KR100671474B1 - Automatic coating system of automotive lamps reflector coating and Protective layer - Google Patents

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an automatic coating apparatus for reflecting films and protective films for automobile lamps for improving the reflectance and salt water resistance of automobile lamps molded in plastic.

More specifically, the first step, which is a pretreatment process that induces surface modification by exposing and activating the surface of the plastic lamp base material to low pressure plasma, and sputtering by introducing Ar gas and applying high power and high voltage. The aluminum reflective film is coated, but the second step is a high-speed coating by a magnetron sputter cathode (coated to a thickness of 1100Å within 20 seconds) by a magnetron sputter cathode, and Ar gas and hexamethyldisiloxane (Hexamethyldisiloxane ( HMDSO)> Plasma CVD (Plasma CVD) method by mixing the gas and applying ultra high pressure by MF power for plasma generation, so that the third step of coating the protective film on the surface of the reflective film is carried out sequentially in one vacuum deposition chamber. The main purpose is to provide a device for performing the above, and if necessary on the third step coating as described above (Dry Air) By using the plasma CVD (Plasma CVD) self-discharge to further proceed to the fourth step of processing the waterproof film.

The present invention configured as described above, according to the coating process of the reflective film and the protective film on the plastic lamp base material as the work process from the first step to the third step (or the fourth step) in one vacuum deposition chamber is automatically and sequentially performed The process and turnaround time can be greatly reduced to maximize productivity. Also, there is no moving and waiting process due to process conversion, which can maximize the quality, and maximize the cost reduction effect and the reduction of facility investment cost. It provides an automatic coating device for the reflective film and the protective film of the automobile lamp with the characteristics that can contribute.

Vertical round vacuum vacuum deposition chamber, size of vacuum coating chamber (range of Ø720 ~ Ø920), vertical circular chamber, integrated structure of chamber and valve, 2 semi-circular doors, dry air supply device for rapid vent, DC Power (Tig90DC), two cryogenic cooling traps, Hexamethyldisiloxane (HMDSO) gas, MF Power (40KHz), Quick Cool Sputter Cathode, Reflective film and protective film of automotive lamps.

Description

Automatic coating system of automotive lamps reflector coating and protective layer

Figure 1a is a front perspective view showing the entire coating system of the present invention.

Figure 1b is a rear perspective view showing the entire coating system of the present invention.

Figure 2a is a perspective view showing a plasma pretreatment and plasma polymerization (Polymerzation) unit system of the coating apparatus of the present invention.

FIG. 2B is an enlarged cross-sectional view of a line AA ′ of FIG. 2A; FIG.

Figure 3 is an exemplary view showing a state of sputtering a metal reflective film in the chamber of the present invention.

Figure 4a is a perspective view of the vacuum deposition chamber of the present invention.

4B is a cross-sectional view of FIG. 4A.

5 is an enlarged perspective view showing a state in which a part is cut in the main valve-integrated vacuum chamber of the present invention.

6 is an enlarged perspective view of main parts of the main valve-integrated vacuum chamber and two loading doors of the present invention;

7 is an enlarged perspective view of the sputtering cathode of the present invention, a part of which is cut away.

Figure 8 is an enlarged cross-sectional view showing an operating state for the sputtering cathode high efficiency cooling method of the present invention.

9 is a perspective view of a partially cutaway view of the arrangement of each component for plasma CVD of the main valve-integrated vacuum chamber of the present invention.

10A is a partial cutaway perspective view of an cryogenic cold trap arrangement of the present invention.

Figure 10b is a graph showing organically the exhaust performance of each of the vacuum trap of the 16-inch vacuum deposition chamber of the present invention, the 22-inch cryogenic freezing trap, and the high-definition shared diffusion pump (5).

11 is a perspective view showing a connection state of the vacuum deposition chamber and the dry air storage tank of the present invention.

The present invention relates to a reflective film and a protective film automatic coating apparatus of an automobile lamp.

More specifically, to improve reflectance and salt water resistance of automobile lamps, a stable vacuum coating is applied to a lamp base material which is injection-molded by plastic using sputtering and plasma chemical vapor deposition (PCVD) deposition techniques. A first step pretreatment step of surface modification to increase the adhesion of the aluminum metal thin film in one vacuum deposition chamber, and a second step of high-speed coating to a film thickness of 1100 kPa within at least 20 seconds. In order to maximize productivity and commerciality, a series of processes can be performed in a sequential order from the process, the third step of coating the protective film on the surface of the reflective film, and the fourth step of forming the waterproof film as necessary. This is to maximize the maximization and cost reduction effect.

