KR100637993B1 - Electrical connecting apparatus - Google Patents

Abstract

The electrical connection device forms a plurality of through holes through which the probe passes in each of the first, second and third plate-shaped members. Each through hole of the first and second plate-shaped members has a small diameter portion that prevents passage of the protruding portion of the probe, and a large diameter portion that communicates with the small diameter portion. Each through hole of the first plate-shaped member has a small diameter portion located on the side opposite to the second plate-shaped member side.

Description

Electrical connection device {ELECTRICAL CONNECTING APPARATUS}

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an electrical connection device such as a probe card used for conduction testing of a test object, such as a semiconductor device such as an integrated circuit.

In the present invention, the extending direction of each probe, that is, the thickness direction of the first, second and third plate members through which the probe penetrates is called an up-down direction, and the direction perpendicular to this direction is called a horizontal direction.

An inspection target such as a semiconductor device performs an energization test (inspection) of whether or not the internal circuit operates according to the specifications. This energization test is performed using an electrical connection device such as a probe card in which a plurality of contacts, such as a probe for pressing the needle tip against the electrode of the inspected object, are arranged on the lower surface of the insulating substrate.

As one of these types of electrical connection devices, the lower plate and the upper plate are arranged at intervals in the vertical direction, the intermediate plate is disposed between the upper and lower plates, and a plurality of needle-type probes are placed on the upper plate, the lower plate, the intermediate plate and the upper plate. There is a vertical device which is assembled to these plates so as to penetrate in the direction, and presses the lower end (needle end) of each probe to the electrode of the subject (for example, Japanese Patent Laid-Open No. 2002-202337). report).

Compared with the conventional device in which a needle-shaped probe bent in an L shape is assembled to a substrate in a cantilever shape, the vertical device is easier to assemble the probe. Since the arrangement density of the electrode can be increased, it is suitable for the energization test of a high-density inspected object having a large number of electrodes.

In addition, in the vertical device, when the needle tip of the probe is pressed against the electrode of the subject under test, the intermediate plate is displaced horizontally with respect to the upper and lower plates so that the probe is curved in the same direction, so that the probe is curved in the same direction in advance. This avoids contact of adjacent probes.

Moreover, the said vertical type apparatus arrange | positions the auxiliary board at the space | interval a little above the lower board, and forms the protrusion part between the auxiliary board and the lower board of each probe, and this prevents a probe from escaping the auxiliary board and the lower board. .

However, in the conventional vertical type device, since the diameter of each probe is as small as a few tens of microns to about 100 microns, the diameters of the through-holes of the auxiliary plate and the lower plate through which the probe penetrates are not reduced to about several tens of microns to about 100 microns. The distal end portion of is moved largely in the through hole, and as a result, the relative position between the tip of the needle and the electrode of the subject is displaced. In addition, it is difficult to accurately form a through hole having a small diameter dimension in which the tip portion of the probe does not greatly move in the through hole.

(Initiation of invention)

An object of the present invention is to enable the formation of minute through-holes with high precision, in which the tip portion of the probe does not move significantly in the through-holes.

The electrical connection device according to the present invention is a first, second and third plate-like member having plate-shaped portions spaced apart from each other in a thickness direction, each of which includes a plurality of through holes penetrating in the thickness direction. A plurality of probes passing through the through-holes of the first, second and third plate members, and the first, second and third plate members, It includes a plurality of probes having a protrusion. Each through hole of the first and second plate-shaped members has a small diameter portion for blocking passage of the protruding portion of the probe and a large diameter portion connected to the small diameter portion. have.

If each through hole of the first and second plate-shaped members has a small diameter portion and a large diameter portion connected to each other, the following effects will be obtained.

Since the small diameter portion can be formed after the large diameter portion is formed, even if the thickness dimensions of the first and second plate-shaped members are large, by forming the deep large diameter portion, the thickness dimension of the portion where the small diameter portion should be formed can be reduced. As a result, a minute through hole in which the tip portion (needle point) of the probe does not move greatly in the through hole can be formed with high accuracy.

Since the positioning of the tip end side of the probe in the direction perpendicular to the through hole is performed by the interaction of the small diameter portion of the through hole of the first and second plate-shaped members, the through hole with respect to the electrode of the inspected object and The position of the needle tip in the perpendicular direction is stabilized.

