KR100772067B1 - Glass flotation equipment of gassette for LCD/PDP glass transfer - Google Patents

Glass flotation equipment of gassette for LCD/PDP glass transfer Download PDF

Info

Publication number
KR100772067B1
KR100772067B1 KR1020050028832A KR20050028832A KR100772067B1 KR 100772067 B1 KR100772067 B1 KR 100772067B1 KR 1020050028832 A KR1020050028832 A KR 1020050028832A KR 20050028832 A KR20050028832 A KR 20050028832A KR 100772067 B1 KR100772067 B1 KR 100772067B1
Authority
KR
South Korea
Prior art keywords
glass
cassette
air
loading
lcd
Prior art date
Application number
KR1020050028832A
Other languages
Korean (ko)
Other versions
KR20060106264A (en
Inventor
이상필
Original Assignee
주식회사한국큐텍
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사한국큐텍 filed Critical 주식회사한국큐텍
Priority to KR1020050028832A priority Critical patent/KR100772067B1/en
Publication of KR20060106264A publication Critical patent/KR20060106264A/en
Application granted granted Critical
Publication of KR100772067B1 publication Critical patent/KR100772067B1/en

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/241—Manufacture or joining of vessels, leading-in conductors or bases the vessel being for a flat panel display
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
    • H01J11/20—Constructional details
    • H01J11/34—Vessels, containers or parts thereof, e.g. substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2209/00—Apparatus and processes for manufacture of discharge tubes
    • H01J2209/26—Sealing parts of the vessel to provide a vacuum enclosure
    • H01J2209/261—Apparatus used for sealing vessels, e.g. furnaces, machines or the like

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Plasma & Fusion (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Mathematical Physics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

본 발명은 PDP나 LCD 모니터를 제조하는 공정에 있어서, 작업 중 이송을 위해 엘씨디/피디피 글래스(유리판재)를 카셋트에 다단으로 적재할 때 글래스의 전체가 안정적으로 바닥에 닿을 수 있도록 카셋트를 구성하고 적재할 때나 인출할 때는 공기를 이용하여 공중으로 부양시키도록 함을 특징으로 하는 것이다. In the process of manufacturing a PDP or LCD monitor, the cassette is configured so that the entire glass can be stably on the floor when the LCD / PD glass (glass plate material) is stacked in multiple stages for transferring during operation. When loading or withdrawing, it is characterized in that to support the air by using air.

구성의 요지로는 카셋트(10)는 전면부에 글래스(1)의 적재 및 인출을 위한 개방부(11)를 구성하고, 나머지 양측면과 상하면 및 후면은 판체(12)를 이용하여 밀폐되도록 하며, 카셋트(10)의 내부의 받침판(13)은 내부에 공간을 가지고 상면으로는 다수개의 작은 분사구멍(14)을 형성하고, 카셋트(10)의 측면 또는 후면에는 상기 각 받침판(13)의 내부 공간과 연결되는 공급관(15)을 각각 연결 구성하여 고압의 공기를 공급받을 수 있도록 함으로써 글래스가 공기의 압력으로 부양될 수 있도록 함을 특징으로 한다. In the gist of the configuration, the cassette 10 constitutes an opening 11 for loading and withdrawing the glass 1 on the front side, and the other both sides, the upper and lower sides and the rear side are sealed using the plate body 12, The supporting plate 13 inside the cassette 10 has a space therein and forms a plurality of small injection holes 14 on the upper surface thereof, and an inner space of each supporting plate 13 on the side or the rear surface of the cassette 10. It is characterized in that the glass can be supported by the pressure of the air by connecting the supply pipe 15 is connected to and configured to receive the high-pressure air, respectively.

PDP(Plazma Display Panel), LCD(Liquid Crystal Display), 모니터, 글래스, 적재 및 인출, 공중부양 Plasma Display Panel (PDP), Liquid Crystal Display (LCD), Monitor, Glass, Loading and Unloading, Levitation

Description

엘씨디/피디피 글래스 이송용 카셋트의 글래스 부양장치{Glass flotation equipment of gassette for LCD/PDP glass transfer}Glass flotation equipment of gassette for LCD / PDP glass transfer

도 1은 본 발명에 의한 카셋트의 측단면도1 is a side cross-sectional view of a cassette according to the present invention

도 2는 도 1의 A에서 본 부분 정면도2 is a partial front view seen from A of FIG.

