KR100692274B1 - Apparatus for chemical vapor deposition - Google Patents

Abstract

The present invention can extend the life of the device, reduce the risk of damage to the corrosion net, as well as reduce the cost by replacing only a part when the corrosion of the network, chemical gas deposition with good productivity due to the smooth flow of the reaction gas An apparatus related to the present invention, comprising: a main body plate having a predetermined width and length, wherein both side edges of the transverse direction are curved upwards, and a blocking wall is fixed to a predetermined height at both ends of the longitudinal direction; A main pipe having a U-shape, which is joined to both sides of the main body plate in a longitudinal direction and is formed with a plurality of injection holes for injecting the injected gas; A first reinforcing bar having a predetermined height on a bottom surface of the main body plate and fixed in a longitudinal direction; A corrosion net surrounding the outer side of the main pipe from one end of the main body plate and being in contact with the blocking wall and firmly joined to the other end; An auxiliary plate spaced apart at predetermined intervals on both sides of the main body plate and coupled to each other by a bracket, and having a blocking wall fixed to a predetermined height at both ends; A U-shaped auxiliary pipe joined to the auxiliary plate in a longitudinal direction and having a plurality of injection holes for injecting the injected gas therethrough; In the well-known system consisting of a secondary corroded net surrounding the outer side of the main pipe from one end of the auxiliary plate to the other end and firmly bonded to the barrier wall, the first reinforcing bar is a predetermined angle outward with respect to the bottom of the body plate Slanted obliquely to be inclined to; A second reinforcing bar is fixed to a bottom surface of the main body plate spaced apart from the first reinforcing bar by a predetermined interval in an outward direction; The corrosion mesh and the auxiliary corrosion mesh is characterized in that the material of any one of Inconel 600 and 601.

Therefore, the present invention significantly reduces the damage rate of the corrosion net compared to the conventional chemical vapor deposition apparatus, as well as prolongs the life, even if a part is damaged can be easily separated only to replace a part, very cost-effective maintenance Phosphorus invention.

Chemical Vapor Deposition, Reaction Gas, Wafer, Powder, Corrosion Net

Description

Chemical vapor deposition apparatus {APPARATUS FOR CHEMICAL VAPOR DEPOSITION}

1 is a perspective view of a body plate of a conventional chemical vapor deposition apparatus

2 is an exploded perspective view of a body plate of a conventional chemical vapor deposition apparatus;

3 is a perspective view of a state in which the body plate and the auxiliary plate of the conventional chemical vapor deposition apparatus

4 is a partial cross-sectional view and operation state diagram of a conventional chemical vapor deposition apparatus

5 is an exploded perspective view of a main plate and an auxiliary plate of the chemical vapor deposition apparatus according to the present invention;

Figure 6 is a perspective view of the body plate and the auxiliary plate coupled state of the chemical vapor deposition apparatus according to the present invention

7 is a partial cross-sectional view and operating state of the chemical vapor deposition apparatus according to the present invention

<Code Description of Main Parts of Drawing>

100: main body plate 110: first reinforcement

120: second reinforcing bar 130: main pipe

140: corrosion net 200: auxiliary plate

230: auxiliary pipe 240: auxiliary corrosion net

300: bracket 310: bolt ball

320: Bolt

The present invention relates to a chemical vapor deposition apparatus, and more particularly, the life of the device is extended, the risk of damage to the corrosion net is reduced, as well as replace only a part in case of damage to the corrosion net to reduce the cost, The invention relates to a chemical vapor deposition apparatus having a smooth flow of reaction gas and good productivity.

As is well known, chemical vapor deposition to form a suitable thin film-type insulating layer on the surface of the substrate 1 during the process of manufacturing a large-scale integrated circuit (LSI), liquid crystal display (LCD), LCD (LCD), etc. (CVD: Chemical Vapor Deposition) process is required.

This is because when a reaction gas such as nitrogen containing a substance to be deposited is injected from the reaction tank to the substrate 1 side such as a wafer, the high temperature of the heater (not shown in the drawing) is placed on the conveyor belt 2 and gradually moves. It is comprised so that thermal decomposition may generate | occur | produce on the surface of the board | substrate 1, such as a wafer heated by the vapor deposition.

