KR100724048B1 - 터보 분자 펌프 - Google Patents

터보 분자 펌프 Download PDF

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Publication number
KR100724048B1
KR100724048B1 KR1020000007703A KR20000007703A KR100724048B1 KR 100724048 B1 KR100724048 B1 KR 100724048B1 KR 1020000007703 A KR1020000007703 A KR 1020000007703A KR 20000007703 A KR20000007703 A KR 20000007703A KR 100724048 B1 KR100724048 B1 KR 100724048B1
Authority
KR
South Korea
Prior art keywords
stator
casing
stator assembly
pumping section
rotor
Prior art date
Application number
KR1020000007703A
Other languages
English (en)
Korean (ko)
Other versions
KR20000058091A (ko
Inventor
미야모토마츠타로
오가미노히로아키
Original Assignee
가부시키가이샤 에바라 세이사꾸쇼
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/473,137 external-priority patent/US6926493B1/en
Application filed by 가부시키가이샤 에바라 세이사꾸쇼 filed Critical 가부시키가이샤 에바라 세이사꾸쇼
Publication of KR20000058091A publication Critical patent/KR20000058091A/ko
Application granted granted Critical
Publication of KR100724048B1 publication Critical patent/KR100724048B1/ko

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/008—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
    • F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
KR1020000007703A 1999-02-19 2000-02-18 터보 분자 펌프 KR100724048B1 (ko)

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
JP4103999 1999-02-19
JP15621599 1999-06-03
JP20099099 1999-07-14
JP11-200990 1999-07-14
JP11-41039 1999-07-14
JP11-156215 1999-07-14
US09/473,137 1999-12-28
US09/473,137 US6926493B1 (en) 1997-06-27 1999-12-28 Turbo-molecular pump
US9/473,137 1999-12-28

Publications (2)

Publication Number Publication Date
KR20000058091A KR20000058091A (ko) 2000-09-25
KR100724048B1 true KR100724048B1 (ko) 2007-06-04

Family

ID=27460988

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020000007703A KR100724048B1 (ko) 1999-02-19 2000-02-18 터보 분자 펌프

Country Status (2)

Country Link
EP (1) EP1030062B1 (fr)
KR (1) KR100724048B1 (fr)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6503050B2 (en) * 2000-12-18 2003-01-07 Applied Materials Inc. Turbo-molecular pump having enhanced pumping capacity
JP4763145B2 (ja) * 2001-03-26 2011-08-31 エドワーズ株式会社 分子ポンプ
JP2002327698A (ja) * 2001-04-27 2002-11-15 Boc Edwards Technologies Ltd 真空ポンプ
JP4004779B2 (ja) * 2001-11-16 2007-11-07 Ｂｏｃエドワーズ株式会社 真空ポンプ
JP3950323B2 (ja) * 2001-11-19 2007-08-01 Ｂｏｃエドワーズ株式会社 真空ポンプ
JP4156830B2 (ja) * 2001-12-13 2008-09-24 エドワーズ株式会社 真空ポンプ
US8147222B2 (en) * 2007-05-15 2012-04-03 Agilent Technologies, Inc. Vacuum divider for differential pumping of a vacuum system
DE102007027354A1 (de) * 2007-06-11 2008-12-18 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
DE102007051988A1 (de) 2007-10-31 2009-05-07 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
AU2009244520B2 (en) * 2008-05-06 2013-10-17 Fmc Technologies, Inc. Motor with high pressure rated can
US8777596B2 (en) 2008-05-06 2014-07-15 Fmc Technologies, Inc. Flushing system
DE102008058149A1 (de) 2008-11-20 2010-05-27 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
DE102008058151A1 (de) * 2008-11-20 2010-05-27 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
JP5532051B2 (ja) * 2009-11-02 2014-06-25 株式会社島津製作所 真空ポンプ
JP2015059426A (ja) * 2013-09-17 2015-03-30 エドワーズ株式会社 真空ポンプの固定部品

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4929151A (en) * 1988-07-27 1990-05-29 Societe Anonyme Dite: Alcatel Cit Vacuum pump
US5273393A (en) * 1992-03-26 1993-12-28 Rolls-Royce Plc Gas turbine engine casing
KR19990007502A (ko) * 1997-06-27 1999-01-25 마에다시게루 터보 분자 펌프

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2214702A1 (de) * 1972-03-25 1973-09-27 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe
JPS57212395A (en) * 1981-06-24 1982-12-27 Hitachi Ltd Molecular pump
DE3402549A1 (de) * 1984-01-26 1985-08-01 Leybold-Heraeus GmbH, 5000 Köln Molekularvakuumpumpe
JP3427950B2 (ja) * 1994-11-17 2003-07-22 株式会社島津製作所 モレキュラドラッグポンプ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4929151A (en) * 1988-07-27 1990-05-29 Societe Anonyme Dite: Alcatel Cit Vacuum pump
US5273393A (en) * 1992-03-26 1993-12-28 Rolls-Royce Plc Gas turbine engine casing
KR19990007502A (ko) * 1997-06-27 1999-01-25 마에다시게루 터보 분자 펌프

Also Published As

Publication number Publication date
EP1030062A3 (fr) 2002-03-20
EP1030062B1 (fr) 2007-12-12
KR20000058091A (ko) 2000-09-25
EP1030062A2 (fr) 2000-08-23

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A201 Request for examination
E902 Notification of reason for refusal
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
G170 Re-publication after modification of scope of protection [patent]
LAPS Lapse due to unpaid annual fee