KR100762124B1 - Evaporation source for luminescent organic composition deposition and apparatus for deposition thereby - Google Patents

Abstract

Provided are an evaporation source for emissive organic compound deposition and a deposition apparatus using the same. Evaporation source for emissive organic compound deposition is a partition wall is open at the top; An evaporation crucible located within the partition wall; And an opening and closing part connected to a rotating shaft fixed to the partition wall to open and close the upper part of the partition wall while rotating. The deposition apparatus using the same includes a vacuum chamber; An evaporation source for emissive organic compound deposition having a partition located inside the vacuum chamber and having an open top, an evaporation crucible located within the partition, and an opening / closing part to open and close the upper part of the partition while rotating; A tray unit in which a substrate on which a deposition process is performed is loaded; And a hot wire unit for heating the evaporation source for organic compound deposition.

OLED, Luminescent Organic Compound, Vacuum Chamber, Deposition Equipment

Description

Evaporation source for deposition of luminescent organic compounds and deposition apparatus using the same {Evaporation source for luminescent organic composition deposition and apparatus for deposition thereby}

1 is a view showing a conventional deposition apparatus for depositing a luminescent organic compound on a transparent substrate in the manufacture of the LED panel.

2 is a cross-sectional view showing an evaporation source for emissive organic compound deposition according to an embodiment of the present invention.

3A and 3B are top plan views illustrating evaporation sources for emissive organic compound deposition according to one embodiment of the present invention.

4 is a cross-sectional view showing a deposition apparatus in which an evaporation source for emissive organic compound deposition according to an embodiment of the present invention is disposed.

<Explanation of symbols for main parts of the drawings>

200: partition 210: evaporation crucible

220: opening and closing portion 230: the rotating shaft

215: hot wire 400: vacuum chamber

440: power supply unit 460: transparent substrate

470: tray portion

The present invention relates to an evaporation source for evaporating an organic light emitting compound and a deposition apparatus using the same, and more particularly, to an evaporation source for depositing an organic light emitting compound in a process of manufacturing an OLED display device and a deposition apparatus using the same. will be.

OLED stands for Organic Light Emitting Diode, and refers to a self-luminous display that emits light by electrically exciting a luminescent organic compound.

These LEDs can be operated at low voltages, and can solve the drawbacks of LCDs such as thinning, wide viewing angles, and fast response speeds. It is attracting attention as a next-generation display that has advantages such as the fact that it can have image quality and its simple manufacturing process is advantageous in future price competition.

1 is a view showing a conventional deposition apparatus for depositing a luminescent organic compound on a transparent substrate in the manufacture of the LED panel.

As shown in FIG. 1, a conventional deposition apparatus 10 for depositing a luminescent organic compound on a transparent substrate includes an evaporation crucible 110 filled with a reaction chamber 100, a luminescent organic compound 105, and a evaporation crucible 110. ) Is heated to a predetermined temperature to heat the emissive organic compound 105, the heating wire 120, the power supply 140 for supplying a predetermined current to the heating wire 120 and the heating wire 120 And the wire unit 130 electrically connecting the power supply unit 140 and the evaporation crucible 110 when the temperature is heated above a predetermined temperature, and the deposition of the luminescent organic compound 105 on the transparent substrate 160 is completed. Or the shutter 150 which is closed when the evaporation crucible 110 is not heated above a predetermined temperature.

The operation of the conventional deposition apparatus 10 will be described below.

First, the transparent substrate 160 requiring deposition of the organic light emitting compound 105 is loaded into the reaction chamber 100, and then the reaction chamber 100 is closed and a predetermined current from the power supply unit 140 is applied to the hot wire portion ( When flowing into 120, the hot wire portion 120 is heated.

The heated heating unit 120 heats the evaporation crucible 110, and as the evaporation crucible 110 is heated, the luminescent organic compound 105 contained in the evaporation crucible 110 is heated above a predetermined temperature. .

The luminescent organic compound 105 heated above a predetermined temperature flows out from the evaporation crucible 110 while vaporizing (vapori-zation), and a predetermined amount of the vaporized luminescent organic compound 105 flowing out from the evaporation crucible 110. In this case, the shutter unit 150 in the reaction chamber 100 is opened, and after that, the evaporated evaporative organic compound 105 begins to be deposited on the surface of the transparent substrate 160.

As such, the process of depositing the organic light emitting compound 105 on the transparent substrate 160 is controlled by controlling the opening and closing of the shutter unit 150.

However, the conventional shutter unit 150 is designed to control only the evaporated luminescent organic compound 105 that flows linearly from the evaporation crucible 110, so that the evaporated luminescent organic compound 105 that flows in a non-linear manner actually flows. In this case, there is a problem that it is difficult to control, and this problem becomes more serious as the amount of evaporated luminescent organic compound 105 increases.