도 3은 도 1의 B부 상세도 3 is a detailed view of portion B of FIG.

**도면중 주요 부분에 대한 부호의 설명***** Description of the symbols for the main parts of the drawings ***

1: 글래스 10: 카셋트1: glass 10: cassette

11: 개방부 12: 판체11: opening 12: plate

13: 받침판 14: 받침판13: base plate 14: base plate

15: 공급관 16: 밸브15: supply line 16: valve

17: 분배관 18: 연결구17: distribution pipe 18: connector

20: 공압발생장치 21: 연결관20: pneumatic generator 21: connector

본 발명은 PDP(Plazma Display Panel)나 LCD(Liquid Crystal Display) 모니터를 제조하는 공정에 있어서, 작업 중 이송을 위해 엘씨디/피디피 글래스(유리판 재)를 카셋트에 다단으로 적재할 때 글래스의 전체가 안정적으로 바닥에 닿을 수 있도록 카셋트를 구성하고 적재할 때나 인출할 때는 공기를 이용하여 공중으로 부양시키도록 함을 특징으로 하는 것이다. The present invention is in the process of manufacturing a plasma display panel (PDP) or liquid crystal display (LCD) monitor, the entire glass is stable when loading the CD / PD glass (glass plate material) in the casing for multiple transfer during operation It is characterized in that the cassette is constructed so that it can reach the floor, and when it is loaded or taken out, it is to be supported by air using air.

주지된 바와 같이 엘씨디나 피디피를 제조하는 공정에서는 공통적으로 두께가 매우 얇고 면적이 넓은 유리판재를 사용하고 공정간의 이송을 위해서는 여러 장의 글래스를 다단으로 적층하게 된 카셋트를 이용하여 이송을 하고 있다.As is well known in the process of manufacturing a CD or PD, a glass plate material having a very thin thickness and a large area is commonly used, and a transfer is performed using a cassette in which several glasses are stacked in multiple stages for transfer between processes.

이러한 종래 카셋트의 구성을 살펴보면, 전체적으로 모서리를 구성하는 골격만으로 카셋트를 구성하고 글래스를 다단으로 적층하기 위하여 카셋트의 내부 양측면에 글래스의 끝단을 안착시키기 위한 걸림구가 돌출된 구성이다.Looking at the configuration of such a conventional cassette, it is a configuration in which a latch for protruding the end of the glass on both sides of the inner side of the cassette in order to configure the cassette with only the skeleton constituting the edge as a whole and to stack the glass in multiple stages.

이와 같이 종래의 카셋트가 글래스의 양단만을 걸쳐 이송하도록 구성된 이유는 글래스를 카셋트에 적재하거나 인출할 때는, 글래스의 아래에서 글래스를 받치면서 인출 및 적재를 위한 로보트 아암(지게차와 유사한 형태)장치가 카셋트의 내부의 적층된 글래스 사이를 출입하여야 하기 때문이다. The reason why the conventional cassette is configured to transport only the both ends of the glass is that when loading or withdrawing the glass into the cassette, a robot arm (a type similar to a forklift) device for drawing and loading while supporting the glass under the glass is placed in the cassette. This is because it is necessary to enter and exit between the laminated glass in the interior.

이와 같은 종래 카세트의 단점으로는 글래스 양단만이 걸림구에 걸리는 형태이고 중앙부는 받쳐주는 구성이 없이 안착된 상태이므로 글래스의 중앙이 아래로 처지는 현상이 발생하게 되고 이러한 현상에 의해 글래스의 파손이나 변형이 발생할 우려가 높은 것이었다. As a disadvantage of the conventional cassette, only the both ends of the glass are caught by the fasteners, and the center portion of the glass is settled without the supporting structure. Therefore, the center of the glass sags downward, which causes the glass to be broken or deformed. There was a high risk of this happening.

이러한 처짐 현상에 따른 문제점이 제품의 불량에 이르게 하는 중대한 원인의 하나였던 것이다.Problems caused by this deflection phenomenon was one of the major causes leading to product defects.