To this end, as shown in Figures 1 to 4, the main pipe 11 is injected and injected with a reaction gas such as nitrogen, and the main body plate 10 is fixed to the main pipe 11 is provided, the main body plate On the bottom side of 10, a corrosion net 12 made of SUS316 is firmly coupled to contact the blocking wall 13 provided at both ends of the body plate 10. In addition, the reinforcing rod 14 is coupled to the bottom side of the main body plate 10 in the longitudinal direction, and serves to prevent the corrosion net 12 is crushed and damaged.

In addition, the left and right sides of the main body plate 10 are provided with auxiliary plates 20 spaced apart by a predetermined interval by the bracket 30 to be welded 31, and the auxiliary plate 21 and the auxiliary pipe 21 and bushings are also provided. The net 22 is provided.

Accordingly, the reaction gas is injected through the main pipe 11 and the auxiliary pipe 21, and the injected reaction gas is injected into the corrosion nets 12 and 22 through the plurality of injection holes 11a. . A portion of the injected reaction gas passes through the corrosion nets 12 and 22 to the side of the substrate 1 provided below, and the injected reaction gas is chemically reacted on the surface of the substrate 1 heated by the heater. The vapor deposition is carried out while rising to the space between the body plate 10 and the auxiliary plate 20 to be exhausted.

In addition, a part of the reaction gas injected into the main body plate 10 flows through the inside of the corrosion net 12 coupled to the main body plate 10 by a predetermined interval, and the passage hole 15 formed in the reinforcing table 14. ) Is discharged over the entire corrosion network 12 and the chemical vapor deposition reaction on the surface of the substrate (1).

However, the conventional chemical vapor deposition apparatus as described above has a number of disadvantages, firstly, as it is made of SUS316 corroded net (12) (22), the chemical resistance and heat resistance is weak, it is impossible to use for a long time, which is an uneconomical disadvantage have.

Second, as only one reinforcing rod 14 is supported on both sides between the body plate 10 and the corrosion net 12, the corrosion net 12 between the end of the body plate 10 and the reinforcing rod 14 is in operation. There is a risk of damage due to carelessness, and third, between the corrosion mesh 12 and the body plate 10 as the corrosion mesh 12 is in close contact with the reinforcing table 14 fixed to the body plate 10 at approximately right angles. Since the flow of the injected reaction gas is not desired, the production of powder is increased, and clogging occurs due to the production of the powder, resulting in uneven film thickness on the surface of the substrate and inferior productivity.

In addition, fourthly, as the bracket 30 connecting the main body plate 10 and the subsidiary plate 20 by welding 31, a part of the corrosion net 22 of the subsidiary plate 20 is damaged or a defect occurs. Even if it is, there is an uneconomical disadvantage because the entire product must be replaced.

Therefore, the present invention is an invention devised to solve the conventional problems, the object of the present invention is to provide an economical device because the chemical resistance and heat resistance is strong and the life is not shortened even if used for a long time, and the present invention is also in the corrosion network It is another object to provide an apparatus for smoothing the reaction gas flow in the process.

In addition, there is little risk of damage even when the corrosion net is collided due to carelessness during operation, and even if a part of the auxiliary plate or the main plate corrosion net is broken, only a part thereof can be easily replaced to reduce costs. have.

The present invention has a predetermined width and length for the above purpose, the main body plate is bent to both sides of the transverse direction in the upper direction, the barrier wall is fixed to a predetermined height at both ends of the longitudinal direction; A main pipe having a U-shape, which is joined to both sides of the main body plate in a longitudinal direction and is formed with a plurality of injection holes for injecting the injected gas; A first reinforcing bar having a predetermined height on a bottom surface of the main body plate and fixed in a longitudinal direction; A corrosion net surrounding the outer side of the main pipe from one end of the main body plate and being in contact with the blocking wall and firmly joined to the other end; An auxiliary plate spaced apart at predetermined intervals on both sides of the main body plate and coupled to each other by a bracket, and having a blocking wall fixed to a predetermined height at both ends; A U-shaped auxiliary pipe joined to the auxiliary plate in a longitudinal direction and having a plurality of injection holes for injecting the injected gas therethrough; In the well-known system consisting of a secondary corroded net surrounding the outer side of the main pipe from one end of the auxiliary plate to the other end and firmly bonded to the barrier wall, the first reinforcing bar is a predetermined angle outward with respect to the bottom of the body plate Slanted obliquely to be slanted to A second reinforcing bar is fixed to a bottom surface of the main body plate spaced apart from the first reinforcing bar by a predetermined interval in an outward direction; The corrosion mesh and the auxiliary corrosion mesh is characterized in that the material of any one of Inconel 600 and 601.

