KR100541276B1 - Apparatus for generating plasma under atmospheric pressure - Google Patents

Abstract

1)로 기울어져 연장되는 한 쌍의 제 2 판들(112a,112b)로 이루어진 절연체 노즐부(110)와; 상기 노즐부(110)의 제 1 판들(111a,111b)의 외측면에 각각 장착되며, 상호 극성이 다른 제 1과 2 전극들(121,122)과; 상기 제 1 판들(111a,111b) 각각의 타측에 연결되어 상기 절연체 노즐부(110)로 가스를 주입하는 가스공급부(130)와; 상기 제 2 판들(112a,112b)의 일면에 고정되어 상기 제 1 판들(111a,111b), 가스공급부(130)와 이격되어 감싸는 하우징(140)으로 구성된다. The present invention relates to an atmospheric pressure plasma generator, and a pair of first plates (111a, 111b) and the first plate (111a, 111b) to be a nozzle at a predetermined distance apart a certain angle (

An insulator nozzle part 110 composed of a pair of second plates 112a and 112b extending inclined to 1); First and second electrodes 121 and 122 mounted on the outer surfaces of the first plates 111a and 111b of the nozzle unit 110 and having different polarities from each other; A gas supply unit 130 connected to the other side of each of the first plates 111a and 111b to inject gas into the insulator nozzle unit 110; The housing 140 is fixed to one surface of the second plates 112a and 112b to surround the first plates 111a and 111b and spaced apart from the gas supply unit 130.

Therefore, the present invention is arranged by placing the electrode on the outer surface of the insulator nozzle, and by extending the insulator nozzle for the protective insulator plate having the optimum thickness and width, the gas in the plasma state to block the penetration to both electrodes, the arc at the electrode It is possible to stably implement a gas in a plasma state without discharging, and to form an inclined side of the outlet side of the insulator nozzle part at an angle, thereby optimizing the gas density of the plasma state in contact with the workpiece, thereby improving the performance of the device. There is an effect that can be excellent.

Atmospheric pressure, plasma, insulator, nozzle

Description

Apparatus for generating plasma under atmospheric pressure

1 is a basic configuration of a general DC arc torch type atmospheric plasma generator

2 is a cross-sectional view of the atmospheric pressure plasma generator according to the present invention

3 is a perspective view of the atmospheric pressure plasma generator according to the present invention

Figure 4 is a basic configuration of the insulator nozzle portion in the atmospheric pressure plasma generating apparatus according to the present invention

5 is a view showing another shape of the insulator nozzle portion in the atmospheric pressure plasma generator according to the present invention;

<Description of the symbols for the main parts of the drawings>

110: insulator nozzle portion 111a, 111b: first plate

112a, 112b: second plate 121, 122: first and second electrodes

130: gas supply unit 140: housing

150: exhaust

The present invention relates to an atmospheric pressure plasma generator, and more particularly, to arrange the electrodes on both sides of the insulator nozzle to block the gas infiltration in the plasma state, and to extend the protective insulator plate having an optimal thickness and width to the insulator nozzle The present invention relates to an atmospheric pressure plasma generator capable of more stably implementing a plasma gas, and since the gas in the discharged and flowing plasma state does not penetrate into both electrodes, no arc discharge occurs in the electrode, thereby improving the performance of the apparatus. .

In general, the state of matter is a solid, liquid, gas, plasma state (fourth state).

In the plasma state, when energy is applied to a gas molecule or an atom, the outermost electrons move out of the orbit to become free electrons, thereby displaying positive charges, and electrons having negative charges with molecules or atoms are generated.

In this plasma state, a large number of positively charged ions and electrons gather and cluster, and as a whole, the electrical property is neutral (that is, the number of ions and electrons are about the same number).

1 is a basic configuration diagram of a general DC arc torch type atmospheric pressure plasma generator, in which a cathode 12 is installed inside an anode nozzle 11, power is supplied from a power supply 13, and gas is supplied to the anode nozzle. (11) When injected into the inside, the gases are in a plasma state inside the anode nozzle (11).