Each through hole of the first plate-shaped member may be located at the side opposite to the second plate-shaped member side. In this case, the length dimension of the probe from the needle tip to the small diameter portion of the through hole of the first plate-shaped member is compared with the case where the small diameter portion of the through-hole of the first plate-shaped member is located on the second plate-shaped member side. Since becomes small, the displacement of the probe in the area | region on the needle tip side from the small diameter part of the through-hole of a 1st plate-shaped member is suppressed. As a result, the displacement of the needle tip with respect to the direction perpendicular to the through hole becomes smaller, and the position of the needle tip with respect to the electrode of the subject under test becomes more stable.

Each through hole of the third plate-shaped member may have a small diameter portion that prevents passage of the protruding portion of the probe, and a large diameter portion that communicates with the small diameter portion. In this case, even if the thickness of the third plate-shaped member is large, the thickness of the portion where the small diameter portion should be formed can be reduced, so that the minute portion on the opposite side of the needle tip of the probe does not move greatly in the through hole. One through hole can be formed with high precision.

Each of the through holes of the first, second and third plate members may further have a truncated conical portion continuous to the small diameter portion and the large diameter portion. In this way, the first, second and third plate-like members are arranged so that each probe can pass through the through-hole of each plate-like member from the large diameter side, and the insertion work of the probe into each through-hole is performed. It can be done easily.

The spacing of the small diameter portions of the first and second plate-shaped members can be made smaller than the spacing of the small diameter portions of the second and third plate-shaped members. In this way, excessive displacement of the probe due to overdrive can be suppressed. In addition, when the needle tip is pressed against the electrode of the object under test, the probe is reliably deformed in the region between the second and third plate-shaped members.

Each through hole of the third plate member may be displaced in one direction with respect to the through holes of the first and second plate members. In this way, when the needle tip is pressed against the electrode of the inspected object, the probe is reliably deformed in the region between the second and third plate-shaped members.

Each probe may be bent in the region between the second and third plate members. In this way, when the needle tip is pressed against the electrode of the inspected object, the probe is reliably elastically deformed in the region between the second and third plate-shaped members.

The electrical connection device may also include a sheet-like member through which the probe penetrates as an electrically insulating sheet-like member disposed between the second and third plate-like members.

The electrical connection device further includes a substrate superposed on the third plate-like member, the substrate having a plurality of through-holes connected to the through-holes of the third plate-like member and a plurality of tester lands connected to the tester, respectively; And a plurality of wires inserted into the through-holes of the substrate and connected to the ends of the probes, respectively, and connected to the tester lands, respectively.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view showing one embodiment of an electrical connection device according to the present invention, with most of the wiring removed.

FIG. 2 is a front view of the electrical connection device shown in FIG. 1

3 is a cross-sectional view illustrating a method of assembling a probe assembly.

4 is an enlarged cross-sectional view of a part of the probe assembly, (A) shows a state in which the probe is not pressed against the electrode of the inspected object, and (B) shows a state in which the probe is pressed against the electrode of the inspected object.

5 is an enlarged cross-sectional view showing, in particular, the location of the through-holes in order to show one embodiment of the through-holes.

6 is a view showing an embodiment of a probe, (A) is a side view, (B) is a front view.

7 is an enlarged cross-sectional view showing another embodiment of the probe assembly.

(The best form to carry out invention)

1 to 6, the electrical connection device 10 includes a plurality of integrated circuits (eight in the example shown in FIG. 1) on the semiconductor wafer 12 as shown in FIGS. 3 and 5. The object to be inspected 14 is used as a probe card for simultaneously inspecting the subject 14. Each test object 14 has a rectangular shape and has a plurality of electrodes 16 on each side spaced in the direction of the rectangular side.

The electrical connection device 10 includes a circular wiring board 20 and a plurality of wirings 24 extending from the connecting board 22 and the connecting board 22 to the wiring board 20. And a probe assembly 26 assembled below the connecting substrate 22.