As a result, it is difficult to control the thickness and flatness of the light emitting organic compound 105 deposited on the transparent substrate 160, so that it becomes difficult to catch the process conditions.

Therefore, there is a need for a switchgear capable of fully controlling the luminescent organic compound 105 evaporated from the evaporation crucible 110.

In addition, the evaporation crucible 110 is conventionally installed one by one for each reaction chamber 100, if there are a plurality of materials to be deposited, there was a inconvenience to be deposited while moving the transparent substrate 160 for each process. In order to solve the problem, there is also a need for further research on an evaporation deposition apparatus that enables the placement of several evaporation crucibles 110 in one reaction chamber 100.

SUMMARY OF THE INVENTION The present invention has been made in an effort to provide an evaporation source for emissive organic compound deposition in which vapor deposition of the emissive organic compound is deposited on a transparent substrate and the deposition thickness can be completely controlled.

Another object of the present invention is to provide a deposition apparatus using the evaporation source for emissive organic compound deposition.

Technical problems to be achieved by the present invention are not limited to the technical problems mentioned above, and other technical problems not mentioned will be clearly understood by those skilled in the art from the following description.

Evaporation source for emissive organic compound deposition according to an embodiment of the present invention for solving the above technical problem is a partition wall is open; An evaporation crucible located within the partition wall; And an opening and closing part connected to a rotating shaft fixed to the partition wall to open and close an upper portion of the partition wall.
Evaporation source for emissive organic compound deposition according to another embodiment of the present invention for solving the above technical problem is a top wall is open; An evaporation crucible located within the partition wall; And a first wing part fixedly connected to the partition wall, and an end portion overlaps with the first wing part in a closed state or a part of an open state of the partition wall, and the first wing part when the upper part of the partition wall is completely opened. The second wing portion is formed so that most of the overlap, and in the state that the upper portion of the partition is completely closed, only the end portion and the second wing portion overlaps without overlapping the first wing portion, the upper portion of the partition In the open state and overlaps with the second wing portion, in the state in which the upper part of the partition is completely open, including an opening and closing portion consisting of a third wing formed to overlap not only the second wing but also the first wing.

Deposition apparatus according to an embodiment of the present invention for solving the above other technical problem is a vacuum chamber; An evaporation source for emissive organic compound deposition having a partition located inside the vacuum chamber and having an open top, an evaporation crucible located within the partition, and an opening / closing part to open and close the upper part of the partition while rotating; A tray unit in which a substrate on which a deposition process is performed is loaded; And a hot wire unit for heating the evaporation source for depositing the organic compound.

Specific details of other embodiments are included in the detailed description and the accompanying drawings.

Advantages and features of the present invention and methods for achieving them will be apparent with reference to the embodiments described below in detail with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various different forms, only the present embodiments to make the disclosure of the present invention complete, and common knowledge in the art to which the present invention pertains. It is provided to fully inform the person having the scope of the invention, which is defined only by the scope of the claims. Like reference numerals refer to like elements throughout.

In addition, the size of the components constituting the invention in the drawings are exaggerated for clarity of the specification, when any component is described as "exists inside, or is installed in connection with" other components, any of the above configuration An element may be installed in contact with the other component, or may be installed at a predetermined distance from the other component, and when installed at a distance, a third element for fixing or connecting the component to the other component The description of the means of may be omitted.

2 is a cross-sectional view showing an evaporation source for emissive organic compound deposition according to an embodiment of the present invention, Figures 3a and 3b is a top plan view showing an evaporation source for emissive organic compound deposition according to an embodiment of the present invention.

As shown in FIG. 2, the evaporation source 20 for depositing the luminescent organic compound according to the exemplary embodiment of the present invention includes a partition 200, an evaporation crucible 210, and an opening / closing part 220.

The partition wall 200 includes an evaporation crucible 210 therein and has an open structure at the top thereof. The partition wall 200 is installed to prevent the evaporated luminescent organic compound generated from the evaporation crucible 210 from leaking to the outside, and is preferably made of a metal material in consideration of heat transfer ability.

The evaporation crucible 210 is installed under the partition wall 200 and contains a luminescent organic compound therein. The evaporation crucible 210 is generally made of a metal material in consideration of heat transfer capability, and has a gap formed thereon to allow evaporation of the luminescent organic compound generated by heating inside the evaporation crucible 210.

Since the evaporation crucible 210 should not be reactive with the luminescent organic compound and excellent in heat transfer ability, the evaporation crucible 210 is made of a metal material as described above, preferably made of platinum or titanium.