Thereafter, the plasma gas is discharged to the outlet 11a of the anode nozzle 11.

Here, as the gas used, an inert gas such as Ar or He or N ₂ and H ₂ are commonly used.

The torch type atmospheric plasma generator is developed for application to materials, industrial equipment manufacturing process and waste treatment using thermal plasma characteristics having high temperature, high heat capacity, high speed, and a large amount of active particles. In general, it is used in plasma spray coating, plasma coating, plasma chemical vapor deposition, and the like, and is also widely used in industrial fields such as cutting, welding, and melting of metals.

On the other hand, such a conventional torch type atmospheric pressure plasma generator is used to clean the metal pattern of the BGA (Ball Grid Array) substrate, in this case, not only to clean the foreign matter on the metal pattern but also lift off the metal pattern (Lift) -off) There was a problem.

The torch type atmospheric pressure plasma generator is lifted off to the metal to be cleaned even when a metal cleaning process for increasing the adhesive strength of the wire bonding is performed during the upper plate and the lower plate assembly process of the TFT (Thin Film Transistor) display.

In addition, the torch type has a disadvantage in that gas consumption is higher than that of the plate type.

In addition, the conventional torch type atmospheric pressure plasma generator has a problem that arc discharge occurs by contacting a gas in a plasma state to an electrode, and thus a short state is often caused. There was a problem of remaining in the workpiece to contaminate the workpiece.

Accordingly, the present invention has been made to solve the problems described above, by configuring the electrodes on both sides of the insulator nozzle to block the gas infiltration in the plasma state, the atmospheric pressure plasma generation that can implement the plasma gas more stably The object is to provide a device.

Another object of the present invention is to extend and arrange a protective insulator plate having an optimum thickness and width in the insulator nozzle, so that the gas in the discharged and flowing plasma state does not penetrate into both electrodes so that arc discharge does not occur in the electrode, thereby improving the performance of the apparatus. It is to provide an atmospheric pressure plasma generator that can be excellent.

Still another object of the present invention is to provide an atmospheric pressure plasma generator capable of optimizing the gas density of the plasma state in contact with the workpiece by forming both sides of the outlet of the insulator nozzle at an angle.

1)로 기울어져 연장되는 한 쌍의 제 2 판들(112a,112b)로 이루어진 절연체 노즐부(110)와; A preferred aspect for achieving the above objects of the present invention is a pair of first plates (111a, 111b) and the first plates (111a, 111b) which are spaced apart from each other by a predetermined distance. Each side has a certain angle (

An insulator nozzle part 110 composed of a pair of second plates 112a and 112b extending inclined to 1);

First and second electrodes 121 and 122 mounted on the outer surfaces of the first plates 111a and 111b of the nozzle unit 110 and having different polarities from each other;

A gas supply unit 130 connected to the other side of each of the first plates 111a and 111b to inject gas into the insulator nozzle unit 110;

An atmospheric pressure plasma generator including a housing 140 fixed to one surface of the second plates 112a and 112b and enclosed by the first plate 111a and 111b and spaced apart from the gas supply unit 130 is provided.

Hereinafter, exemplary embodiments of the present invention will be described with reference to the accompanying drawings.

1)로 기울어져 연장되는 한 쌍의 제 2 판들(112a,112b)로 이루어진 절연체 노즐부(110)와; 상기 노즐부(110)의 제 1 판들(111a,111b)의 외측면에 각각 장착되며, 상호 극성이 다른 제 1과 2 전극들(121,122)과; 상기 제 1 판들(111a,111b) 각각의 타측에 연결되어 상기 절연체 노즐부(110)로 가스를 주입하는 가스공급부(130)와; 상기 제 2 판들(112a,112b)의 일면에 고정되어 상기 제 1 판들(111a,111b), 가스공급부(130)와 이격되어 감싸는 하우징(140)으로 구성된다.2 is a cross-sectional view of the atmospheric pressure plasma generating apparatus according to the present invention, wherein a pair of first plates 111a and 111b and one side of each of the first plates 111a and 111b spaced apart from each other by a predetermined distance are nozzles. At a certain angle (