The wiring board 20 is made of an electrical insulating material such as epoxy or ceramic containing glass. The wiring board 20 has a hole (opening) 28 that penetrates the center region in the thickness direction at the center thereof, and the plurality of tester lands 30 electrically connected to the tester are multiplexed at the periphery. And a plurality of connection lands 32 on the outside of two opposite sides of the hole 28.

The hole 28 has a rectangular shape which is slightly larger than the arrangement area of the integrated circuit to be examined simultaneously. The tester land 30 and the connection land 32 are electrically connected in a one-to-one relationship by a connection line not shown. Such a connection line can be a wiring formed in the wiring board 20 by a suitable technique such as a printed wiring technique.

The connecting substrate 22 is made of an electrically insulating material, and has a rectangular plate-shaped portion 34 which is slightly smaller than the hole 28 of the wiring board 20 and a rectangular formed on the upper outer side of the plate-shaped portion 34. The flange part 36 is provided. The connecting substrate 22 is assembled with a plurality of screw members 38 on the upper surface of the wiring board 20 in the flange portion 36 with the plate-shaped portion 34 located in the hole 28.

In the example shown, the connection board 22 has a plate-shaped portion 34 whose upper part of the rectangle protruding upward of the wiring board 20 is smaller than the lower part of the rectangle located in the hole 28 and the upper part of the plate-shaped upper part 34. Although the annular flange part 36 to which the fitting was fitted is couple | bonded with the some screw member 40, you may manufacture the plate-shaped part 34 and the flange part 36 integrally.

The connecting substrate 22 also has a plurality of through holes 42 penetrating in the thickness direction of the plate-shaped portion 34. Each through hole 42 corresponds to the electrode 16 of the object under test 14.

As shown in FIG. 4, each wiring 24 uses a cable protected by an electrically insulating layer 46 covering the periphery of the conductive core wire 44. One end of each of the wirings 24 is inserted into the through hole 42 in which the core 44 exposed by the electrical insulation layer 46 is peeled off, and the adhesive 48 at the exposed end of the core wire 44. It is coupled to the connecting substrate 22 by the. Although not shown, the cable arranges the electrical shield layer around the electrical insulation layer 46.

One end surface of each core wire 44 is almost maintained at the height position of the lower surface of the connection board 22. The other end of each of the wirings 24 is peeled off and the electrical insulation layer 46 is peeled off, and is joined to the connection land 32 by a conductive adhesive such as solder at the end where the core wire 44 is exposed.

The probe assembly 26 is formed of a rectangular parallelepiped having a rectangular planar shape slightly smaller than the plate-shaped portion 34 of the connecting substrate 22. The probe assembly 26 arranges the second rectangular plate-shaped member 52 on the upper side of the first rectangular plate-shaped member 50 and the rectangular plate on the second plate-shaped member 52. Three plate members 54 are arranged at intervals, and a rectangular frame member 56 is disposed between the second and third plate members 52 and 54.

The first plate member 50, the second plate member 52, the third plate member 54 and the edge member 56 are in a state of being superimposed as described above, and the plurality of screw members. Coupled with (58), the probe support 62 which supports the some probe 60 is comprised. The screw member 58 penetrates through the third plate member 54, the rim member 56, and the second plate member 52 and is screwed to the first plate member 50.

The first and second plate-like members 50 and 52 each have a rectangular recessed portion that opens upward, and the third plate-shaped member 54 has a rectangular recessed portion opened downward. Have. The second plate member 52 is superimposed on the first plate member 50 so as to close the recessed portion of the first plate member 50. The rim member 56 has a rectangular inner space through which the recessed portions of the second and third plate-shaped members 52 and 54 pass through.

As a result of the above, the first and second plate-like members 50 and 52 are rectangular in spite of the fact that the second plate-like member 52 overlaps the first plate-like member 50. The plate-shaped portion serving as the central region is spaced in the vertical direction.

In plan view, the first, second and third plate-like members 50, 52 and 54 and the rim member 56 have the same size, and the first, second and third plate-like members. The concave portions of the members 50, 52 and 54 and the inner space of the frame member 56 have the same size.

As shown in Figs. 3 and 4, the first, second and third plate members 50, 52 and 54 are recessed correspondingly through their central regions, i.e., plate portions, in the thickness direction, respectively. It has a plurality of through holes 64 and 66 and 68 which are opened at a location. The through holes 64, 66 and 68 correspond to the through holes 42 of each other and the connecting substrate 22, respectively.