As is well known, as the technology of the modern industrial society is advanced and high precision, various efforts are being made to induce improvement in productivity and high quality in manufacturing methods, processing equipment or production facilities, especially in the automobile industry. As a result, the importance of productivity and quality is increasing.

Therefore, the present invention deeply recognizes such a situation, particularly in forming an aluminum reflective film and a protective film on an injection-molded plastic automobile lamp, thereby greatly reducing time and manpower due to process reduction, maximizing productivity and quality, and further reducing manufacturing costs. To increase competitiveness.

On the other hand, looking at the conventional method of coating the reflective film and the protective film on the automotive lamp,

First, injection molding (first step) of a plastic lamp of a predetermined type through an injection mold, and applying a chemical adhesive to the surface of the molded lamp with a spray (second step), and then to the product 80 ~ 180 ℃ After heating and drying (the third step) for 40 minutes by hot air of, it was vacuum-coated (the fourth step) the aluminum reflection film by resistance heating method by high vacuuming the inside of the evaporator while putting it in a vacuum evaporator configured as a chamber. Subsequently, in order to increase salt water resistance on the surface of the aluminum reflecting film coated with the above process, a chemical resistant to salt water is applied by spraying to form a protective film (the fifth step). The hot air was blown and dried for about 20 minutes (stage 6).

On the other hand, looking at the time required to go through the series of processes described above, 20 seconds when the lamp injection of the first process, 8 seconds when applying the adhesive of the second process, 40 minutes in the third process, 15 minutes in the fourth process, 8 seconds in the fifth process and 20 minutes in the sixth process, the time from the first process to the sixth process is 60 minutes and 58 seconds in total.

Therefore, as can be seen in the above process, as the time required for coating and drying the reflective film and the protective film on the surface of the plastic injection molded lamp is excessively excessive, productivity is greatly degraded and moved by the process. In addition, the manpower required for work and management is excessive, and due to the excessive process, the facility investment cost and the occupancy of the facility space are very high.

In particular, the aforementioned automotive lamps (Head Lamp, Rear Lamp, Fog Lamp, etc.) are mostly organic polymers (PCs, BMC, PBT, PPC, ABS, etc.) as organic materials. In the conventional method, pre-treatment and protective film coating on the plastic lamp molding is performed in the air as it is, so that the degree of coating of the product may vary depending on the temperature and humidity of the exterior, resulting in poor coating. In addition, there were no choice but to follow the closure of environmental pollution.

In other words, in the conventional method described above, all of the aluminum coatings, which are the only operations performed in the chamber, are sprayed in the air, so that foreign matters or contaminants in the air may be added during the coating process. In addition, the process of handling chemicals has serious disadvantages that always threaten worker's health due to the serious air pollution in the workplace. In addition, the coating layer can not be formed firmly, and thus the product quality can be greatly reduced. There is no end, such as being alone.

The present invention has been made in view of the above-mentioned conventional problems, and in particular, in sputtering and vacuum plasma chemical vapor deposition (CVD) technology in coating an aluminum reflective film coating and a protective film together with a pretreatment work on an automobile lamp. The product can be produced more quickly and easily by using the product, and in addition, three processes such as surface modification of the plastic lamp, aluminum reflective film coating and protective film coating can be performed sequentially and continuously in one vacuum chamber. Its purpose is to maximize the cost-saving effect due to time and process savings, and to contribute to the improvement of product quality and prevention of environmental pollution such as air by maximizing quality.

In the present invention, in the aluminum reflective film coating and the protective film coating on the lamp surface injection-molded with plastic, the surface of the plastic is etched in the first step in one chamber, and then the sputter cathode in the second step. By applying a high-output high voltage by the high-speed coating of the aluminum metal reflecting film, the third step is a device for three steps such as coating a protective film on the surface of the aluminum metal reflecting film coated in step 2 There is a feature in providing.

Hereinafter, an apparatus of the present invention for coating a reflective film and a protective film of an automobile lamp will be described.

