KR100766394B1 - Auto denting test equipment - Google Patents

Abstract

An automatic indenting inspection device is provided to prevent an image from being changed according to assembling condition of a body tube and to perform an automatic focus control operation easily and accurately at high sped by using a laser. An automatic indenting inspection device comprises a double inspection unit, a digital indenting image generating unit(20), and a laser focus control unit. The double inspection unit is moved by a transfer motor controlled by a program logic control unit to place an inspection object. The digital indenting image generating unit is installed to form a digital indenting image from indent formed on the inspection object, and includes an objective microscope lens(220), a CCD(Charge Coupled Device) camera(230), a DIC(Differential Interference Contrast) filter(240), an illumination unit(260), a polarizing filter(250), and an analyzer filter(270). The objective microscope lens is combined with one side of a single body tube(210), and the CCD camera is combined with the other side. The DIC filter is combined with a side surface of the single body tube, and the illumination unit is formed with an LED(Light Emitting Diode) element and an aluminum protection cover. The polarizing filter and the analyzer filter are combined with the illumination unit. The motor control unit comprises a line CCD receiving unit, a focus control fixing support, a focus control motor, and a motor control unit. The line CCD receiving unit receives laser from a laser emitting unit, and the focus control fixing support is combined with the single body tube. The focus control motor moves the focus control fixing support vertically. The motor control unit controls the operation of the focus control motor.

Description

AUTO DENTING TEST EQUIPMENT}

1 is a view for explaining a conventional indentation inspection apparatus disclosed in the application number 10-2005-92804,

2 is a view for explaining the automatic indentation inspection device for inspecting the bonding state of the flat panel display device module having a double inspection table of the present invention,

3 is a view for explaining a double inspection table according to the automatic indentation inspection device for inspecting the bonding state of the flat panel display device module having a double inspection table of the present invention,

4 is a view for explaining a part inspection process through the double inspection table of the automatic indentation inspection device for bonding state inspection of the flat panel display device module having a double inspection table of the present invention,

FIG. 5 is a view for explaining a single barrel digital indentation image generating unit according to an automatic indentation inspection device for bonding state inspection of a flat panel display device module having a double inspection table of the present invention;

6 is a view for explaining a polarization filter unit including an illumination unit according to the automatic indentation inspection device for bonding state inspection of the flat panel display device module having a double inspection table of the present invention,

7 is a view for explaining the automatic focus adjustment according to the automatic indentation inspection device for bonding state inspection of the flat panel display device module having a double inspection table of the present invention.

*** Explanation of reference numerals for main parts of drawing ***

1: test object 10: double inspection table

20: digital indentation image generating unit 40: main controller

60: monitor

70: computer-integrated manufacturing (CIM) server

110: first inspection table 120: second inspection table

210: single barrel 220: objective microscope lens

230: CCD camera 240: DIC filter unit

250 polarization filter unit 252 polarization filter adjustment lever

254 condensing lens 260 lighting unit

262: half moon diffusion plate 264: LED light emitting element

266: heat sink 270: analyzer filter unit

310: laser light emitting unit 320: line CCD light receiving unit

330: focusing motor 340: focusing fixed support

410: line controller 510: transfer motor

The present invention relates to an inspection apparatus for inspecting the bonding state of a flat panel display (FPD) module using an indentation, and in particular, the ACF is temporarily attached to the surface by the adhesive force of an anisotropic film (ACF). The present invention relates to an indentation inspection device for inspecting a bonding state by extracting an indentation generated in the process of attaching a part to a high temperature and high pressure attachment means as an image. That is, a flat panel display (FPD) includes products such as a liquid crystal display (LCD), a plasma display panel (PDP), and an organic ELD, and in particular, the liquid crystal display (LCD) is a TFT / STN / CSTN. There is a wide range of products. Indentation image of panel and material bonding process after Tape Automatic Bonding (TAB) and Chip On Glass (COG) / Film On Glass (FOG) processes, which are part of the module production process of all these flat panel display devices. will be.

Generally, LCD panel and TCP (Tape Carrier Package) bonding, PCB (Printed Cricuit Board) and TCP bonding, bare chip and LCD panel bonding, FPCB (Film PCB) ACF is normally used as a method for electrically connecting these in the process of joining a panel.