As shown in Fig. 5, the through holes 64, 66 and 68 are formed in the small diameter portions 64a, 66a and 68a and the small diameter portions 64a, 66a and 68a, respectively, having small diameters. Conical diameter portions 64b, 66b and 68b that follow, and large diameter portions 64c, 66c and 68c that follow conical diameter portions 64b, 66b and 68b, and have the same size and the same shape. have.

Each of the through holes 64, 66 and 68 can form a small diameter portion after the large diameter portion is formed. In this way, even if the thickness dimensions of the first, second, and third plate members 50, 52, and 54 are large, by forming a deep large diameter portion, the thickness dimension at the place where the small diameter portion should be formed can be reduced. As a result, a minute through hole in which the tip portion (needle tip) of the probe 60 does not move greatly in the through hole can be formed with high accuracy. Such through holes 64, 66 and 68 can be formed by laser processing.

The 1st plate-shaped member 50 has the small diameter part 64a of the through-hole 64 below, and the 2nd and 3rd plate-shaped members 52 and 54 have the through-hole 66. And the small diameter portions 66a and 68a in (68).

Although the through holes 64 and 66 of the first and second plate-shaped members 50 and 52 coincide with each other in the plane perpendicular to the thickness direction, the through holes of the connecting substrate 22 42) is shifted in one direction.

On the other hand, although the through hole 68 of the third plate-shaped member 54 is shifted in one direction with respect to the through holes 64 and 66 in the plane perpendicular to the thickness direction, the connecting substrate 22 The through holes 42 are aligned with each other.

However, the through holes 42, 64, 66 and 68 in the horizontal direction may coincide.

Each probe 60 is made in the form of a needle which can be elastically deformed by a conductive metal thin wire such as tungsten wire, and passes through the through holes 64, 66 and 68, respectively.

The upper end surface of each probe 60 is inserted so that the upper end part of the probe 60 can move upwards and downwards in the through-hole 68, and is almost the height position of the upper surface of the 3rd plate-shaped member 54, Moreover, it is in contact with the lower end surface of the core wire 44 of the wiring 24.

The lower end part of each probe 60 penetrates through the through-hole 64 in the state which has a little clearance with respect to the small diameter part 64a so that it can move to an up-down direction, and protrudes below from the 1st plate-shaped member 50 End of the needle.

Each probe 60 has a projection 70 which cannot escape through the through holes 64 and 66 between the first and second plate-shaped members 50 and 52, preferably through holes 64. ) And (66) are provided between the small diameter portions 64a and 66a. Each projecting part 70 has the flat shape which pressed the predetermined location of the probe 60 in radial direction in the example shown.

The diameter dimension of each probe 60, especially the diameter dimension at the location of the through holes 64 and 66, is that of the small diameter portions 64a, 66a and 68a of the through holes 64 and 66 and 68. As shown in FIG. Although it has a slightly smaller circular cross-sectional shape, the point below the tip part (needle end part), preferably the protrusion part 70, is smaller as much as the tip part (needle point side), as shown in FIG.

Each of the probes 60 has the through holes 66 and 68 displaced in one direction in a plane perpendicular to the through holes 66 and 68, and the protrusions 70 are small in the through holes 64. It is bent to the same side in the area | region between the 2nd and 3rd plate-shaped members 52 and 54 from being pressed by the core wire 44 in contact with the neck part 64a.

When the diameter dimension of the probe 60 is 50 ± 2 μm and the length dimension of the probe 60 is 65 ± 0.05 μm, the first, second and third plate members 50, 52 and 54 are provided. The thickness dimension of the plate-shaped portion of the can be 0.7mm, 0.6mm and 0.7mm, respectively, and the depth dimension of the truncated cone diameter portion 64b and the large diameter portion 64c of the through hole 64 can be 0.5mm in total. have.

The probe assembly 26 and the electrical connection device 10 can be assembled, for example, as follows.