1A to 11, the present invention forms a vacuum atmosphere for pretreatment of a vehicle lamp, a reflective coating and a protective coating, and a hydrophilic coating, and can process all processes in one reaction vessel, but the main valve Vacuum deposition chamber (1) having a diameter of 720 to 920 mm and configured to be integrally connected to the rear of the vacuum deposition chamber (1), and a high vacuum diffusion pump (5), which is a vacuum pump for high vacuum exhaust for high vacuum formation therein. Mechanical booster pump (6) (total exhaust capacity is 3240m3), which is a vacuum pump for evacuating at a high speed in the medium vacuum region of the high vacuum formation stage in the vacuum deposition chamber (1). / Hr. 60 Hz x 2 units = 6,480 m 3 / Hr. 60 Hz), and a rotary vacuum pump 7 (total vacuum pump) used as an initial vacuum exhaust pump in the vacuum deposition chamber 1 for exhausting air from atmospheric pressure to medium vacuum. Exhaust capacity is 8,000 L / min × 2 units = 16,000 L / min) and moisture and operating oil in the vacuum deposition chamber (1) are most adversely affected, and air is vented to atmospheric pressure after vacuum formation. As moisture contained in the inside rapidly enters the vacuum chamber and sticks to the surface of the vacuum chamber, high vacuum exhaust time is required due to the influence of moisture during re-vacuum formation. The air storage tank 8 and the plastic product surface, which is the automobile lamp base material which is placed and mounted inside the vacuum deposition chamber 1, contain various gases and a large amount of water, and the gas and moisture are contained in the vacuum deposition chamber 1. It is used to maximize productivity by doubling the vacuum exhaust rate by rapidly adsorbing the gas and moisture because it is a decisive cause of the internal vacuum exhaust time. Cryogenic refrigerator (9), a direct current glow discharge (Glow discharge) a direct current of a target to be negative, in placing the product to be treated to the anode 10 ^-2 Torr ~ 10 ^-3 Torr in the Ar gas atmosphere between the electrodes using KV Ar ⁺ during the glow discharge of Ar generated between the electrodes by applying a voltage is accelerated to the negative drop portion around the target, colliding with the target surface to scatter the target atom, and thus a DC power supply used to generate such a glow discharge. (DC Power Supply) 10, automatic voltage regulator 11 for supplying a constant voltage (207V ± 5%) of MF Power, and for cooling the cathode for sputtering, maximizing cooling efficiency and using pure water Cooler 12 used to improve the insulation to suppress arc generation inside the chamber during glow discharge, and installed near the vacuum deposition chamber 1, the entire equipment by the touch screen and PLC Vacuum control through the electric control control panel (13), a vacuum deposition chamber (1), a mechanical booster pump (6), and a rotary vacuum pump (7). In the case of high vacuum exhaust, a roughing valve (14), which is a valve to block the connection part, is installed between the lower part of the main valve 101 and the upper part of the high vacuum shared diffusion pump (5) to prevent the backflow of the oil diffusion pump oil and the vacuum. Vacuum valve that connects or blocks the 22-inch cryogenic freezing trap 15 used to rapidly condense moisture and improve the high vacuum exhaust rate, and the vacuum deposition chamber 1 and the cryogenic freezing trap 17 of the 16-inch vacuum deposition chamber. As a result, the gate valve 16, which is open only at high vacuum exhaust and rapidly condenses water in the vacuum deposition chamber 1, is used to improve the high vacuum exhaust speed, and the water is rapidly exhausted at high vacuum exhaust in the vacuum deposition chamber 1. condensation The vacuum deposition chamber used for improving the high vacuum exhaust speed and the cryogenic freezing trap 17 and the inside of the vacuum deposition chamber 1 are mounted on both sides and ITC (in chamber top coating) Glow discharge plasma cathode (18), which is a two-electrode for the pre-treatment process to ensure the coating film coating during the process and the polymerization process of the protective film and the cured film on the surface of the aluminum reflective film during the process; Amplification of the voltage supplied from the MF Power for plasma generation to two electrodes for the pretreatment process to ensure the reflective film coating during the ITC process and the polymerization and polymerization of the protective film and the cured film on the surface of the aluminum reflective film. Voltage amplification unit (19), and pretreatment process and aluminum reflection for smooth reflection coating during ITC process MF Power (20), which is a voltage amplification unit for the polymerization of the protective film and the cured film on the surface of the film, and the pretreatment process and the aluminum reflective film to make the reflective film coating smooth during the ITC process HMDSO flow control system (21) to control the precise flow of hexamethyldisiloxane (HMDSO) gas for the polymerization of the protective film and the cured film on the surface, and the reflective film coating during the ITC process Pretreatment process and Ar gas flow rate control system (22) for precise flow control of Ar gas for the polymerization of protective film and cured film on the surface of aluminum reflecting film, and pretreatment process for smooth reflection film coating during ITC process. N ₂ O gas flow rate control for the N ₂ O gas flow rate control for processing the sum (Plasma Polymerzation) of the protective film and the cured film on the aluminum reflective film (23), two sputtering cathodes (24) mounted on both sides of the vacuum deposition chamber (1) and forming an aluminum reflective film on the plastic base material, and a vacuum deposition chamber (1) and supplying a high voltage to the glow discharge plasma cathode. Two high voltage high vacuum feed throws (25) to keep the air tight to the atmosphere, and a high vacuum valve (26, Vent Valve), which introduces and blocks the dry air prepared in the dry air tank to the vacuum increase chamber (1). ) And a dry air generator (27) for dehumidifying moisture in the general air produced by the compressor and storing it in the dry air tank (8).