상기한 문제점을 감안하여 안출한 본 발명은 글래스 이송용 카셋트의 구성시 글래스가 적재 및 인출되기 위한 일부분만 개방하고 나머지의 부분은 밀폐시킨 후, 글래스를 받치는 구성으로는 상면으로 공기를 분사하도록 된 판체형으로 구성하여 글래스를 적재 및 인출할 때는 판체를 통하여 글래스의 저면으로 공기를 분사함으로써 글래스가 판체로부터 부양되도록 함을 목적으로 하는 것이다.The present invention devised in view of the above problems is to open the part for the glass loading and withdrawal in the configuration of the glass transfer cassette, and to seal the rest of the portion, the glass is configured to spray the air to the upper surface When the glass is loaded and withdrawn in a plate shape, the glass is floated from the plate by injecting air to the bottom of the glass through the plate.

본 발명은 글래스 이송용 카셋트를 구성함에 있어서, 글래스의 적재 및 인출을 위한 일부분만 개방하고 나머지의 부분은 판체로 밀폐시키며, 각 글래스가 안착되는 받침판에는 상면으로 공기를 분사토록 함으로써 글래스가 부양되도록 구성함을 특징으로 하는 것인 바, 이하 첨부된 도면에 의거 바람직한 구성 실시예를 상세히 살펴보면 다음과 같다.According to the present invention, in the construction of the glass conveying cassette, only a portion of the glass is opened and removed for loading and withdrawing, and the remaining portion is sealed with a plate, so that the glass is supported by spraying air to the upper surface of the supporting plate on which each glass is seated. It is characterized by the configuration bar, look at in detail the preferred embodiment according to the accompanying drawings as follows.

도 1은 본 발명에 의한 카셋트의 측단면도, 도 2는 도 1의 A에서 본 부분 정면도, 도 3은 도 1의 B부 상세도이다. 1 is a side cross-sectional view of a cassette according to the present invention, FIG. 2 is a partial front view seen from A of FIG. 1, and FIG.

본 발명의 카셋트(10)는 전면부에 글래스(1)의 적재 및 인출을 위한 개방부(11)를 구성하였고, 나머지 양측면과 상하면 및 후면은 판체(12)를 이용하여 밀폐되도록 구성하였다.The cassette 10 of the present invention constituted an opening portion 11 for loading and withdrawing the glass 1 on the front side, and the remaining both sides, the upper and lower sides, and the rear side were configured to be closed using the plate body 12.

카셋트(10)의 내부에는 각 글래스(1)가 안착될 수 있도록 받침판(13)을 구성하는데, 상기 받침판(13)에는 내부에 공간을 가지고 상면으로는 다수개의 작은 분사구멍(14)을 형성하였다.A supporting plate 13 is formed in the cassette 10 to allow each glass 1 to be seated therein. The supporting plate 13 has a space therein and a plurality of small injection holes 14 are formed on the upper surface thereof. .

카셋트(10)의 측면 또는 후면에는 상기 각 받침판(13)의 내부 공간과 연결되 는 공급관(15)을 각각 연결 구성하여 고압의 공기를 공급받을 수 있도록 하였으며, 각 공급관(15)에는 밸브(16)를 각각 설치하여 수동 또는 자동으로 개폐되는 밸브(16)의 작용에 따라서 각각의 받침판(13)에 공기를 공급 또는 차단토록 하였다. Side or rear of the cassette 10 is connected to the supply pipe 15 connected to the internal space of the support plate 13 so as to receive a high-pressure air, each supply pipe 15 has a valve (16) ), Respectively, to supply or shut off air to each support plate 13 according to the action of the valve 16 which is opened or closed manually or automatically.

상기 공급관(15)은 모두 공압발생장치(20)와 연결되는 연결관(21)으로부터 공기를 공급받도록 연결구(18)를 형성한 분배관(17)을 연결하였다.All of the supply pipes 15 connected to the distribution pipe 17 formed with the connector 18 so as to receive air from the connection pipe 21 connected to the pneumatic generator 20.

공압발생장치(20) 카셋트(10)의 자체의 임의의 위치에 일체로 설치하여 공기를 공급할 수도 있고, 또는 적재 및 인출이 필요한 작업위치에 공압발생장치(20)를 설치하여 작업시에만 연결토록 할 수도 있다. The pneumatic generator 20 may be integrally installed at any position of the cassette 10 to supply air, or the pneumatic generator 20 may be installed at a work position requiring loading and withdrawal to be connected only at work. You may.

도면중 미설명된 부호 2는 글래스 운반장치의 받침간이다. Reference numeral 2, which is not described in the drawing, refers to the supporting portion of the glass conveying device.