In addition, the present invention is characterized in that the space between the first reinforcing bar and the corroded net spaced by a predetermined interval to maintain a space.

In addition, the present invention is characterized in that the bolt hole is formed to facilitate the disassembly and assembly of the bracket to be coupled to the body plate and the auxiliary plate, it is another feature that is fixed by the bolt.

Hereinafter, the configuration of the most preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.

5 is an exploded perspective view of the body plate and the auxiliary plate of the chemical vapor deposition apparatus according to the present invention, Figure 6 is a perspective view of the body plate and the auxiliary plate of the chemical vapor deposition apparatus according to the present invention, Figure 7 is the present invention Partial cross-sectional view and operation state diagram of a chemical vapor deposition apparatus according to.

Chemical vapor deposition apparatus of the present invention is provided with a body plate 100 having a predetermined width and length as known, both edges of the body plate 100 is formed to be curved upwards, the front and rear ends of the barrier wall ( 101 is secured to a predetermined height.

The first reinforcing bar 110, which has a plurality of passage holes 111 formed therein, is fixed to the bottom of the body plate 100 in a lengthwise direction so as to allow the reaction gas to pass therethrough. It is fixed inclined somewhat obliquely in the direction. In addition, by further fixing the second reinforcing bar 120 having the passage hole 121 formed on the bottom of the body plate 100 at a position spaced outwardly from the first reinforcing bar 110, the corrosion net 140 to be described later. ) Support and reinforcement more reliably to minimize the risk of breakage.

And, the U-shaped thin main pipe 130 is longitudinally bonded to both sides of the main body plate 100, a plurality of injection holes for the injection of the reaction gas injected through the main pipe 130 ( 131 is formed.

In addition, the bottom surface of the one end of the main body plate 100 to the other end is covered with a corrosion net 140, the corrosion net 140 by the blocking wall 101 formed on the front and rear ends of the main body plate 100 The main pipe 130 is wrapped and bonded while being spaced apart from the bottom of the main body plate 100 at a predetermined interval to form a space. At this time, the corrosion net 140 uses an Inconel 600 or 601 material to prevent the life is shortened by frequent cleaning by the chemical treatment. Inconel is a heat-resistant alloy containing 15% of chromium, 6 to 7% of iron, 2.5% of titanium, and less than 1% of aluminum, manganese, and silicon as well as nickel. Very suitable for the device of the present invention.

On the other hand, the first reinforcing bar 110 covered by the corrosion net 140 is located slightly obliquely in the lower outward direction with respect to the bottom surface of the body plate 100, so that the end is a predetermined distance from the corrosion net 140 It is desirable to be spaced apart to form a space.

In addition, the auxiliary plates 200 are provided at both sides of the main body plate 100 so as to be spaced apart from each other by a bracket 300 at predetermined intervals. Of course, at both ends of the auxiliary plate 200, the blocking wall 201 is fixed to a predetermined height, and the auxiliary pipe 230 having the injection hole 231 is joined in a U-shape, and the auxiliary plate 200 The outer side is wrapped by the auxiliary corrosion net 240. At this time, it is preferable to form a bolt hole 310 in the body plate 100 and the auxiliary plate 200 to facilitate the assembly and disassembly of the bracket 300, and coupled to the bolt hole 310 by a bolt 320. Do.

