23 2011-06-28 The Regents Of The University Of California Optical sensing based on wavelength modulation spectroscopy
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US7943915B2 (en) * 2008-10-10 2011-05-17 Ge Infrastructure Sensing, Inc. Method of calibrating a wavelength-modulation spectroscopy apparatus
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DE102010030549B4 (de) * 2010-06-25 2016-04-28 Siemens Aktiengesellschaft Nichtdispersiver Gasanalysator
US8003945B1 (en) * 2010-08-25 2011-08-23 Jacob Y Wong Intrinsically safe NDIR gas sensor in a can
US8358417B2 (en) * 2010-10-21 2013-01-22 Spectrasensors, Inc. Spectrometer with validation cell
CN102226722B (zh) * 2011-03-29 2013-03-20 韦占雄 光纤光栅传感器的波长检测仪
US8178832B1 (en) * 2011-05-31 2012-05-15 Wong Jacob Y Re-calibration methodology for NDIR gas sensors
CN102495009A (zh) * 2011-11-21 2012-06-13 武汉理工大学 一种气体检测无线传感方法及装置
KR101311308B1 (ko) * 2011-12-26 2013-09-25 국방과학연구소 레이저의 열적번짐 측정장치, 이를 포함하는 열적번짐 측정 시스템 및 레이저의 열적번짐 측정방법
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US9459209B2 (en) * 2012-06-04 2016-10-04 Shimadzu Corporation Gas analysis device
DE102012215594B3 (de) * 2012-09-03 2013-08-01 Sick Ag Verfahren zur Laserspektroskopie von Gasen
KR101331834B1 (ko) 2012-11-28 2013-11-22 국방과학연구소 고출력 레이저 장거리 대기전파에 의한 레이저-물질 상호작용 시뮬레이터
EP2803975B1 (de) * 2013-05-17 2015-07-08 Sick Ag Verfahren zur Laserspektroskopie von Gasen
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CN103760136A (zh) * 2014-01-21 2014-04-30 河北先河环保科技股份有限公司 一种温室气体及其稳定同位素在线监测系统
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EP3001180A1 (de) * 2014-09-29 2016-03-30 Siemens Aktiengesellschaft Verfahren und Gasanalysator zur Messung der Konzentration einer Gaskomponente in einem Messgas
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CN104697952B (zh) * 2015-03-23 2017-09-15 山东省科学院海洋仪器仪表研究所 用于对海水中的多种气体进行浓度检测的装置
GB201513313D0 (en) * 2015-07-28 2015-09-09 Gas Measurement Instr Ltd Gas detection apparatus and method
CN105388125A (zh) * 2015-10-30 2016-03-09 苏州优康通信设备有限公司 一氧化碳浓度的光学检测系统
JP6930548B2 (ja) * 2017-01-26 2021-09-01 日本電気株式会社 検知システム及び検知方法
US20190064061A1 (en) * 2017-08-26 2019-02-28 Innovative Micro Technology Gas sensor using vcsel
CN109883980A (zh) * 2019-03-29 2019-06-14 安徽延达智能科技有限公司 一种可以同时测甲烷、一氧化碳的本安传感器
KR102330480B1 (ko) * 2019-09-20 2021-11-24 플람 주식회사 세정장비 모니터링 장치
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CN112304885B (zh) * 2020-10-29 2023-06-13 山东省科学院激光研究所 一种基于vcsel的自适应多谱线co检测系统及方法
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Also Published As

Publication number Publication date
DK1549932T3 (da) 2006-06-06
DE602004000374D1 (de) 2006-04-13
JP2007504449A (ja) 2007-03-01
PL1549932T3 (pl) 2006-06-30
US20060098202A1 (en) 2006-05-11
EP1549932A1 (de) 2005-07-06
CA2538554A1 (en) 2005-03-24
ES2256834T3 (es) 2006-07-16
ATE317115T1 (de) 2006-02-15
KR20060061371A (ko) 2006-06-07
CN100559160C (zh) 2009-11-11
US7180595B2 (en) 2007-02-20
DE602004000374T2 (de) 2006-09-28
WO2005026705A1 (en) 2005-03-24
CN1849507A (zh) 2006-10-18
EP1549932B1 (de) 2006-02-01

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