ACF has a double-sided tape structure in which a heat-hardened adhesive and a fine conductive ball are mixed therein. When a high temperature pressure is applied, the conductive ball in the portion where the pad of the circuit pattern contacts is destroyed, and the broken conductive ball is separated between the pads. Electricity is applied, and the remaining adhesive is filled / cured on the uneven surface other than the pad portion and adhered to each other. After the ACF is bonded through Tape Automatic Bonding (TAB) and Chip On Glass (COG) / Film On Glass (FOG) processes, the connection status is checked by checking their bonding status. There are a number of other processes that result in a product with normal operation.

Therefore, the defective rate of the product can be lowered only by finding a connection defect between parts before producing the finished product. In the case of incomplete bonding, even if the screen comes out, the life of the product is short, and even a small impact generates a defective product.

For this reason, a visual inspection using a naked eye or a tool microscope was performed. However, in the case of a manual inspection, a lot of manpower is required for a smooth inspection and a considerable amount of time is required for the inspection.

In order to solve the problem of unproductive problem that requires a lot of manpower and inspection, indentation inspection that extracts and inspects the image of indentation generated in the process of attaching the part material temporarily attached by ACF adhesive force by means of high temperature and high pressure. The device was developed.

The conventional indentation inspection apparatus disclosed in Fig. 1 Application No. 10-2005-92804 (hereinafter referred to as 'conventional inspection device') is an optical device that obtains the indentation image as one of the indentation inspection device for extracting the indentation image and inspecting the bonding state The image generating unit and the image converting unit for digitizing the indentation image generated by the optical image generating unit and the vision control unit for performing the inspection algorithm by receiving the signal of the image conversion unit receives the alignment signal of the vision control unit to drive the transfer motor In the apparatus consisting of a PLC control unit for moving the inspection object supplied to the inspection table to the optical image generating unit, the optical image generating unit is provided with an objective lens in the lower portion of the first barrel coupled to each side of the DIC filter, The second barrel having the first camera coupled to the upper part of the first barrel is formed by the third barrel having the analyzer filter. The coupling is characterized in that, the fourth column has a field of view adjusting lens on top of the second column is coupled, in which the second camera is coupled to a top of the fourth column.

However, such a conventional inspection apparatus is composed of a polarizing filter, an analyzer filter, a DIC filter used in a general microscope, and combines a plurality of barrels (1, 2, 3, 4) to create an optical system for creating a three-dimensional impression of indentation. There is a problem that the image is changed depending on the assembly state of the barrel.

In addition, the conventional inspection apparatus has a problem in that the automatic focusing is not made precisely at high speed because the first camera having the same optical path as that of the inspection unit optical system for the automatic focusing adjustment is made precisely, the focus adjustment at all inspection positions Because of this problem, blurring occurs due to out of focus, which is a major cause of poor test repeatability and accuracy.

In addition, the conventional inspection device has a problem that the bias of the illumination occurs, the stability is inferior.

In addition, the conventional inspection apparatus has a problem that the user is burned due to the heat of the lighting means.

In addition, the conventional inspection apparatus has a problem that is affected by the vibration generated between the transport of the inspection table as the optical system is located above the inspection table.

In addition, the conventional inspection apparatus is composed of a single inspection stand, there is a problem that the input and take-out operation of the inspection object is impossible during the inspection.

In addition, the conventional inspection apparatus has a problem in that a large amount of time is required when the inspection object is replaced due to the user's hassle to calculate the position value of the inspection table for each inspection object and input it to the PLC control unit.

Due to such a comprehensive problem of the conventional inspection device, it is not possible to keep up with the speed of the TAB / COG / FOG attachment equipment that is being accelerated, so that it is not possible to perform a full inspection or to reduce the inspection position.

As a result, the defective material is transferred to the next process due to the failure to perform a complete pre-inspection, thereby reducing the stability of the product by increasing the possibility of producing the defective product as well as damaging the process.

That is, the conventional inspection apparatus has a problem that does not meet the high-speed and precise inspection requirements by the development of the surrounding technology.