The opening and closing part 220 is installed to open and close the upper part of the open partition wall 200 according to the movement of the opening and closing part 220 itself.

3A is a top plan view showing a state when the opening and closing part 220 is closing the upper part of the partition wall 200, and FIG. 3B is a top plan view showing a state when the opening and closing part 220 opens the upper part of the partition wall.

As shown in FIGS. 3A and 3B, the opening and closing portion 220 has a circular shape, since the partition 200 is formed in a cylindrical shape. Therefore, if the shape of the partition wall 200 is not cylindrical, the shape of the opening and closing portion 220 will also change according to the shape.

The opening and closing part 220 is connected to the rotating shaft 230 that is broken in the groove formed in the upper portion of the partition wall 200 to open and close the upper portion of the partition wall 200 by the rotation.

The rotation shaft 230 is preferably provided with two so as to face each other on both sides of the opening and closing portion 220. In addition, the rotating shaft 230 may be connected to an external power source (not shown) to rotate the opening and closing part 220 according to the rotation of the rotating shaft 230 to open and close the upper part of the partition wall 200, and the opening and closing part 220. By directly connecting a power source (not shown) to the opening and closing portion 220 may be to directly open and close the top of the partition wall 200.

However, in the present invention, the technical idea is to install the evaporation crucible 210 in a predetermined space sealed by the partition wall 200 to control the evaporation and evaporation amount of the evaporated luminescent organic compound, the opening and closing portion 220 described above It is not limited by the form, composition or function of Therefore, if there is another structure that can open and close the upper portion of the closed predetermined space may be used.

Figure 4a is a plan view showing another embodiment of the opening and closing part 220, Figure 4b is a front view of the closed state of Figure 4a, Figure 4c is a front view of a partially open state, Figure 4d is a front view of a fully open state. .

As shown in FIGS. 4A to 4D, the opening and closing portion 220 according to another embodiment of the present invention includes a first wing portion 251, a second wing portion 252, and a third wing portion 253.

The first wing 251 has a fan shape having a predetermined radius of curvature and is fixedly connected to the partition wall 200. The second wing 252 has a fan shape having a radius of curvature equal to or similar to that of the first wing 251. As shown in FIG. 4B or FIG. 4C, the second wing 252 has a tip portion that is closed in a partially open state. It overlaps with the 1st wing part 251, and as shown in FIG. 4D, it is formed so that a large part may overlap with the 1st wing part 251 in a fully open state. At this time, in order to adjust the degree of overlap with the first wing 251 according to the movement of the second wing 252, the height of the first wing 251 and the second wing 252 is different shall.

The third wing 253 has a fan shape having the same or similar radius of curvature as the first wing 251, and as shown in FIG. 4B, the third wing 253 does not overlap with the first wing 251. Only the second wing portion 252 and the end portion overlap, without overlapping the second wing portion 252 in the partially open state as shown in Figure 4c, the second in the fully open state as shown in Figure 4d Not only the wing portion 252, but also has a structure to overlap the first wing portion 251. Therefore, in order to have a structure in which the third wing portion 253 overlaps with the second wing portion 252, the height formed than the second wing portion should be higher or lower, and the height with the first wing portion 251 is increased. In consideration of the height of the third wing 253 is preferably formed lower than the height of the second wing 252.

5 is a cross-sectional view showing a deposition apparatus in which an evaporation source 20 for evaporating a luminescent organic compound according to an embodiment of the present invention is disposed.

The deposition apparatus 40 according to an embodiment of the present invention includes a vacuum chamber 400, an evaporation source 20 for depositing an organic material, a tray 470, and a hot wire 215.

In addition, the vapor-deposited transparent substrate 460 is attached to the tray portion 470 on which the transparent substrate 470 is mounted. However, in FIG. 5, the tray part 470 is disposed at a distance from the inner wall of the vacuum chamber 400, but is actually installed on the upper surface of the inside of the vacuum chamber 400 or by any connection means. 400) It is fixed to the inner surface.

However, the evaporation source 20 for depositing the luminescent organic compound mounted in the deposition apparatus 40 according to the exemplary embodiment of the present invention is the same as described with reference to FIG. 2. Therefore, the same reference numerals as those in the drawings used in FIG. 2 denote the same members in FIG. 5.

Therefore, in interpreting FIG. 5, reference should be made to the matters described in FIG. 2, which should also be referred to in interpreting the scope of the present invention.