이러한 구성으로 된 본 발명의 작용을 살펴본다.It looks at the operation of the present invention having such a configuration.

본 발명에 의한 카셋트(10)에 글래스(1)를 적재할 때도 공기의 분사를 이용하여 주는 것이 유용한데, 적재 또는 인출하는 과정에서 글래스(1)를 받치는 운반장치의 받침간(2)이 글래스(1)를 들고 카셋트(10)의 내부로 이동을 하게 되면 받침판(13)의 분사구멍(14)으로 분사되는 공기의 압력이 글래스(1)의 저면을 받치는 상태가 된다. When the glass 1 is loaded into the cassette 10 according to the present invention, it is useful to use the injection of air, and the supporting part 2 of the transport device supporting the glass 1 in the loading or withdrawing process is the glass. When (1) is moved to the inside of the cassette 10, the pressure of the air injected into the injection hole 14 of the support plate 13 is in a state of supporting the bottom surface of the glass (1).

이러한 상태에서 받침간(2)이 조금 하강하면서 후진을 하면 받침간(2)은 글래스(1)에 전혀 마찰이나 장애를 가하지 않고 카셋트(10)로부터 이탈이 가능하게 되고 글래스(1)는 그대로 공중에 떠있는 상태가 되며, 이러한 상태에서 밸브(16)를 작용하여 공기의 공급을 서서히 줄이면 글래스(1)는 천천히 받침판(13)의 위에 안착이 되는 것이다. In this state, if the supporting base 2 descends slightly while moving backward, the supporting leg 2 can be detached from the cassette 10 without applying friction or obstacle to the glass 1 at all, and the glass 1 remains in the air as it is. In the floating state, and in this state by operating the valve 16, the supply of air gradually decreases that the glass 1 is slowly seated on the support plate (13).

이러한 방법으로 각 받침판(13)의 위에 글래스(1)를 안착시킨 후 카셋트(10) 전체를 다음의 공정으로 이동을 하면 되며, 이러한 상태에서는 글래스(1)의 전체가 받침판(13)에 안착되어 있으므로 글래스(1)가 휘어지거나 다른 물리적인 힘을 받지 않게 되는 것이다. In this way, the glass 1 is seated on each support plate 13, and then the entire cassette 10 is moved to the next process. In this state, the entire glass 1 is seated on the support plate 13 Therefore, the glass 1 is not bent or subjected to other physical forces.

이하는 카셋트(10)를 이동한 후 글래스(1)를 인출할 때의 작용을 살펴보면 다음과 같다.Hereinafter, the operation of drawing the glass 1 after moving the cassette 10 will be described.

맨 위에 적재된 글래스(1)를 꺼낼 때는 해당하는 받침판(13)에 공기를 공급하여 주는데, 이로 인하여 그 위의 글래스(1)는 공기의 압력으로 일정높이 공중으로 부양된 상태가 된다. When the glass 1 loaded on the top is taken out, air is supplied to the corresponding support plate 13, and the glass 1 thereon is lifted into the air at a predetermined height by the pressure of the air.

이러한 상태에서 이동을 위한 장치의 받침간(2)이 글래스(1)의 아래로 진입하여 살짝 올라가면서 글래스(1)를 받치는 상태를 만들고, 이러한 상태에서 공기의 공급을 중단하면 글래스(1)는 받침간(2)의 위에 안착된 상태가 되는 것이며, 그후 받침간(2)이 후진하여 글래스(1)를 인출하게 되는 것이다.In this state, the support base 2 of the device for movement enters the glass 1 and goes up slightly to make the glass 1 support. In this state, the glass 1 stops supplying air. It will be in the state seated on the base 2, and then the base 2 is reversed to take out the glass (1).

상기와 같은 본 발명의 작용에서 적재는 맨 아래부터 이루어지는 것이 유용하고 인출작용은 맨 위에서부터 이루어지는 것이 유용한 것인데, 이러한 작용의 순서에 따라 공기를 차례로 공급하는 작용은 밸브(16)인데, 수동밸브의 경우는 작업자의 인력에 의한 수동으로 작용할 수 있고, 자동밸브의 경우는 큰트롤장치에 의해 자동으로 작동될 수가 있을 것이다.In the operation of the present invention as described above, it is useful that the loading is performed from the bottom and the withdrawal operation is performed from the top, and in this order, the operation of supplying air in sequence is the valve 16. In the case of manual operation by the personnel of the operator, in the case of the automatic valve may be automatically operated by the large trolley device.