The present invention has been made to solve the problems of the prior art as described above, and the object of the present invention is to provide an indentation inspection apparatus that can process a large number of inspection objects relative to time, and also ensures accuracy thereof, Accurate indentation image acquisition, shorter time and accuracy of auto focusing, stable lighting, prevention of user's burns due to heat generation of light, relatively structure that optical system is less susceptible to vibration of device, input of inspection object during inspection And it is an object of the present invention to provide a device that can automatically control the position of the inspection table according to the take-out and inspection object.

The present invention for achieving the technical problem to be achieved by the above-described invention is a Tape Automatic Bonding (TAB) and Chip On Glass (COG) / Film On Glass (FOG) process that is part of the module production process of a flat panel display device (FPD) An inspection object placed on an inspection table moved by a transfer motor 510 controlled by a program logic control unit PLC to acquire an image of the indentation generated when the panel and the material are attached thereafter, and then inspect the bonding state. A digital indentation image is generated from 1) and includes an objective microscope lens 220, an analyzer filter unit 270, and a polarization filter unit 250 in which a DIC filter unit 240 and an illumination unit 260 are combined. In the inspection apparatus for generating a digital indentation image through the image generator to perform the inspection algorithm for the digital indentation image in the main controller 40,
The test bench is placed in the test object 1 and moved by the transfer motor 510 controlled by the program logic controller PLC is a double test bench 10 consisting of two per digital indentation image generating unit,
The digital indentation image generating unit 20 for generating a digital indentation image from the indentation formed on the inspection object 1 placed on the double inspection table 10 is
A single barrel 210 is coupled to the objective microscope lens 220 on one side, CCD camera 230 is coupled to the other side, the DIC filter unit 240, LED light emitting element 264 and aluminum material on the side The polarization filter unit 250 and the analyzer filter unit 270 coupled to the illumination unit 260 including a protective cover of the combination is configured,
A laser light emitting unit 310 for emitting a laser and a line CCD receiving unit 320 receiving the laser; and a focusing fixing support 340 coupled to the single barrel 210; and the focusing fixing support 340 And a laser focus control unit including a focus control motor 330 for moving up and down; and a motor controller for controlling the driving of the focus control motor 330.

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The objective tube lens 220 is coupled to one side with the single barrel 210, and the CCD camera 230 is coupled to the other side, and the DIC filter unit 240, the LED light emitting element 264 and the aluminum material are protected on the side. The polarizing filter unit 250 and the analyzer filter unit 270 coupled to the lighting unit 260 including the cover are configured to be combined,

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In addition, the double inspection table 10 is a loader (not shown) and the completed inspection object (1) that can insert the inspection object (1) at the same time the inspection of any one of the two inspection table and the other inspection table at the same time It is characterized by mounting an unloader (not shown) that can take out).

In addition, the polarization filter unit 250 further includes a condenser lens 254 installed at a portion coupled to the illumination unit 260 in order to uniformize the illumination.

In addition, the protective cover made of an aluminum material of the lighting unit 260 may further include a plurality of heat sinks 266 for dissipating heat inside the protective cover of the aluminum material to the outside.

In addition, the lighting unit 260 further includes a half moon diffusion plate 262 installed at the front end of the LED light emitting device 264 to prevent the illumination of the illumination.

In addition, the main controller 40 receives the position information of the double inspection table according to the inspection object so that the position of the double inspection table is determined by the program logic controller PLC according to the inspection object. It is characterized in that it further comprises; a line controller 410 provided to).

In addition, the main controller 40 is to report the status and production information of the real-time equipment to the computer-integrated manufacturing system server (Computer-Integrated Manufacturing Server, 70);

In addition, the digital indentation image generating unit 20 and the laser focus control unit is located under the double inspection table 10, the digital indentation image of the inspection object (1) placed on the double inspection table (10) Taken under the double inspection table 10; characterized in that.

DETAILED DESCRIPTION Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art may easily implement the present invention. As those skilled in the art would realize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention. In the drawings, parts irrelevant to the description are omitted in order to clearly describe the present invention, and like reference numerals designate like parts throughout the specification. In addition, when a part is said to "include" a certain component, this means that it may further include other components, except to exclude other components unless otherwise stated.