An insulator nozzle part 110 composed of a pair of second plates 112a and 112b extending inclined to 1); First and second electrodes 121 and 122 mounted on the outer surfaces of the first plates 111a and 111b of the nozzle unit 110 and having different polarities from each other; A gas supply unit 130 connected to the other side of each of the first plates 111a and 111b to inject gas into the insulator nozzle unit 110; The housing 140 is fixed to one surface of the second plates 112a and 112b to surround the first plates 111a and 111b and spaced apart from the gas supply unit 130.

Here, the exhaust unit 150 is preferably installed to be spaced apart from the second plates (112a, 112b).

In the atmospheric pressure plasma generator of the present invention configured as described above, when a voltage is applied to the first and second electrodes 121 and 122, the gas injected into the insulator nose line 110 is in a plasma state at atmospheric pressure.

That is, gas in a plasma state is generated between the first plates 111a and 111b of the insulator nozzle unit 110.

The gas in the plasma state is discharged from the end surfaces of the first plates 111a and 111b.

At this time, if the workpiece is located below the second plates 112a and 112b of the insulator nozzle unit 110, the organic matter present in the workpiece (the LCD substrate in the manufacturing process) is cleaned by the gas in the plasma state. do.

3 is a perspective view of the atmospheric pressure plasma generator according to the present invention, the insulator nozzle unit 110 and the gas supply unit 130 is installed in the housing 140 of the atmospheric pressure plasma generator 200 of the present invention.

Here, the second plates 112a and 112b of the insulator nozzle unit 110 are exposed to the lower portion of the generator 200, and a gas supply pipe 151 for injecting gas from the outside to the front surface of the gas supply unit 130. Is equipped.

4 is a basic configuration diagram of the insulator nozzle unit in the atmospheric pressure plasma generator according to the present invention, and is applied to the first and second electrodes 121 and 122 between the first plates 111a and 111b in the insulator nozzle unit 110. The thickness d ₁ of the first plates 111a and 111b should be somewhat thin in order to make the gas injected by the applied voltage into the plasma state.

That is, the thickness d ₁ of the first plates 112a and 112b for generating the gas in the plasma state in the insulator nozzle unit 110 is preferably 0.5 to 5.0 mm.

In addition, the width W ₁ of the first plates 111a and 111b for generating a gas in a plasma state in the insulator nozzle unit 110 may be set in a range of 0.1 to 10 mm.

In addition, the lower surfaces of the second plates 112a and 112b in contact with the gas in the plasma state discharged from the insulator nozzle unit 110 should serve to flow the gas in the plasma state. The thickness d ₂ of 112b should be made thicker than the thickness d ₁ of the first plates 111a and 111b (d ₂ > d ₁ ), and it is preferable to satisfy the following condition (1). Do.

d ₂ = d ₁ X (2.0 ~ 3.5) -------- Equation (1)

In addition, the plasma state is discharged from the insulator nozzle unit 110 so that the gas in the plasma state flows into the first and second electrodes 121 and 122 to prevent arc discharge, that is, a short state. The width W ₂ of the lower surfaces of the second plates 112a and 112b in contact with the gas may be greater than the thicknesses of the first and second electrodes 121 and 122, and satisfy the condition of Equation 2 below.

W ₂ = W ₁ + 2d ₁ ----------------- Equation (2)

Here, the width W ₂ of the lower surfaces of the second plates 112a and 112b may be set differently according to the characteristics and the type of the gas.

Therefore, in the present invention, an insulator nozzle is formed between the two electrodes so that the gas in a discharged plasma state does not penetrate into the both electrodes, so that arc discharge does not occur at the electrode, and the nozzle is extended to an optimal thickness and width. The protective insulator plates, that is, the second plates 112a and 112b described above are further configured, so that the plasma gas state can be more stably implemented.