또한 공압발생장치(20)는 카셋트에 일체로 구성할 수도 있지만, 공기의 공급은 적재 또는 인출할 위치에 공기를 공급하는 연결관(21)을 구성하여 두었다가 카 셋트(10)가 적재 또는 인출을 위하여 이동 후 정지된 상태에서 연결구(18)를 연결하여 공기를 공급받도록 한다.In addition, the pneumatic generator 20 may be configured integrally in the cassette, but the air supply is configured by connecting the connector 21 for supplying air to the position to be loaded or withdrawn, the cassette 10 is loaded or withdrawn In order to receive air by connecting the connector 18 in the stopped state after the movement.

이상 설명한 바와 같은 본 발명에 의하면 종래 카셋트에서 발생하는 글래스의 안정적인 받침이 미흡하여 불량이 발생하는 문제점을 일거에 해결하고, 글래스를 받침판에 완전하게 안착시키면서도 인출 및 적재 작업에 문제가 없도록 글래스를 부양시키도록 된 것으로, 글래스 가공을 위한 적재, 이송 및 대기상태에서 발생하던 문제점을 해결하여 불량률을 낮추고 생산성을 향상시키게 되는 유용한 발명인 것이다. According to the present invention as described above, the stable support of the glass generated in the conventional cassette is insufficient to solve the problem that the defect occurs at once, while the glass is completely seated on the support plate while supporting the glass so that there is no problem in the drawing and loading operation In order to solve the problems occurring in the loading, conveying and waiting conditions for glass processing, it is a useful invention to lower the defective rate and improve productivity.

Claims (2)

공압발생장치(20)와 연결되는 연결관(21)으로부터 공급관(15)을 통하여 공기를 공급받아 글래스의 저면에서 공기를 분사하도록 된 엘씨디/피디피 글래스 이송장치에 있어서,In the LCD / PD glass transfer device that is supplied with air through the supply pipe 15 from the connecting pipe 21 connected to the pneumatic generator 20 to inject air from the bottom of the glass, 카셋트(10)는 전면부에 글래스(1)의 적재 및 인출을 위한 개방부(11)를 구성하고, 나머지 양측면과 상하면 및 후면은 판체(12)를 이용하여 밀폐되도록 하며,The cassette 10 constitutes an opening 11 for loading and withdrawing the glass 1 on the front side, and the other both sides, the upper and lower sides and the rear side are sealed using the plate body 12, 카셋트(10)의 내부에는 각 글래스(1)가 안착될 수 있도록 받침판(13)을 구성하되, 상기 받침판(13)은 내부에 공간을 가지고 상면으로는 다수개의 작은 분사구멍(14)을 형성하고,The support plate 13 is configured to allow each glass 1 to be seated inside the cassette 10. The support plate 13 has a space therein and forms a plurality of small injection holes 14 on the upper surface thereof. , 카셋트(10)의 측면 또는 후면에 구성되어 각 받침판(13)의 내부 공간과 연결되는 공급관(15)에는 밸브(16)를 각각 설치하여 수동 또는 자동 개폐작용에 따라서 적재 또는 인출시에 각각의 받침판(13)에 공기를 공급하도록 하며,The valves 16 are respectively installed in the supply pipe 15 formed at the side or the rear of the cassette 10 to be connected to the internal space of each support plate 13 so that each support plate can be provided at the time of loading or withdrawing according to manual or automatic opening and closing operations. To supply air to (13), 상기 공급관(15)은 모두 연결구(18)를 형성한 분배관(17)에 연결하여 구성함을 특징으로 하는 엘씨디/피디피 글래스 이송용 카셋트의 글래스 부양장치.The supply pipe 15 is a glass flotation device for the cassette for transferring the CD / PD glass, characterized in that configured to connect to all the distribution pipe (17) forming the connector (18). 제 1항에 있어서,The method of claim 1, 공압발생장치(20)는 적재 및 인출이 필요한 작업위치에 설치하여 작업시에만 카셋트(10)와 연결토록 구성함을 특징으로 하는 엘씨디/피디피 글래스 이송용 카셋트의 글래스 부양장치.Pneumatic generator 20 is a glass flotation device of the cassette for CD / PD glass transfer, characterized in that configured to be connected to the cassette 10 only when the work is installed in the working position that requires loading and withdrawal.
KR1020050028832A 2005-04-07 2005-04-07 Glass flotation equipment of gassette for LCD/PDP glass transfer KR100772067B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020050028832A KR100772067B1 (en) 2005-04-07 2005-04-07 Glass flotation equipment of gassette for LCD/PDP glass transfer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020050028832A KR100772067B1 (en) 2005-04-07 2005-04-07 Glass flotation equipment of gassette for LCD/PDP glass transfer