Now, the automatic indentation inspection device for inspecting the bonding state of the flat panel display device module having a double inspection table according to a preferred embodiment of the present invention will be described in detail with reference to the drawings, the following terms are defined in consideration of functions in the present invention As such, the terms may vary depending on the intention or custom of a user using the automatic indentation inspection device for inspecting the bonding state of the flat panel display device module having a double inspection table. Therefore, the definition should be made based on the contents throughout the present specification.

2 is a view for explaining the automatic indentation inspection device for inspecting the bonded state of the flat panel display device module of the present invention in detail, the present invention is a view for explaining the automatic indentation inspection apparatus for inspecting the bonded state of the flat panel display device module having a double inspection table, 3 is a view for explaining a double inspection table according to the automatic indentation inspection device for inspecting the bonding state of the flat panel display device module having a double inspection table of the present invention, Figure 4 is a bonding state inspection of the flat panel display device module having a double inspection table of the present invention FIG. 5 is a view illustrating a part inspection process through a double inspection table of an automatic indentation inspection device, and FIG. 5 is a digital indentation image generation of a single barrel according to an automatic indentation inspection device for bonding state inspection of a flat panel display device module having a double inspection table according to the present invention. 6 is a view for explaining a portion of the present invention, 7 is a view illustrating a polarization filter unit including an illumination unit according to an automatic indentation inspection apparatus for inspecting a bonding state of a flat panel display device module having an inspection table, and FIG. 7 is an automatic inspection for bonding state inspection of a flat panel display device module having a double inspection table of the present invention. It is a figure for demonstrating auto focus adjustment by an indentation test apparatus.

Hereinafter, the automatic indentation inspection apparatus for inspecting the bonding state of the flat panel display device module of the present invention will be described in detail.

As shown in FIG. 2, the automatic indentation inspection apparatus for inspecting the bonded state of the flat panel display device module according to the present invention includes a double inspection table 10, a digital indentation image generator 20, a laser focus controller, and a main controller 40. , The monitor 60 and the like.

The double inspection table 10 is individually driven by a transfer motor 510 whose driving is controlled by a program logic controller PLC.

That is, as shown in (a) of FIG. 3, the double inspection table 10 includes a first inspection table 110 and a second inspection table 120, and a transfer motor 510 driven by the program logic controller. ) Is composed of the X-axis linear motor 510-1, the first inspection table 110, the Y-axis linear motor 510-2, and the second inspection table 120, the Y-axis linear motor 510-3.

In addition, the loader that can inject the inspection object (1) into the supply / takeout 1 position (P1) and the supply / takeout 2 position (P2) of the double inspection table 10 and the supply / takeout 1 position (P1) and supply It consists of an unloader which can be ejected at the position of ejection / distraction 2 (P2), and this loader and unloader are mounted on one X-axis linear motor.

Therefore, each inspection stand of the double inspection table 10 moves the supply / takeout 1 position P1, the inspection position P2, and the supply / takeout 2 position P2 as shown in FIG. .

As described above, each inspection stand is individually driven according to the supply / takeout / inspection position, so that supply and take-out is possible even during inspection of the inspection object as shown in FIG. 4, thereby shortening the entire inspection time.

In addition, the digital indentation image generating unit 20 is installed in the lower side of the double inspection table as shown in (b) of Figure 3 is designed to be less affected by the vibration caused by the drive of the transfer motor 510. desirable.

At this time, each of the inspection table (110, 120) of the double inspection table 10 has a conventional structure in which the inspection object (1) can be placed.

The digital indentation image generating unit 20 for generating a digital indentation image from the indentation formed on the inspection object 1 placed on the double inspection table 10 is a single barrel 210 as shown in FIG. 5. Objective microscope lens 220 is coupled, the CCD camera 230 is coupled to the other side, the lighting unit 260 including a DIC filter unit 240, LED light emitting element 264 and a protective cover of aluminum material on the side The combined polarization filter unit 250 and the analyzer filter unit 270 are configured to combine.