The vacuum deposition chamber (1) is provided with two left and right vacuum deposition doors (3) (2), and these doors have a function of making the internal vacuum very quickly and accurately because the internal sealing effect is very large when the doors are closed. The vacuum deposition doors (3) and (2) are convexly formed on the surface thereof, and inside the upper and lower supports (41, 42), a deposition jig (4) for specimen insertion is mounted, and the vacuum deposition doors (3) ( At a predetermined position on the surface of 2), a see-through window 31 was formed so that the working situation could be confirmed by internal perspective. The specimen injection deposition jig (4) is a part (Loading) for loading the jig for coating of the automotive lamp, which is somewhat different in shape and shape depending on the model.

In addition, the vacuum deposition chamber 1 is equipped with a primary exhausting exhaust port 102 and two mixed gas introduction ports 103 for introducing a reaction gas thereon, and a vacuum deposition chamber 1. At the lower end of (1), a motor shaft (not shown) for rotating the test sample deposition jig is installed and the main valve 101 is mounted at the rear.

As shown in FIGS. 7 and 8, the two sputtering cathodes 24 forming the aluminum reflective film on the plastic base material form a thin thickness of the back plate 241 to 2 to 3 mm, and the cooling water 243 to 2 to 3. As the supply plate circulates at a pressure of 2.3 kg / cm 2, the back plate bends and swells like a balloon and is in close contact with the aluminum target 242, even though a high temperature occurs when the aluminum target 242 is sputtered by plasma. It is possible to cool stably to maximize the deposition efficiency.

In addition, in the present invention, as shown in the diagram of Fig. 10B, the freezing trap 17 of the 16-inch vacuum deposition chamber has a capacity of about 20,500 L / sec to process moisture, and the 22-inch cryogenic freezing trap 15 has moisture. The ability to handle is about 25,230 L / sec. In addition, the high vacuum oil diffusion pump 5 has an additional cryogenic pumping capacity of 45,000 / L / sec by two cryogenic refrigeration traps 15, compared to 17500 L / sec air standard. H ₂ O standard), the vacuum exhaust capacity has been significantly improved.

On the other hand, vacuum and moisture have the biggest adverse effect. This is because after the vacuum is formed, the moisture contained in the air at the time of the vent is rapidly introduced into the vacuum chamber and adheres to the surface inside the vacuum chamber. The effect of this moisture on revacuum formation leads to a high vacuum exhaust time.

In particular, the above phenomenon will adversely affect the productivity of the mass production equipment required for the production of automotive parts. In the present invention, such unreasonable matters are cleaned by dehumidifying more than 99% of moisture through the dry air unit 27 as shown in FIG. The air is stored in the dry air tank 8 during another process and the high pressure valve 29 opens at the vent of the vacuum deposition chamber 1 and is supplied to the vacuum deposition chamber 1 through the vacuum valve 26. As shown in the graph below, not only short vent time but also high vacuum exhaust time during re-vacuum exhaust can be drastically shortened to improve productivity.

Referring to the process of forming a reflective film and a protective film on a vehicle lamp using the present invention configured as described above are as follows.

First, in forming a reflective film and a protective film on an automobile lamp using the apparatus of the present invention, the coating process is different depending on the type of lamp, the housing of the automobile lamp (ABS, PC) and the rear bezel (Material: PC) ), Pog Lamp (Material: PC, ABS), Indoor, Door, etc. (Material: ABS) are coated through the following A process, Reflector (Material: BMC), Front Bezel (Material: PC), A photogram (material: aluminum die casting) and the like are coated using the following B process.

When we talk about process A,

It takes 20 seconds as a step of injection molding a lamp made of plastic through an injection molding machine → The coating process is performed in three or four steps using the apparatus of the present invention, but after plasma CVD pretreatment, the aluminum reflective film is sputtered. Next, the plasma seed is coated with a protective film (if necessary, the plasma seeded hydrophilic film is coated), which takes 4 minutes and 34 seconds (an average of four seasons including summer).