First, the tip portion of the probe 60 passes through the through hole 64 of the first plate-shaped member 50, and the portion above the protruding portion 70 of the probe 60 has a second plate-shaped member 52. ) Is passed through the through hole 66, and a portion further upward of the probe 60 passes through the rim member 56, so that the upper portion of the probe 60 passes through the third plate-shaped member 54. The first plate-shaped member 50, the second plate-shaped member 52, the rim member 56 and the third plate-shaped member 54 are shown in Fig. 3A so as to pass through 68). Nested together.

In order to allow the probe 60 to pass through the first, second and third plate-like members 50, 52 and 54 and the rim member 56 as described above, the probe 60 is passed through the through hole 64. Or 66, 68, or the reverse order.                 

In the state shown in FIG. 3A, the third plate-like member 54 is displaced with respect to the first and second plate-like members 50 and 52 and the edge member 56, and the through-holes. In the state in which the 64, 66 and 68 are aligned in the vertical direction (the state in which the axes of the through holes 64, 66, 68 coincide), the first, second and third plate members 50, 52 and 54 and the rim member 56 are held.

In addition, as shown in FIG. 3 (A), the probe 60 has a top end slightly protruded from the third plate member 54 and a bottom end protrudes downward from the first plate member 50. And passes through the through holes 64, 66 and 68. At this time, since the probe 60 can pass through the through holes 64, 66 and 68 on the large diameter portions 64c, 66c and 68c, the probes for the respective through holes 64, 66 and 68 ( Insertion work of 60 becomes easy.

Subsequently, as shown in FIG. 3B, the third, plate-shaped member (50, 52 and 54) and the edge member 56 are aligned so that the first, second and third plate-like members 50, 52 and 54 are aligned. 54 is moved in a horizontal direction with respect to the first and second plate members 50 and 52 in a horizontal direction. As a result, the through hole 68 is horizontally displaced with respect to the through holes 64 and 66, so that the probe 60 is disposed between the second and third plate members 52 and 54. FIG. It is elastically deformed in one direction and bends reliably.

However, when the probe 60 passes through the through holes 64, 66 and 68 as described above, the first, second and third plate-like members 50, 52 and 54 and the edge member You may align 56 with the state shown to FIG. 3 (B).

Subsequently, as shown in FIG. 3B, the first, second and third plate members 50, 52 and 54 are firmly engaged in the above state by the plurality of screw members 58. As shown in FIG. Instead of coupling the first, second and third plate members 50, 52 and 54 by the screw member 58, the first, second and third plate members 50 and 52 and 54 may be joined by an adhesive.

The probe assembly 26 assembled as described above is firmly coupled to the connecting substrate 22 by a plurality of screw members (not shown), as shown in FIGS. 1, 2 and 3C. After the connection board 22 and the probe assembly 26 are joined together, the wiring board 20 and the connection board 22 may be assembled, or after the connection board 22 and the wiring board 20 are assembled. (22) and the probe assembly 26 may be combined.

When the connecting substrate 22 and the probe assembly 26 are coupled, each probe 60 is pressed downward by the core wire 44 of the wiring 24 whose upper end surface is corresponding. As a result, as shown in Fig. 4A, each of the probes 60 is pushed downward and elastically deformed in the region above the second plate-shaped member 52.

The positional relationship in the horizontal plane of the first, second and third plate members 50, 52 and 54 and the positional relationship in the horizontal plane of the probe assembly 26 and the connecting substrate 22 are probes. In the state where the 1st plate-shaped member 50 of the assembly 26, the 2nd plate-shaped member 52, the rim member 56, and the 3rd plate-shaped member 54 are mutually positioned, these are screwed. By joining by a member, it is also maintained in a constant relationship by a plurality of positioning pins 72 (see FIG. 1) inserted through the connecting substrate 22 and inserted into the probe assembly 26.

In the energization test of the inspected object 14, the electrical connection device 10 has a lower end (needle end) of the probe 60 as shown in FIGS. 3 (C) and 5. ), The lower end of each probe 60 is pressed against the electrode 16 of the object under test 14.

At this time, positioning of the tip end side of the probe 60 in the direction perpendicular to the through holes 66 and 68 is performed by the interaction of the small diameter portions 64a and 66a of the through holes 64 and 66. As a result, the position of the tip of the needle in the direction perpendicular to the through holes 64 and 66 is stabilized, and the probe 60 is surely in contact with the electrode 16 of the inspected object 14.