Accordingly, the present invention provides a chemical vapor deposition apparatus for chemical vapor deposition on the surface of a substrate 1 such as a wafer, in which the corrosion net 140 side inadvertently collides during separation for installation or cleaning. In some cases, the present invention can support the second reinforcing bar 120 in addition to the first reinforcing bar 110 at the same time, it is possible to reduce the failure rate of the corrosion net 140.

Substrate 1, such as a wafer, is provided in the lower portion where the chemical vapor deposition apparatus of the present invention is installed, and the lower portion thereof is heated to about 550 ° C by a heater (not shown), and the main pipe 130 and the auxiliary pipe When the reaction gas is injected through the 230, the bottom surface of the main body plate 100 and the corrosion net 140 and the auxiliary plate through the injection holes 131 and 231 drilled into the main pipe 130 and the auxiliary pipe 230. Sprayed between the bottom of the 200 and the auxiliary corrosion net 240.

The injected reaction gas is injected over the entire corrosion net 140 through the passage holes 111 and 121 of the first reinforcing rod 110 and the second reinforcing rod 120 of the body plate 100. Since the space between the network 140 and the first reinforcing bar 110 by a predetermined interval, the flow of the reaction gas is made smoothly to reduce the production of powder can be improved productivity. In addition, in the auxiliary plate 200, the reaction gas is injected through the auxiliary bushing network 240, and the injected reaction gas deposits a thin film while causing a chemical reaction on the surface of the substrate 1 such as a wafer heated by a lower heater. In addition, the gas is raised to the space between the main body plate 100 and the auxiliary plate 200 and exhausted.

On the other hand, when the corrosion mesh 140 of the main body plate 100 or the auxiliary corrosion mesh 240 of the auxiliary plate 200 is damaged due to carelessness or aging, the bolt of the bracket 300 to replace only the damaged portion By loosening the 320 and replacing and replacing only the damaged corrosion mesh 140 and 240, the cost of the product can be reduced.

As described above, the present invention significantly reduces the damage rate of the corrosion net than the conventional chemical vapor deposition apparatus, as well as prolongs the life, and even if a part is broken, it is easy to separate and replace only a part, thereby greatly reducing maintenance costs. It is an economic invention.

In addition, there is an advantage that the productivity of the product can be improved and produce a good product by reducing the fear that the work is interrupted because the reaction gas flow is reduced to reduce the production of powder.

Claims (3)

A main body plate having a predetermined width and a length, and both edges of the transverse direction are curved upwards, and a blocking wall is fixed to a predetermined height at both ends of the longitudinal direction; A main pipe having a U-shape, which is joined to both sides of the main body plate in a longitudinal direction and is formed with a plurality of injection holes for injecting the injected gas; A first reinforcing bar having a predetermined height on a bottom surface of the main body plate and fixed in a longitudinal direction; A corrosion net surrounding the outer side of the main pipe from one end of the main body plate and being in contact with the blocking wall and firmly joined to the other end; An auxiliary plate spaced apart at predetermined intervals on both sides of the main body plate and coupled to each other by a bracket, and having a blocking wall fixed to a predetermined height at both ends; A U-shaped auxiliary pipe joined to the auxiliary plate in a longitudinal direction and having a plurality of injection holes for injecting the injected gas therethrough; In the well-known chemical vapor deposition apparatus consisting of a secondary corrosion net which is firmly bonded to the outer wall surrounding the outer side of the main pipe from the one end of the auxiliary plate to the other end; The first reinforcing bar is inclined at an angle so as to be inclined at a predetermined angle in a lower outward direction with respect to a bottom surface of the main body plate; A second reinforcing bar is fixed to a bottom surface of the main body plate spaced apart from the first reinforcing bar by a predetermined interval in an outward direction; The corrosion network and the auxiliary corrosion network is a chemical vapor deposition apparatus, characterized in that the material of any one of Inconel (600) and 601. The method of claim 1, And a space between the first reinforcing bar and the corrosion net by a predetermined interval to maintain a space. The method according to claim 1 or 2, Forming a bolt hole to facilitate the disassembly and assembly of the bracket to be coupled to the body plate and the auxiliary plate, the chemical vapor deposition apparatus, characterized in that fixed by the bolt.

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