Therefore, the digital indentation image generating unit 20 according to the present invention is a single barrel of the DIC filter unit 240, the polarization filter unit 250 and the analyzer filter unit 270 for generating a three-dimensional image of the indentation By constructing 210, a plurality of barrels may be assembled as in the conventional inspection apparatus, and thus generation of a defective image due to a defect in the assembly state between the barrels may be eliminated at the source.
In addition, in order to prevent the generation of a bad image due to the bias of the illumination of the conventional inspection device, as shown in FIG. 6, the bias of the illumination can be corrected by adjusting the position in front of the LED light emitting element 264 of the lighting unit 260. The half moon diffusion plate 262 is further included. This prevents the occurrence of a bad image due to the bias of the illumination of the conventional inspection device, and at the same time provides a more accurate digital indentation image.

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In addition, as shown in FIG. 6, a condenser lens 254 is added to the polarization filter unit 250 to which the polarization filter adjustment lever 252 is attached for stable illumination. The condenser lens 254 serves to stably provide the illumination provided from the illumination unit 260 to the polarization filter unit 250.

In addition, as shown in FIG. 6, the lighting unit 260 prevents overheating of the lighting unit 260 due to heat generation of the internal LED light emitting device 264 using an aluminum material having a high thermal conductivity as a cover forming the exterior. Of course, further includes a plurality of heat sinks 266 for dissipating heat in the cover as soon as possible by expanding the heat dissipation area.

The CCD camera is a digital camera used in a conventional electron microscope and converts an indentation optical image into a digital indentation image. The digital indentation image converted into the digital signal is transmitted to the main controller 40 and becomes basic information for performing the inspection algorithm.

As shown in FIG. 7, the laser focus control unit is configured to combine a laser light emitting unit 310 for emitting a laser, a line CCD receiving unit 320 receiving the laser, and the single barrel 210. ) And a focus control motor 330 for moving the focus adjustment fixed support 340 up and down, and a motor controller for controlling the driving of the focus adjustment motor 330.

The depth of focus of the objective microscope lens 220 is 0.01 mm or less, and high precision focus adjustment of 0.005 mm or less should be made to obtain an optimal indentation shape.

Therefore, the present invention uses a laser for high-precision focusing. That is, when the laser emitted from the laser light emitting unit 310 is received through the line CCD light receiving unit 320, and the received information is provided to the main controller 40, the main controller 40 is connected to the received information. Accordingly, a signal for correcting the vertical position of the digital indentation image generator 20 is provided to the motor controller, and the motor controller, which receives the same, drives the focus control motor 330 and is driven by the focus control motor 330. The vertical adjustment of the focus adjustment fixing support 340 is a vertical movement, the digital indentation image generation unit 20 is also coupled to the vertical position is modified to adjust the optimal focus automatically.

The main controller 40 receives the digital indentation image generated by the digital indentation image generating unit 20 from the CCD camera 230 to perform an inspection algorithm for the digital indentation image, and performs indentation inspection for various components. Control is performed, and the resultant image, the inspection state, and the interface screen are output through the monitor 70.

Unlike the vision control unit of the conventional inspection apparatus, the main controller 40 according to the present invention inspects the position of the double inspection table 10 whose position is determined by the program logic controller PLC according to the inspection object 1. The apparatus may further include a line controller 410 for providing the program logic controller PLC with position information of the double inspection table according to the object 1.

That is, in the conventional inspection apparatus, when the inspection object 1 is changed, the position of the inspection table must be calculated and inputted, so that the preparation time of the inspection apparatus according to the change of the inspection object takes a relatively long time, but the main controller according to the present invention. The line controller 410 further includes the line controller 410, when only the information of the changed inspection object is input, automatically calculates the position of the inspection table for inspecting the changed inspection object, and provides the calculated information to the program logic controller. Control the transfer position of the inspection table.

In addition, the main controller 40 is characterized by reporting the status and production information of the real-time equipment to a computer-integrated manufacturing server (Computer-Integrated Manufacturing Server, 70).

The automatic indentation inspection device for the bonding state inspection of the flat panel display device module having a double inspection table of the present invention having the configuration as described above is composed of a polarizing filter, an analyzer filter, a DIC filter coupled to one single barrel, There is an effect of preventing the image from changing depending on the state of assembly between the barrel in the case of the barrel.