When we explain process B,

It takes 20 seconds as a step of injection molding a lamp made of plastic through an injection molding machine. → Base coating for spraying an adhesive made of chemicals to the aluminum reflective film to increase the adhesion to the aluminum reflective film of the lamp. It takes 8 seconds as a step → It takes 40 minutes as a step of drying with hot air of 80 ~ 180 ℃ using a hot air dryer → Plasma CVD is performed in three or four steps using the apparatus of the present invention. After the pretreatment, sputtering of the aluminum reflecting film, followed by 4 minutes 40 seconds as a plasma seed protective coating (coating the plasma CD hydrophilic coating after the protective coating, if necessary).

Therefore, in comparison with the coating time according to the conventional method, it takes about 60 minutes and 58 seconds without any classification of the article from the injection to the completion of the coating in the prior art, but it takes 31.4 seconds in the case of A process using the apparatus of the present invention As a result, productivity of 116 times is improved compared to the conventional one, and in the case of B process, 40 minutes and 40 seconds are required, so that the productivity of 1.5 times the conventional size is improved.

Hereinafter, the present invention will be described in more detail.

First, the vehicle lamp is mounted on the sample input jig 4 and then closed by closing the vacuum deposition chamber 1.

Next, when the roughing valve 14 is opened by turning the start switch of the electric control control panel 13 on, the vacuum degree in the vacuum deposition chamber 1 is reduced by the rotary vacuum pump 7 and the mechanical booster pump 6. Automatic exhaust to 2 × 10 ^-2 Torr. Ar gas is then supplied through an automatic flow control system (MFC) 18 and a supply pipe to supply 170 to 230 Sccm, and at the same time, hexamethyldisiloxane (HMDSO) gas and an automatic flow control system (MFC) 21 are supplied. 100 ~ 160Sccm is supplied through the supply pipe, and at the same time, N ₂ O gas is supplied through the automatic flow control system (MFC) 23 and 100 ~ 135Sccm through the supply pipe. While supplying the mixed gas, while maintaining the vacuum level at 2 × 10 ^-2 Torr while controlling the motor of the mechanical star pump (6) with an inverter, the MFP power supply (20) and the voltage amplification unit (19) for plasma generation are The plasma cathode 18 is applied at a frequency of 40KHz and a voltage of 3600-4200V for 20-35 seconds. At this time, when a voltage between the plasma cathodes 18 is applied, a glow discharge plasma is generated and electrons are emitted from the cathode toward the anode positive. If the average free distance is short, the electrons are scattered due to collision with molecules without much acceleration. When the pressure is lowered, the average free distance of electrons is increased, and when electrons accelerated to the ionization potential of the molecule collide with the molecules, the molecules are ionized and electrons are released. The emitted electrons are accelerated again to ionize other molecules.

This process enabled the plasma CVD deposition method to improve the surface etching and adhesion with the following ideal data.

 Plastic base material ABS PC Contact angle (°) Surface tension (mN / m) Adhesion (X-Cut) Contact angle (°) Surface tension (mN / m) Adhesion (X-Cut) Before surface modification of plastic base material 68.4 42.5 NG 81.6 35.5 NG After surface modification of Plasma CVD with Ar Gas 35 62 OK 32 62 OK After surface modification of plasma CVD with O2 gas 11 71 OK 5.5 71 OK

<Adhesion of thin film is cross cut at 1mm interval of coating surface, and then adhered with 3M 610 Tape and pulled out strongly to observe peeling phenomenon of thin film. Surface Tension Meter: DSA100 (KRUSS)>

On the other hand, sputtering (Sputtering) refers to the phenomenon that the target member is released from the target surface when irradiating the target (Target) particles of high energy, as shown in Figure 3, which is a basic method using a direct current glow discharge The substrate is placed on the anode at the target. In the Ar gas atmosphere of 10 ^-2 Torr-10 ^-3 Torr, the DC voltage of 600 ~ 800V is applied between the electrodes, so that Ar ⁺ during the glow discharge of Ar generated between the electrodes is accelerated to the cathode drop around the target and collides with the target surface. Sputter the atoms of the target.

In particular, by applying a magnetic field orthogonal to the electric field between the electrodes, a large amount of ions are generated around the target by the magnetron discharge, thereby increasing the deposition rate.

In the present invention, the two sputtering cathodes 24 have a structure as shown in FIGS. 7 and 8, so that the cooling performance is maximized so that the aluminum target 241 is maintained at a temperature of 120 ° C. or less, thereby not affected by temperature. This makes it possible to achieve remarkable productivity in the process of coating the reflective and protective films of automobile lamps. In particular, in the coating of the reflective film, as shown in the table below, the film is sputtered to form more than 800Å even at the deepest point of the product. The time was enabled in 30 seconds including the decompression time.