In addition, since the through holes 64 of the first plate-shaped member 50 have the small diameter portion 64a downward, the through holes from the needle tip as compared with the case where the small diameter portion 64a is positioned upward. The length dimension of the probe 60 becomes small to the small diameter part 64a of (64). As a result, the displacement of the probe in the area of the needle tip side from the small diameter portion 64a is suppressed, so that the displacement of the needle tip in the direction perpendicular to the through hole 64 becomes smaller, and the electrode of the subject 14 The position of the needle tip relative to (16) is more stable.

When the lower end of the probe 60 is pressed against the electrode 16 of the test object 14, the probe 60 is subjected to a predetermined overdrive OD, as shown in Fig. 4B. It elastically deforms in the area between the third plate members 52 and 54. As a result, the probe 60 penetrates through the small diameter portions 64a and 66a of the through holes 64 and 66 in a state having a gap, so that the lower end portion thereof with respect to the electrode 16. It moves slightly in the horizontal direction, giving a scraping action to the electrode 16.

Excessive displacement of the probe 60 due to the overdrive is such that the interval between the small diameter portions 64a and 66a of the first and second plate-shaped members 50 and 52 is equal to the second and third intervals. It is suppressed by being smaller than the space | interval of the small diameter part 66a and 68a of the plate-shaped members 52 and 54. FIG. In addition, the probe 60 is reliably deformed in the region between the second and third plate members 52 and 54 by the overdrive.

As shown in FIG. 7, a guide film 76 having a plurality of holes 74 through which the probe 60 penetrates is disposed between the second and third plate-like members 52 and 54, The curved direction of the probe 60 may be regulated. In this case, the hole 74 can be a long hole long in the curved direction of the probe 60.

In the embodiment shown in Fig. 7, the axis of the through hole 68 is displaced with respect to the axis of the through holes 64 and 66 in the state of being assembled to the probe assembly 26. You may bend by the guide film 76.

In the present invention, the probe assembly may be used as the upper or lower side of the inspected object or may be used while the probe assembly is inclined.

The present invention is not limited to the above embodiments, and various modifications can be made without departing from the spirit thereof.

Claims (9)

First, second and third plate-like members having plate-shaped portions spaced apart from each other in the thickness direction, each of the first, second and third portions having a plurality of through holes penetrating in the thickness direction, respectively. And a plurality of probes passing through the through holes of the first, second and third plate members, the plurality of probes having a protrusion between the first and second plate members. and, Each through hole of the first and second plate-shaped members has a small diameter portion that prevents passage of the protruding portion of the probe, and a large diameter portion connected to the small diameter portion, Each said probe is bent in the area | region between the said 2nd and 3rd plate-shaped member, Between the small diameter portion of each of the through-holes of the first and second plate-shaped members and the probe passing through the iso-necked portion, a frictional action is applied to the electrode when the lower end of the probe is pressed against the electrode of the inspected object. Electrical connection device characterized in that the gap is set so as to give. The method according to claim 1, Each through-hole of the first plate-shaped member has the small diameter portion located on the side opposite to the second plate-shaped member side. The method according to claim 2, Each through hole of the third plate-shaped member has a small diameter portion for preventing passage of the protruding portion of the probe, and a large diameter portion connected to the small diameter portion. The method according to claim 3, The through-holes of the first, second and third plate members further have a truncated conical portion continuous to the small diameter portion and the large diameter portion. The method according to claim 1, An interval of the small diameter portion of the first and second plate-shaped members is smaller than an interval of the small diameter portion of the second and third plate-shaped members. The method according to claim 1, Each through hole of the third plate member is displaced in one direction with respect to the through holes of the first and second plate members. delete The method according to claim 1, And an electrically insulating sheet-like member disposed between the second and third plate-shaped members, further comprising a sheet-shaped member through which the probe passes. The method according to claim 1, A substrate superposed on the third plate-shaped member, the substrate having a plurality of through-holes connected to the through-holes of the third plate-shaped member, and a plurality of tester lands connected to the tester, and through-holes of the substrate. And a plurality of wires inserted into the ends of the probes and connected to the tester lands, respectively.

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