Publications (2)

Publication Number Publication Date
KR20060106264A KR20060106264A (en) 2006-10-12
KR100772067B1 true KR100772067B1 (en) 2007-11-05

Family

ID=37627003

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020050028832A KR100772067B1 (en) 2005-04-07 2005-04-07 Glass flotation equipment of gassette for LCD/PDP glass transfer

Country Status (1)

Country Link
KR (1) KR100772067B1 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR970050005A (en) * 1995-12-13 1997-07-29 김광호 Liquid Crystal Display Glass Loading Cassettes and Jigs
KR19990068968A (en) * 1998-02-03 1999-09-06 윤종용 Semiconductor wafer cassette
KR200271560Y1 (en) * 2001-11-28 2002-04-11 케이 이엔지(주) a supporting bar that prevents glass from bending through injection for cassette to load LCD glass

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR970050005A (en) * 1995-12-13 1997-07-29 김광호 Liquid Crystal Display Glass Loading Cassettes and Jigs
KR19990068968A (en) * 1998-02-03 1999-09-06 윤종용 Semiconductor wafer cassette
KR200271560Y1 (en) * 2001-11-28 2002-04-11 케이 이엔지(주) a supporting bar that prevents glass from bending through injection for cassette to load LCD glass

Also Published As

Publication number Publication date
KR20060106264A (en) 2006-10-12

Similar Documents

Publication Publication Date Title
KR20100103266A (en) Pump tower
US20170025296A1 (en) Gas purge apparatus, load port apparatus, installation stand for purging container, and gas purge method
JPWO2013005283A1 (en) Tube clamp device and water pressure tester
EP2863423B1 (en) Lid opening/closing device
JP2020175358A (en) Automatic Nozzle Cleaning-Inspection Management System
JP5926694B2 (en) Substrate relay device, substrate relay method, substrate processing apparatus
KR100772067B1 (en) Glass flotation equipment of gassette for LCD/PDP glass transfer
WO2008068845A1 (en) Pallet conveyance device and substrate inspection device
KR100880843B1 (en) Air cleaning system for testing equipment of tft-lcd panel array and modulator air cleaning machine for the same
KR100847627B1 (en) Device for carrying in and out boards
KR100766115B1 (en) Coating apparatus for substrate of flat panel display
KR20110024682A (en) A vacuum deposition apparatus with crucibles interchangeable without beaking vacuum state in a vacuum chamber
KR100606567B1 (en) Apparatus for manufacturing flat panel display
TW202239674A (en) Transportation device, and method for manufacturing glass sheet transporter
KR20110020102A (en) A device for floating substrate, and a substrate transfer device and a coating apparatus having the same
KR20160049629A (en) Cassette stoker and casette loading/unloading method using thereof
KR101468388B1 (en) Gate valve and FPD manufacturing machine having the same
KR20110029618A (en) Substrate exchanging module for substrate processing apparatus, and substrate processing apparatus having the same
JP2008210881A (en) Apparatus of holding cleanliness when goods are delivered by local clean conveyer
KR20120077445A (en) Lift pin module and apparatus for manufacturing of fpd including the same
KR20210020591A (en) Substrate treatment apparatus and Substrate treatment method
KR101315497B1 (en) Improved Device and Method of Separating Substrate, and Coating Apparatus Having the Same
KR100555361B1 (en) Apparatus for assembling piston of cosmetic case
KR100752934B1 (en) Apparatus for vacuum processing
KR100688985B1 (en) Apparatus for inspecting substrate and control method for the same

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
G170 Publication of correction
FPAY Annual fee payment

Payment date: 20121016

Year of fee payment: 6

FPAY Annual fee payment

Payment date: 20130802

Year of fee payment: 7

FPAY Annual fee payment

Payment date: 20140818

Year of fee payment: 8

LAPS Lapse due to unpaid annual fee