That is, in the related art, the target cooling backplate is 8-12mm thick, so that the aluminum target and the backplate are not processed to a perfect plan view (0.001mm or less), so that the contact area is small and the heat conduction is poor, which greatly reduces the cooling efficiency. It is practically impossible to process a flat surface of aluminum or copper plate 4 inches wide and 54 inches long and 8-12 mm thick to less than 0.001 mm. Therefore, conventional cathodes have a long time while applying less power. In order to improve the deposition efficiency, there was no limit, but as shown in FIG. 8, in the present invention, by supplying the water pressure of the cooling water at 2-2.3Kg / cm2 in the state in which the back plate was formed as thin as 2-3mm, The backplate swells like a balloon and comes in tight contact with the aluminum target, so see the diagram below. As it is excellent in heat exchange efficiency, the cooling performance is maximized.

(If the cooling water is supplied at 2-2.3Kg / ㎠, the back plate bends like a balloon due to the total surface pressure and sticks to the surface of the target as it is, thereby providing high adhesion and maximizing heat exchange. Therefore, as shown in the chart below, the deposition efficiency is improved by about 4 times compared with the conventional (part B).

A is the cathode of the present invention when continuously applied at 120 KW in consideration of cooling efficiency

B shows a case where the conventional cathode is continuously applied at 40 KW in consideration of cooling efficiency.

  Therefore, the aluminum reflective coating on the surface of the plastic molding lamp is very stable and quick.

In addition, the reflective film coated as described above is excellent in reflectance and brightness, but the aluminum is weak in moisture or salt present in the air, thereby decreasing the reflectance, brightness and lifetime. Therefore, a protective film should be coated to protect it.

Although there are various methods of coating the protective film, conventionally, after vacuum coating of the aluminum reflective film, the protective film was coated in the air by UV coating and drying method, but this decreased the productivity and the quality of the product due to the environmental pollution and the incorporation of impurities. In the invention it is made in a vacuum deposition chamber.

After coating the aluminum reflecting film in the vacuum deposition chamber 1 of the present invention, as shown in FIGS. 2B and 9, the mechanical valve is immediately injected while inert gas and monomer gas are simultaneously injected by the flow control valves 21, 22, and 23. By the star pump 6 and the inverter control, the vacuum degree is accurately maintained at 2 x 10 ^-2 Torr. Subsequently, MF Power is applied (40KHz.600V) by the plasma generation MFC power 20, and the voltage amplification unit 19 is applied to the plasma cathode 18 inside the vacuum deposition chamber 1. Plasma is formed in the range of 3600V to 4200V to form a protective film as CVD (Chemical Vapor Deposition).

Under the above conditions, it took a short time of less than 55 seconds for the protective film (SiOx film with excellent chemical resistance) to form 450 Å (quality standard value over 300 치는) on the automotive lamp.

On the other hand, once again referring to the configuration of the vacuum deposition chamber (1) of the present invention, as shown in the main portion of Fig. 4a, the vertical valve is formed of the main valve 101 in the rear integrally, the sputtering cathode on both sides 24 and a plasma cathode 18 are mounted, and two vacuum deposition doors 2 and 3 are mounted on both sides of the front side so as to be alternately closed left and right, and the vacuum deposition doors 2 and 3 respectively. The silver surface is formed in a round shape and rotated by a motor (not shown) mounted on the bottom of the vacuum deposition chamber 1 when the upper and lower centers of the sample deposition deposition jig 4 are supported and closed. At the same time, the specimen deposition jig 4 is formed so as to be located in the center of the vacuum deposition chamber 1.

In addition, the two vacuum deposition doors (2) and (3) are closed in one of the vacuum deposition chamber (1), and the other vacuum deposition door in the process of the pre-treatment, reflecting film coating, protective film coating is to be in the standby state At this time, the lamp to be formed with aluminum coating and a protective film on the deposition jig for sample input of the vacuum deposition door in the standby state may be mounted. Therefore, the two vacuum deposition chambers (1) alternately maintain the working state and the working state at all times, and during the waiting time, the coating and the protective film work can be separated and the new product can be installed to prevent time loss. Since it can be mass-produced very easily.

Using the present invention to summarize the order of controlling the above process as shown in the table.

* PC material standard

* Conditions in the workplace: Temperature 25 ℃ or below, Humidity 50% or below, Spring, Autumn and Winter.