In addition, there is an effect that the automatic focusing is made precisely at high speed by adjusting the focus using a laser.

In addition, by using a half-diffusion plate to improve the blurring of the light, and provide a stable light through the condensing lens has the effect of obtaining a high quality digital indentation image.

In addition, there is an effect that can prevent the user from being burned by the overheating of the lighting unit by the cover and the heat sink of the aluminum material and to extend the life of the lighting unit.

In addition, since the digital indentation image generating unit is installed below the inspection table, the digital indentation image generating unit is relatively less affected by the vibration generated between the inspection tables.

In addition, there is an effect that the input and take-out operation of the inspection object can be performed even during the inspection by making the inspection table double.

In addition, by calculating the position value of the inspection table for each inspection object through the line controller to provide to the PLC, the preparation time of the inspection device is reduced when the inspection object is replaced.

Such a specific effect of the present invention provides an inspection speed capable of full inspection, thereby enabling precise inspection of the inspection object, which causes defective materials to be transferred to the next process due to the lack of complete pre-inspection, thereby resulting in process damages. In addition to increasing the likelihood of producing defective products has the effect of solving the problem of reducing the stability of the product.

Claims (8)

After the tape automatic bonding (TAB) and chip on glass (COG) / film on glass (FOG) processes, which are part of the module production process of the flat panel display device (FPD), the image of the indentation generated during the attachment of the panel and the material is obtained and Digital indentation through a digital indentation image generating unit for generating a digital indentation image from the inspection object (1) placed on the inspection table moved by the transfer motor 510 controlled by the program logic controller (PLC) to inspect the bonded state through In the inspection apparatus for generating an image to perform the inspection algorithm for the digital indentation image in the main controller 40, The test bench is placed in the test object 1 and moved by the transfer motor 510 controlled by the program logic controller PLC is a double test bench 10 consisting of two per digital indentation image generating unit, The digital indentation image generating unit 20 for generating a digital indentation image from the indentation formed on the inspection object 1 placed on the double inspection table 10 is The objective tube lens 220 is coupled to one side with the single barrel 210, and the CCD camera 230 is coupled to the other side, and the DIC filter unit 240, the LED light emitting element 264 and the aluminum material are protected on the side. The polarizing filter unit 250 and the analyzer filter unit 270 coupled to the lighting unit 260 including the cover are configured to be combined, A laser light emitting unit 310 for emitting a laser and a line CCD receiving unit 320 receiving the laser; and a focusing fixing support 340 coupled to the single barrel 210; and the focusing fixing support 340 And a laser focus control unit including a focus control motor 330 for moving up and down; and a motor controller for controlling the driving of the focus control motor 330. The method of claim 1, wherein the double inspection table 10 At any one of the two inspection stands, the inspection stand is equipped with a loader capable of injecting the inspection object (1) and an unloader for taking out the inspected inspection object (1) at the other inspection station. Automatic indentation inspection device. The method of claim 1, wherein the polarization filter 250 Automatic indentation inspection device further comprises a; condensing lens (254) is installed in a portion coupled with the illumination unit (260) in order to uniformize the illumination. According to claim 1, wherein the protective cover made of aluminum of the lighting unit 260 is And a plurality of heat sinks 266 for dissipating heat inside the protective cover of aluminum to the outside. The method of claim 1, wherein the lighting unit 260 is An automatic indentation inspection device further comprising; a half moon diffuser plate 262 installed at the front end of the LED light emitting element 264 to prevent the illumination of the illumination. The method of claim 1, wherein the main controller 40 The line controller 410 provides the program logic controller PLC with position information of the double inspection table according to the inspection object so that the position of the double inspection table whose position is determined by the program logic controller PLC is determined according to the inspection object. Automatic indentation inspection device comprising a. The method of claim 1, wherein the main controller 40 Automatic indentation inspection device, characterized by reporting the status and production information of the real-time equipment to a computer-integrated manufacturing server (70). The method according to any one of claims 1 to 7, The digital indentation image generating unit 20 and the laser focus adjusting unit are positioned under the double inspection table 10 to double-induce the digital indentation image of the inspection object 1 placed on the double inspection table 10. Automatic indentation inspection device, characterized in that shooting under the inspection table (10).

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