In the deposition apparatus 40 in which the evaporation source 20 for emissive organic compound deposition according to an embodiment of the present invention according to FIG. 5 is disposed, at least one evaporation source 20 for evaporating the emissive organic compound is disposed therein, As a result, several luminescent organic compounds, such as luminescent organic compounds for red-green-blue (RGB), can be produced in one vacuum chamber 400 without having to move around the vacuum chamber to deposit each luminescent organic compound. It is possible to deposit in one chamber.

FIG. 6 is a view showing how the evaporation sources 20 for depositing one or more luminescent organic compounds are arranged in relation to the transparent substrate 460. In particular, FIG. .

As illustrated in FIG. 6, each of the evaporation sources 20 is disposed at the same distance from each other, and should be formed at the same separation distance from each other in relation to the transparent substrate 46. This is because the gases from each evaporation source 20 with the same deposition conditions can be deposited on the transparent substrate 460 with the same conditions.

The heating wire part 215 heats a crucible made of boron nitride, carbon, quartz glass, or the like by heating a resistance heating method commonly used (flowing current through a sheath heater and radiating heat thereof), and heating an organic material by heat of the crucible. Sublimation or melt-evaporation method), but in the present invention, the evaporation crucible 200 is directly heated by high frequency induction heating, and the sublimation or melt-evaporation is performed by heating the luminescent organic compound by the heat of the evaporation crucible 200. Therefore, the temperature increase rate of the evaporation crucible 200 is remarkably improved, and furthermore, since the thermal responsiveness is good, the evaporation crucible 200 can be deposited with excellent precision and rapid deposition in a constant state.

Therefore, the hot wire portion 215 of the deposition apparatus 400 according to the present invention uses a high frequency induction coil.

The hot wire portion 215 made of a high frequency induction coil is connected to a high frequency power supply 440 through which a high frequency current flows.

 Although the embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to the above embodiments but may be manufactured in various forms, and having ordinary skill in the art to which the present invention pertains. It will be understood by those skilled in the art that the present invention may be embodied in other specific forms without changing the technical spirit or essential features of the present invention. Therefore, it should be understood that the embodiments described above are exemplary in all respects and not restrictive.

According to the evaporation source for emissive organic compound deposition according to the embodiment of the present invention described above and the deposition apparatus using the same, there are one or more of the following effects.

By moving the opening and closing portion to prevent mutual interference between the deposition source can be improved the color quality of the deposited color element to improve the quality of the color.

The evaporation source for each of the luminescent organic compounds in RGB can be installed in a single chamber, eliminating the need to go through several vacuum chambers, thereby simplifying the process and reducing process costs.

Since it is possible to precisely control the material evaporated for each one evaporation source, it is easy to control the thickness of the final deposited film.

By using high frequency induction heating method instead of resistance heating method and using evaporation crucible with material with good thermal conductivity, the thermal response is remarkably improved and the deposition rate is constant so that the precision can be increased and the capacity of evaporation crucible can be increased. There is a number.

Claims (7)

A bulkhead with an open top; An evaporation crucible located within the partition wall; And Evaporation source for evaporating organic light-emitting organic compound comprising an opening and closing portion for opening and closing the upper portion of the partition while rotating connected to the rotating shaft fixed to the partition. A bulkhead with an open top; An evaporation crucible located within the partition wall; And The first wing portion fixedly connected to the partition wall, the upper portion of the partition wall is closed or partially open, the tip portion overlaps with the first wing portion, and the upper portion of the partition wall and most of the first wing portion The second wing portion formed to overlap with each other, and in the state where the upper portion of the partition wall is completely closed, the second wing portion overlaps only the second wing portion without overlapping with the first wing portion, and the upper portion of the partition wall is partially opened. In the state overlapping with the second wing portion, in the state that the upper portion of the partition wall is fully open, the organic light emitting device including an opening and closing portion comprising a third wing portion formed to overlap not only the second wing portion but also the first wing portion. Evaporation source for compound deposition. A vacuum chamber; An evaporation source for emissive organic compound deposition having a partition located inside the vacuum chamber and having an open top, an evaporation crucible located within the partition, and an opening / closing part to open and close the upper part of the partition while rotating; A tray unit in which a substrate on which a deposition process is performed is loaded; And Deposition apparatus comprising a hot wire portion for heating the evaporation source for organic compound deposition. The deposition apparatus of claim 3, wherein at least one evaporation source for evaporating the organic light emitting compound is disposed in the deposition apparatus. The method of claim 3, wherein The opening and closing part is connected to the rotating shaft fixed to the partition wall deposition apparatus, characterized in that for opening and closing the upper portion of the partition wall. The method of claim 3, wherein And the hot wire portion is a high frequency induction coil. The method according to claim 3 or 6, wherein And the hot wire portion is connected to a high frequency power source through which a high frequency current flows.

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