* Product type: size is 390L × 170W × 100H (mm), when 24

order Process Name Main contents of the process time One Process Start Press start switch in auto mode 2sec 2 Primary Vacuum Exhaust (Va. Pumping) Vacuum exhaust by Rotary and Booster Pump Exhaust up to 2 × 10 ^-2 Torr from Atm 30sec 3 Glow Discharge Ar + HMDSO + N2O gas is supplied via MFC. The degree of vacuum is maintained at 2 × 10 ⁻² Torr. Surface modification treatment is applied by applying MF Power. 35sec 4 Fine Pumping Rapid exhaust to 5 × 10 ^-5 Torr by diffusion diffusion high vacuum pump and chamber cryogenic Cryo Coil 35sec 5 Aluminum Sputtering The vacuum is maintained at 5 x 10 ^-3 Torr while Ar gas is supplied through the MFC. DC 120KW is applied as two powers to two cathodes and deposited. 30sec 6 Plasma Polymerzation Ar + HMDSO + N ₂ O gas is supplied via MFC. The degree of vacuum is maintained at 2 × 10 ⁻² Torr. Human MF Power is coated as Plasma CVD 60sec 7 Curing Film Coating (Post Treatment) Ar + N ₂ O gas is supplied via MFC. The degree of vacuum is maintained at 2 × 10 ⁻² Torr. Human MF Power is coated as Plasma CVD 20sec 8 Vacuum release (Vent) Dry air is prepared every cycle to supply dry air rapidly in order to quickly release vacuum and reduce chamber contamination. 3sec 9 Sample input, take out (Load & Unload) Take out the product by alternating the left and right doors, and prepare and insert the next work. Input and take out of the product should be prepared at the time of processing. 3sec 1 process time 218 sec (3:38 sec)

According to the above process, the surface modification and metal reflective coating and the protective coating (which may further be added to the waterproof coating) for coating the metal reflective film on the surface of the automobile lamp in accordance with the above process in one vacuum deposition chamber 1 All will be done.

As described above, the present invention provides a device that enables the rapid and easy coating of an etching, a metal reflective film, and a protective film (which may further form a waterproof film) in one vacuum deposition chamber 1 in a very quick and easy manner. It is a very useful invention that maximizes the cost savings effect, maximizes the merchandise, and facilitates mass production, thus maximizing the cost savings effect, especially contributing to the prevention of environmental pollution.

Claims (6)