2)로 기울여 형성한다.FIG. 5 is a view illustrating a state in which an insulator nozzle part of another shape in the atmospheric pressure plasma generator according to the present invention is placed on the workpiece. The outlet of the gas in the plasma state is discharged from the insulator nozzle part 110. Angle both sides of the

2) Tilt to form.

The reason is that the gas in the plasma state discharged from the insulator nozzle part 110 reacts with the workpiece 201, and the reacted gas is in both side directions of the inclined outlet, that is, in the 'a' direction of FIG. 5. This is because it can be pushed out continuously and exit from the workpiece 201.

2)로 돌출되어 있고, 다른 하나의 제 2 판(122b) 대향면은 제 2 판(122b)의 내측으로 일정각도(

2) 기울어져 있으면, 피가공물(201)에 접촉되는 플라즈마 상태의 가스 밀도를 최적화시킬 수 있게 된다.Therefore, the opposite surfaces of the second plates 112a and 112b at the outlet of the insulator nozzle part 110 are formed to be inclined, so that the opposite surfaces of one second plate 112a are at a predetermined angle (

2) and the other opposing surface of the second plate 122b has a constant angle (inward) of the second plate 122b.

2) When tilted, the gas density in the plasma state in contact with the workpiece 201 can be optimized.

If the gas density of the plasma state in contact with the workpiece 201 is not optimized, and the reacted gas remains in the workpiece 201, it causes contamination of the workpiece 201. The type atmospheric plasma generator can solve this problem.

As described above, the present invention has the advantage that the plasma gas can be more stably implemented by arranging the electrodes on both sides of the insulator nozzle to block the gas infiltration in the plasma state.

In addition, by extending and arranging a protective insulator plate having an optimum thickness and width in the insulator nozzle, the gas in the discharged and flowing plasma state does not penetrate into both electrodes so that arc discharge does not occur in the electrode, thereby improving the performance of the apparatus. It has an effect.

Although the invention has been described in detail only with respect to specific examples, it will be apparent to those skilled in the art that various modifications and variations are possible within the spirit of the invention, and such modifications and variations belong to the appended claims.

Claims (8)

A pair of first plates facing and spaced apart; A pair of second plates each of which has a bottom surface portion of the pair of first plates extended outwardly; A pair of electrodes attached to an outer surface of each of the pair of first plates and having mutually different polarities; An injection hole is formed on any one of front and rear surfaces thereof, and a lower part thereof is opened to be coupled across each of the pair of first plates; And a housing having an accommodating space of the gas supply unit, a pair of first plates, and an electrode, and having a lower surface connected to the accommodating space, the housing being coupled to each side of each of the pair of second plates. The method of claim 1, Atmospheric pressure plasma generating apparatus characterized in that the exhaust portion further provided spaced apart from the second plate. The method of claim 1, wherein the second pair of plates One second plate is formed to protrude at an angle toward the other second plate facing the connecting portion with the first plate, the other second plate is such that the connecting portion with the first plate is inclined at the same angle as the predetermined angle Atmospheric pressure plasma generating apparatus characterized in that the cutting. The method of claim 1, wherein the second plate Atmospheric pressure plasma generating apparatus, characterized in that the thickness is thicker than the first plate. The method of claim 1, wherein the first and second plates are Atmospheric pressure plasma generating apparatus characterized in that the thickness is formed according to the following formula (1). d ₂ = d ₁ × (2.0 to 3.5) ---------- (1) (d ₁ = thickness of first plate, d ₂ = thickness of second plate) The method of claim 4 or 5, wherein the first plate Atmospheric pressure plasma generator, characterized in that formed in a thickness of 0.5mm ~ 5.0mm. The method of claim 1, wherein the second plate Atmospheric pressure plasma generating apparatus characterized in that the thickness is larger than the thickness of the electrode, the width is formed according to the following equation (2). W ₂ = W ₁ + 2d ₁ ---------- (2) (W ₁ = width of first plate, d ₁ = thickness of first plate, W ₂ = width of second plate) The method of claim 7, wherein the first plate Atmospheric pressure plasma generator, characterized in that formed in a width of 0.1mm ~ 10mm.

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