A vacuum deposition chamber (1) configured to form a vacuum atmosphere for pretreatment of an automobile lamp, a reflective coating and a protective coating, and a hydrophilic coating, and the main valve 101 is integrally formed; A high vacuum diffusion pump 5 connected to the rear of the vacuum deposition chamber 1 and being a high vacuum exhaust vacuum pump for forming a high vacuum therein; A mechanical booster pump (6), which is a vacuum pump for evacuating at a high speed in the middle vacuum region before the high vacuum formation stage in the vacuum deposition chamber (1); A flow rotary vacuum pump (7) used as an initial vacuum exhaust pump in the vacuum deposition chamber (1) for exhausting air from atmospheric pressure to medium vacuum; The plastic product surface, which is the automobile lamp base material which is put and installed inside the vacuum deposition chamber 1, contains various gases and a large amount of moisture, and this gas and moisture require a lot of vacuum exhaust time inside the vacuum deposition chamber 1. Ultra low temperature freezer (9) is used to maximize the productivity by doubling the vacuum exhaust speed by rapidly adsorbing the gas and moisture to be a decisive cause to make; And, The target is placed on the cathode using DC glow discharge, and the product (Subrate) to be treated is placed on the anode, and a DC voltage of several KV is applied between the electrodes in an Ar gas atmosphere of 10 ^-2 Torr to 10 ^-3 Torr. Ar + during the Glow discharge of Ar generated between the electrodes accelerates to the cathode drop around the target and collides with the target surface to scatter the target atom. Therefore, a DC power supply used to generate such a glow discharge is used. (10); and, Automatic voltage regulator 11 for supplying a constant voltage (207V ± 5%) of MF Power; And, The cooler used to cool the sputtering cathode 24 mounted inside the vacuum deposition chamber 1 to maximize the cooling efficiency and to improve insulation by using pure water to suppress arcing in the chamber during glow discharge. 12); An electric control control panel 13 installed near the vacuum deposition chamber 1, which is an electric control device for manually or automatically operating the entire apparatus by a touch screen and a PLC; Roughing valve (14, Roughing Valve) which is a valve for disconnecting the vacuum in the exhaust or high vacuum exhaust through the vacuum deposition chamber (1), mechanical booster pump (6), and flow vacuum pump (7); A 22-inch cryogenic refrigeration trap installed between the lower part of the main valve 101 and the upper part of the high vacuum sharing diffusion pump 5 is used to prevent the backflow of oil diffusion pump oil and to rapidly condense moisture in the vacuum to improve the high vacuum exhaust speed. 15); and, It is a vacuum valve that connects or blocks the vacuum deposition chamber 1 and the vacuum deposition chamber cryogenic trap 17, and is opened only during high vacuum exhaust to rapidly condense moisture in the vacuum deposition chamber 1 to improve high vacuum exhaust velocity. Gate valve 16; 16-inch vacuum deposition chamber ultra low temperature refrigeration trap (17) used to rapidly condense moisture during high vacuum exhaust in the vacuum deposition chamber (1); and Pretreatment process for smooth reflection film coating during ITC (in chamber top coating) process and plasma electrode for plasma polymerizing treatment of protective film and cured film on aluminum reflective film surface. A voltage amplification unit 19 for amplifying a voltage supplied from the; Pre-treatment process to facilitate the coating of the reflective film during the ITC process and MF Power 20 for plasma generation, which is a voltage amplification unit for the polymerization of the protective film and the cured film on the surface of the aluminum reflective film. Hexamethyldisiloxane (HMDSO) to control the flow rate of hexamethyldisiloxane (HMDSO) for pretreatment to ensure smooth coating of the ITC process and for the polymerization of the protective film and the cured film on the surface of the aluminum reflecting film. Siloxane flow regulator 21; and, Ar gas flow rate control system 22 for pre-treatment process for smooth coating of reflective film during ITC process, and precise flow control of Ar gas for the processing of Plasma Polymerzation of protective film and cured film on the surface of aluminum reflecting film; N ₂ O gas flow control system (23) for the N ₂ O gas flow rate control for the pre-treatment process to ensure the reflective film coating during the ITC process and the plasma polymerzation treatment of the protective film and the cured film on the surface of the aluminum reflective film; Two high voltage high vacuum feed throws 25 for supplying a high voltage to the glow discharge plasma cathode and maintaining a high airtight between the vacuum deposition chamber 1 and the atmosphere; Vent valve 26, which is a high vacuum valve for introducing and blocking the dry air prepared in the dry air tank into the vacuum increase chamber 1; Reflective film and protective film automatic coating device for a car lamp, characterized in that made of a dry air generator (27) for dehumidifying moisture in the general air produced in the compressor to dry air tank (8). The method of claim 1, It is a pretreatment process for smooth reflection film coating during both ITC (in chamber top coating) process inside the vacuum deposition chamber 1 and two electrodes for the polymerization of the protective film and the plastic film on the surface of the aluminum reflective film. Two sputtering cathodes 24 equipped with a glow discharge plasma cathode 18 to form an aluminum reflective film on a plastic base material at predetermined positions on both sides of the vacuum deposition chamber 1 in a direction different from the plasma cathode 18. Reflective film and protective film automatic coating device of a car lamp, characterized in that the mounting configuration. The method of claim 2, Ordinary automobile lamp injection molded from plastic, Etching the surface of the plastic in the first step in one vacuum deposition chamber 1, In the second step, by applying a high output high voltage by the sputtering cathode (24), the aluminum metal reflective film is coated at a very high speed, In the third step, the three-step process such as coating a protective film on the surface of the aluminum metal reflective film coated in the second step is carried out in a quick step by step, the automatic coating film and protective film of the automotive lamp. The method according to claim 1 or 2, On the right and left sides of the vacuum deposition chamber (1) inlet, the surface is formed convexly convex, and the deposition jig (4) for specimen insertion is mounted between the upper and lower supports (41, 42) inside, and the vacuum deposition door (3) (2). Reflective film and protective film automatic coating device for a car lamp, characterized in that to form a viewing window (31) at a predetermined position of the surface to alternate between the two vacuum deposition doors (3) and (2). The method of claim 2, Sputtering cathode 24 to form an aluminum reflective film on the plastic base material to form a thin thickness of the back plate 241 to 2 ~ 3mm, and to circulate the supply of cooling water 243 at a pressure of 2 ~ 2.3kg / ㎠ Accordingly, the back plate bends and swells like a balloon while being in close contact with the back surface of the aluminum target 242, thereby allowing the aluminum target 242 to be cooled very quickly and stably even when high heat occurs during sputtering by plasma. Reflector and protective film automatic coating device for automobile lamps. The method of claim 1, In the vacuum deposition chamber (1) after coating the reflective film and the protective film in a high vacuum state, when vented to atmospheric pressure (moisture) contained in the air rapidly flows into the inside of the vacuum chamber is stuck to the surface inside the vacuum chamber to re-vacuum In order to prevent the phenomenon that high vacuum exhaust time is required by the influence of moisture at the time of formation, the dry air storage tank 8 is connected and installed, and it is connected to the main valve 101 via the vane valve 26. Reflective film and protective film automatic coating device of automobile lamp.

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